4
ESPEC CORP.
No. 4009304005810
5 Drainage
There is a water drain pipe at the dew tray for chamber or the main part of chamber dew tray for stand.
Prepare a drain hose to connect to the pipe as necessary.
The suitable hose size is I.D.
φ
12 mm
Notice
・
If collecting drainage in a container, regularly check water level to make sure it does
not overflow. If using the continuous water supply or additional water tank (option), do not
drain water into a container.
・
To prevent backflow into the chamber, do not share the drainage line with other
equipment. Also, leave the water tank drain hose and drain pipe ends open to the
atmosphere.
・
Raising the drain pipe about 5 cm or more off the floor or the chamber’s supporting
surface will form a pocket in the line, whereby preventing proper drainage and possibly
causing water to backflow into the dew tray or the mechanical parts compartment. Also, if
any part of the drain pipe is higher than the drain outlet, water will not drain smoothly,
possibly flooding the test area floor.
