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Detected gases

Gases found in semiconductor manufacturing plants

Detection principle

Electrochemical

Gas sampling method

Extractive

Detection range

As per specifications

Concentration display method LCD display

Detection accuracy

 (See note 1.)

±10% of full scale

Response time 

(See note 1.)

Within 60 s (60% response)

Power supply

Four AA alkaline batteries or AC adapter (optional item)

Battery operating time

(See note 2.) 

Up to 12 hours of continuous operation (at 20

 with alkaline batteries and 

no alarms) 

Operating

temperature range

0 to 40

Dimensions

W 62 x H 150 x D 128 mm (projected portions excluded) 

Mass

Approx. 1.3 kg

Approval (See note 3.)

CE (EMC Directive, 2014/30/EU)

Note 1:

The detection accuracy and response time were measured under identical detection

conditions.

Note 2:

The operating time of the batteries depends on factors such as environmental

conditions, operating conditions, the storage time, and the manufacturer 

Note 3:

AC Adapter, EC-7 and Data Logger Software (optional items) are exempt from CE

marking. (see on page 11)

.

12  Specifications

13

12

13

11  Warranty

New Cosmos Electric Company Limited (New Cosmos) offers the following as the sole and 
exclusive limited warranty available to Customer. 
This warranty is in lieu of, and customer waives, all other warranties of any kind or nature, 
expressed or implied, including without limitation, any warranty for merchantability or fitness for a 
particular purpose. The remedies set forth herein are exclusive.

New Cosmos warrants to the original purchaser and no other person or entity (customer) that 
gas detection product supplied by New Cosmos shall be free from defects in materials and 
workmanship for a period of one (1) year from the date of purchase. This warranty does not include 
consumables, such as fuses, filters, etc. Certain other accessories not specifically listed here may 
have different warranty periods.

After examination of allegedly defective product return to New Cosmos, with freight prepaid, should 
the product fail to conform to this warranty, customer's only remedy and New Cosmos's only 
obligation shall be, at New Cosmos's sole option, replacement or repair of such non-conforming 
product or refund of the original purchase price of the non-conforming product. In no event will New 
Cosmos be liable for any other special, incidental or consequential damages or losses of any kind 
whatsoever, including but not limited to, loss of anticipated profits and any other loss caused by 
reason of non-operation of the product.

This warranty is valid only if the product is maintained and used in accordance with New Cosmos's 
instructions and for recommendations. New Cosmos shall be released from all obligations under 
this warranty in the event repairs or modifications are made by persons other than its own or 
authorized service personnel or if the warranty claim results from physical abuse or misuse of the 
product.

Summary of Contents for XPS-7

Page 1: ...his manual Instruction manual No XPS 7T 10 Semiconductor Plant Gas Detector XPS 7 Instruction Manual Store this Instruction manual in a convenient location and consult it whenever necessary Operate th...

Page 2: ...ing Procedure 6 5 1 Inserting Batteries 6 5 2 Installing the Sensor Unit 7 5 3 Turning the Gas Detector ON 8 5 4 Detection 8 5 5 Ending Detection 8 6 Logger Function 9 7 Replacing the Filter 10 8 Dail...

Page 3: ...ath WARNING Indicates a potentially hazardous situation that if not avoided could re sult in serious injury or death CAUTION Indicates a potentially hazardous situation that if not avoided could re su...

Page 4: ...es FS Alarm setting 1st level 2nd level XDS 7NH NH3 Ammonia 100 ppm 12 ppm 25 ppm XDS 7SH SiH4 Silane 25 ppm 2 5 ppm 5 ppm XDS 7DC SiH2Cl2 Dichlorosilane 25 ppm 2 5 ppm 5 ppm XDS 7AH AsH3 Arsine 250 p...

Page 5: ...to open it and access the key switches Buzzer speaker Gas inlet Sampled gas aspiration inlet 6 dia Attaches to the gas inlet tube Gas outlet Exhaust outlet for sampled gas 6 dia Adapter connector Con...

Page 6: ...ecial command switch Used with the logger function UP DOWN switches Used to set the start time and other logger function settings Key Switches LCD Display Log indicator Lit when the log function is op...

Page 7: ...is attached make sure that it will not pull out Removing Press in the release ring on the coupling and simultaneously pull out the gas inlet tube Attaching Removing Gas Inlet Tube Filter case Contains...

Page 8: ...AA alkaline batteries provided and make sure they are inserted according to the polarity indicated in the battery compartment Close the battery cover WARNING Replace all four batteries at the same tim...

Page 9: ...power to the sensor unit A sensor unit that does not have power to it cannot detect gases and may cause the sensor trouble indicator to light A sensor unit installed in the Gas Detector is powered eve...

Page 10: ...after a power failure 5 4 Detection Place the gas sampling pipe near the target detection area When the unit detects gas the concentration of the detected gas is displayed If the detected gas concentr...

Page 11: ...e log data to a personal computer Press the DOWN switch once in RUN mode LOG will be displayed on the lower right corner of the LCD display and the log start time can be entered Press the SPECIAL COMM...

Page 12: ...re factory adjustments that are not available for user application 7 Replacing the Filter Twist the lter holder with detection probe to open it Use a pair of tweezers to remove the O ring and filter I...

Page 13: ...age 6 The batteries are low Replace the batteries The sensor unit is not installed Install a sensor unit Page 7 Abnormal drop in the ow rate The lter is clogged Replace the lter with a new one Page 10...

Page 14: ...After examination of allegedly defective product return to New Cosmos with freight prepaid should the product fail to conform to this warranty customer s only remedy and New Cosmos s only obligation s...

Page 15: ...2 hours of continuous operation at 20 with alkaline batteries and no alarms Operating temperature range 0 to 40 Dimensions W 62 x H 150 x D 128 mm projected portions excluded Mass Approx 1 3 kg Approv...

Page 16: ...Distributor Manufacturer New Cosmos Electric Co Ltd 2 5 4 Mitsuya naka Yodogawa ku Osaka 532 0036 Japan URL http www newcosmos global com XPS 7 09 T XPS 7T 10 2008 100...

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