-19-
Optical Parts Disassembly
c
Integrator lens-in disassembly
Integrator Lens-In Ass'y
Fig.3
Integrator lens-in
Shield
PBS marker
Integrator lens-out
* Rugged surface
facing to PBS
Integrator lens-in
* Rugged surface
facing to PBS
Prism Beam
Splitter (PBS)
v
condenser Lens Ass'y disassembly (For Kr8-XBM2100)
Fig.4
(M2.5x6)x2
Optical unit top
Condenser Lens(G)
Condenser Lens(B)
Condenser Lens Ass'y