ADVANCED MATERIALS HANDLING
|
APPLICATION GUIDE
SemiChem APM 200 with HF and
H
2
O
in DSP+
Application guide
Page 1: ...ADVANCED MATERIALS HANDLING APPLICATION GUIDE SemiChem APM 200 with HF and H2O2 in DSP Application guide ...
Page 2: ... 4 A 2 3 Reagents and Tubing 5 A 2 4 ORP and Fluoride Sensors 5 A 3 Preparing to Run 6 A 3 1 Facilities 6 A 3 2 Flush Burettes 6 A 3 3 Settings 6 A 3 4 Recipes and Adjustments 7 A 3 4 1 Recipes 7 A 3 4 2 Adjustments 8 A 3 5 ORP Sensor Calibration 12 A 3 6 Fluoride ISE Sensor Calibration 12 A 3 6 1 Auto Cal Adjustments 13 A 4 Running 13 A 4 1 First Run 13 A 4 2 Process Calibration 14 ...
Page 3: ...th 24 VDC All service should be performed by a qualified electrician electrical technician WARNING Chemical Precaution Corrosive or poisonous liquids Some reagents may be corrosive to the eyes skin and respiratory tract and may be hazardous if ingested Wear chemical resistant gloves face shield and apron when changing the burette O ring See MSDS for further health hazard information To minimize ch...
Page 4: ...ion 001836 and the sensor Electrode F ISE Half Cell 001770 A 2 2 GLASS BURETTES Burette installation 1 Using the silicone paste kit apply a small amount of silicone to each burette piston s O ring NOTE Silicone paste is not needed on jacketed O rings 2 Install the glass burette into the piston and guideposts using a slight twist motion 3 Secure the burette glass assembly with the 8 32 1 2 SHCS and...
Page 5: ...arameters it is important that the reagents are correctly assigned to the proper burettes A 2 4 ORP AND FLUORIDE SENSORS 1 Remove any caps and covers on the ORP sensor NOTE There may be residual white crystals These crystals are saturated potassium chloride solution They are normal and can simply be wiped away 2 Remove all caps and covers on the fluoride ion selective electrode ISE 3 Remove the el...
Page 6: ...memotors Import HF and H2O2 Sample 1 and 2 HF and H2O2 Sample 1 HF and H2O2 Sample 2 H2O2 in CMP Slurry Sample 1 H2O2 in CMP Slurry Sample 2 A 3 2 FLUSH BURETTES Flushing the burettes with the appropriate reagents 1 From Recipes choose Refill_Burette_1 Press Run Now The burette will proceed to cycle up and down three times During which it will displace the air in the burette with the reagent Once ...
Page 7: ...when either a PLC remote mode or a PC computer send the input as per the SemiChem APM 200 Installation and Operating Manual section 4 2 the SemiChem APM 200 will run the recipe tied to the input For example Remote Recipe 0 may be the HF and Hydrogen Peroxide in Sample 1 recipe and Remote Recipe 1 may be the HF and Hydrogen Peroxide in Sample 2 recipe and Remote Recipe 1 may be the HF and Hydrogen ...
Page 8: ...ll CONDITION number 2 volume 0 25 valve EV02 These recipes can be edited and adjusted Additionally recipes can be imported via the USB Text notations of the recipe assumptions are within each of the recipes These assumptions are based on the SemiChem APM 200 configuration the sample loop volume the burette assignments the electrode input assignments the reagent concentrations and the process conce...
Page 9: ... channel_id 2_sensor_ch 1 endpoint 850 window 1 00 end 10 5 sensor pH algorithm seek_set direction up_1 min_inc 03 max_inc 4 goal 4 1 formula normal units mL offset 0 00 equib 3 call CONTROLIO io MIXERA value 0 time 0 call CONDITION number 2 volume 4 valve EV02 call CONTROLIO io MIXERA value 1 time 10 call ISE cell 1 number 1 channel_id 1 sensor_ch 2 ph_sensor_ch 1 addn_mode default meas_mode fixe...
Page 10: ...channel_id 2 Defines which displayed and analog output is used for this measurement sensor_ch 1 Defines the ORP electrode is connected to sensor input 1 endpoint 850 Defines the titration endpoint value Can be optimized for the chemistry s endpoint window 100 Defines the tolerance in which the SemiChem APM 200 will seek for the actual endpoint In this case the SemiChem APM 200 will search from 750...
Page 11: ...n method meas_mode fixed Defines duration of the sensor s measuring time Fixed time is defined in meas_time Auto time is defined as self determined sensor s stability meas_time 30 Can be adjusted shorter or longer based on the ISE s measuring stability cell_vol 200 Defines the total volume in the cell during the measurement This value is used to determine the proper volume of standard to be added ...
Page 12: ...uld be 61 3 mVs If the sensor does not report back an acceptable slope verify electrode electrical connections reagent assignments and the recipe to ensure proper calibration range Entegris Service Calibrate Done Set Low pH Auto Cal ISE Slope History 1 Parameters Channel Readings Titration Calibration ISE Calibration Ch mV Parameter Value gpHStdLow gpHStdHigh gpHSlope gpHOffset 1 42 09 1 Calibrati...
Page 13: ... empty and flush the burettes will reset and the displayed results will update It will close the READY contact A 3 6 1 Auto Cal Adjustments The Auto Cal 2 recipe is similar to the HF and H2O2 recipe with these notes 1 The Auto Cal 2 does not take a sample It creates the low and high concentrations of the calibration range using the Fluoride Standard 2 The ISE measurement parameters between the Aut...
Page 14: ...owing procedure calibrates the SemiChem APM 200 to the process The system can be calibrated with either the factor or process calibration method Factor Calibration 1 The analyzer s calculation factor can be derived from first principals using the following equation Calculation Factor Ctit RR U MW Vsamp Ctit Titrant concentration normality RR Reaction ratio moles of sample that will react with each...
