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Page 9
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Technical data
B722-40-880 Issue H
N
2
-
-
-
-
He
-
-
-
-
Ultimate pressure:
with rotary vane backing pump:
*
<5 x 10
-9
mbar
<5 x 10
-10
mbar <5 x 10
-9
mbar
<5 x 10
-9
mbar
with diaphragm backing pump:
†
<5 x 10
-8
mbar
<5 x 10
-9
mbar
<5 x 10
-8
mbar
<5 x 10
-8
mbar
*
Ultimate pressure 48 hours after bakeout with 2-stage rotary vane backing pump.
†
Ultimate pressure 48 hours after bakeout with P
b
< 5 mbar (500 Pa).
Note:
Contact Edwards for details on the EXT75DXi and EXT75iiDX variants.
Table 4 - DX pumps technical data
Parameter
EXT75DX
Critical backing pressure
*
*
Pumping speed is reduced to 90% of its original value.
N
2
8 mbar
He
6.5 mbar
H
2
2.5 mbar
Minimum backing pump displacement
0.6 m
3
h
-1
Maximum Continuous Backing Pressure
†
(at Ultimate Inlet Pressure)
†
Above this pressure, rotational speed drops below nominal. Values for maximum continuous inlet pressure
obtained using a RV12 backing pump. Refer to
Nitrogen:
Water Cooling (40 °C ambient)
‡
‡
Cooling water temperature at 15 °C. Cooling water flow rate at 30 l hr
-1
.
4 mbar
Forced Air Cooling (35 °C ambient)
5 mbar
Natural Convection Cooling (30 °C ambient)
2 mbar
Maximum continuous inlet pressure
(at Ultimate Backing Pressure)
Nitrogen:
Water cooling (40 ºC ambient)
2 x 10
-2
mbar
Forced Air cooling at (35 ºC ambient)
3 x 10
-2
mbar
Natural Convection Cooling (30 °C ambient)
8 x 10
-3
mbar
Argon:
Water cooling (40 ºC ambient)
4 x 10
-3
mbar
Forced Air cooling at (35 ºC ambient)
4 x 10
-3
mbar
Natural Convection Cooling (30 °C ambient)
1 x 10
-3
mbar
Recommended backing pump
**
RV3
Operating attitude
Vertical and upright through to horizontal
±
2 °
Nominal rotational speed
90,000 revolutions per minute
Starting time to 90% speed
††
110 seconds
Sound power level (1 metre away)
< 50 dB(A)
Table 3 - DX pumps technical data (continued)
Parameter
EXT75DX
ISO63
EXT75DX
63CF
EXT75DX
NW40
EXT75DX
ISO100
