5.3 Ishikawa Diagrams
Section 5: Troubleshooting
CV-6SLX User Manual
5-12
0101-8242-0, Rev. C
Ishikawa Diagram #11: Output Arcing Fault
Ishikawa Diagram #12: Overtemperature Fault
Emitter/Chamber
FPS
Damaged emitter
Power Supply
Defective HV Relay
HV Output cable
Consequence
Possible Causes
Output Arcing LED lights
red (see Table 6-16)
Faulty/loose connections in
HV path or output path
HV feedthrough
shorted/damaged
Faulty/loose connections in FPS
connections or chamber feedthrough
Temp Sensors
Connection J6 on inverter
not made or brokern
Power Supply
Ambient temperature too high
U1 damaged
Power supply blower‘s
intake restricted
+24 VDC missing;
PS1 or T2 defective
Connections between inverter
and T2/PS1 missing or defective
Defective B1 blower fan
B1 blower fan obstructed
B1 Blower Fan
B1 blower fan power connection
missing or damaged
Consequence
Possible Causes
Overtemperature LED
lights red
(see Table 6-18)
5-18)
5-16)
