NOWPAK LINER-BASED CANISTER SYSTEM
3
User Manual | Entegris, Inc.
SECTION 1: OVERVIEW
—
This user guide is intended for use by personnel who
will install, use, maintain and repair the NOWPak
®
liner-based canister system. General and descriptive
information about the system is provided. Step-by-step
instructions for all user procedures and troubleshooting
information are included in this guide.
Chemical Suppliers
will use the instructions in this
guide to refurbish the canisters, and for filling new
and refurbished canisters with chemicals for use by
and end users of the system.
End Users
of the system will use the instructions in this
guide to install dispense connectors and canisters to
their production tools, operate the system, change out
empty canisters, and maintain the canister components.
The contents of this guide have been organized into
the following sections to assist you in locating the
information you need. Contents of the manual are
subject to change without notice.
SAFETY INFORMATION
This section provides important safety information that
must be understood and followed by anyone working
with the NOWPak liner-based canister system.
SYSTEM INFORMATION
This section provides general information about
the system.
CANISTER SYSTEM COMPONENTS
This section contains descriptions of, and usage
information for, system components.
HANDLING THE CANISTER
This section contains information about handling
and moving canisters that are filled with chemicals.
Instructions are provided for properly storing filled
canisters and staging canisters before dispensing
chemicals from them.
REFURBISHING AND REFILLING THE CANISTER
This section is for use by chemical suppliers who
fill new canisters with chemicals and who receive
empty canisters from end users for refurbishment
and refilling. Step-by-step procedures are provided
for the disassembly, cleaning, recycling, and refilling
operations performed by chemical suppliers.
ADDITIONAL GUIDES
Additional Entegris guides are available upon request
and provide descriptions and operating instructions
for the dispense connectors used in the liner-based
canister system.
SECTION 2: SAFETY
—
These safety instructions must be followed whenever
installing, removing, filling, operating, or working on
or around the NOWPak liner-based canister system.
GENERAL SAFETY PRECAUTIONS
• Follow all appropriate chemical safety regulations.
• Wear chemical splash goggles and other appropriate
Personal Protection Equipment (PPE) when handling
components containing chemicals.
• Only dispense hazardous chemicals in a highly
ventilated area to avoid exposure to hazardous
chemical vapors.
• Observe all instructions and warnings on the
NOWPak liner-based canister.
• Always dispense liquids away from the operator,
or any other person.
• Regularly inspect the dispense connector for
evidence of chemical leaks.
• If a leak is observed, stop operation, and repair
the leak.
• Use only Entegris original parts for repair
or maintenance.
• Use only Entegris recommended tools for setup,
operation, and maintenance of the liner-based
canister system.
