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Internal piping diagram
Correspondence of measured components and optical units
Optical unit 1 (IR Unit 1)
Sampling cell
Sampling gas inlet 1
Note) 2 cells may be used by
combination of range.
INLET1
OUTLET1
Sampling gas outlet 1
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OUTLET
INLET
PURGE
< ZPA1 >
Purge gas inlet
Sampling gas outlet
Sampling gas inlet
< Bottom panel >
