3
INTRODUCTION ............................................................................... 5
CHECKING PACKAGE CONTENTS ....................................................... 5
SECURITY INFORMATION ................................................................. 7
USAGE NOTES .................................................................................. 9
CHAPTER I OVERVIEW .................................................................... 12
1.1
I
NTRODUCTION
............................................................................. 12
1.2
P
ERFORMANCE CHARACTERISTICS
..................................................... 12
1.3
N
AMES OF SECTIONS AND SUMMARY OF OPERATIONS
........................... 13
1.4
D
IMENSIONS
................................................................................ 15
1.5
P
AGE COMPOSITION
....................................................................... 16
CHAPTER II PREPARATION BEFORE TESTING .................................. 19
2.1
T
EST FLOW PREVIEW
...................................................................... 19
2.2
B
ASIC PARAMETER SETTING PROCESS
................................................. 21
2.3
I
NSPECTION BEFORE MEASUREMENT
.................................................. 22
2.4
M
ETHOD FOR CONNECTING TEST LINES
.............................................. 23
2.5
M
ETHOD FOR CONNECTING ELECTRODE BOXES
.................................... 25
CHAPTER III BASIC SETTINGS .......................................................... 26
3.1
S
ET TEST VOLTAGE
.......................................................................... 26
3.2
S
ET
T
EST
R
ANGE
........................................................................... 26
3.3
S
ET
T
EST
S
PEED
............................................................................ 27
3.4
C
OMPARATOR FUNCTION
................................................................. 27
3.5
R
ESPONSE MODE OF SORTING RESULTS
............................................... 28
3.6
S
URFACE RESISTIVITY
...................................................................... 29
3.8
L
EAKAGE
C
URRENT
M
EASUREMENT
.................................................. 34
CHAPTER IV MEASUREMENT ......................................................... 35
4.1
S
TART
-
UP TEST
.............................................................................. 35
4.2
T
EST
R
ANGE
................................................................................. 35
