Overview
The Aeronex
®
H Series removes gaseous contami-
nants such as H
2
O, CO, CO
2
, O
2
and nonmethane
hydrocarbons to sub-ppb levels in hydrogen gas. The
systems utilize ambient temperature purification
technology, have a low pressure drop and offer a
low cost of ownership.
With the Aeronex
®
H Series systems, all purifiers
used in a process are integrated into a single,
microprocessor-controlled cabinet with a touch
screen interface. Systems use two purifier beds in
order to maintain a continuous flow of pure gas.
One purifier bed is on line while the other is in
regeneration or is ready for use. Contaminants
are removed to sub-ppb (part-per-billion) and
ppt (part-per-trillion) levels.
All functions such as conditioning and purging
are completely automated, requiring minimal user
interface and providing maximum reliability and
cost of ownership. The system offers improved
safety by placing all purifiers in a single location
and, because the purifiers are regenerable, there
are no environmental concerns.
Panel-mounted subsystems are offered specifically
to Original Equipment Manufacturers (OEMs) and
are designed for integration into a process tool.
Applications
• Photolithography
• Metallorganic Chemical Vapor Deposition
(MOVCD)
• Atomic Layer Deposition (ALD)
• Low Temperature Epitaxy (LTE)
• Other applications that require ultrapure
hydrogen gas
Features and Benefits
• Power failure will not damage the
purification system
• Complete automatic operation saves time,
increases reliability
• Purifies to sub-ppb (part-per-billion) and ppt
(part-per-trillion) levels
• Low pressure drop means no changes to inlet
pressure are required
• Self-regenerating purifiers provide the lowest
cost of ownership
• Ambient temperature purification means lower
energy costs and resource conservation
• CE and SEMI
®
S2 certified
• Start-up service is provided, making it easy to
integrate the unit
• The system is designed for easy field mainte-
nance and upgrades
• Available worldwide through Entegris’ global
infrastructure
Models Available
Model
Description
PGPS4H
Panel-mounted model for OEM use and for
applications requiring a flow rate up to 120 SLM
EGPS4H
Enclosed model for use with applications
requiring a flow rate up to 120 SLM
EGPS8H
Enclosed model for use with applications
requiring a flow rate up to 300 SLM
EGPS12H Enclosed model for use with applications
requiring a flow rate up to 1000 SLM
AERONEX® H SERIES GAS PURIFICATION SYSTEM
continuous ultrapure H
2
gas at
a low cost of ownership
