SEMICHEM APM 200 WITH HF AND H
2
0
2
IN DSP+
3
Application Guide | Entegris, Inc.
INTRODUCTION
—
Our SemiChem APM 200 (advanced process monitor)
application guide provides step-by-step instructions
for properly configuring the SemiChem APM 200 for
the DSP+ application for measuring low level HF and
hydrogen peroxide only. This guide is designed for
trained and qualified personnel. It is complimentary
to the SemiChem APM 200 Installation and Operating
Manual, not a replacement.
A.1 PRECAUTIONS
—
Be sure any personnel working on the SemiChem
APM 200 has read and understands the Installation
and Operating Manual. There are inherent hazards
to working with the SemiChem APM 200.
WARNING: Service of the SemiChem APM 200
may cause exposure to hazardous conditions
including chemical, electrical, and mechanical
dangers. Personnel should be properly trained
in all areas before attempting to service or
troubleshoot the analyzer.
WARNING: Electrical Precaution: High
voltage electronics (110/220 VAC) are located
throughout the electronics module. Printed
circuit boards are powered with 24 VDC. All
service should be performed by a qualified
electrician/electrical technician.
WARNING: Chemical Precaution: Corrosive
or poisonous liquids. Some reagents may
be corrosive to the eyes, skin, and respiratory
tract and may be hazardous if ingested. Wear
chemical resistant gloves, face shield, and
apron when changing the burette O-ring. See
MSDS for further health hazard information.
To minimize chemical exposure, purge the
burette with air by removing the reagent intake
line from the reagent bottle, then flush the
appropriate burette. This will remove most
of the reagent from the burette assembly.
If replacing the burette glass, consult with
on-site environmental personnel for proper
disposal of remaining reagents. If replacing
a burette O-ring, keep the burette glass
assembly within the enclosure for proper
exhaust of fumes.
It is the user's responsibility to fully understand the
use, application, and hazards associated with the
SemiChem APM 200. Refer to the SemiChem APM 200
Installation and Operating Manual for more information.
A.2 REASSEMBLY
—
A.2.1 START-UP KIT
To complete the start-up of the SemiChem APM 200,
you will need:
1. 1 ea. 9/64” ball driver (003642).
2. 4 ea. tube weights and barbs (001824 and 003529).
3. Silicone paste kit (002691).
Start-up kit items.