Canon ANELVA M-332MX Operation Manual Download Page 2 | Manualshive

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FT-651-059

A-NET CRYSTALION GAUGE

M-332MX

OPERATION MANUAL

5

4

3

Mar . 5 .2010

2

Dec

.

28

.2009

1

Sep

.

11

.2000

EDITION

DATE

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Summary of Contents for ANELVA M-332MX

Page 1: ...buy your excess underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Demos In stock Ready to ship TAR certified secure asset solutions Expert team I Trust guarantee I 100 satisfaction All trademarks brand names and brands appearing herein are the property of th...

Page 2: ...FT 651 059 A NET CRYSTALION GAUGE M 332MX OPERATION MANUAL 5 4 3 Mar 5 2010 2 Dec 28 2009 1 Sep 11 2000 EDITION DATE ...

Page 3: ...ported outside Japan please contact our sales department for more information because a judgment based on the Foreign Exchange and Foreign Trade Control Law is necessary Furthermore when this product is transferred or disposed in Japan please take notice of the place where it is dealt ...

Page 4: ...ent In order to operate this instrument safely and correctly always observe the safety precautions written below Canon Anelva shall not accept any liability or guarantee for any damage incurred as a result of mishandling this instrument or failure to observe these safety precautions Before opening the controller case disconnect the power supply connector Use an input power supply in the range of D...

Page 5: ...er handling instructions This guarantee shall not apply to the following causes of failure 1 Failure resulting from mishandling incorrect use or storage 2 Failure resulting from repair work of modifications carried out by any other party except Canon ANELVA 3 Failure arising from uncontrollable forces fire flooding earthquake lightening etc This guarantee shall cover the repair or replacement of f...

Page 6: ...umption 12 W when filament and degas are ON Note Due to the inrush current when the power is switched ON prepare a DC power supply that has current capacity of 1 6 Amps or higher Degas method Grid power ON Input control signal Filament ON OFF Degas ON OFF Crystal gauge zero reset input Crystal gauge ATM reset input B A filament ON OFF Controlled by the filament ON OFF signal Manual control zero is...

Page 7: ...OFF Not operating No power input circuit failure Red illuminated Controller internal hardware error Circuit failure Red flashing 1 Note 1 Crystal unit gauge head error Gauge head not connected gauge head failure Crystal Red flashing 2 Note 2 Zero adjustment or ATM adjustment error the error is output continuously until corrected Error when adjusting zero Zero adjusted at a pressure of 10 2 Pa or a...

Page 8: ...sions 5 Unpacking and Checking When you receive this product immediately open the packaging and check all components are included Inspect the outside for any external damage Components Crystal gauge M 332MX main unit with gauge head 1 D Sub connector HDAB 15S Hirose Denki 1 Plug case HAD CTH Hirose Denki 1 Operation Manual 1 ...

Page 9: ...s from the controller drive voltage or if the control signal power supplies are to be insulated from the controller drive power supply or if the effects of noise are to be considered connect the control signal Vcc IN to a separate power supply 2 Remote Control Input Function Table 5 Remote Control Input Functions Signal Name Pin No Function B A filament inhibit input 5 Prohibits the filament switc...

Page 10: ...quation Pressure unit Pa Vout 0 6 x Log10 Press 133 33 6 875 Press 133 33 10 Vout 6 875 0 6 Conversion table Analog Output Vout V Error Content 0 4 Sensor error 9 5 Sensor error at crystal gauge failure or when B A gauge protection is operating The lowest voltage output during pressure measurement except when an error occurs is the value of the measured pressure lower limit value of each gauge cry...

Page 11: ...e gauge head pins are all standing perpendicular Align the gauge head insertion guides on the gauge head side and the controller side and then insert the gauge straight After inserting tighten the M3 gauge head locking screw to lock the gauge head securely to the controller If the gauge head is not inserted cleanly into the controller do not force it Re check the M3 screw and gauge head pins and t...

Page 12: ...ed and needs replacing See Section 7 for the method of replacing the sensor Automatic Zero Adjustment In addition to operation written above the zero can be adjusted automatically in conjunction with the B A gauge When the B A gauge is ON if the B A measurement pressure remains below the zero reset allowing pressure 1 33 x 10 2 Pa the zero point is automatically adjusted every 5 minutes 2 ATM Adju...

Page 13: ... oscillating inside the gauge head due to broken wiring etc Replace the gauge head Crystal Red flashing 2 Note 2 Error when adjusting zero Adjust the zero at a pressure of 10 2 Pa or below If there is no improvement replace the gauge head Error when adjusting ATM Adjust the ATM pressure in the adjustment range If there is no improvement replace the gauge head Red illuminated The B A gauge filament...

Page 14: ...quipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentation Artisan Scientific Corporation dba Artisan Technology Group is not an affiliate representative or authorized distributor for any manufacturer listed herein We re here to make your life easier How...

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