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Granville-Phillips Series 330 Instruction Manual Download Page 74

T

Theory of Operation

Convectron Gauge

 29, 56

Ionization Gauge

 28

Thermocouple Gauge

 29

Thermocouple Gauge

Calibration

 62

Installation

 60

Operation

 61

Reading Pressure

 61

Specifications

 31, 62

Theory of Operation

 29

Thermocouple Module

Analog Output

 61

Introduction

 59

Units of Measure

 59

Troubleshooting

Ionization Gauge Problems

 72

Power Input Problems

 70

Power Supply Problems

 71

W

Warranty

 14

Series 330 Vacuum Gauge Controller
Instruction Manual - 330004 - Rev. 02

Summary of Contents for Series 330

Page 1: ...Series 330 Instruction Manual Granville Phillips Series 330 Vacuum Gauge Controller Instruction manual part number 330004 Revision 02 August 2008...

Page 2: ......

Page 3: ...com World Wide Web www brooks com 2008 Brooks Automation Inc All rights reserved Granville Phillips and Convectron are registered trademarks of Brooks Automation Inc All other trademarks and register...

Page 4: ...inch rack 330503 Bench top mount 330504 Half rack mount 2 process control relays 330505 Dual side by side controllers with two Convectron Gauge 330026 and two thermocouple gauge analog outputs Dual si...

Page 5: ...Gauge Module 330026 or 330032 16 2 3 4 Thermocouple Gauge TC Module 330026 16 2 3 5 Process Control Module 330505 16 2 3 6 Ion Gauge Cables 16 2 4 Initial VGC Setup and Installation 17 2 4 1 Line Vol...

Page 6: ...D Calibration 38 Chapter 5 Convectron Gauge Module 39 5 1 Introduction to the Convectron Gauge Module 39 5 1 1 Units of Measure for a Convectron Gauge 39 5 2 Convectron Gauge Tube Installation 40 5 2...

Page 7: ...es 63 7 1 Introduction 63 7 2 Process Control System Connections 63 7 3 Process Control Operation 64 7 3 1 Setpoint Display and Adjustment 64 7 3 1 1 To Display a Setpoint 65 7 3 1 2 To Modify a Setpo...

Page 8: ...Table of Contents 8 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02...

Page 9: ...th these precautions or with specific warnings elsewhere in this manual violates safety standards of design manufacture and intended use of the instrument Brooks Automation Inc disclaims all liability...

Page 10: ...tions may result in fire electric shock or other hazards Safety Check Upon completion of any service or repairs to this product ask the Qualified Service Person to perform safety checks to determine t...

Page 11: ...devices are properly installed before installing the product In addition check that a The proper gas cylinders are installed b Gas cylinder valve positions are correct on manual systems and c The aut...

Page 12: ...rgon or CO2 unless accurate conversion data for N2 to the other gas is properly used See Section 5 3 on page 44 If used improperly Convectron gauges can supply misleading pressure indications that can...

Page 13: ...p over the phone If the module must be returned to the factory for service request a Return Authorization RA from Brooks Automation Granville Phillips Do not return products without first obtaining an...

Page 14: ...ance with this instruction manual may cause harmful interference to radio communications However there is no guarantee that interference will not occur in a particular installation Operation of this e...

Page 15: ...tion gauge or from 1 0 x 10 3 Torr 1 0 x 10 3 mbar or 1 0 x 10 1 pascal to 999 Torr using Convectron gauges or from 1 x 10 3 Torr to 1 Torr using thermocouple gauges Pressure ranges are air equivalent...

Page 16: ...rom two Convectron Gauges simultaneously The pressure readout is an analog output signal See Chapter 5 2 3 4 Thermocouple Gauge TC Module 330026 The Thermocouple Module provides the same functions as...

Page 17: ...rect line voltage as shown in Figure 2 1 is readable from the rear of the VGC 5 Verify that fuse F2 is the correct value as shown in Table 2 1 Position fuse extractor tab FUSE PULL to the right hand p...

Page 18: ...2 Installation 18 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 2 2 330 VGC Mounting Configurations...

Page 19: ...ion source or used in a sputtering system spurious electrons or ions may disturb the measurement Screens or other shielding should be placed between the gauge and the system if spurious charged partic...

Page 20: ...r vacuum Accidental bending of the pins may cause the glass to break and implode Cables once installed should be secured to the system to provide strain relief for gauge tube pins Ionization gauges ar...

Page 21: ...tallation 21 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 2 5 Ion Gauge Cable for Granville Phillips Nude Gauges Figure 2 6 Ion Gauge Cable for Granville Phillips Nude Ga...

Page 22: ...at earth ground Connect the power cord to a properly grounded outlet Make sure the vacuum port to which the gauge is mounted is properly grounded Connect the gauge envelope to a facility ground If nec...

Page 23: ...ground a component Later on someone may replace the metal tubing with plastic tubing thus unwittingly causing a potentially dangerous situation 2 Provide a connection to ground for other instruments w...

Page 24: ...angerous voltage between them This test does not prove that either connection is earth ground only that they are the same If more than 2 ohms is indicated check with your electrician 4 If AC or DC vol...

Page 25: ...on of the controls and indicators found on a basic 330 VGC is given in this section For detailed instructions pertaining to particular functions consult the chapter for that function Figure 3 1 Series...

Page 26: ...ge Section 5 1 1 on page 39 for information on changing the units of measure for the Convectron gauge and Section 6 1 1 on page 59 for the Thermocouple gauge The pressure units label can be changed by...

Page 27: ...nt panel illuminates when degas is ON To turn it OFF press the rocker switch again or press the GAUGE momentary rocker switch to turn OFF degas and turn ON the gauge Degas cannot be activated unless t...

Page 28: ...ctron collisions with molecules occur is proportional to the density of gas molecules and hence the ion current is proportional to the gas density or pressure at constant temperature The amount of ion...

Page 29: ...g on the wire decreases that is the pressure decreases the temperature of the wire must increase A wire of metal dissimilar from the sensor wire metal is attached to the sensor The junction of the dis...

Page 30: ...oC Table 3 3 Series 330 VGC Electrical Specifications Parameter Specification Voltage 90 130 VAC or 200 260 VAC Frequency 50 to 60 Hz Power 100 watts max Fuse Ratings 1 25 A 90 130 V 60 A 200 260 V Ta...

Page 31: ...put 0 10 Vdc Logarithmic 1 V decade Table 3 7 Convectron Gauge Specifications Parameter Specification Gauge Type Granville Phillips Series 275 Pressure Range 1 x 10 4 Torr to 990 Torr N2 equivalent Ga...

Page 32: ...0 A for 25 msec min Must go to greater than 3 5 V for 105 msec min before next low state Filament Status Relay Contact Rating 4 A 250 VAC resistive load or 30 Vdc Table 3 10 Process Control Specificat...

Page 33: ...er VGC is shipped from the factory preset to display the unit of measure Torr millibar or pascal that you requested To change the units proceed as follows 1 Turn OFF power to the control unit 2 Remove...

Page 34: ...igure 4 2 is a 3 position switch that is used to display gauge sensitivity pressure or emission current To display the sensitivity set the switch to the left or to the right with the ion gauge OFF To...

Page 35: ...bration Switch must be set with the IG tube turned on to view emission during adjustment The span of adjustment is from approximately 10 to 120 of the range value Theoretically varying the emission cu...

Page 36: ...or gases other than air or N2 calculate the sensitivity Sx for gas type x as follows where SN2 is the gauge sensitivity for N1 and Rx is found from Table 4 1 For example if the normal sensitivity for...

Page 37: ...al 330004 Rev 02 For 10 mA emission PRESSURE 10 volts 12 For 1 mA emission PRESSURE 10 volts 11 For 0 1 mA emission PRESSURE 10 volts 10 Figure 4 3 Electrometer Module Rear Panel Figure 4 4 Analog Out...

Page 38: ...pressure Shutdown Adjustment The Overpressure Shutdown Adjustment potentiometer Figure 4 1 is factory set so the ion gauge will shut down when the pressure rises above the levels listed in Table 4 2 T...

Page 39: ...jacks See Figure 5 2 5 1 1 Units of Measure for a Convectron Gauge The Series 330 Controller is shipped from the factory preset to display the units of measure Torr mbar or pascal that you requested T...

Page 40: ...ample at 760 Torr of argon gas pressure the indicated pressure on a Convectron gauge calibrated for N2 is 24 Torr At an indicated pressure of 50 Torr the true pressure of argon is considerably above a...

Page 41: ...hylene toluene and acetone produce fumes that are toxic and or flammable Use only in areas well ventilated to the outdoors and away from electronic equipment open flames or other potential ignition so...

Page 42: ...The gauge will operate and accurately measure pressure below 1 Torr when mounted in any orientation Above 1 Torr The gauge will accurately measure pressures above 1 Torr only when mounted with its ax...

Page 43: ...female fitting Wrap the threads of the gauge tube port with Teflon tape and screw these threads into the system fitting hand tight Do not use any wrench or tool The gauge tube body functions adequate...

Page 44: ...at this time or sooner if readings in the 10 4 range are not needed The 10 4 Torr range is accurate to about 0 1 milliTorr provided the instrument has been carefully zeroed at vacuum See Section 5 3 6...

Page 45: ...ill help to locate the proper graph for a specific application NOTE 1 mbar 100 pascal so the mbar charts may be used for pascal units by multiplying the values on the axes by 100 A useful interpretati...

Page 46: ...horizontally to the left to a true pressure of 250 Torr Thus 250 Torr argon pressure produces an indication of 10 Torr N2 equivalent Example 3 True to Indicated Pressure Conversion Assume you want to...

Page 47: ...5 Convectron Gauge Module 47 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 5 5 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 100 mTorr...

Page 48: ...5 Convectron Gauge Module 48 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 5 6 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 Torr...

Page 49: ...5 Convectron Gauge Module 49 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 5 7 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 Torr...

Page 50: ...5 Convectron Gauge Module 50 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 5 8 Convectron Gauge Indicated vs True Pressure Curve 10 4 to 0 1 mbar...

Page 51: ...5 Convectron Gauge Module 51 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 5 9 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 mTorr...

Page 52: ...5 Convectron Gauge Module 52 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 5 10 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 mbar...

Page 53: ...iature phono jack or BNC connector See Figure 5 11 If graphed on loglinear axes the output voltage is linear with respect to the log of pressure The analog output is 1 V per decade of pressure with a...

Page 54: ...adjust the ATM until the analog output indicates the local atmospheric pressure in the pressure units you have selected 6 NOTE 1 atmosphere at sea level is 7 6 x 10 2 Torr 1 0 x 10 3 mbar 1 0 x 10 5...

Page 55: ...ble but it must be done very carefully to prevent damaging to the sensor 1 Hold the gauge tube with the main body horizontal and the port projecting upward at an angle of 45 Slowly fill it with solven...

Page 56: ...ance and a voltage is developed across the null terminals The bridge control circuit senses the null voltage and decreases the voltage across the bridge until the null voltage is again zero When the b...

Page 57: ...uide Symptom Possible Cause CGA Overcurrent LED is illuminated Cable short pins 1 3 on CGA CGB Overcurrent LED is illuminated Cable short pins 1 3 on CGB CGA or CGB Bridge Circuit LED is illuminated B...

Page 58: ...ectron Gauge Specifications Parameter Specification Gauge Type Granville Phillips Series 275 Pressure Range 1 x 10 4 Torr to 999 Torr N2 equivalent Gas Type N2 Air Analog Output Logarithmic 1Vdc decad...

Page 59: ...niature phone jacks 6 1 1 Units of Measure The Series 330 Controller is shipped from the factory preset to display the units of measure Torr mbar or pascal that you requested To change the units of me...

Page 60: ...le Gauge Specifications on page 62 for other compatible transducers The thermocouple gauge tubes may be installed anywhere in the system using a 1 8 NPT or 410 in compression connection or may be weld...

Page 61: ...utput connectors on the rear of the 330 VGC Thermocouple gauges have negligible resolution at pressures above 1 Torr 6 2 2 Analog Output Standard 1 8 miniature phono jack connectors for the analog out...

Page 62: ...ctory and should not normally be attempted by the user However if necessary proceed as follows 1 Allow the system pressure to rise to atmospheric pressure 2 Remove the top of the control unit 3 Adjust...

Page 63: ...lled either by digital setpoints or by the built in manual override switches The Process Control Module for the 330 VGC has 2 channels for the Ionization gauge only 7 2 Process Control System Connecti...

Page 64: ...n non volatile memory and are specified by a 2 digit mantissa and a 1 digit exponent They can be set anywhere in the range 1 x 10 12 to 9 x 10 5 This allows for the entire pressure range of all suppor...

Page 65: ...oss many decades Release the SET button when you have entered the desired decade and then press it to scroll slowly within the decade to reach the exact setpoint needed After the setpoint button is re...

Page 66: ...e display bus and is unable to update pressure data while setpoints are being displayed It will not mistakenly interpret setpoint data as pressure data but will simply retain the last displayed pressu...

Page 67: ...er compares the setpoints with the pressure display data on the display bus and makes a decision as to whether or not to activate a channel s relay The manual override switches when set to the ON or O...

Page 68: ...ion Manual 330004 Rev 02 7 6 Process Control Specifications Parameter Specification Relay Configuration SPDT Form C Contact Rating 5A 120 VAC 4A 240 VAC resistive or 5A 30 Vdc Channels 2 maximum Hyste...

Page 69: ...roper anti static protection methods and must be packaged in anti static packaging Brooks Automation Granville Phillips will supply return packaging materials at no charge upon request Shipping damage...

Page 70: ...information in this manual is for the use of Qualified Service Personnel To avoid shock do not perform any procedures in this manual or perform any servicing on this product unless you are qualified t...

Page 71: ...Controller input power fuse blown 4 Defective power transformer T1 power switch or line filter 1 Plug in power cord 2 Restore power to receptacle 3 Replace fuse with correct type and value as indicat...

Page 72: ...in the ion gauge cable 1 Connect the gauge cable 2 Replace the ion gauge or switch to the second filament if available 3 Repair or replace the gauge cable 2 The ion gauge filament does not illuminate...

Page 73: ...Emission Adjustment 35 Installation 33 Introduction 33 Operation 34 Relative Gas Sensitivities 36 Sensitivity Adjustment 35 Specifications 30 Units of Measure 26 Explosion Implosion 11 F FCC verifica...

Page 74: ...on 60 Operation 61 Reading Pressure 61 Specifications 31 62 Theory of Operation 29 Thermocouple Module Analog Output 61 Introduction 59 Units of Measure 59 Troubleshooting Ionization Gauge Problems 72...

Page 75: ......

Page 76: ...CO 80503 USA Phone 1 303 652 4400 15 Elizabeth Drive Chelmsford MA 01824 USA Phone 1 978 262 2400 Worldwide Customer Service Support 24 7 Phone 1 800 367 4887 To obtain a copy of this instruction man...

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