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5 TRANSPORT, PACKAGING AND STORAGE ............................................................16
5.1 Safety information for transportation .........................................................................................................................16
5.2 Transport inspection ......................................................................................................................................................16
5.3 Packaging .........................................................................................................................................................................16
5.4 Storage ..............................................................................................................................................................................16
6 INSTALLATION AND INITIAL START-UP ................................................................... 17
6.1 Safety notes for installation and initial start-up ........................................................................................................17
6.2 Preparation .......................................................................................................................................................................17
6.3 Installation .........................................................................................................................................................................17
6.4 Required qualifications for initial start-up and cylinder changing ......................................................................17
6.5 Initial Start Up...................................................................................................................................................................18
6.5.1 Inert gas purging (MTLX and MTLT with inert gas purging) ..............................................................................19
6.5.2 Fill the process gas tubing with process gas ......................................................................................................19
6.5.3 Change empty gas cylinder......................................................................................................................................19
6.5.4 Taking gas supply panel out of operation .......................................................................................................... 20
6.6 Tests ................................................................................................................................................................................. 20
7 OPERATION ................................................................................................................... 20
8 MAINTENANCE ............................................................................................................ 20
8.1 Safety notes for maintenance ..................................................................................................................................... 20
8.2 Maintenance plan ......................................................................................................................................................... 20
8.3 Maintenance work ..........................................................................................................................................................21
8.3.1 Cleaning ..........................................................................................................................................................................21
8.3.2 Requirements for maintenance ...............................................................................................................................21
8.3.3 Necessary maintenance ............................................................................................................................................21
8.4 Measures following maintenance...............................................................................................................................21
9 TROUBLESHOOTING ................................................................................................... 21
9.1 Safety notes for troubleshooting .................................................................................................................................21
10 DISMANTLING AND DISPOSAL ............................................................................... 23
10.1 Safety notes for dismantling and disposal ..............................................................................................................23
10.2 Dismantling ....................................................................................................................................................................23
10.3 Disposal ..........................................................................................................................................................................23
