FT651-059
3
1
Crystal Ion Gauge M-332MX Outline
The A-NET Crystal Ion Gauge M-332MX is a transducer model
vacuum gauge that can measure pressures over a wide range from 4 x
10
-8
Pa to atmospheric pressure. The vacuum gauge controller and the
gauge head are incorporated into a single body.
This vacuum gauge is a combination vacuum gauge that uses a
crystal type vacuum gauge (crystal gauge), which employs a crystal
oscillator, for measuring in the high-pressure region and a ionization
vacuum gauge (B-A gauge) for measuring in the low-pressure region.
By a combination of pressure measurements, it is possible to measure
pressures over a wide range from 4 x 10
-8
Pa to atmospheric pressure
by a single vacuum gauge.
Crystal Ion Gauge M-332MX
2 Specifications
Table 1 Specifications
Item Specification
Gauge head
Model name: MX1
Crystal type vacuum gauge (crystal gauge) and ionization vacuum gauge (B-A gauge)
combination gauge
Pressure measurement range
4 x 10
-8
Pa to atmospheric pressure
Crystal gauge measurement range: 1 Pa to atmospheric pressure
B-A gauge measurement range: 4 x 10
-8
Pa to 13 Pa
* The lower limit pressure measurement range is indicated by the soft X-ray limit.
The lower limit pressure of the effective pressure measurement range varies depending on the
gauge head connecting flange together with the pumping system configuration and pumping system
operating conditions. (As a guideline, KF flange type: 10
-6
Pa, ICF flange type: 10
-7
Pa)
Input power supply
DC 22 to 26 V (Maximum power consumption 12 W: when filament and degas are ON)
Note: Due to the inrush current when the power is switched ON, prepare a DC power supply that has
current capacity of 1.6 Amps or higher.
Degas method
Grid power ON
Input control signal
①
Filament
ON/OFF
②
Degas
ON/OFF
③
Crystal gauge zero reset input
④
Crystal gauge ATM reset input
B-A filament ON/OFF
Controlled by the filament ON/OFF signal.
①
Manual control: zero is adjusted by the switch on the rear panel.
②
Remote control: zero is adjusted by external input.
Crystal gauge zero adjustment
③
Auto mode: when the B-A gauge switches ON, if the B-A measurement pressure remains below
the zero reset allowing pressure (1.33 x 10
-2
Pa) the zero point is automatically adjusted every 5
minutes.
Crystal gauge ATM adjustment
①
Manual control: ATM is adjusted by VR on the rear panel.
②
Remote control: ATM is adjusted by external input (set to the value set by VR)
Pressure measurement
gas type
N
2
gas conversion
Analog output
The crystal gauge measurement pressure and the B-A gauge measurement pressure are output by
a single analog signal.
Output: LOG output (0 to 10 V)
…
See Section 6 (3) for details of the analog output.
Output impedance: Approx. 100
Ω
B-A unit filament protection
operation
Over range (when operating above 13 Pa) and emission error (when over
±
50%)
<The error is reset by switching OFF the filament control signal. >
Gauge head filament
Yttoria coated iridium single filament
Gauge head flange type
KF40
Display LED
Crystal gauge operation
B-A gauge operation (B-A filament ON/OFF status)
Connector type
D-Sub 15P
External dimensions
See Page 5
Operating environment
Temperature: 5 to 40
℃
(electronics included), humidity: 70% or lower
Gauge head only temperature resistance: 150
℃
maximum
