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2021.05.25 

• 

REV. 3 

• MASS FLOW METER OPERATING MANUAL

 3

Introduction 

Your flow meter has a variety of innovative features:

• 

High-accuracy performance for all your gases.

 

Use your flow meter with any of the 98+ gases 

included with Gas Select™

page 13

.

• 

1000 readings per second 

guarantees high 

resolution data

page 10

.

• 

Monitor live pressure and temperature 

during 

flow control, 

page 10

.

• 

Backlit display with adjustable contrast 

is easy 

to read even in direct sunlight. In dimly lit areas, 

press the logo to turn on the backlight, 

page 17

.

• 

Change your STP

 (standard temperature and 

pressure) to match any standard temperature and 

pressure reference, 

page 15

.

• 

Connection to a computer 

for control and data 

logging to capture all pressure data for logging 

and analysis, 

page 18

This manual covers the following instruments:

•  M-Series:

 gas mass flow meters

•  MQ-Series:

 high-pressure gas mass flow meters

•  MS-Series:

 anti-corrosive gas mass flow meters

•  MW-Series (WHISPER™):

 low pressure drop gas 

mass flow meters

•  MB-Series:

 portable gas mass flow meters

•  MBQ-Series:

 portable high-pressure gas mass 

flow meters

•  MBS-Series:

 portable anti-corrosive gas mass 

flow meters

•  MWB-Series (WHISPER™):

 portable low pressure 

drop gas mass flow meters

For support or questions regarding the use or 

operation of this device, please contact us using 

the information on 

page 2

.

Alicat offers countless combinations of device sizes, 

accessories, connections, and configurations. These 

custom solutions are offered to meet a variety of 

application challenges brought forth by users pushing 

the boundaries of our standard offerings.
If you have an idea for a new process or a challenging 

application, contact Alicat for specialized engineering 

and application support.

MQ-10SCCM

M-100SLPM

M-5000SLPM

Summary of Contents for ALICAT SCIENTIFIC M

Page 1: ...OPERATING MANUAL FOR MASS FLOW METERS Models M MQ MS MW MB MBQ MBS MWB...

Page 2: ...bration is necessary to ensure the accuracy of readings and extend the Limited Lifetime Warranty Fill out the Service Request Form at alicat com service or contact us directly when it is time for reca...

Page 3: ...covers the following instruments M Series gas mass flow meters MQ Series high pressure gas mass flow meters MS Series anti corrosive gas mass flow meters MW Series WHISPER low pressure drop gas mass...

Page 4: ...Reference Values 15 Flow and Pressure Averaging 15 Zero Band 15 Configuring Serial Communications 16 Unit ID 16 Modbus RTU Address 16 Baud Rate 16 Display Setup 17 Main Screen Options 17 Screen Lighti...

Page 5: ...ical configuration of a standard mass flow meter Your device s appearance and process connections may differ See page 2 for more examples Backlight The monochrome display comes equipped with a backlig...

Page 6: ...cked MOV Mass flow over range of device OVR Totalizer rolled over to zero POV Pressure over range of device TMF Totalizer missed out of range flow TOV Temperature over range of device VOV Volumetric f...

Page 7: ...w stream Connecting Your Gas Flow Meter Your flow meter can measure flow generated by positive pressure and or suction Connect the meter so that the flow travels in the same direction as the flow arro...

Page 8: ...k or the multi pin connector on top of your device Note Power requirements vary based on configuration Please reference the associated specification sheet at alicat com specs for power requirements St...

Page 9: ...esume when the switch is released You can also tare with the front controls page 11 or serial commands page 19 This should only be done in a true zero flow condition Option Second Analog Output Signal...

Page 10: ...olute pressure reading can also be tared when the device is exposed to the local barometric pressure How to Tare Taring Flow MENU TARES TARE FLOW Flow tares should take place at the expected process p...

Page 11: ...the instrument since its last reset similar to a gasoline pump TOTAL TIMER toggles between totalized flow and elapsed time as the highlighted parameter in the center SLPM or another measurement of mas...

Page 12: ...he device SW Firmware version Display SW color displays only Firmware version of the display Device Full Scale Ranges ABOUT Full Scale Ranges This displays the maximum calibrated range of available fl...

Page 13: ...Mixes SETUP Active Gas COMPOSER Mixes To provide accurate measurements your flow meter needs to reference the viscosity of the gas you are flowing through it The closer you can get to defining your ac...

Page 14: ...gas COMPOSER can change the gas percentage to fill the remaining portion to 100 by selecting the component gas then selecting Set to Balance Once the gases total 100 the mixture can be saved be select...

Page 15: ...for STP and NTP calculations Unless otherwise requested your flow meter ships with a default STP of 25 C and 1 atm which affects flow units beginning with S and an NTP of 0 C and 1 atm which affects f...

Page 16: ...n you select SET If you select as the Unit ID the flow meter will enter streaming mode when you exit the menu page 19 Modbus RTU Address SETUP RS 232 Serial or RS 485 Serial Modbus Address The Modbus...

Page 17: ...ust the brightness level and move the brightness indicator left or right Display Rotation SETUP Display Display Rotation The device has the option of inverting flipping the screen upside down as confi...

Page 18: ...re all set to the same rate Data bits 8 Parity none Stop bits 1 Flow control none Alicat s Serial Terminal Application Alicat s Serial Terminal is a preconfigured program for serial communications tha...

Page 19: ...meter Manual taring can be accomplished through two separate commands for flow and pressure Taring flow sets the zero flow reading and must be done when no flow is passing through the flow meter Tare...

Page 20: ...or hyphen only This is equivalent to the short name when creating a mix via the front panel page 14 Mix Number Choose a number from 236 to 255 If a user mix with that number already exists it will be...

Page 21: ...streaming data desired unit ID Set streaming interval unit ID w91 of ms Query gas list info unit ID g Choose a different gas unit ID g Gas Number New COMPOSER mix unit ID gm Mix Name Mix Gas1 Gas1 Ga...

Page 22: ...out keep using it but tell us about the drop at your next annual recalibration so we can check it out for you Issue How can I see readings in different units Action From the main menu select SETUP Se...

Page 23: ...number matches the one your software is using to connect to the flow meter 5 On the external serial communications device computer PLC etc be sure that the flow control handshaking settings are set as...

Page 24: ...per minute count count count Setpoint count 0 64000 Percent of full scale Pressure Units Absolute or Barometric Gauge Notes PaA PaG Pascal hPaA hPaG Hectopascal kPaA kPaG Kilopascal MPaA MPaG Megapasc...

Page 25: ...30M 30 CH4 70 CO2 151 Bio35M 35 CH4 65 CO2 152 Bio40M 40 CH4 60 CO2 153 Bio45M 45 CH4 55 CO2 154 Bio50M 50 CH4 50 CO2 155 Bio55M 55 CH4 45 CO2 156 Bio60M 60 CH4 40 CO2 157 Bio65M 65 CH4 35 CO2 158 Bio...

Page 26: ...N2 1 0 Ar 10 O2 9 5 CO2 79 5 N2 1 0 Ar 13 O2 7 0 CO2 79 N2 1 0 Ar Laser Gas Mixes 4 5 CO2 13 5 N2 82 He 6 0 CO2 14 N2 80 He 7 0 CO2 14 N2 79 He 9 0 CO2 15 N2 76 He 9 4 CO2 19 25 N2 71 35 He 9 0 Ne 91...

Page 27: ...c Analog Out Optional 1 5 Vdc or 0 10 Vdc output signal 7 Power In 8 Ground common for power digital communications analog signals and alarms Warning Do not connect power to pins 1 through 6 as perman...

Page 28: ...C Ground Ground 2 Analog Out Analog Out Analog Out RX or A Analog Out NC Analog Out 3 Ground Analog In NC NC NC NC NC 4 NC Ground NC NC NC Analog Out NC 5 Power In Ground Power In Ground Ground Power...

Page 29: ...RS 485 A 4 Remote tare ground to tare Remote tare ground to tare 5 Serial RS 232 TX signal Optional RS 485 B Serial RS 232 TX Signal Optional RS 485 B 6 Static 5 12 Vdc Optional Secondary analog outp...

Page 30: ...d Plot No A 147 Road No 24 Next to Spraytech Circle opp Metropolitan Company Wagle Industrial Estate Thane West Mah r shtra 400 604 91 022 41248010 China SE Asia info cn alicat com alicat com cn 2nd F...

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