12
SEMICHEM APM 200 WITH HF AND H
2
0
2
IN DSP+
Application Guide | Entegris, Inc.
A.3.6 FLUORIDE ISE SENSOR CALIBRATION
The pH sensor requires periodic calibration to set the
slope of the sensor’s response. The calibration is
performed using a two-point calibration.
1. Idle the system.
2. From the MAIN screen, press "Calib." Press the
"ISE Calibration" tab.
3. Set the Channel to “2”, which is the Fluoride ISE
input. Press "Auto Cal."
The system will begin performing the calibration
routine as described in the recipe “ISE 2 Auto Cal”.
Briefly, the system will create the low range fluoride
concentration in the cell, measure the created sample
with the ISE, then create the high range fluoride
concentration in the cell and measure again. The
system will then determine the difference in the
sensor response to calculate the sensor’s slope. This
slope will be updated in the “ISE Slope History”. The
slope should be 61 ±3 mVs.
If the sensor does not report back an acceptable
slope, verify electrode electrical connections,
reagent assignments, and the recipe to ensure
proper calibration range.
Entegris / Service / Calibrate
Done
Set Low pH
Auto Cal
(ISE) Slope History 1:
Parameters
Channel: Readings:
Titration Calibration
ISE Calibration
Ch:
mV:
Parameter
Value
gpHStdLow
gpHStdHigh
gpHSlope
gpHOffset
1
-42.09
1
Calibration/ISE Calibration.
– cal = no: These parameters are used for
the sample. If this recipe was to define the
sensor calibration this would be “yes."
– cal_ch = 1: These parameters are used for
the sample. If this recipe was to define the
sensor calibration this would be 2 because
the ISE is connected to sensor input 2.
The recipe shown above is for the above stated
assumption. However, these parameters can be
adjusted to optimize the system. Additionally, if the
process concentrations vary from the above stated
assumption, then there may need to be further
adjustments in the recipe, reagent concentrations,
and/or sample loop size.
A.3.5 ORP SENSOR CALIBRATION
The ORP does not require calibration.