Edwards EXT75DX Instruction Manual Download Page 1

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B722-40-880

Issue H

Instruction Manual

EXT Compound Turbomolecular Pumps

EXT75DX, EXT75DXi and EXT75iiDX

Description

Item Number

EXT75DX

ISO63

B722-41-000

EXT75DX

CF63

B722-42-000

EXT75DX

NW40

B722-43-000

EXT75DX

ISO100

B722-45-000

EXT75DX

ISO100 (NW25 Backing)

B722-46-000

EXT75DX

ISO63 Reversed

B722-48-000

EXT75DXi

NW40

B722-35-000

EXT75DXi

ISO63 (NW16 Interstage)

B722-37-000

EXT75DXi

ISO63 (NW25 Interstage)

B722-38-000

EXT75iiDX

ISO63 (NW16 Interstage)

B722-31-000

EXT75iiDX

Cartridge Pump

B722-32-000

Original Instructions

Summary of Contents for EXT75DX

Page 1: ...X CF63 B722 42 000 EXT75DX NW40 B722 43 000 EXT75DX ISO100 B722 45 000 EXT75DX ISO100 NW25 Backing B722 46 000 EXT75DX ISO63 Reversed B722 48 000 EXT75DXi NW40 B722 35 000 EXT75DXi ISO63 NW16 Intersta...

Page 2: ...harmonised standards EN 1012 2 1996 A1 2009 Compressors and vacuum pumps Safety requirements Vacuum pumps EN 61010 1 2010 Safety requirements for electrical equipment for measurement control and labor...

Page 3: ...pumps nXDS 6 10 15 20 EXT pumps EXT75DX XDS pumps XDS35 46 100 Diaphragm XDD 1 D lab Turbo Pump Carts T station nEXPT nEXT station Materials Content Declaration Part name Lead Pb Mercury Hg Cadmium Cd...

Page 4: ...This page has been intentionally left blank...

Page 5: ...cification and vent control data 13 2 4 Purge gas specification 14 2 5 Cooling water 14 2 6 Materials exposed to gases pumped 14 2 7 Electrical data 15 2 8 Logic interface connector 15 2 9 Podule conn...

Page 6: ...ndby speed setting 41 4 1 5 Normal speed setting 41 4 1 6 Timer setting and options 42 4 1 7 Analogue signal options 43 4 1 8 Electronic braking options 43 4 1 9 Factory settings 44 4 1 10 Assigning a...

Page 7: ...aptor 65 7 4 6 VRX vent restrictor 65 7 4 7 Vent port adaptor 65 7 4 8 PRX purge restrictor 66 7 4 9 Vibration isolators 66 7 4 10 FL20K foreline trap 66 7 4 11 Podule connector plug 66 7 4 12 TIC tur...

Page 8: ...Ds 18 13 Operating and storage environment 18 14 Checklist of components 19 15 Summary of commands that can be sent to the DX pump 30 16 Command abbreviations 32 17 Error codes 32 18 Vent options 35 1...

Page 9: ...ment When flow rates are specified the abbreviation sccm is used to mean standard cubic centimetres per minute This is a flow of 1 cm3 min 1 at an ambient temperature of 0 C and a pressure of 1013 mba...

Page 10: ...ump Note The EXT75DXi with an NW16 interstage port is not supplied with an inlet strainer The DX pumps have a vent port for venting the pump and vacuum system to atmospheric pressure The pump is suppl...

Page 11: ...4 for factory default settings of the parameters discussed in the following Sections 1 4 1 Power limit setting Select the maximum power that will be drawn by the pump refer to Section 4 1 1 The more p...

Page 12: ...nfigure the Podule to monitor a different system parameter refer to Section 4 1 7 1 4 5 Automatic vent options An Edwards TAV vent valve can be connected directly to the DX pump s Podule The Podule is...

Page 13: ...ut for a number of pump parameters The logic interface has been designed to include both serial and parallel modes of control and monitoring operating through one connector The pump can be operated us...

Page 14: ...ust the configuration settings stored in the Podule or to monitor operational status of the pump Whilst operating in Parallel mode the same controls and monitoring signals are available as described i...

Page 15: ...losure protection installed EXT75DX and 75DXi NW25 IP50 EXT75DXi NW16 IP50 EXT75iiDX Contact Edwards for details WARNING Vent dangerous gases and gas mixtures safely Do not expose people to these gase...

Page 16: ...3 If pumping a gas not in the list above contact the supplier for advice If the supplier is not contacted the pump warranty may be invalidated The pump is not suitable for pumping aggressive or corro...

Page 17: ...onal speed drops below nominal Values for maximum continuous inlet pressure obtained using a RV12 backing pump Refer to Section 3 9 for cooling conditions Nitrogen Water Cooling 40 C ambient Cooling w...

Page 18: ...it setting 80 W EXT75DX Note Contact Edwards for details on the EXT75DXi and EXT75iiDX variants WARNING Do not exceed the maximum continuous operating pressure Doing so can result in dangerous rotor t...

Page 19: ...options and the vent valve connection and refer to Section 4 1 3 for configuring the venting options Figure 2 Maximum allowed rate of pressure rise during venting pressure against time with pump init...

Page 20: ...ification Reference data Purge gas Dry air nitrogen argon or other inert gases Maximum dew point at atmospheric pressure 22 C Maximum size of particulates 1 m Maximum concentration of oil 0 1 parts pe...

Page 21: ...ven using an Edwards TIC be aware that there are several variants Contact Edwards to determine which is most suitable for the application 2 8 Logic interface connector DX pumps have a 15 way logic int...

Page 22: ...gure 3 with the polarity of the pins marked when the vent valve fan is energised The podule connector plug is available as an accessory see Section 7 4 Analogue output Output voltage 0 to 10 V d c dir...

Page 23: ...able standby speed 5 Serial enable Connect to Pin 2 to enable serial interface mode 7 FAIL Serial TX Logic high when fail condition exists in parallel mode 9 Analogue output Positive 0 10 V output pro...

Page 24: ...ncy of the pump motor At high speeds it appears continuously on The LED switches off when the rotational speed is very low or stopped In a fail condition this LED flashes in a sequence to indicate err...

Page 25: ...ed in Section 6 1 Do not discard the packing materials retain them to re package the pump if it is returned for service Note An inlet strainer is not available for the NW16 interstage port of the EXT7...

Page 26: ...ng system with a DX pump 1 Vacuum system 2 High vacuum gauge 3 Vibration isolator 4 Inlet screen 5 DX pump 6 Backing valve 7 Vacuum gauge 8 Flexible bellows 9 Foreline trap 10 Rotary backing pump 11 M...

Page 27: ...ion of the inlet screen EXT75DX 3 3 2 Mechanical fixing There are two ways in which the DX pumps can be securely fixed The ideal fixing for a DX pump is via its inlet flange to a rigid firmly fixed va...

Page 28: ...es If necessary fit an inlet vibration isolator between the pump inlet and the vacuum system refer to Section 7 4 In this case fix the base of the pump to a firm support as described in Section 3 3 4...

Page 29: ...ge gas to the pump remove the plug fitted in the purge port fit a vent port adaptor refer to Section 7 4 and connect the purge gas supply to the vent port adaptor The purge gas must comply with the sp...

Page 30: ...nnector pins The DX pump can be controlled using a hardware parallel control interface and via commands sent over a serial interface If the DX pump is controlled using the hardware Parallel Interface...

Page 31: ...th Refer to Table 9 Logic Interface Connector Pins when connecting the electrical supply to the customer connector mating half Figure 6 Logic interface connections parallel mode 3 6 Parallel interface...

Page 32: ...gate its operational status using a number of commands There is a multi drop mode that allows for communication with more than one DX pump whilst using just one control system 3 7 1 Connect the serial...

Page 33: ...Serial Stop command 3 7 3 Serial protocol The Serial Interface link is set to 9600 Baud 8 bits 1 stop no parity with no handshaking The commands are made up from printing ASCII characters The maximum...

Page 34: ...sent The correct structure to use is as follows a valid start character either a character for a store operation or a character for a query operation followed by a command which will be an upper case...

Page 35: ...y the pump can any commands sent via the Parallel Interface be acted on Similarly if the pump is started using the Start switch on the Parallel Interface the pump cannot then be stopped by sending a S...

Page 36: ...gs S867 1 Reset all configuration options and parameters to the factory settings PIC software version S868 10 string chars PIC software version number D39647620x Speed control C869 0 1 decimal Set tar...

Page 37: ...mal characters prefixed by a minus number for negative numbers h hexadecimal ASCII character r Returned error code refer to Table 16 sp space character string may have several ASCII characters X Multi...

Page 38: ...in multi drop message protocol are detailed below All multi drop commands queries or replies have the first character All commands queries and replies contain a header containing the address of the no...

Page 39: ...recommends opening the manual vent valve only after the pump speed has fallen to 50 of full rotational speed 3 8 2 TAV5 or TAV6 solenoid vent valve The TAV5 and TAV6 solenoid valves can be purchased a...

Page 40: ...TIC Refer to the TIC Instruction Manuals for more information 3 8 4 Alternative valve connected to the vacuum system If using another vent valve ensure that a suitable vent restrictor is fitted to th...

Page 41: ...nal power supply the Edwards TIC Turbo and Instrument Controller the TIC Turbo Controller or by the Podule It cannot be powered by the Podule if a TAV solenoid valve is already connected to the Podule...

Page 42: ...ng hose clips and make sure that they are tightened securely Alternatively unscrew the riffled hose connectors and remove them from the water cooler and make direct connections to the 1 8 inch BSP fem...

Page 43: ...3 4 1 Configuring the DX pump using serial commands Refer to Table 14 for a summary of the full set of serial commands Table 12 details the parameter range and factory default for each setting The fo...

Page 44: ...be in the following format If the character d is 8 then the fan is enabled If it is anything else configure the Podule to run the fan 4 1 3 Controlled venting options If the Podule is used to automat...

Page 45: ...ed in memory within the DX pump To check what Standby Speed is set send a query as follows The reply will be as follows 4 1 5 Normal speed setting The Normal Speed is a user configurable setting and c...

Page 46: ...ut period is set send a query as follows The reply will be as follows The Timer is permanently enabled during ramp up however it is optional whether to have it enabled at other times When the pump is...

Page 47: ...the Electronic Braking feature The pump is supplied with Electronic Braking disabled by default To enable Electronic Braking send the following serial command The reply will be as follows The state of...

Page 48: ...address can be any decimal number from 1 to 98 The address number 0 is used to disable multi drop mode The address number 99 is reserved as a wild card and is used in the query set up detailed later T...

Page 49: ...rform these settings refer to the TIC Turbo and Instrument Controller or TIC Turbo Controller Instruction Manuals Note It is not possible to configure the Analogue Output Options using the TIC There i...

Page 50: ...d to the DX pump 2 Start the backing pump 3 Switch on the power supply to the pump Check that the two LEDs on the Podule light up for approximately 0 5 seconds and then extinguish If the LEDs do not l...

Page 51: ...here is no open vent valve command but when a stop command is sent to the pump the override is cleared 4 5 2 Start the pump To start the pump send the following command over the serial communications...

Page 52: ...oth measured in C 4 5 6 Link parameter readings The internal voltage current and motor power of the DX pump can be monitored by sending the following query The reply will be as follows where the first...

Page 53: ...rotational speed has fallen below 50 otherwise the rate of pressure rise may be too high which could damage the pump In an emergency only open the vent valve quickly to decelerate the pump rotor in th...

Page 54: ...power supply If higher currents are drawn the voltage of the regenerated power supply may collapse causing the vent valve to open before the speed falls through 50 of full operating speed If the elec...

Page 55: ...inside the pump The Edwards BX bakeout band may be used to heat the pump refer to Section 7 4 Fit the appropriate band around the pump just below the CF inlet flange When baking the pump or the system...

Page 56: ...serial depending on the control mode Then send a Start command to ramp the pump up to designated speed Either Parallel or Serial Control Timer enabled Regenerative power maintains all output signals...

Page 57: ...rotors is typically 40 000 to 50 000 cycles As a precautionary measure Edwards recommends that pumps are returned for a major service rotor replacement after 20 000 cycles of acceleration to full spe...

Page 58: ...th the pump The pump does not rotate after a serial Start command is sent Check whether the pump returns a reply to the Start command If there is no reply check that the serial communications link is...

Page 59: ...e high vacuum system Check the rest of the system for leaks and contamination If found repair the leaks and clean the contamination Remove the pump from the system and test the ultimate pressure of th...

Page 60: ...e reply will be as follows where the first returned number refers to motor rotational speed in revolutions per second Hz Table 23 Flashing error codes Error flash position Error flash code Comments Ac...

Page 61: ...ns a list of the lower 16 status flags that will be useful for fault finding The upper 16 status flags are reserved by Edwards Binary digits Bit numbers 2 2 8 3 0 0 2 2 0 0 1 0 0 0 1 0 1 0 0 0 0 0 1 1...

Page 62: ...are trip Over speed or Over current trip activated 14 Thermistor error Pump internal temperature measurement system disconnected or damaged 15 Serial control mode interlock Serial enable has become in...

Page 63: ...articularly useful for service personnel to determine the model of the pump Send the following query to find out pump type The reply is as follows where String1 is the pump type String2 is the DSP sof...

Page 65: ...oir 5 Avoid long term storage if possible When long term storage is necessary the pump should be set up and run for at least eight hours every six months 6 2 Disposal Dispose of the DX pump and any co...

Page 67: ...e or repair of the equipment For more information about service options contact the nearest Service Centre or other Edwards company 7 2 1 Returning a pump for service If returning a pump to a Service...

Page 68: ...p 7 4 2 ACX air cooler An ACX air cooler can be fitted to the DX pump Refer to Section 3 9 to check the suitability of air cooling in a particular application 7 4 3 WCX water cooler A water cooler can...

Page 69: ...ctance and is suitable for larger vacuum systems typically with volume greater than 10 litres 7 4 6 VRX vent restrictor Use a VRX fixed orifice vent restrictor to restrict flow of vent gas into the pu...

Page 70: ...ng from the backing pump and is recommended where the highest system cleanliness is required 7 4 11 Podule connector plug A Podule connector plug can be fitted to the DX pump to drive a TAV vent valve...

Page 71: ...rable parameters in the pump Figure 10 Installation of optional accessories and spares 1 Vibration isolator 2 Inlet flange seal supplied 3 DX pump 4 TAV vent valve 5 Vent port adaptor 6 VRX vent restr...

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