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ESPEC CORP.

 

No. 4009304005810 

4. Assembly procedure 
 
  4-1. Dew tray for chamber 

< Procedure > 

1) Place the chamber dew tray 

  where the chamber is to be placed. Place the chamber on the dew 

tray. 

 

2) Insert the chamber fastening bracket 

  to the chamber’s adjuster foot, and fix the brackets and adjuster 

foot with two screws 

  for each position. (4 places) 

 

 

 
 
 

4-2. Dew tray for stand 

< Procedure > 

1) Place the dew tray for stand 

  where the chamber to be placed. Place the chamber on the dew tray. 

 
2) Apply the silicon sealant included as accessory to the shaded area 

  of the dew tray for the stand.     

   (10mm wide, 3mm thick) 

* Degrease the area to apply the silicon sealant using alcohol or paint thinner. 

 
3) Secure the front    frame of the dew tray 

  to the dew tray with the four screws 

 

4) Connect the front    frame 

  and the dew tray 

① 

with aluminum tape 

  as detailed in Fig. 1. 

(Aluminum tape cannot be used for silicon sealant covered area. If silicon sealant remains, clean by 
alcohol or thinner before covering with aluminum tape.) 

 

5) Apply the silicon sealant to the corner formed by the front frame 

  and the dew tray 

  as shown in 

Fig. 2. 

 

6) Secure the stand bracket 

  to the stand by two fixing bolts (M8) included as accessories for the stand 

. (2 places). 

 
          *There are two types of brackets for the stand as accessories. Use proper type for each stand. 
 
          *Anchor bolts (M12) for fixing to the floor is provided by customer side. 
 

 
 

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Summary of Contents for SU-222,242

Page 1: ... Dew tray for chamber Dew tray for stand Material 18 8 Cr Ni stainless steel Model For chamber For stand C H L stand SU SH 222 242 W560 x D850 x H40 W690 x D970 x H40 SU SH 262 242 5 W560 x D940 x H40 SU SH 642 662 W660 x D1085 x H40 W790 x D1105 x H40 Dew tray is installed at site Installation charge is not included Contact the purchased distributer or ESPEC CORP 3 Accessories Name For chamber Fo...

Page 2: ...3mm thick Degrease the area to apply the silicon sealant using alcohol or paint thinner 3 Secure the front frame of the dew tray to the dew tray with the four screws 4 Connect the front frame and the dew tray with aluminum tape as detailed in Fig 1 Aluminum tape cannot be used for silicon sealant covered area If silicon sealant remains clean by alcohol or thinner before covering with aluminum tape...

Page 3: ...side of each stand ex L stand Fig 1 Cross section of the joint part viewed in the direction of arrow X Fixing anchor bolts Provided by customer Shaded area Fig 2 Dew tray corner viewed in the direction of arrow Y Part putting together screw insertion and and ...

Page 4: ... tank option do not drain water into a container To prevent backflow into the chamber do not share the drainage line with other equipment Also leave the water tank drain hose and drain pipe ends open to the atmosphere Raising the drain pipe about 5 cm or more off the floor or the chamber s supporting surface will form a pocket in the line whereby preventing proper drainage and possibly causing wat...

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