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Edwards EXT200/200H GCMS, Instruction Manual, Page: 1 / 38

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Edwards EXT200/200H GCMS Instruction Manual Download Page 1

B756-01-880

Issue K Original

Instruction Manual

EXT Split Flow Compound Turbomolecular Pumps

Description

Item Number

24 Volt EXT Compound Turbomolecular Pumps:
EXT200/200H

B756-01-991

EXT200/200Hi

B756-02-991

EXT70/200H

B756-03-991

EXT200/200H 

B756-24-991

EXT200/200H GCMS (Reversed Body)

B756-41-991

EXT200/200H LCMS (Reversed Body)

B756-43-991

24 Volt EXT system (comprising Compound Turbomolecular Pump and EXDC160):
EXT200/200H

B756-21-991

EXT200/200Hi

B756-22-991

EXT70/200H

B756-23-991

EXT200/200H ICPMS

B756-30-991

EXT200/200H GCMS

B756-40-991

EXT200/200H GCMS (Reversed Body)

B756-42-991

EXT200/200H LCMS (Reversed Body)

B756-44-991

Summary of Contents for EXT200/200H GCMS

Page 1: ...200H B756 03 991 EXT200 200H B756 24 991 EXT200 200H GCMS Reversed Body B756 41 991 EXT200 200H LCMS Reversed Body B756 43 991 24 Volt EXT system comprising Compound Turbomolecular Pump and EXDC160 EX...

Page 2: ...uipment for measurement Control and laboratory use Part 1 General requirements UL61010 1 2nd Edition Safety requirements for electrical equipment for measurement Control and laboratory use Part 1 Gene...

Page 3: ...conformity with the provisions of the Machinery Directive 2006 42 EC The machine s is in conformity with the following standard s or other normative document s EN ISO 12100 2 2003 Safety of Machinery...

Page 4: ...This page intentionally blank...

Page 5: ...ed separate from the pump 16 3 3 3 Inlet connection and orientation 16 3 3 4 Backing connection 17 3 3 5 Interstage connection Hi pump variants only 18 3 4 Vent options vent valve connection and contr...

Page 6: ...200H GCMS split flow pump system units in mm 10 3 Dimensions of the EXT 200 200H ICPMS split flow pump system units in mm 11 4 Dimensions of the EXT 200 200H GCMS LCMS reversed body 12 5 A typical vac...

Page 7: ...s details of electrical installation Important safety information is highlighted as WARNING and CAUTION instructions these instructions must be obeyed The use of WARNINGS and CAUTIONS is defined below...

Page 8: ...B756 01 880 Issue K Page 2 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Page 9: ...Ambient operating temperature range 5 C to 40 C Ambient operating humidity range 10 to 90 RH non condensing Maximum operating altitude 2000 m Ambient storage temperature range 30 C to 70 C WARNING Ven...

Page 10: ...r for advice If the supplier is not contacted the warranty on the pump may be invalidated The pumps are not suitable for pumping aggressive or corrosive gases 2 3 Vent gas specification and vent contr...

Page 11: ...there is any doubt about the quality of the supply Table 3 Water cooling Quality Mechanically and optically clean with no deposits or turbidity pH value 6 0 to 8 0 Maximum calcium carbonate concentrat...

Page 12: ...l s 1 190 l s 1 185 l s 1 113 l s 1 Pb 1 mbar 100 Pa H2 130 l s 1 163 l s 1 175 l s 1 102 l s 1 Pb 0 5 mbar 50 Pa Ar 153 l s 1 104 l s 1 Pb 0 2 mbar 20 Pa Side inlet pumping speed N2 155 l s 1 155 l s...

Page 13: ...mum continuous inlet pressure air cooling at 35 C ambient Air cooling is beneficial to the EXDC controller Nitrogen unless otherwise Main inlet 3 x 10 3 mbar 3 x 10 1 Pa 3 x 10 3 mbar 3 x 10 1 Pa 5 x...

Page 14: ...pump RV3 RV3 RV3 RV3 The data shown for EXT200 200H GCMS applies to pumps B75640991 B75641991 B75642991 B75643991 and B75644991 This is because these pumps have the same internal components and the da...

Page 15: ...d component types are exposed to the gases pumped aluminium alloys stainless steels fluoroelastomer and nitrile O rings hydrocarbon lubricant felt rare earth magnets silicon nitride phenolic resin and...

Page 16: ...erved Edwards and the Edwards logo are trademarks of Edwards Limited Technical data Figure 2 Dimensions of the EXT 200 200H GCMS split flow pump system units in mm 1 8 slots 8 4 mm wide 2 EXDC control...

Page 17: ...e Edwards logo are trademarks of Edwards Limited Technical data B756 01 880 Issue K Figure 3 Dimensions of the EXT 200 200H ICPMS split flow pump system units in mm 1 8 slots 8 4 mm wide 2 Controller...

Page 18: ...s and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank Figure 4 Dimensions of the EXT 200 200H GCMS LCMS reversed body 1 Extended vent port adaptor 2 Back...

Page 19: ...the packaging If the pump is damaged notify the supplier and the carrier in writing within three days state the Item Number of the pump together with the order number and the supplier s invoice numbe...

Page 20: ...acuum system WARNING Once the pump is removed from the bottom packaging there is a danger of toppling WARNING Install the pump in the vacuum system before connecting the controller to the power supply...

Page 21: ...should be retained over the pump inlets until the pump is ready to be installed WARNING Do not expose any part of the human body to vacuum as it can cause injury WARNING Care must be taken to avoid fo...

Page 22: ...if the pump is operational and a manual handling hazard if the pump impeller is stationary Integral mesh centering rings have not been designed to enable the inlet screen to be removed If the inlet sc...

Page 23: ...may be required if the pump is run at a high inlet pressure The EXT70 200H and EXT200 200H Split Flow Pumps are also suitable for use with diaphragm backing pumps although the effect of higher backin...

Page 24: ...act Edwards However if the pump is manually vented when it is at full rotational speed and the rate of pressure rise is too high the pump life may be reduced When using the manual vent valve supplied...

Page 25: ...ction 3 5 regarding exposure to hazardous voltages whilst the pump is still rotating The EXC Controller is designed to allow a pumping system to be configured in a variety of ways from a basic manuall...

Page 26: ...ing water contains too much calcium carbonate or if it contains particulates which are too large Corrosion of the water cooling circuit may occur if there is too little calcium carbonate and oxygen in...

Page 27: ...open the vent valve quickly to decelerate the pump rotor in the shortest possible time WARNING Do not operate the pump unless it is connected to the vacuum system The pump rotor rotates at very high...

Page 28: ...itors the temperature of the EXT Split Flow Pump and the electrical power consumption of the pump If the EXDC Controller detects excessive power consumption or temperature the rotational speed of the...

Page 29: ...actory reconditioned replacement Alternatively send the pump to an Edwards Service Centre to have the bearings replaced When returning the pump to an Edwards Service Centre use the procedure included...

Page 30: ...ds recommends the use of non CFC solvents such as isopropanol or ethanol For environmental reasons keep wastage of cleaning solutions and solvents to a minimum 5 5 Fault finding Refer to Table 7 for t...

Page 31: ...r the supplier Is the EXC Controller first speed indication LED lit If not the EXC Controller is faulty If lit then the EXT Split Flow Pump is faulty Consult Edwards or the supplier The EXC Controller...

Page 32: ...he gauge or too large a chamber Increase the conductance or reduce the volume Is the interstage inlet pressure 0 2 mbar 20 Pa If the interstage inlet pressure is too high inlet pressure at the turbomo...

Page 33: ...possible When long term storage is necessary the pump should be set up and run for at least eight hours every six months 6 2 Disposal Dispose of the EXT Split Flow Pump and any components and accesso...

Page 34: ...B756 01 880 Issue K Page 28 Edwards Limited 2013 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Page 35: ...ers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned...

Page 36: ...DC Drive Module as an alternative to an EXC Controller and pump to controller cable 7 4 3 EXC controllers The Edwards EXC Controllers provide the facilities necessary for operating a pumping system ba...

Page 37: ...valve is fitted in place of the manual valve or alternatively can be fitted with an adaptor supplied with the valve and be used with any suitable NW10 flanged port on the vacuum system The vent port...

Page 38: ...w of vent gas into the EXT Split Flow Pump Refer to Section 3 4 for information on the selection of the correct VRX vent restrictor Figure 8 Installation of optional accessories Table 17 VRX vent rest...

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