EBARA A70W, Instruction Manual

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Dipswitch No. 5 sets configuration for remote START / STOP signals as either "alternate
(maintained) signal" or "pulse (momentary) signal."
Pins 1, 2, 4, and 5 pins become momentary signal ports when Dipswitch No. 5 is ON.
Dipswitch No. 7 sets dilution N2 usage.
For applications that neither deposit byproducts nor corrode the pump (e.g. load lock,
sputtering, SEM) the user may reduce nitrogen consumption by closing the dilution N
2
selector valve located on the side of the pump and turning on Dipswitch No. 7,
In dilution mode, the pump outputs a Dilution N
2
Flow ALARM when dilution N
2
flow
decreases; in zero dilution mode, the pump outputs a Dilution N
2
Flow ALARM when
dilution N
2
selector valve is open.
[NOTE] Select compatible settings for the dilution N
2
selector valve and Dipswitch No. 7
together.
Set Dipswitch No. 8 ON to start and stop BP automatically based on inlet vacuum; set
Dipswitch No. 8 OFF to start and stop BP with a remote signal.
[NOTE] The user may toggle remote / local switch and use of the buzzer at any time. The
pump stores the setting of other switches at start up. Turn power OFF to change
the settings.
Default factory settings at time of shipment are: Data Length = 8 bits, always observation,
buzzer in use, according to signal, alternating signal, with dilution mode, BP automatic
operation, and Local operation. Refer to Figure 4.7.
Figure 4.7 Switch Settings
1
8
ON
LOCAL
REMOTE
Dip
Switch
Toggle
Switch
Power
LED
Rotary
Switch
RS232C
Port
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