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Transpector XPR 3+ Operating Manual

1.16.2.3  Valve Parts List

WARNING

This valve has an operational voltage rating of 
24 V(dc) +10% to -15%.

Figure 1-8  Valve parts list

Item Description

1

Solenoid Coil

2

Connector Gasket

3

Connector

4

Connector Elbow

5

Nut

6

Washer

7

Compression Ring

8

Screw

Summary of Contents for Transpector XPR 3+

Page 1: ...Transpector XPR 3 O P E R A T I N G M A N U A L Gas Analysis System PN 074 687 P1A Cover Page ...

Page 2: ...Declaration Of Conformity Page 1 ...

Page 3: ...tains embedded software protected under the following copyrights Copyright INFICON Inc Disclaimer The information contained in this Operating Manual is believed to be accurate and reliable However INFICON assumes no responsibility for its use and shall not be liable for any special incidental or consequential damages related to the use of this product Due to our continuing program of product impro...

Page 4: ...scription of Transpector XPR 3 Gas Analysis System 1 4 1 7 Specifications for Transpector XPR 3 Gas Analysis System 1 4 1 8 Supplied Items 1 4 1 9 Physical Requirements 1 5 1 9 1 Physical Dimensions 1 5 1 9 2 Weight 1 6 1 9 3 Mounting Requirements 1 6 1 9 4 Ventilation Requirements 1 6 1 9 5 Maintenance Access 1 6 1 10 Electrical Power Requirements 1 6 1 10 1 Required Supply Voltage 1 6 1 10 2 Cur...

Page 5: ...necting the Pirani Interlock Cable 1 24 1 16 11 Attaching Heating Jackets 1 25 1 17 Input Output I O 1 25 1 17 1 Two Digital Inputs 1 26 1 17 2 One Status Relay Output 1 26 1 17 3 One Analog Input 1 28 Chapter 2 Connecting Transpector XPR 3 2 1 Introduction 2 1 2 2 General Networking Information 2 1 2 2 1 IP Addresses 2 1 2 2 2 Subnetworking 2 3 2 3 Transpector XPR 3 IP Address 2 3 2 3 1 Changing ...

Page 6: ...tion I O Tab 5 2 5 4 2 Transpector XPR 3 BKM for Pirani Interlock Operation 5 6 5 5 Using Transpector XPR 3 5 7 5 5 1 Leak Detection 5 7 5 5 2 Recipe Generation 5 7 5 5 3 Mass Scale Tuning 5 8 5 5 4 Transpector XPR 3 Filament 5 8 5 5 5 High Pressure Electron Multiplier 5 8 Chapter 6 Transpector XPR 3 Low Pressure EM 6 1 Introduction 6 1 6 2 Transpector XPR 3 Filament Caution 6 1 6 3 Electron Multi...

Page 7: ...is Required 7 5 7 5 3 Filament Kit Replacement 7 5 7 5 4 How to Determine the Condition of the Ion Source 7 7 7 6 Mass Calibration 7 9 7 6 1 Mass Alignment 7 9 7 7 Pirani Interlock Adjustment Procedures 7 10 7 7 1 INFICON PSG500 Adjustment Instructions 7 10 Chapter 8 Diagnosing Problems 8 1 Introduction 8 1 8 2 Symptom Cause Remedy Chart 8 1 8 3 Communication Problems 8 6 Chapter 9 Bibliography Ch...

Page 8: ...perating Temperature 12 2 12 10 Maximum Bakeout Temperature 12 3 12 11 Operating Temperature 12 3 12 12 Power Input 12 3 12 13 Ethernet Communication Interface 12 3 12 14 Relay Outputs 12 3 12 15 Inputs 12 3 12 16 Indicators Green 12 3 Chapter 13 Supplied Items 13 1 Introduction 13 1 13 1 1 Ship Kit 13 1 13 1 2 Electronics Module 13 2 13 1 3 Power Supply 13 2 13 1 4 Sensor 13 3 13 1 5 Software 13 ...

Page 9: ...verview of Transpector XPR 3 Gas Analysis System Topics include the purpose of Transpector XPR 3 specifications a list of supplied items installation instructions customer support contact information Software information can be found either in the FabGuard Explorer Operating Manual PN 074 528 P1 or in the FabGuard help files for all other FabGuard programs 1 2 Using This Manual Please read this Op...

Page 10: ...y cause bodily injury WARNING Risk Of Electric Shock This is an example of a Electrical Warning paragraph It warns of the presence of electrical voltages which may cause bodily injury 1 3 How To Contact Customer Support Worldwide customer support information is available under Contact Support Worldwide at www inficon com Sales and Customer Service Technical Support Repair Service If you are experi...

Page 11: ... 16 Hardware Installation on page 1 8 3 Install the communication cable See section 1 16 8 Installing Ethernet Communications on page 1 23 4 Install the software Refer to the FabGuard Explorer Operating Manual for information on installing the software NOTE Transpector XPR 3 requires FabGuard version 17 04 00 or higher for operation 1 5 Purpose of Transpector XPR 3 Gas Analysis System Transpector ...

Page 12: ...he sensor itself is comprised of three components the ion source ionizer the quadrupole mass filter the ion detector The sensor is mounted on an electrical feedthrough flange which is bolted to the vacuum chamber where the gas analysis measurements are made Electronics Module The electronics module controls the sensor and communicates to the operating computer The electronics module and sensor are...

Page 13: ...ght mounting requirements ventilation requirements and the perimeter required for maintenance access for Transpector XPR 3 1 9 1 Physical Dimensions Figure 1 2 shows the overall physical dimensions of Transpector XPR 3 in inches millimeters Figure 1 1 Sensor dimensions Figure 1 2 Physical dimensions of Transpector XPR 3 ...

Page 14: ...spector XPR 3 system 1 9 4 Ventilation Requirements At least 25 4 mm 1 in of open space around the Transpector XPR 3 electronics module must be maintained for proper ventilation 1 9 5 Maintenance Access Easy access to Transpector XPR 3 should be maintained for installation and maintenance activities 1 10 Electrical Power Requirements Transpector XPR 3 must be connected to a source of power as spec...

Page 15: ... 66 Pascals 1 13 Environmental Requirements The following paragraphs explain the use altitude range humidity pollution degree and operating temperature for Transpector XPR 3 1 13 1 Use Transpector XPR 3 is designed for indoor use only 1 13 2 Altitude Range Transpector XPR 3 can be used up to a maximum altitude range of 2000 m 6561 ft 1 13 3 Pollution Degree Pollution Degree 2 per EN61010 1 Electri...

Page 16: ... Gas Analysis System 1 If the optional Isolation Valve option was purchased with the Transpector XPR 3 install the Isolation Valve see section 1 16 2 on page 1 11 2 If the optional Pirani Gauge Interlock was purchased with the Transpector XPR 3 mount the Pirani Interlock Weldment Assembly see section 1 16 3 on page 1 17 3 If the optional Pirani Gauge Interlock was purchased with the Transpector XP...

Page 17: ...on high vacuum systems If there are no concerns with the installation of this type of flange proceed to section 1 16 5 1 Attaching the Sensor to the Vacuum Chamber on page 1 19 NOTE If the system does not have a port with a compatible mating flange an adapter will be necessary To install these flanges without leaks follow proper operating procedures These flanges are sealed with a metal gasket and...

Page 18: ...ect to each other 4 Install supplied silver coated stainless steel bolts in the bolt holes of the flanges and finger tighten NOTE If the factory supplied silver coated stainless steel hardware is not used and the flanges are going to be baked coat the bolt threads with an anti seize compound FelPro C 100 or equivalent CAUTION Do not get any of the anti seize compound on the gaskets or vacuum parts...

Page 19: ...g Jacket IPN 961 025 G1 Valve Heating Jacket 150 C 120 230 V ac Operation IPN 914 407 P1 Figure 1 5 Typical Connection of a Transpector XPR 3 to the process chamber 1 16 2 1 Notes for Air Operated Valve The INFICON supplied air operated valve is a 1 8 in ported 3 way single solenoid 2 position spring return Normally Open NO or Normally Closed NC general purpose air valve It is configured for 2 way...

Page 20: ...at least 60 psig Figure 1 6 INFICON supplied air valve 1 16 2 2 Port Identification for 2 Way Normally Closed Use See Figure 1 7 IN Pressure supply port OUT Delivery port to valve EXH Exhaust port plugged Figure 1 7 Port identification EXH IN OUT IN OUT EXH 2 WAY NORMALLY CLOSED PLUGGED INLET AIR ...

Page 21: ... 2 3 Valve Parts List WARNING This valve has an operational voltage rating of 24 V dc 10 to 15 Figure 1 8 Valve parts list Item Description 1 Solenoid Coil 2 Connector Gasket 3 Connector 4 Connector Elbow 5 Nut 6 Washer 7 Compression Ring 8 Screw ...

Page 22: ...g Instructions 1 Remove the screw 8 Figure 1 9 Removing connector assembly 2 Remove the clear plastic connector elbow 4 Figure 1 10 Removing connector elbow 3 Remove the connector 3 from the solenoid assembly be careful to not remove the connector gasket 2 ...

Page 23: ...e black plastic nut 5 from the connector elbow 4 the washer 6 and the compression ring 7 can stay in place Figure 1 12 Connect elbow assembly 5 Take the MMSP Valve Relay Interface Cable IPN 600 1450 P2 and run the cables through the nut 5 washer 6 compression ring 7 and the connector elbow 4 ...

Page 24: ...4 Connecting the red and black wires to the terminal 7 Press the connector 3 back into the connector elbow 4 screw the nut 5 securely into place Connect the connector 3 to the solenoid coil 1 noting the connection scheme NOTE When fitting the connector 3 into the connector elbow 4 note the orientation of the connection to the solenoid coil 1 Ideally the elbow should be facing away from the inlet a...

Page 25: ...n orientation of the Pirani gauge with respect to the Transpector electronics module the isolation valve and the tool 1 Evaluate or pre fit Transpector XPR 3 on the tool port to determine the orientation of the Transpector electronics module with respect to the tool and the Pirani gauge with respect to a side of the Transpector electronics module Typically the Pirani gauge is placed under the Tran...

Page 26: ...lange faces come into contact 1 16 4 Mounting the Pirani Gauge The Pirani gauge is UHV compatible with a SS body ceramic electrical feed through and a 8 VCR female mounting flange 1 Connect the Pirani gauge flange to the port on the Interlock Weldment Assembly using a Ni 8 VCR 2 silver plated Ni gasket 2 Adjust the orientation of the Pirani gauge and tighten the gland finger tight Use a 1 1 16 in ...

Page 27: ...ent Cleaning the sensor requires its disassembly If the sensor is contaminated and needs cleaning contact INFICON 1 16 5 1 Attaching the Sensor to the Vacuum Chamber The sensor may be mounted in any position when attaching it to the vacuum vessel or chamber 1 Attach the Transpector XPR 3 Sensor Flange to the Pirani Interlock Weldment Assembly CF 40 Flange with a Cu gasket using 28 x 1 in 12pt SS s...

Page 28: ... composition accurately reflects that existing in the vacuum chamber If materials are evaporated or coatings are deposited in the vacuum chamber the sensor must be protected against the deposition of these materials on its surfaces by installing a baffle or deflector In systems which are baked include the sensor in the bakeout zone or provide it with separate heaters Dimensions of the quadrupole s...

Page 29: ... at temperatures greater than 150 C FC Do not turn on the Electron Multiplier EM at sensor temperatures above 150 C Turning on the EM at elevated temperature could result in permanent damage to the detector WARNING During or immediately after bakeout the heating jacket and metal surfaces in the vicinity of the heating jacket may be extremely hot These surfaces may exceed 100 C at the maximum ambie...

Page 30: ...R 3 sensor mounting connector assembly includes a mounting nut a flat teflon ring and an O ring When the mounting nut is tightened the O ring compresses making a tight fit on the sensor housing For proper installation place the nut over the end of the sensor and roll the O ring back to the groove on the sensor 2 Note the alignment pin or key pin and match the sensor feedthrough to the electronics ...

Page 31: ...apor levels that may be higher due to local surface outgassing effects These recommendations should be followed whenever the Transpector XPR 3 sensor is exposed to atmosphere for long periods of time and will serve to increase sensor life 1 16 8 Installing Ethernet Communications Communication cables are required to connect Transpector XPR 3 to the computer Ethernet communication is the default co...

Page 32: ...wer supply module NOTE The AC Line Input for the 24 V dc Power Supply must be rated 90 260 V ac 40 W maximum 47 63 Hz 3 Plug the AC line cord into an appropriate AC outlet 4 Verify that the green power indicator on the Transpector XPR 3 back panel is illuminated If the green indicator is not illuminated check the power connections 1 16 10 Connecting the Pirani Interlock Cable The Pirani gauge is f...

Page 33: ...87 P1 and 068 0433 Power cord for 230 V AC operation IPN 600 1487 P2 and 068 0434 The operating temperature of the heater is nominally 150 C Thermal over temperature protection is built into the heater WARNING During or immediately after bakeout the heating jacket and metal surfaces in the vicinity of the heating jacket may be hot These surfaces may exceed 100 C at the maximum ambient operating te...

Page 34: ...passes all software or hardware interlocks When using digital inputs for controlling Transpector XPR 3 emission develop an interlock that will not allow the emission to turn on if the pressure is too high for operation of Transpector XPR 3 1 17 2 One Status Relay Output One status relay output is active closed when the emission is on See Table 1 3 Table 1 2 Digital inputs Emission ON PIN 14 Emissi...

Page 35: ...1 27 Transpector XPR 3 Operating Manual Figure 1 22 Pinout connectors ...

Page 36: ...andle inputs between 0 to 10 volts and common mode voltages of 100 volts See Table 1 4 NOTE The analog input is supported through FabGuard software If the Pirani interlock option is configured the Pirani gauge reading will use analog input 1 Table 1 4 Analog inputs ANALOG INPUT 1 PIN 9 ANALOG INPUT 1 PIN 10 ...

Page 37: ...ard uses IP addresses to locate and identify sensors on a network 2 2 General Networking Information This section will discuss some of the general networking variables that can affect the connection of Transpector XPR 3 2 2 1 IP Addresses IP addresses can be set either manually or automatically Static manual IP addresses are set by the user and are manually changeable by the user Dynamic automatic...

Page 38: ...atically reconnect to the Transpector XPR 3 sensor because it does not know the newly assigned IP address This will lead to loss of communication and loss of data Static IP addresses do not change unless the IP address is manually changed Static IP addresses help protect Transpector XPR 3 from losing communication and data Transpector XPR 3 uses IPv4 IP addresses IPv4 IP addresses consist of 32 bi...

Page 39: ...wo devices are on different subnets 2 3 Transpector XPR 3 IP Address By default Transpector XPR 3 ships with an IP address of 192 168 1 100 with a subnet mask of 255 255 0 0 NOTE When connecting Transpector XPR 3 to an existing local network there must be a static IP address for each Transpector XPR 3 being installed Contact the network administrator for IP address assignments 2 3 1 Changing Trans...

Page 40: ...t need to be installed to work Upon double clicking the IMSSU will display as shown in Figure 2 1 Figure 2 1 INFICON Mass Spectrometer Search Utility When the IMSSU first opens nothing will be displayed The IMSSU detects all Transpector XPR 3 installed on the network regardless of IP address The IMSSU will start automatically or it can be manually started by clicking Search Clears List The IMSSU w...

Page 41: ...window will display see Figure 2 3 Figure 2 3 IMSSU TCP IP Properties window The TCP IP Properties window will display Transpector XPR 3 MAC Address the current Transpector XPR 3 IP address a Change To text box to enter the new Transpector XPR 3 IP address a selection of either DHCP On or DHCP Off To change the IP address type the new IP address in the Change To box and click Apply Transpector XPR...

Page 42: ... executed within 60 seconds of turning the Find Device On Show Settings Click Show Settings to open a display on the right side of the IMSSU that will display multiple settings of Transpector XPR 3 This is an excellent tool for troubleshooting The following settings are displayed Serial Number Gateway IP Address DHCP Status MAC Address Description Subnet Mask Name Description Structure Version Nam...

Page 43: ...puter and Transpector XPR 3 To change the computer s IP address follow these instructions 2 3 1 2 1 Windows 7 Instructions NOTE Changing the IP address of the host computer requires administrator rights You will need to use an administrator account to change the IP address 1 Click Start to display the Start menu then click Control Panel Start is located on the taskbar on the Windows 7 desktop See ...

Page 44: ... the Network and Internet group click View network status and tasks See Figure 2 5 Figure 2 5 View network status and tasks 3 On the network status and tasks window click Change adapter settings See Figure 2 6 Figure 2 6 Change adapter settings ...

Page 45: ...r right click Local Area Connection and select Properties See Figure 2 7 Figure 2 7 Changing adapter settings 5 Select Internet Protocol Version 4 TCP IPv4 then click Properties See Figure 2 8 Figure 2 8 TCP IPv4 6 In the TCP IPv4 properties menu select Use the following IP address See Figure 2 9 Figure 2 9 Use the following IP address ...

Page 46: ...nect to Transpector XPR 3 11 To change the IP address back to its default settings follow steps 1 through 6 and return the IPv4 properties to their original settings 2 4 Connecting Transpector XPR 3 Before connecting Transpector XPR 3 decide 1 Is Transpector XPR 3 going to be set up on a private network installed directly on to either a computer or a router that is not hooked up to the internet or...

Page 47: ... on page 2 7 2 4 1 2 Installing a Single Transpector XPR 3 on an Existing Local Network When installing a single Transpector XPR 3 on an existing local network the default IP address of Transpector XPR 3 may not be compatible with the network Transpector XPR 3 can have either a Static IP address recommended or a Dynamic IP address set by DHCP not recommended Contact your network administrator for ...

Page 48: ... of the router switch 2 4 2 2 Installing Multiple Transpector XPR 3 on an Existing Local Network If multiple Transpector XPR 3 sensors are to be connected to an existing local network use an Ethernet switch instead of a router NOTE Routers can cause conflicts with local networks because the router will attempt to set IP addresses for all network connected devices Since Transpector XPR 3 sensors wi...

Page 49: ... means pressures below 2 6 Pascals or approximately 2x10 2 Torr approx 2 6x10 2 mbar 3 3 Patents The following patents are applicable to the design and operation of Transpector XPR 3 system Method of manufacturing a miniature quadrupole using electrode discharge machining US 5 852 270 Abstract A method for manufacturing a miniature quadrupole from a single blank includes fastening four lengthwise ...

Page 50: ...de an electron multiplier used in conjunction with the Faraday collector to allow separate modes of operations Application of a suitable first potential to the electron multiplier can cause charged particles to be deflected directly to the Faraday collector in one mode and application of a second potential can cause deflection of charged particles to the electron multiplier with the effects of the...

Page 51: ...ne the partial pressures amounts of the respective gases The Sensor consists of three main parts ion source ionizer quadrupole mass filter ion detector All of these parts are mounted on an electrical feed through flange which is bolted to the vacuum chamber where the gas analysis measurements are made The sensor works only in a high vacuum environment because the ions once created must not collide...

Page 52: ...anual Figure 3 1 Transpector XPR 3 sensor Electrometer 1275 V 50 to 500 V Micro Channel Plate Ions Collector Plate Electrons Total Pressure Ion Chamber Partial Pressure Ion Chamber Dual Filament Y2 O3 Ir Hyperbolic Quadrupole 18mm Long ...

Page 53: ...he filament The filament is heated with a DC current from the emission regulator circuit with the resulting temperature of the filament used as the means of controlling the emission current The potential voltage on the anode is positive with respect to the potential on the filament The potential difference between the filament and the anode determines the kinetic energy usually called the electron...

Page 54: ...upole Mass Filter The ions produced in the ion source are injected into the mass filter which rejects all ions except those of a specific mass to charge ratio Most ions contain only one unit of charge In Transpector XPR 3 the mass filter is a quadrupole type to which is applied a combination of RF and DC potentials The RF frequency and amplitude determine the mass and the RF DC ratio determines th...

Page 55: ...the rods 1 2 where V is the RF amplitude f is the RF frequency t is time U is the DC potential PZ is the pole zero The RF component removes the low mass ions from the beam Ions of sufficiently low mass have their motions remain in phase with that of the applied RF These ions will gain energy from the field and oscillate with increasingly large amplitudes Eventually as they travel along the length ...

Page 56: ... by sweeping the RF amplitude along with the DC voltage The variation in the efficiency of transmission of ions through the filter with mass is discussed in section 3 5 on page 3 10 Following that section 3 6 on page 3 10 discusses the behavior of the filter at very low masses where the applied voltages approach zero 3 4 3 The Ion Detector The ion detector region of the sensor consists of the quad...

Page 57: ...pplied across the EM the condition of the EM and to a lesser extent the mass and chemical nature of the incident ion In general the EM gain decreases as the ion mass increases The advantage of the EM Sensor is its higher sensitivity thus making it possible to measure lower partial pressures A typical Transpector XPR 3 has an FC sensitivity of about 4x10 7 amps Torr resulting in a minimum detectabl...

Page 58: ...ristics As described above the quadrupole acts as a mass filter for a mixed beam of ions rejecting those of both high and low mass while passing those of an intermediate mass The selectivity of the mass filter is expressed in terms of resolution R which is numerically given by the ratio of the center mass M to the width M both in AMU of the pass band Since the number of the ions passed by the filt...

Page 59: ... ions with ambient gas molecules is described by the mean free path property of the gas environment The mean free path is the average distance that an ion travels before interacting with a gas molecule The numerical value of the mean free path is dependent on the type of ion the type of gas atmosphere and the gas pressure i e the concentration of gas molecules 1 where is the mean free path K is a ...

Page 60: ...loss provided that the current output I of the ion source is proportional to the partial pressure of the ion of interest An additional linearization term 1 AP is used to compensate for the effects of ion space charge in the ion source Transpector XPR 3 is equipped to make this linearizing calculation using the total pressure reading of the ion source The linearization factors F X K and A the ioniz...

Page 61: ... Transpector XPR 3 produces its measurements refer to Chapter 3 How The Instrument Works 4 1 1 Qualitative Interpretation of Mass Spectra The basic graphical output of a residual gas analyzer is the mass spectrum Amass spectrum is a pattern of peaks on a plot of ion intensity as a function of ion mass to charge ratio Each chemical substance has a characteristic mass spectrum Different instruments ...

Page 62: ...s showing the most important masses verses time The prominent peaks for air are mass 28 from Nitrogen mass 32 from Oxygen mass 40 from Argon and mass 18 from water vapor 4 1 1 1 Ionization Process When a sufficiently energetic electron strikes a gas molecule there are many processes that can occur just some of which are summarized in Table 4 1 Table 4 1 Electron impact ionization processes XYZ e X...

Page 63: ...iply charged species will be less intense than those for the corresponding singly charged ion For example the doubly charged peak for argon is typically less than one fifth as intense as the singly charged peak it should be noted that this intensity ratio is sensitive to the incident electron energy There are some situations when it is difficult to determine whether the ion is singly or multiply c...

Page 64: ...on is 0 096 mass 124 0 090 mass 126 1 92 mass 128 26 44 mass 129 4 08 mass 130 21 18 mass 131 26 89 mass 132 10 44 mass 134 and 8 87 mass 136 Isotope ratios like fragmentation patterns are a very useful aid in recognizing specific materials Under normal partial pressure analyzer ionization conditions the peak height ratios for the various isotopes of an element will be the same as the ratios of th...

Page 65: ...1 99 985 2 0 015 He 3 0 00013 4 100 0 B 10 19 78 11 80 22 C 12 98 892 13 1 108 N 14 99 63 15 0 37 O 16 99 759 17 0 0374 18 0 2039 F 19 100 0 Ne 20 90 92 21 0 257 22 8 82 Na 23 100 0 Al 27 100 0 Si 28 92 27 29 4 68 30 3 05 P 31 100 0 S 32 95 06 33 0 74 34 4 18 36 0 016 Cl 35 75 4 37 24 6 Ar 36 0 337 38 0 063 40 99 600 ...

Page 66: ...al i e the minimum electron energy required to produce a specific ion for Ar is 15 7 eV The number of argon ions produced rises steeply with energy until a maximum is reached at about 55 eV As the electron energy rises above this level the rate of Ar production slowly decreases The appearance potential for Ar2 is 43 5 eV and the ion production rate does not maximize until the electron energy excee...

Page 67: ...ities for each of these masses and common sources for each of these ions NOTE This list is by no means all inclusive Table 4 3 Spectrum Interpretation Guide Spectrum Interpretation Guide AMU Chemical Symbol Sources 1 H Water F or Hydrogen F 2 H2 D Hydrogen Deuterium 2 H 3 HD 3H Hydrogen Deuterium Tritium 3H 4 He Helium 5 No known elements 6 C Doubly Ionized 12C Rare 7 N DI 14 N Rare 8 O DI 16 O Ra...

Page 68: ...gen Isotope 35 Cl Chlorine Isotope See Note 2 36 HCl 36Ar C3 Hydrochloric Acid Argon Isotope Hydrocarbons 37 37 Cl C3H Chlorine Isotope See Note 2 Hydrocarbons 38 37HCl C3H2 Hydrochloric Acid or See Note 2 Hydrocarbons 39 C3H3 See Note 3 Hydrocarbons 40 Ar C3H4 Argon See Note 1 Hydrocarbons 41 C3H5 See Note 1 Hydrocarbons 42 C3H6 See Note 1 Hydrocarbons 43 C3H7 CH3CO Note 1 Acetone F or Methyl Eth...

Page 69: ... by PPa while Kab is the proportionality constant for the peak at mass b from substance a and Iab is the ion current at mass b from substance a The proportionality constant Kab depends on the nature of the substance being detected and on the characteristics of the partial pressure analyzer The substance dependent part is called the material factor Mab The instrument dependent part is called the an...

Page 70: ...he energy of the ionizing electrons If the correct values of these factors are not known for the exact conditions of the particular analyzer being used they can be approximated using published values for other conditions with generally only a small loss in accuracy Fragmentation factors can be calculated from fragmentation patterns given in the general references cited in Chapter 9 Other valuable ...

Page 71: ...92 34 40 83 Krypton Kr 60 07 20 17 84 45 65 05 86 13 Benzene C6H6 82 10 Trichlorethylene C2HCl3 78 53 83 10 95 22 51 11 130 22 52 11 Methane CH4 132 21 50 10 16 46 97 14 15 40 60 13 Carbon Dioxide CO2 14 07 44 70 13 04 Water H2O 28 11 18 75 16 06 Methanol CH3OH 17 19 12 01 31 43 1 05 32 23 16 02 Carbon Monoxide CO 29 18 28 91 28 03 Xenon Xe 12 05 132 26 16 03 Neon Ne 129 26 20 90 131 22 Ethanol C2...

Page 72: ...mited lists of ionization sensitivities can be found in the books by O Hanlon Chapter 8 Section 1 1 and Drinkwine and Lichtman Table I page 5 HINT Actual ionization probabilities vary significantly depending especially on the ionizer and the electron energy For best accuracy measure the relative ionization probability using a hot cathode ionization gauge calibrated for nitrogen to monitor a known ...

Page 73: ...disulfide CS2 4 8 Nitrogen N2 1 0 Carbon monoxide CO 1 05 Nitric oxide NO 1 2 Carbon tetrachloride CCl4 6 0 Nitrous oxide N2O 1 7 Chlorobenzene C6H5Cl 7 0 Oxygen O2 1 0 Chloroethane C2H5Cl 4 0 n Pentane C5H12 6 0 Chloroform CHCl3 4 8 Phenol C6H5OH 6 2 Chloromethane CH3Cl 3 1 Phosphine PH3 2 6 Cyclohexane C6H12 6 4 Propane C3H8 3 7 Deuterium D2 0 35 Silver perchlorate AgClO4 3 6 Dichlorodifluormeth...

Page 74: ...e gain of the Electron Multiplier G measured at mass 28 for nitrogen is the Electron Multiplier output current divided by the Faraday mode output current under otherwise identical conditions The multiplier gain is a strong function of the high voltage applied The sensitivity of the instrument S is the ratio of Faraday mode ion current for a given pressure of pure nitrogen measured at mass 28 and i...

Page 75: ...eak b resulting from substance a in amps assumes that there are no other substances present which contribute significantly to the total current at mass peak b 4 1 3 Additional Information for Interpreting Mass Spectra The following paragraphs contain additional information which may be of use when interpreting mass spectra 4 1 3 1 Ion source Characteristics It is important to recognize that the pa...

Page 76: ...erly representative of the composition of the gas in the vacuum chamber Third reactions involving gas molecules on surfaces of the analyzer can result in a change of composition Gases can either be consumed by the surfaces or produced by the surfaces One example of gas consumption is the reaction of oxygen with a hot filament particularly when tungsten filaments are used The typical result is an a...

Page 77: ...h correlation between the number of electrons in a molecule and its ease of ionization Although the total ion yield i e the sum of ions of all masses is electron energy and ionizer dependent a reasonable estimate for the number of ions produced relative to some standard usually nitrogen in a partial pressure analyzer is the relative ionization gauge sensitivity 4 1 3 2 Scanning Characteristics Qua...

Page 78: ...s for the substances of interest should be measured with the same instrument and the same adjustments as the samples to be analyzed 4 1 3 4 High Pressure Effects As described in Section 3 7 High Pressure Effects on page 3 11 when approaching the high pressure limit of operation the ion current does not increase linearly with pressure because of ion losses that are pressure dependent The degree of ...

Page 79: ...vapor levels that may be higher due to local surface outgassing effects These recommendations should be followed whenever Transpector XPR 3 Sensor is exposed to atmosphere for long periods of time and will serve to increase sensor life CAUTION Do not turn on electron multiplier high voltage at sensor temperatures above 150 C Permanent damage to the electron multiplier could result WARNING During o...

Page 80: ... 3 Pirani Interlock Protection Filament interlock protection for Transpector XPR 3 allows the XPR 3 filament emission to operate at safe pressures 2x10 2 Torr by action of the Pirani Emission OFF Interlock function Protection is provided by a Pirani gauge which directly monitors pressure at the XPR 3 Interlock protection turns off the XPR 3 filament if the pressure increases above a maximum operat...

Page 81: ...5 3 Transpector XPR 3 Operating Manual Figure 5 1 RGA Configuration External I O tab Name In the Name box enter a name for the analog input See Figure 5 2 Figure 5 2 Name ...

Page 82: ...hanged 10 Volt Input Figure 5 5 10 volt input Defines what an input of 10 volts means in user units If the Signal Type is INFICON Pirani MxG or BxG the 10 volt input value cannot be changed High Trip Action Figure 5 6 High Trip Action High Trip Action is typically used to stop emission from turning on at pressures too high for safe operation NOTE High Trip Action offers protection in addition to t...

Page 83: ... Trip Action is typically used to protect the sensor in case the pressure gauge fails or the pressure gauge cable becomes disconnected NOTE Low Trip Action will act as an emission interlock when set to a pressure value below the minimum value possible for the pressure gauge and Emission and EM Off are selected Low Trip Level Figure 5 9 Low Trip Level Defines the Low Trip Level If INFICON Pirani Mx...

Page 84: ... be in units of Torr or millibar depending upon the units selected in Signal Type 5 5 Using Transpector XPR 3 Once the sensor has been conditioned by baking it out and then keeping it under vacuum the emission can be turned on 5 5 1 Leak Detection Using FabGuard Explorer there is no recipe required for operating in Leak Mode Select the Leak Mode button to default to sampling Helium mass 4 over tim...

Page 85: ...It is strongly recommended that the filaments be replaced after 4000 hours of operation approximately six months of continuous operation CAUTION If the filaments are not replaced and are allowed to burn out coating from the filament could contaminate the ion source plate and create electrical shorts preventing operation with a new set of filaments The yttria coated filament part number 914 022 G2 ...

Page 86: ...5 8 Transpector XPR 3 Operating Manual CAUTION The HPEM degrades from monitoring high ion currents Avoid measuring ion currents above 1E 7 Amps while operating with the HPEM on ...

Page 87: ... to turn on the emission above 10 mTorr 20 mTorr with Pirani Interlock option may result in premature failure of filaments Utilize the Pirani Interlock option or other measures to operate the Transpector XPR 3 within a safe pressure range Failure to observe this caution will result in premature failure of filaments Filament replacement is not covered by warranty under these conditions Please read ...

Page 88: ...that operates at process pressures up to 10 mTorr 20 mTorr with the Pirani Interlock option It has an Electron Multiplier that can operate at pressures up to 1x10 4 Torr The miniature quadrupole sensor analyzes gases by ionizing some of the gas molecules separating the ions by mass measuring the quantity of ions at each mass The masses allow the identification of the gas molecules from which the i...

Page 89: ...Low Pressure EM detector includes a continuous dynode electron multiplier CDEM that can operate at a total pressure up to 1x10 4 Torr The CDEM voltage range is 775 to 1 225 volts The sensor is mounted on an electrical feed through flange which is bolted to the vacuum space where the gas analysis measurements are made Electronics Module The electronics module controls the sensor The electronics mod...

Page 90: ...ture 0 1 amu over 24 hours Peak Ratio Stability 28 40 as FC Better than 2 over 24 hours Sensitivity nominal As FC at 40 eV 200 µA Emission As EM at 70 eV 400 µA 4E 7 amps Torr 8E 3 amps Torr Minimum Detectable Partial Pressure As FC at 40 eV 200 µA As EM at 70 eV 400 µA 1E 9 Torr 6E 12 Torr Minimum Detectable Concentration 50 ppm Maximum Operating Pressure With Pirani Interlock Option Without Pira...

Page 91: ...pector XPR 3 Operation CAUTION Transpector XPR 3 Low Pressure EM Gas Analysis System has an Electron Multiplier that can operate at pressures up to 1x10 4 Torr Relay Outputs 1 relay 24 V at 0 5 amps Inputs 1 Analog Input 2 Digital Inputs NOTE All specifications after a 30 minute warm up MDPP Minimum Detectable Partial Pressure is calculated as the standard deviation of the noise minimum detectable...

Page 92: ... 2 7 2 Safety Considerations If Transpector XPR 3 is used in a manner not specified by INFICON protection provided by the equipment may be impaired 7 2 1 Toxic Material The Transpector XPR 3 sensor does not contain any toxic material However if the Transpector XPR 3 sensor is used in an application wherein toxic material is used or generated residue of the toxic material will likely be present on ...

Page 93: ...hock If the Transpector XPR 3 electronics module is operated while open hazardous electrical voltages may be present Such operation should not be attempted except by qualified service personnel 7 3 General Instructions For All Repair Procedures CAUTION Perform any servicing in a clean well illuminated area Wear clean nylon lint free lab gloves or finger cots Do not touch the vacuum side of the sen...

Page 94: ...scribed in section 7 5 3 Filament Kit Replacement on page 7 5 If the procedures explained above do not solve the problem contact INFICON Refer to section 1 3 How To Contact Customer Support on page 1 2 CAUTION When heating the sensor above 150 C the electronics module and the signal contact must be removed from the sensor 7 4 2 Spare Heating Jacket Part Numbers INFICON offers several heating jacke...

Page 95: ...ranspector XPR 3 Operating Manual 7 5 Repair Procedures 7 5 1 Tools Required The hand tools shown in Figure 7 1 A DMM capable of measuring 30M or above Figure 7 1 Tools required Included in the filament kit ...

Page 96: ...sured with the filament assembly and ceramic shield removed 2 Measure the resistance of each of the pins with respect to ground pin A These measurements should be above 30M 3 Measure the resistance of each of the pins with respect to each other All of these measurements should also be above 30M with the exception of across the filament if the filament has not failed 7 5 3 Filament Kit Replacement ...

Page 97: ...ilament so that the face of the repeller is parallel to the face of the anode and the filament is approximately centered to the two mounting screws per steps 2 and 3 below See Figure 7 3 Figure 7 3 Filament assembly 2 Align the holes in the filament blocks with those on the base plate 3 Place the lock washers on the screws and then insert the screws through the filament assembly and into the holes...

Page 98: ...or equivalent torque the screws to 10 12 oz In 0 0384 Nm to 0 0461 Nm CAUTION Do not touch the filament wires 7 5 4 How to Determine the Condition of the Ion Source 1 Remove the Transpector XPR 3 sensor from the vacuum system 2 Completely loosen the two 1 72 x 0 31 in long gold plated cap head screws that hold the filament assembly to the ion source plate Remove the filament assembly and screws Se...

Page 99: ...hould also be above 30M If any of the measurements in steps 3 and 4 are less than 30M the ion source is contaminated and requires cleaning or replacement before the new filament is installed Contact the nearest INFICON Service Center for assistance with returning the unit to the factory for repair Refer to section 1 3 How To Contact Customer Support on page 1 2 If the resistance measurements in st...

Page 100: ...PR 3 does have some slightly different values for peak width adjustment For more detailed information reagrding mass tuning using FabGuard please refer to the FabGuard Explorer operating manual 7 6 1 1 Factory Tuning The gases that are used for factory tuning of these masses are Hydrogen mass 1 and 2 Helium mass 4 Nitrogen mass 28 Argon mass 40 Krypton mass 86 7 6 1 2 Mass Scale Tuning at Base Pre...

Page 101: ...d be the default Tune list which is masses 1 2 4 28 40 and 86 If this list is not present when the Tune window is opened modify the Tune Mass Table as necessary to show only masses 1 2 4 28 40 and 86 CAUTION Do not attempt to remove masses 1 2 4 or 86 AMU from the Tune Table or adjust the resolution at these masses 7 7 Pirani Interlock Adjustment Procedures Follow these procedures for adjusting th...

Page 102: ...k of the gauge see Figure 7 7 with the supplied tool to make the ATM atmosphere adjustment The gauge is automatically adjusted to 750 Torr 1000 mbar 99 991 78 Pa which is a Pirani voltage of 10 V dc 0 1V Figure 7 7 PSG500 adjustment button Pin Pin 1 Pin 2 Pin 3 Pin 4 Pin 5 Pin 6 8 Assignment Supply Voltage 14 32 Vdc Supply Common Signal Output Measurement Signal Identification Signal Common Switch...

Page 103: ...dc 7 Vent the system to atmosphere air or nitrogen and verify that the Pirani voltage is 10 0 0 1 V dc Repeat the ATM adjustment if the setting at atmosphere has changed 8 Evacuate the system to a pressure of less than 7 5x10 6 Torr 1x10 5 mbar 1x10 3 Pa and wait at least 2 minutes 9 Verify that the Pirani voltage at high vacuum is still 1 9 0 1 V dc If the Pirani voltage has changed repeat the HV...

Page 104: ... SYMPTOM CAUSE REMEDY Power LED does not turn on 24 V external power supply Check input AC line voltage to external power supply Check 24 V input verify input between 20 30 V Replace power supply Electronics failure Return to INFICON for repair No communi cation to HOST computer Sensor IP address not compatible with network Refer to Chapter 2 Connecting Transpector XPR 3 Transpector communications...

Page 105: ...sure that the Transpector XPR 3 electronics module is pushed all the way on sensor ANODE error Defective sensor anode shorted Check sensor with OHM meter for shorts See sensor pin out diagram Fix or replace sensor Electronics failure Return to INFICON for repair RF error Defective sensor RF leads open RF DC card fault Fix or replace sensor Electronics failure Return to INFICON for repair Electron ...

Page 106: ...e EM voltage Electronics failure Return to INFICON for repair Mass Filter Error Bad tune file Retune RGA Contaminated quadrupole Return to INFICON for repair Ion Source Error Incorrect Ion source settings Load original configuration file Ion source contaminated Return to INFICON for repair Detector Error EM voltage set too high Reduce EM voltage Detector not working correctly Replace EM detector D...

Page 107: ...ament shorted Verify that filament is not shorted to ground Focus Error Unable to start or maintain Focus voltage Reset electronics box Return electronics box to INFICON for repair No spectra Emission is OFF Turn Emission ON EM is ON when operating Turn EM OFF Contaminated sensor Degas or service sensor Replace sensor Electronics failure Return to INFICON for repair Pressure too low for FC Use EM ...

Page 108: ...n current Improper calibration Ensure that the total pressure gauge used for sensitivity calibration was properly calibrated Electronics failure Return to INFICON for repair EM has low gain Bake out sensor Replace sensor Poor peak shape Sensor contaminated Degas sensor Bake out sensor Service sensor System pressure too high Verify pressure less than 2E 2 Torr for Transpector XPR 3 Mass calibration...

Page 109: ...lict between Transpector XPR 3 and another network device Refer to Chapter 2 Connecting Transpector XPR 3 for more information on communications problems High noise level System grounding Verify that vacuum system is grounded Electronics failure Return to INFICON for repair Transpector XPR 3 electronics box not mounted properly on sensor Push Transpector XPR 3 electronics box all the way on to the...

Page 110: ...essure Analyzers and Analysis M J Drinkwine and D Lichtman American Vacuum Society Monograph Series or A User s Guide to Vacuum Technology J F O Hanlon John Wiley and Sons 1989 The latter book also contains a wealth of information on related topics including gas flow pressure gauges pumps materials and the design of vacuum systems ...

Page 111: ...n a vacuum apparatus when no gases are being deliberately introduced Bakeout A bakeout is the process of heating a vacuum chamber above the ambient temperature in order to accelerate the desorption of species such as water vapor and hydrocarbons which are adsorbed onto the inner surfaces of the vacuum chamber Center Voltage The center voltage is the DC potential to which the quadrupole rod RF and ...

Page 112: ...potential times the electron charge Electron Multiplier An electron multiplier is a in situ amplifier which is used to increase the sensitivity of a mass spectrometer When a high voltage is applied to an electron multiplier positive ions are accelerated into the multiplier causing the release of a large number of electrons per incident ion at the output Emission Current The emission current is the...

Page 113: ...lier The gain of an electron multiplier is the ratio of incident ion current to electron current output The gain of the multiplier is a strong function of the bias potential applied across it Ion An ion is a molecule or atom which has either lost or added one or more electrons Those molecules which have lost electrons are positive ions Those molecules which have added electrons are negative ions I...

Page 114: ...cal relationship between an ion current and the total or partial pressure giving rise to that current A mass spectrometer is said to have good linearity when the ion current is proportional to the pressure over a specified pressure range within a specified tolerance Typically but not always the ion current will be linear with pressure at the low end of an instrument s pressure range At some pressu...

Page 115: ...ven element which have the same number of neutrons For example 99 985 of all naturally occurring hydrogen atoms have no neutrons giving an atomic mass of approximately 1 while 0 015 have one neutron giving an atomic mass of approximately 2 There is a third isotope of hydrogen which contains two neutrons giving an atomic mass of 3 but this isotope is unstable with such a short radioactive half life...

Page 116: ...used to determine the quantities and chemical nature of gases present in a vacuum system The instrument is typically a mass spectrometer equipped with an open ion source Resolution Resolution is the ability of a mass filter to select between nearby masses It is typically measured as the mass of the peak divided by the width of a given mass peak at 10 or 50 of the peak maximum intensity Secondary E...

Page 117: ...io of ion current detected at the exit end of the mass filter set to transmit a given mass to the current of ions of the same mass entering the filter from the ion source Typically the transmission factor for nitrogen ions at 28 AMU is set equal to 1 The transmission factor at other masses is given relative to that for nitrogen Viscous Flow Viscous flow is that motion of gas molecules wherein the ...

Page 118: ...on 600 1428 P1 Power Supply Extension Cable 4 5 m 15 ft 600 1429 P1 Power Supply Extension Cable 9 m 30 ft 961 417 G1 4 Port Ethernet Router w Push Button Wi Fi 961 418 G1 8 Port Ethernet Switch 961 702 G1 Sensor Hardware Kit 914 024 G1 Angle Valve Kit Manual includes heater 961 0250 G1 Angle Valve Kit Air Operated 24 V dc includes heater 914 410 P1 Spare Angle Valve Manual 914 220 G1 Spare Angle ...

Page 119: ...ension 961 021 G3 Power Supply Kit 80 250 V ac 4 ft 1 2 m US Plug 9 14 m 30 ft Extension 961 021 G4 Power Supply Kit 80 250 V ac 1 2 m 4 ft DE Plug 961 021 G5 Power Supply Kit 80 250 V ac 1 2 m 4 ft DE 4 57 m 15 ft Extension 961 021 G6 Power Supply Kit 80 250 V ac 1 2 m 4 ft DE 30 ft Extension 961 021 G7 Power Supply Kit 80 250 V ac 1 2 m 4 ft UK Plug 961 021 G8 Power Supply Kit 80 250 V ac 1 2 m ...

Page 120: ... Operating Manual 961 0200 G2 Heater Power Cable Kit DE Plug 961 0200 G3 Heater Power Cable Kit UK Plug 961 0200 G4 Heater Power Cable Kit IL Plug Table 11 3 Transpector XPR 3 replacement spare parts Part Number Description ...

Page 121: ...e warm up period at constant STP unless specified 12 2 Mass Range 12 3 Detector Type 12 4 Resolution 12 5 Temperature Coefficient Transpector XPR 3 Transpector XPR 3 Low Pressure EM 1 to 100 AMU Transpector XPR 3 Transpector XPR 3 Low Pressure EM Microchannel Plate Electron Multiplier Faraday Cup Continuous Dynode Electron Multiplier Faraday Cup Peak Width AMU at 10 of peak height Transpector XPR ...

Page 122: ...10 7 3x10 5 4x10 7 3x10 7 3x10 5 Torr mbar Pa Transpector XPR 3 Transpector XPR 3 Low Pressure EM FC 1x10 9 1 3x10 9 1 3x10 7 1x10 9 1 3x10 9 1 3x10 7 EM 6x10 12 8x10 12 8x10 10 6x10 12 8x10 12 8x10 10 Torr mbar Pa Transpector XPR 3 Transpector XPR 3 Low Pressure EM FC only 20 mTorr 2 6x10 2 2 6 20 mTorr 2 6x10 2 2 6 FC EM 20 mTorr 2 6x10 2 2 6 1x10 4 Torr 1 3x10 4 1 3x10 2 Degrees C Transpector X...

Page 123: ...or XPR 3 Low Pressure EM 5 to 50 C ambient Transpector XPR 3 Transpector XPR 3 Low Pressure EM 20 30 V dc 24 V dc Typical Latching 4 pin Din connector internally isolated from system ground Transpector XPR 3 Transpector XPR 3 Low Pressure EM Standard Cat5e Ethernet Cable Connection Transpector XPR 3 Transpector XPR 3 Low Pressure EM 1 relay 24 V at 0 5 amps Transpector XPR 3 Transpector XPR 3 Low ...

Page 124: ... section 13 1 4 on page 13 3 Software Optional see section 13 1 5 on page 13 3 Heating Jacket System Optional Interlock Kit Optional Angle Valve Optional 13 1 1 Ship Kit Table 13 1 Ship kit Part Number Description 961 020 G1 Ship Kit includes 600 1198 P8 7 m Ethernet Cable 961 702 G1 Mounting Hardware 961 022 G1 O ring and Mounting Nut 961 370 P1 O ring Removal Tool 051 032 D Connector 051 1082 Ca...

Page 125: ...ly Kit 85 250 V ac 1 2 m 4 ft US Plug 961 021 G2 Power Supply Kit 85 250 V ac 1 2 m 4 ft US Plug with 4 5 m 15 ft Extension 961 021 G3 Power Supply Kit 85 250 V ac 1 2 m 4 ft US Plug with 9 m 30 ft Extension 961 021 G4 Power Supply Kit 85 250 V ac 1 2 m 4 ft DE Plug 961 021 G5 Power Supply Kit 85 250 V ac 1 2 m 4 ft DEPlug with 4 5 m 15 ft Extension 961 021 G6 Power Supply Kit 85 250 V ac 1 2 m 4 ...

Page 126: ...nts 961 X1LAP Transpector XPR 3 LPEM Y2O3 Ir Filaments Table 13 5 Software optional Part Number Description 921 039 G1 FabGuard Explorer Single Sensor Version CD 921 039 G2 FabGuard Explorer Multi Sensor Version CD Table 13 6 Heating jacket system optional one of the following optional Part Number Description 914 415 P1 Interlock Weldment Heating Jacket 600 1487 PX Heater Power Cable 068 XXXX Coun...

Page 127: ...g Manual 13 1 8 Angle Valve Optional Table 13 8 Angle valve optional optional Part Number Description 914 024 G1 Angle Valve Kit Manual includes Heater Y Cable 961 0250 G1 Angle Valve Kit Air Operated 24 V dc includes Heater Y Cable ...

Page 128: ...ation Of Contamination 1 3 detection factor 4 12 4 13 9 2 detector 3 1 9 2 detector type 11 1 doubly charged ion 9 2 E electron energy 3 4 9 2 electron multiplier 9 2 electron stimulated desorption 4 15 electronics enclosure 11 4 electronics module 1 5 12 2 physical dimensions 1 6 EM gain 3 11 emission current 3 4 9 2 emission error 7 2 emult error 7 2 energy of the bombarding electrons 4 5 exit a...

Page 129: ...trifluoride 3 13 noise level 7 6 O open ion source 9 5 outgassing 4 14 9 5 overvoltage category 1 8 P parent ion 9 5 partial pressure 4 13 4 16 9 6 analyzer 4 8 pass band width 3 8 peak height 4 8 peak shape poor 7 5 perimeter for maintenance access 1 7 pole zero 3 7 9 6 pollution degree 1 8 power input 11 3 supply 1 15 12 2 pressure maximum 11 2 pumping 4 14 Q quadrupole 9 6 exit aperture 3 10 ex...

Page 130: ...pinning rotor gauge 4 11 supply voltage 1 7 surface film 3 13 T temperature bakeout 11 3 coefficient 11 2 error 7 3 max operating 11 3 operating 11 3 operating range 1 8 total pressure 9 6 total pressure plate 9 7 transition flow 9 7 transmission factor 4 12 4 13 9 7 tuned 4 16 tungsten hexafluoride 3 13 U ultrahigh vacuum 4 14 user configured switches 11 4 V vacuum region 4 14 vacuum system 4 14 ...

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