Edwards EXT200/200H GCMS, Instruction Manual, Page: 5 / 38

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Contents
B756-01-880 Issue K
Contents
Section Page
1 Introduction ....................................................................................... 1
1.1 Scope and definitions ................................................................................................... 1
2 Technical data .................................................................................... 3
2.1 General .................................................................................................................... 3
2.2 Pumping media ........................................................................................................... 3
2.3 Vent gas specification and vent control data ....................................................................... 4
2.4 Water cooling ............................................................................................................. 5
2.5 Materials exposed to gases pumped .................................................................................. 9
3 Installation ....................................................................................... 13
3.1 Unpack and inspect .....................................................................................................13
3.2 Typical installation .....................................................................................................13
3.3 Connection to the vacuum system ...................................................................................14
3.3.1 Mechanical fixing .......................................................................................................15
3.3.2 Inlet screens (supplied fitted) or integral mesh centering ring (supplied separate from the pump) ......16
3.3.3 Inlet connection and orientation .....................................................................................16
3.3.4 Backing connection .....................................................................................................17
3.3.5 Interstage connection (Hi pump variants only) ....................................................................18
3.4 Vent options, vent valve connection and control ..................................................................18
3.5 Electrical installation ..................................................................................................18
3.5.1 EXDC controllers ........................................................................................................19
3.5.2 EXC controllers .......................................................................................................... 19
3.6 Cooling ...................................................................................................................19
3.6.1 Introduction ............................................................................................................. 19
3.6.2 Forced-air cooling ......................................................................................................20
3.6.3 Water cooling ............................................................................................................ 20
4 Operation ........................................................................................ 21
4.1 Start-up ..................................................................................................................21
4.2 Shut-down ................................................................................................................21
4.3 Safety interlocks and control system ................................................................................22
4.3.1 EXDC controllers ........................................................................................................22
4.3.2 EXC controllers .......................................................................................................... 22
5 Maintenance ..................................................................................... 23
5.1 Introduction .............................................................................................................23
5.2 Bearing maintenance ...................................................................................................23
5.3 Rotor life ................................................................................................................. 23
5.4 Cleaning the pump ......................................................................................................24
5.5 Fault finding .............................................................................................................24
6 Storage and disposal ........................................................................... 27
6.1 Storage ...................................................................................................................27
6.2 Disposal ................................................................................................................... 27
7 Service, spares and accessories .............................................................. 29
7.1 Introduction .............................................................................................................29
7.2 Service .................................................................................................................... 29
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