5 – 23
Transpector CPM Operating Manual
W (and alloys)
(TiN liner)
W (and alloys)
(TiN liner)
SF
6
NF
3
SF
6
WF
6
F
2
HF
H
2
O
O
2
N
2
WOF
4
TiF
4
NF
3
WF
6
F
2
HF
H
2
O
N
2
O
2
WOF
4
TiF
4
127, 89, 108
279, 281
38
20
18, 17
32, 16
28, 14
257, 259
86, 67, 105, 48
52, 33, 71
279, 281
38
20
18, 17
28, 14
32, 16
257, 259
86, 67, 105, 48
SiO2
(and
boro-phospho-s
ilicate glass)
CHF
3
/CF
4
,
CHF
3
/O
2
CHF
3
CF
4
O
2
SiF
4
CO
2
HF
H
2
O
COF
2
C
2
F
6
51, 69
69, 50
32, 16
85, 66, 47
44, 28, 16, 12
20
18, 17
47, 66
119
Table 5-5 Dry etching chemistries (continued)
Etched
Material
Typical
Reagents
Important
Species
Monitored
Masses