1 - 4
Transpector XPR 3+ Operating Manual
Transpector XPR 3+ is an important aid in the efficient use of a high-vacuum
system, detecting leaks, and contaminants. It can indicate the partial pressures of
gases in processes occurring within a vacuum or other vessel, and therefore, can
be used to investigate the nature of a process or monitor process conditions.
1.6 General Description of Transpector XPR 3+
Gas Analysis System
Transpector XPR 3+ Gas Analysis System is comprised of three parts:
Sensor
The sensor, which functions only in a high-vacuum environment with pressures
below 2x10
-2
Torr (2.66 x 10
-2
mbar) [2.66 Pascals].
The sensor itself is comprised of three components:
the ion source (ionizer)
the quadrupole mass filter
the ion detector
The sensor is mounted on an electrical feedthrough flange, which is bolted to
the vacuum chamber where the gas analysis measurements are made.
Electronics Module
The electronics module controls the sensor and communicates to the operating
computer. The electronics module and sensor are sold matched in sets. The
electronics module attaches to and is supported by the sensor.
Software
The software controls the electronics module and displays the data
from the sensor.
1.7 Specifications for Transpector XPR 3+ Gas Analysis System
See
for Transpector XPR 3+ Gas Analysis System specifications.
1.8 Supplied Items
See
for items that are packaged with Transpector XPR 3+
Gas Analysis System.