Cee® Apogee™ Developer Manual
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1.9. Chemical
Ensure chemical compatibility of all chemicals and materials being used inside the machine.
This includes all wetted parts of the storage, supply, dispense, and waste systems.
Ensure chemical compatibility of all chemicals with each other. All dispensed materials are
held in one common waste storage tank. Check for reactions between chemicals before use.
Flammable Chemicals. No open flames/sparks.
Relieve pressure before opening canisters, tanks, cartridges, or syringes to refill.
Relieve pressure and shut off chemical valves before servicing supply lines, dispense valves
or other components.
Relieve pressure and shut off chemical valves before removing spin lid or changing BSR
tubes, EBR tubes, or any other dispense nozzle or spray tip.
Flush tubing and valves with an appropriate solvent and drain system before servicing.
When draining waste tank, use appropriate containers and connection methods.
Ensure proper ventilation/exhaust is used at all times.
Always wear the proper Personal Protective Equipment for the job. This includes safety
glasses, gloves and other equipment as needed to protect from mechanical and chemical
hazards.
1.10.
Lockout/Tagout Procedures and Information
Before servicing, turn off the machine and remove the power inlet cord by disconnecting the plug
where it enters the machine.
1.11.
Intended Use of Machine
The Cee® Apogee
™ Developer is intended for use as a Semiconductor/Optical application spin
coating machine. It is primarily intended for substrates up to the maximum size.
The Cee® Apogee
™ Developer is not intended for use in food or medical applications or for use
in hazardous locations.
The Cee® Apogee
™ Developer is intended for use only by properly trained personnel wearing the
proper personal protective equipment. Anyone not trained in the proper use of the Apogee
™
Developer and have not fully read this manual should not operate the equipment.
The Cee® Apogee
™ Developer is intended for use in a cleanroom environment to provide the
proper processing conditions for the substrates. If it is used outside of a cleanroom environment,
the substrate cleanliness may be compromised.
The Cee® Apogee
™ Developer is not intended for use in a hazardous or explosive environment.
