129 Concord Road
Billerica, MA 01821
USA
Tel
+1
952 556 4181
Fax
+1
952 556 8022
Toll Free
800 394 4083
Corporate Headquarters
Customer Service
www.entegris.com
User Manual
LIMITED WARRANTY
Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information,
visit
link in the footer. Entegris does not warrant any
failure in the case of customers using unapproved foreign components.
FOR MORE INFORMATION
Please call your Regional Customer Service Center today to learn what Entegris can do for you.
Visit
link to find the customer service center nearest you.
TERMS AND CONDITIONS OF SALE
All purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information,
visit
link in the footer.
Entegris
®
, the Entegris Rings Design
®
, and other product names are trademarks of Entegris, Inc. as listed
. All third-party product names, logos, and company names are trademarks or
registered trademarks of their respective owners. Use of them does not imply any affiliation, sponsorship,
or endorsement by the trademark owner.
©2013-2020 Entegris, Inc.
|
All rights reserved.
|
Printed in the USA
|
5550-7429ENT-0220
Environmental Conditions
The SB300 FOSB is packaged to meet industry
accepted cleanroom protocols. This packaging
can be used for storage until ready for use. Storage
temperature should not exceed 70°C (158°F).
Utilize your cleanroom protocol as a guide for
removing Entegris packaging material.
Product Reuse
The SB300 FOSB may be reused if it is properly
handled and maintained. To maximize the number of
uses, the following guidelines should be followed:
• Door and shell should be thoroughly cleaned
after each use
• The door gasket and wafer cushion should be
replaced after each use
• Thoroughly inspect the FOSB for damage or
excess wear prior to reuse
