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Owner’s Manual
Apogee™ 300 Bake Plate
www.costeffectiveequipment.com
+1-573-466-4300
Page 1: ...Owner s Manual Apogee 300 Bake Plate www costeffectiveequipment com 1 573 466 4300...
Page 2: ...11 Intended Use of Machine 6 2 Equipment Description 7 2 1 Dimensions 8 2 2 Programmability 8 2 3 Precision 8 2 4 Reliability 8 2 5 Utilities 9 3 Installation 9 3 1 Floor Space Requirements 9 3 2 Faci...
Page 3: ...Bake Plate Manual Page 3 of 23 4 9 Reflow Soldering 20 4 10 Bake Plate Process Troubleshooting 21 5 Preventative Maintenance 22 5 1 Safety Checks 22 5 2 Mechanical Checklist 22 5 3 Utility Checks 22 5...
Page 4: ...nstallation of or accident to the equipment b Any major repairs or alterations are made to equipment by anyone other than a duly authorized representative of Cee Representatives of Buyer will be autho...
Page 5: ...e machine to minimize risk of injury Labels are placed on the machine to identify areas where caution is needed during operation 1 7 Electrical High voltage is present in the machine Disconnect the po...
Page 6: ...ine and remove the power inlet cord by disconnecting the plug where it enters the machine 1 11 Intended Use of Machine The Cee Apogee 300 Bake Plate is intended for use as a Semiconductor Optical It i...
Page 7: ...m critical experiments Recipes are easily entered monitored and stored with the convenient full color touch screen interface with DataStream Technology Compact footprint intuitive design and unequaled...
Page 8: ...s replace N2 proximity for loading unloading substrates from bake module Program 10 specific proximity heights above the surface in any sequence or combination Height is programmed in 0 001 increments...
Page 9: ...83 2 1 min N2 for bake plate proximity 35 psi 241 3 Pa 3 Installation 3 1 Floor Space Requirements The Apogee 300 Bake Plate is a bench top unit and requires a table or bench top for location In most...
Page 10: ...trol see DataStream Manual 3 AC Power In Cord is Provided Single Phase 100 120V AC at 10 Amps 208 240V A C option available see back label shown in Figure 1 to verify 4 Accessory Port This is used to...
Page 11: ...top Pins 1 Temperature and Humidity Sensor 1 Power Cord with female power connector 1 User Installation Manual CD or USB 3 5 System Installation and Setup 1 Lift the unit out of the packing crate by g...
Page 12: ...Cee Apogee 300 Bake Plate Manual Page 12 of 23...
Page 13: ...r centered on the bake plate surface The holes closest to the center are for 2 inch wafers From the center the stop pin locations are for 2 in 3in 100m 125 mm 150 mm and 200 mm wafers respectfully 3 S...
Page 14: ...e differences and set a few guidelines for using bake plates Stratification the formation of different temperature zones is a problem associated with convection ovens and can severely affect film qual...
Page 15: ...ature loading the substrate onto the surface for a specific length of time and removing it promptly at the end of the cycle The selection of the temperature and time values used as well as the bake me...
Page 16: ...otplate surface in a pattern which optimizes vacuum distribution without the formation of cold spots or warping of the substrate This method is usually preferred for silicon and other flat substrates...
Page 17: ...soft contact method creates hot spots where the substrate touches the hotplate and cold spots where it does not It should be noted as well that this type of proximity process is self leveling in that...
Page 18: ...Cee Apogee 300 Bake Plate Manual Page 18 of 23...
Page 19: ...e larger mass of the substrate results in bakes times approaching five minutes It should be noted that these substrates can be processed with higher temperature and much shorter bake times but reprodu...
Page 20: ...t OVEN BAKE 90 C 30 minutes Polyimide beta partial imidization 135 C 30 minutes Polyimide alpha solvent removal HOTPLATE BAKE 115 C 30 secs w Hard Contact bake Polyimide beta partial imidization 150 C...
Page 21: ...ke time Film underbaked Bake temperature too low Select higher temperature Bake time too short Increase bake time Film blistering or cracking Unstable balance in temp time parameters Decrease temp inc...
Page 22: ...th most organic solvents isopropyl alcohol or acetone For major buildup of material a glass microscope slide can be used to gently scrap the material away Hold the slide at a 45 angle so you do not sc...
Page 23: ...should not be used The bake plate lid may be cleaned with isopropyl alcohol acetone or water based cleaners Avoid getting solvent of any kind on the small yellow Hot Surface labels Use only water bas...
