Operation Manual Ver. 1.3
1
Table of Contents
1. Operation ..................................................................... 2
1.1 General specification ........................................................... 2
1.2 Front / rear panel introduction ............................................. 3
1.3 System setup ........................................................................ 4
1.4 Parameters setting ................................................................ 4
1.5 Error message ...................................................................... 5
2. Software ........................................................................ 6
2.1 Installation ........................................................................... 6
2.2 Operation ............................................................................. 9
3. OVEN ......................................................................... 13
3.1 Overview ............................................................................ 13
3.2 Setup procedure for chip holder ........................................ 15
4. Safety and warranty .................................................. 17
Appendix
A. Pin assignment .................................................................... 18
