LV.1~2
8/11
O-Ring position
Vacuum pump main inspection provision
Maintenance guide
The exhaus t filter
The exhaust filter exchange method
1. The exhaust pipe disassembling
2. The exhaust pipe gasket disassembling
3. The exhaust filter spring disassembling
4. The exhaust filter disassembling
※
Warning
5. Re-use of the used O-RING will cause
the malfunction.
The exhaust filter
O-RING
※
Warning
6. Assemble O-RING tightly to the processed side
of the oil container inside.
PF005