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Appendix A2

M561-00-880 Issue C

The following text will be displayed if the condition is SELFTEST_WARNING, SELF_TEST_FAULT_, or
EEPROM_FAULT____.

Table A20 - Inverter diagnostic display text

Inverter

diagnostic
Register 1

Inverter

diagnostic
Register 2

Text display

0x8000

0x0000

INTERNAL_COMMS__

0x4000

0x0000

P_CHARGE_WARNING

0x2000

0x0000

WATCHDOG_TIMEOUT

0x1000

0x0000

OSTEST_FAULT____

0x0800

0x0000

EEPROM_LOW_VCC__

0x0400

0x0000

EEPROM_WRITEFAIL

0x0200

0x0000

EEPROM_TIMEOUT__

0x0100

0x0000

EEPROM_BYTECOUNT

0x0080

0x0000

FLASH_BOOT_CRC__

0x0040

0x0000

FLASH_WRITE_FAIL

0x0020

0x0000

FLASH_BLOCK_CRC_

0x0010

0x0000

EXTERNAL_RESET__

0x0008

0x0000

SINK_TEMP_FAULT_

0x0004

0x0000

CAL_DATA_INVALID

0x0002

0x0000

EEPROM_BLOCK_CRC

0x0001

0x0000

EEPROM_MAP_ID___

0x0000

0x0200

IGBT_OPEN_CCT___

0x0000

0x0100

MOTOR_OPEN_CCT__

0x0000

0x0010

MOTOR_SHORT_CCT_

0x0000

0x0008

VOLTAGE_SENSOR__

0x0000

0x0004

CURRENT_SENSOR__

0x0000

0x0002

IGBT_OPEN_CCT___

0x0000

0x0001

IGBT_SHORT_CCT__

0x8000

0x0000

INTERNAL_COMMS__

0x4000

0x0000

P_CHARGE_WARNING

0x2000

0x0000

WATCHDOG_TIMEOUT

0x1000

0x0000

OSTEST_FAULT____

0x0800

0x0000

EEPROM_LOW_VCC__

Summary of Contents for iXH100

Page 1: ...M561 00 880 Issue C Original Instruction Manual iXH iXL and pXH Dry Pumping Systems...

Page 2: ...flow 5 Single Mode A Multi Mode 204 slm flow 44 slm flow B Multi Mode 96 slm flow C Multi Mode 133 slm flow D Multi Mode 204 slm flow Exhaust 0 r 1 Standard without check valve 2 r 3 Standard with che...

Page 3: ...gh Voltage A None B r C r D r E 1800 F 3000 TMS System 0 Standard 1 r Exhaust 0 r 1 Standard without check valve 2 r 3 r Seals 0 r 1 r 2 Standard 3 EES Pump Motor 0 None 1 4 5 kW 2 7 5 kW 3 11 kW Boos...

Page 4: ...asurement control and laboratory use EMC requirements Industrial Location Immunity Class A Emissions EN50581 2012 Technical Documentation for the Assessment of Electrical and Electronic Products with...

Page 5: ...rt 1 General Requirements EN 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements Industrial Location Immunity Class A Emissions EN50581 2012 Technical Documen...

Page 6: ...rt 1 General Requirements EN 61326 1 2006 Electrical equipment for measurement control and laboratory Use EMC requirements Industrial Location Immunity Class A Emissions EN50581 2012 Technical Documen...

Page 7: ...Electrical Equipment for Measurement Control and Laboratory Use Part 1 General Requirements EN 61326 1 2006 Electrical equipment for measurement control and laboratory use EMC requirements Industrial...

Page 8: ...ion manual Materials Content Declaration for all iXH iXL pXH models Product Product Label Meaning All iXH iXL500 and pXH models Indicates toxic or hazardous substance contained in at least one of the...

Page 9: ...nnect the nitrogen supply 28 3 5 1 Flammable pyrophoric materials 28 3 5 2 Gas purges 29 3 6 Leak test the system 29 3 7 Electrical supply 29 3 7 1 Mains supply cable connection 31 3 8 Connect an addi...

Page 10: ...ries 53 7 1 Introduction 53 7 2 Service 53 7 3 Ordering accessories 54 Appendix A1 Pump display terminal 57 A1 1 LEDs 57 A1 2 Pump start stop and control 57 A1 3 Warning Alarm display and acknowledgem...

Page 11: ...ata 7 4 Loading data refer to Figure 5 8 5 Nitrogen purge data for iXH and iXL systems 9 6 Gas module types and flows 10 7 Electrical data iXH100 to iXH1820 H T 11 8 General electrical data 14 9 Elect...

Page 12: ...A16 Alarms 68 A17 Hexadecimal to digital conversion 70 A18 Inverter alarm codes 71 A19 Inverter warnings codes 72 A20 Inverter diagnostic display text 73 Associated publications Publication title Pub...

Page 13: ...TION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below CAUTION Cautions are given where failure to observe the instruction could result in damage to the e...

Page 14: ...eet cyclic loadlock duty applications used in the flat panel and solar industries The pXH booster systems are not intended for use as stand alone units Each system must be backed using a suitable Edwa...

Page 15: ...The front panel controls Figure 3 Front view of pumping system Note iXH 100 iXH 200H and iXH 610 variants have only two eyebolts provided for lifting Item Control connector identification 1 EMS butto...

Page 16: ...Power LED green 5 System interface 6 Warning LED yellow 7 Running and Alarm LEDs 2 colours either green or red 8 Accessory interface 9 MicroTIM in control LED green 10 EMS interface 11 Micro TIM conne...

Page 17: ...0 ISO63 NW40 105 iXH610 784 x 390 x 780 355 70 1 5 20 4 ISO100 NW40 105 iXH1210 H 784 x 390 x 780 413 430 70 1 5 20 4 ISO100 NW40 105 iXH1220H T 901 x 390 x 780 455 460 70 1 5 20 4 ISO100 NW40 105 iXH...

Page 18: ...1 C decreasing linearly to 50 relative humidity at 40 C Maximum operating altitude 2000 m Pollution degree 2 IEC 61010 Materials in contact with process gas Pump shaft and rotors Cast Iron Steel Seals...

Page 19: ...1210 H 1025 1065 5 x 10 3 1000 iXH1220H T 1200 1250 5 x 10 3 1000 iXH1820 H T 1700 1900 5 x 10 3 1000 iXH3030 T 2750 2900 5 x 10 3 1000 iXH3045H 3225 5 x 10 3 1000 iXH3050H 3200 5 x 10 3 1000 iXH4545H...

Page 20: ...2 106 94 108 iXH1220H T 814 457 165 5 311 430 107 136 120 94 iXH1820 H T 814 400 165 5 311 433 134 127 112 118 iXH3030 T 829 395 230 436 545 183 147 131 164 iXH3045H 924 422 220 5 427 534 218 183 171...

Page 21: ...5 Centre of gravity and levelling foot loads 2 4 Nitrogen purge data Note pXH systems do not have a nitrogen purge facility Table 5 Nitrogen purge data for iXH and iXL systems Characteristics Rating U...

Page 22: ...6 Gas module types and flows For iXH systems Gas module type Description Module sizes available Total flow harsh setting Total flow medium setting Total flow with inlet purge Total flow with exhaust p...

Page 23: ...20 A Recommended branch circuit fuse UL 200 230 V systems 25 45 55 55 35 35 45 45 45 A Recommended branch circuit fuse IEC 200 230 V systems 25 40 45 45 30 30 40 40 40 A Recommended branch circuit fu...

Page 24: ...0 80 80 80 35 35 A Recommended branch circuit fuse IEC 200 230 V systems 45 65 65 65 65 65 65 30 30 A Recommended branch circuit fuse UL 380 460 V systems 30 40 40 40 40 40 40 20 20 A Recommended bran...

Page 25: ...systems 20 40 32 78 74 A Recommended branch circuit fuse UL 200 230 V systems 50 100 80 170 160 A Recommended branch circuit fuse IEC 200 230 V systems 35 80 65 140 135 A Recommended branch circuit f...

Page 26: ...tive earth ground conductor Must be fitted with cross sectional area at least equal to phase conductor size up to 16 mm2 Maximum permitted overcurrent protection for systems with the Han K 4 4 mains c...

Page 27: ...35 mm2 fine stranded wire VDE 0295 class 5 refer to Table 10 Or Harting Han Axial Screw module 200A 3 off required part number of mating half suitable for 25 40 mm2 wire is 09 14 001 2763 or 09 14 00...

Page 28: ...istor open collector Gate valve position sense Pin 7 Closed Pin 8 Open Power Supplies Pin 12 Accessory 24 V supply Pin 13 Accessory 24 V supply Pin 5 0 V supply common 24 V d c 0 75 A 24 V d c 0 2 A T...

Page 29: ...5 bar Minimum required pressure differential across supply and return Refer to Table 13 Supply temperature range Refer to Table 12 Water type Treated or non corrosive industrial Maximum particle size...

Page 30: ...Technical data Table 12 Cooling water supply temperature Cooling water supply temperature Units Applies to pump models 10 30 C iXH100 iXH200H iXH610 iXH1210 H iXH1220H T iXH1820 H T iXH3030 T iXL250Q...

Page 31: ...valved system and the Rated Min Pressure Differential may not correlate with water flow rates stated in the table under all operating conditions The Rated Min Pressure Differential is required to main...

Page 32: ...emperature 106 C Typical booster heater power consumption 1 kW Test Parameters Tracer gas SF6 Sulphur Hexafluoride Tracer gas concentration 100 Tracer gas release rate 2 slpm Tracer gas release points...

Page 33: ...m Pass Fail Chlorine Cl2 1 0 5 0 125 2 0 079 0 04 Pass Ammonia NH3 10 25 6 25 2 0 079 0 40 Pass Arsine AsH3 0 1 0 05 0 0125 2 0 079 0 00 Pass Boron Trichloride BCl3 1 5 1 25 2 0 079 0 04 Pass Carbon M...

Page 34: ...raction rate required at top of enclosure m3 h Extraction rate required at exhaust cover m3 h iXH100 180 0 iXH200H 180 0 iXH450H 310 60 iXH500H 310 60 iXH610 180 0 iXH1210 H 180 0 iXH1220H T 180 0 iXH...

Page 35: ...product configurators at the start of this manual If in doubt consult Edwards Disconnect the other components in the process system from the electrical supply so that they cannot be operated accident...

Page 36: ...3 Remove the lifting eyebolts and replace with the lifting eyebolt hole plugs supplied with the systems 4 Ensure that access is possible to the emergency stop button refer to Figure 2 item 1 if not u...

Page 37: ...ping system to your vacuum exhaust system WARNING Pipe the exhaust to a suitable treatment plant to prevent the discharge of dangerous gases or vapours to the surrounding atmosphere WARNING Do not tou...

Page 38: ...uge in the inlet pipeline so that you can determine that the dry pumping system operates correctly You must be able to isolate the dry pumping system inlet from the atmosphere and from your vacuum sys...

Page 39: ...tion When connected the airflow operates continuously and will extract substances of concern that may be released during a failure Refer to Section 2 8 for extraction rates required for each pump mode...

Page 40: ...sion or possibly friction If ignition occurs then the following may happen High pressures could occur within the pump and may not be contained A flame front could travel back up the foreline A flame f...

Page 41: ...e if the flow rate falls below that required then the flow of flammable gases or vapours to the pump must be stopped 3 6 Leak test the system Note If you need further information on leak testing conta...

Page 42: ...oad protection refer to Section 2 5 Pump rating information can be found on the label on the rear of the pump If you connect the electrical supply to your system through an ELCB or RCD depending on te...

Page 43: ...riate figure Note The Protective Earth connection on the Han 100A connector is on the hinged frame It may be necessary to use one of the cable shoes provided in the connector kit to fit the protective...

Page 44: ...in place Connect the other end of your electrical supply cable to your electrical supply through a suitable isolator Figure 8 The Harting Han K 4 4 cable mounted connector Low volt pin configuration...

Page 45: ...on M561 00 880 Issue C Figure 9 The Harting 100A axial screw module cable mounted connector Low volt pin configuration High volt pin configuration Pin identification Pin A1 Phase 1 Pin A2 Phase 2 Pin...

Page 46: ...ds Limited Installation Figure 10 Customer connection kit combination low volts iXL750 Item Identification 1 24 Frame hood 6 module A F 2 200A female insert 4 70 mm2 3 24 Hood M50 4 CONDUIT SLEEVE KIT...

Page 47: ...hat can be connected into your own control equipment In this case the emergency stop control should be compliant with IEC 60947 5 1 a red self latching mushroom push button on a yellow background If y...

Page 48: ...d outlet 3 Connect your water return hose to the cooling water outlet Figure 4 item 18 fit a water flow meter into the water supply line close to the pump and then connect your water supply hose to th...

Page 49: ...tion system are open 4 Ensure that all openings to atmospheric pressure in the foreline vacuum system are closed 5 Press the LOCAL CONTROL button Figure 2 item 5 and check that the green LOCAL CONTROL...

Page 50: ...therefore fit suitable measurement equipment in the nitrogen supply pipeline If you fit a rotameter ensure that it is suitable for use with nitrogen and that it is correctly calibrated If the nitrogen...

Page 51: ...removed or damaged and do not touch any parts of the pump s when the system is on Surfaces of the pump s are very hot and can cause injury to people In accordance with Semi S2 hot surface warning labe...

Page 52: ...h the PDT press Control button The message PDT1 IN CONTROL will be displayed if the front connection is used and the message PDT2 IN CONTROL will be displayed if the rear connection of the iXH iXL is...

Page 53: ...king it difficult to restart the pump next time To prevent this problem a special ramped shut down can be performed Contact Edwards for more information 4 3 2 MicroTIM operation Use your control equip...

Page 54: ...ll be ignored and the pump s will continue to operate For safety reasons some alarms cannot be overridden and the system will automatically shut down even if you have selected Run til crash Refer to T...

Page 55: ...n remedied the system should be left for a minimum of 30 minutes before attempting to restart Table 20 Pump protection sensors Sensor Warning condition triggered Alarm condition triggered Exhaust pres...

Page 56: ...mp after an emergency stop or automatic shut down Note If the system has automatically shut down because of high pump power check that the pump is free to rotate before you restart the system contact...

Page 57: ...st the system after maintenance and seal any leaks found to prevent leakage of dangerous substances out of the system and leakage of air into the system WARNING Obey the safety instructions given belo...

Page 58: ...eets for fluorinated materials used in the pump are available on request The system requires little user maintenance Pump protection sensors fitted to the system do not require routine maintenance The...

Page 59: ...the vacuum and exhaust systems and fit blanking caps 5 If necessary disconnect the air extraction port from your factory extraction system 6 If necessary disconnect any accessories from the system 7 A...

Page 60: ...aning materials containing abrasives The system is given a charge of oil before it leaves the factory You should not need to check or adjust oil levels between major overhauls We recommend that you ca...

Page 61: ...1 Remove the left hand side panel of the pumping system 2 Identify the gas module Contact Edwards for guidance 3 Use a short flat blade screwdriver to turn the adjustment screw on the front of the gas...

Page 62: ...ions Use the following procedure 1 Access the Config menu on the PDT requires an access code contact Edwards 2 Scroll to Temp Setpoints press ENTER 3 Scroll to Set DP Temp or Set MB Temp press ENTER 4...

Page 63: ...Each Service Centre offers a wide range of options including disposal Refer to Section 7 2 for more information Pump system materials suitable for recycling include cast iron steel PTFE stainless ste...

Page 65: ...equipment 2 Serial number if any 3 Item Number and description of the part 7 2 Service Edwards products are supported by a world wide network of Edwards Service Centres Each Service Centre offers a wi...

Page 66: ...ems A50790000 Nitrogen flow switches Suitable for 0 60 slm A50784000 Suitable for 0 204 slm A50785000 Utilities kit contains mating half quick connectors for cooling water and electrical connector mat...

Page 67: ...If you wish to use an exhaust check valve on a system with an NW40 exhaust you will need to order the correct kit for your particular system refer to Table 24 A50768000 M56930012 Pumping system model...

Page 69: ...il it is acknowledged by pressing ENTER when it goes continuous until the warning clears Alarm Red illuminates to indicate that a pump alarm is present It flashes when a new alarm occurs until it is a...

Page 70: ...wed in the Status menu see below Some Alarms such as 1 01 STOP ACTIVATED remain present until the pump is manually started from the PDT or front panel controls Once all warning alarm conditions have g...

Page 71: ...ical Display Serial Number S N 1234567 Control Holder NONE IN CONTROL Dry Pump current DP CURRENT 1 1A Booster current MB CURRENT 1 1A pXH Booster current PB CURRENT 1 1A Green Mode state GREEN MODE S...

Page 72: ...STOP 900 Active Alarms and Warnings if present The PDT returns the serial number of the system it is plugged directly into For example if an iXH is being used to control a pXH the PDT can be plugged i...

Page 73: ...he Setup menu Each inverter fault history contains up to 32 entries each contains one alarm and one warning where 1 is the most recent Scroll by pressing up down keys Press CANCEL to exit back to the...

Page 74: ...p menu Scroll by pressing up down keys Press ENTER to open a sub menu or CANCEL to exit back to the Setup menu Display only items press CANCEL to exit back to the IP Configuration menu Table A10 FIT A...

Page 75: ...TER to select the parameter for display or CANCEL to exit back to the SELECT LINE menu UNITS Units to display Scroll by pressing up down keys Press ENTER to open a sub menu or CANCEL to exit back to t...

Page 77: ...e handled by the PDT Table A15 lists the warning messages that might be displayed on the PDT with possible causes and actions you should take Table A15 Warnings Warning Message on PDT Action Message o...

Page 78: ...sor is fitted and is correctly connected Warning 55 13 Sensor missing The dry pump temperature sensor may have become disconnected or failed Check that the sensor is fitted and is correctly connected...

Page 79: ...k the wiring and air supply to the Gate valve Note This warning will only clear when the valve has successfully been closed and opened Warning 176 01 MB INV xxxx yyyy xxxx yyyy aaaaaaaaaaaaaaaa Booste...

Page 80: ...to be displayed Refer to Appendix A1 3 for more information on how alarms are handled by the PDT Table A16 lists the alarm messages that might be displayed on the PDT with possible causes and actions...

Page 81: ...Not Running See manual Booster Inverter will not start up when requested Check inverter fault history Alarm 176 13 No MB Inv Comms See manual The pump controller cannot communicate with the booster i...

Page 82: ...gits from 0 to F To determine the cause of a warning or alarm you must first decode each hexadecimal number 0 indicates that there is no alert for that bit Normally you will only see codes of 1 2 4 or...

Page 83: ...ead for address data rate un initialised analogue input channel 4 OSTEST _FAULT Internal fault contact Edwards 2 EEPROM_FAULT Inverter diagnostic registers also checked as per Table A20 and text outpu...

Page 84: ...lve stuck closed or water pipe to inverter blocked 6 8 HIGHTC Controller temperature above upper limit Controller temperature sensor open circuit check water supply 4 HIGHTS Inverter heat sink tempera...

Page 85: ...W_VCC__ 0x0400 0x0000 EEPROM_WRITEFAIL 0x0200 0x0000 EEPROM_TIMEOUT__ 0x0100 0x0000 EEPROM_BYTECOUNT 0x0080 0x0000 FLASH_BOOT_CRC__ 0x0040 0x0000 FLASH_WRITE_FAIL 0x0020 0x0000 FLASH_BLOCK_CRC_ 0x0010...

Page 87: ...remain in the state that they were in prior to the communication failure and outputs to the MicroTIM are unaffected It is important to note however that control might be released from the device that...

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