Bruker M4 TORNADO User Manual Download

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TORNADO

High performance Micro-XRF spectrometer

Summary of Contents for M4 TORNADO

Page 1: ...M4 TORNADO High performance Micro XRF spectrometer ...

Page 2: ...d the contents of this manual for agreement with the hardware and software described Since deviations cannot be precluded entirely we cannot guarantee full agreement However the data in this manual are reviewed regularly and any necessary corrections are included in subsequent editions Suggestions for improvement are welcome Order no DOC M81 EXX012 V1 Issue 04 12 13 2013 Bruker Nano GmbH Berlin Ge...

Page 3: ...Spectrum 23 3 6 Evaluation of X ray Fluorescence Spectra 23 4 The M4 TORNADO system 27 4 1 Product Description 27 4 1 1 Product features 27 4 1 2 Product versions 27 4 2 Hardware System Components 28 4 2 1 Spectrometer 29 4 2 2 Instrument control PC 30 4 2 3 Vacuum system 30 4 2 4 Technical parameters 30 4 3 Hardware Installation 32 4 3 1 Room planning 32 4 3 2 Electrical connection 33 4 3 3 Exter...

Page 4: ...stems layer thickness 85 6 5 Point Analysis 85 6 5 1 Definition of measurement conditions 86 6 5 2 Measurement and data evaluation 89 6 5 3 Quantification 89 6 6 Multi Point Analysis 89 6 6 1 Definition of measurement conditions 90 6 6 2 Measurement and data evaluation 92 6 6 3 Quantification 92 6 7 Auto Point Analysis 93 6 7 1 Definition of measurement conditions 93 6 7 2 Measurement and data eva...

Page 5: ...or autofocus calculation 134 6 12 8 Settings in the area for mosaic image 135 7 Often Used Analytical Procedures 137 7 1 Recommended Measurement Parameters 137 7 2 Point 138 7 3 Multi Point 140 7 4 Auto Point 142 7 5 Line scan 144 7 6 Area Analysis 146 7 7 Quantification 148 7 7 1 Quantification of a single element spectrum 148 7 7 2 Quantification of distribution measurements 149 8 Shutdown 151 8...

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Page 7: ...on of a quantification method 76 Fig 25 Method editor 77 Fig 26 Result presentation for interactive quantification 80 Fig 27 Results tab 83 Fig 28 Parameter tab 83 Fig 29 Spectrum tab 84 Fig 30 The Point workspace 85 Fig 31 Definition of acquisition parameters 89 Fig 32 Point analysis result 89 Fig 33 The Multi Point workspace 90 Fig 34 Definition of acquisition parameters 92 Fig 35 The Multi Poin...

Page 8: ...Taking a white standard 132 Fig 64 Adjustment of image size 132 Fig 65 Adjustment of the X ray spot position 134 Fig 66 Setting in the area for autofocus 135 Fig 67 Setting of reduced area for mosaic image 136 Fig 68 Background correction of brightness control 136 Fig 69 Point analysis 138 Fig 70 Multi Point analysis 140 Fig 71 Auto Point analysis 142 Fig 72 Line scan analysis 144 Fig 73 Area anal...

Page 9: ...r quantification 77 Table 27 Result presentation for interactive quantification 81 Table 28 Quantification results display 82 Table 29 Energy calibration of the current spectrum 84 Table 30 Options for the sample image 86 Table 31 Options for mosaic imaging 88 Table 32 Functions of the Multi Point workspace 90 Table 33 Functions of the Auto Point workspace 93 Table 34 Functions of the Line workspa...

Page 10: ...List of Tables 10 User Manual Table 59 List of the components included in the standard delivery 159 ...

Page 11: ...pabilities of the product We reserve the right to make product changes that enhance technical advancement 1 2 User Information The manual is divided into several sections You can find the section heading in the header line on every page The footer line contains the name of the user manual and the page number Various cross references are included in the operating instructions to ease navigation wit...

Page 12: ...ions of any sort Radiographic applications Online process analytical applications in industry and research Analysis of aggressive chemical or radioactive substances 1 4 Warranty and Liability The general conditions of sale and supply as passed to the operator of the M4 TORNADO X ray analysis device by Bruker Nano GmbH strictly apply Warranty and liability claims for personal and material damage ar...

Page 13: ...er and users 2 2 Basic Safety Requirements The following basic safety requirements must be observed at all times The M4 TORNADO may only be used as intended All safety instructions in this document and in all other applicable documents must be observed and fulfilled The device may not be operated unless the complete safety equipment such as the protective housing is present and fully functional Th...

Page 14: ... is prepared for an indoor use for laboratory environment i e dry and normal contaminated no external water The measurement site should not be close to strong magnetic fields such as electric motors or generators In the surroundings of the measurement site there should not be any sources of splashing water such as showers or washing sites The instrument should not be exposed to aggressive media at...

Page 15: ...urce operation parameters as certified according to anti radiation precautions 2 6 Protection against Electric Current Danger The mains voltage supply of 100 V to 240 V and the high voltage supply of the X ray tube of 50 kV are highly dangerous at body contact Observing the safety rules can prevent a risk of X ray radiation for the operator due to the measures taken and the technical installations...

Page 16: ... discernment either temporarily or permanently The manufacturer must have familiarized at least one person of the operating staff with the technical and safe application of the M4 TORNADO This accountability is non transferable Each person who is authorized to set up install activate or operate the M4 TORNADO must have read and understood the complete manual The staff must have profound knowledge ...

Page 17: ... the sample chamber shutter can only be opened if sample chamber door is closed 6 Primary radiation protection of the X ray tube Housing made of 3 mm brass and 3 mm Cu with a 3 mm hole for limiting the beam emission not visible 7 Secondary radiation protection of the X ray tube Housing made of 2 mm steel for further limiting the emission of X rays 8 Shutter Software controlled shutter for opening ...

Page 18: ...O 2 10 Warning Labels and Name Plates Table 2 Warning labels and name plates of the electronic units Element Place Function Front panel Company logo Front panel Product name Rear panel Name plate of the instrument Rear panel Name plate and warning label of the X ray source and the HV 1 2 3 4 5 ...

Page 19: ...ominantly specific to elements and not specific to molecules X ray fluorescence analysis is a method for the determination of the element content in samples Conclusions about the chemical bonds cannot be made directly this way 1 ionization of an inner shell by an X ray photon 2 refilling of the gap with an electron from a higher energy level 3 emission of an X ray photon Fig 2 Emergence of X ray f...

Page 20: ...tral background of the excited spectrum The background in X ray excited spectra is mainly a result of scattering of tube radiation on the sample Therefore tube excited spectra have a better peak to background ratio and allow for better sensitivity 3 2 Detection of X ray Quanta The emitted radiation of the sample hits the detector There it is absorbed and generates charges In the SDD electrical cha...

Page 21: ...uanta were counted in a certain energy range channel In the magnified section of last figure the channel structure of the spectrum can be recognized An examination of the signal processing reveals that the signal is just processed sequentially But due to the fast process a few 10 000 cps can be accumulated it seems that the spectrum is growing simultaneously X ray quanta which are detected with ex...

Page 22: ...ics Mono energetic X ray quanta are thus not displayed as sharp lines in the displayed spectrum but spread to a Gaussian type curve The most important parameter for the description of this essential detector feature is the Full Width at Half Maximum FWHM which defines the peak width at the half peak maximum The FWHM value depends mainly on the following parameters design of the detector and the ap...

Page 23: ...e electronics and for service tasks in particular for energy calibration and live time calculation Ordinate in the measuring unit counts pulses or after switching into the measuring unit counts per second cps in the software 3 6 Evaluation of X ray Fluorescence Spectra The X ray fluorescence analysis is intended to solve two partial tasks Which elements are present in the sample and what is the co...

Page 24: ...c data library The identification of the elements is normally done by an interactive comparison of the measured spectral lines and the measured spectrum from the periodic table 3 Background correction A remaining spectral background composed of the detector shelf and the scattered excitation radiation has to be subtracted from the spectrum The scattered part depends on the sample itself For heavy ...

Page 25: ...ror Sigma For each deconvoluted fluorescence peak the absolute standard deviation on the basis of the statistical error of the complete peak and the background is calculated BG i i N N 2 δ δi standard deviation for the peak area Ni net peak area for the element i NBG background area 6 Fit quality Chi 2 The fit quality is a statistical parameter which allows conclusions about the quality of the dec...

Page 26: ...cation method Different methods can be used in dependence of the knowledge about the sample homogeneous layer system on the availability of references and the requirements for accuracy This method calculates the concentration of the elements in the sample Finally these results are displayed and prepared for a measurement report ...

Page 27: ...ent control via graphic user interface GUI for easy handling with control functions for the instrument like o excitation conditions tube parameters filters measurement time o detector o stage position control o camera magnification illumination of sample chamber Measurement of spectra element distribution Display of data spectra element distributions Quantification with standardless Fundamental Pa...

Page 28: ...circuitry PC with peripheral components like monitor keyboard mouse Vacuum pump Fig 6 Components of the M4 TORNADO system The connections of the M4 TORNADO system components are listed in Table 4 Table 4 Connections of the M4 TORNADO system components Pos Component Connection Function 1 spectrometer line connector line connection with integrated cut out 2 control PC line connector line connection ...

Page 29: ... excellent count rate capability combined with very stable energy resolution 145 eV for Mn Kα even at high count rates Optical microscopes allow a differentiated sample view in the instrument This is important for the exact positioning of the small spots in Micro XRF The instrument has 3 camera systems a camera in the sample chamber door that allows an overview of the sample in the chamber a camer...

Page 30: ...ing speed is reduced to compensate only the leakage In that status the pump runs quietly Only when pumping against air in the sample chamber the pump is loud The pump is oil free which avoids back diffusion oil from the pump into the sample chamber That could contaminate the sample or components of the instrument detector X ray optics The pump is also maintenance free 4 2 4 Technical parameters Th...

Page 31: ...dow MCBM 50 0 6BRh MCB 50 0 7q W 50 kV 30 W 40 W for tungsten Poly cap lens with spot size 25 µm or collimator HV power supply Manufacturer Type Max output Input Hitek MH60 503 04 50 kV 24 V Detector Manufacturer Type Sensitive area Energy resolution Max count rate Bruker Nano GmbH SDD 530 30 mm 2 145 eV for Mn Kα 400 000 cps for Cu MCBM and lens excitation Signal and control electronics Manufactu...

Page 32: ...icroscope 10x and 100x sample view of approx 1 mm and 1 cm door camera for chamber overview USB Operating conditions Optimum temp range Working temp range Rel humidity Compartment air 22 C 28 C 18 C 32 C 20 80 not condensing free of corrosive fumes no intensive dust exposure 4 3 Hardware Installation 4 3 1 Room planning The installation must be performed on a sustainable and vibration free support...

Page 33: ...ions required for the M4 TORNADO are specified in Table 6 Table 6 Electrical connections Electrical connection Dimensions Spectrometer 100 V 240 V 50 Hz 60 Hz max 400 W Vacuum pump 100 V 120 V 50 Hz or 100 V 120 V 60 Hz or 210 V 230 V 50 Hz max 530 W during pumping max 60 W for vacuum Control computer and periphery depending on the PC max 150 W ...

Page 34: ...main components have a temperature compensation that allows the user to work in a wide temperature range Too high temperatures can influence the correct working of the instrument Working temperature range 18 C 32 C Relative humidity 20 80 not condensed Heat production The instrument and the connected components produce a heat loss of about 150 W which is emitted to the surrounding Compartment air ...

Page 35: ...o intuitive graphic user interface It allows the control of the instrument and a sophisticated spectrum evaluation and quantification 5 1 1 Start up and Login The M4 TORNADO software runs on the M4 TORNADO server and the client workstations However the user only has to start the client application the server software and communication drivers will start and log in automatically A desktop icon and ...

Page 36: ...undamental parameter data evolution Area provides distribution analysis on areas with HyperMap functionality i e saving of a spectrum for every pixel and offers possibilities for further data evaluation System comprises all maintenance and service dialogs for system set up calibration license administration and others It is required for installing a new license file if a software upgrade has been ...

Page 37: ...ription in section 6 2 3 The hierarchical tree structure of a project facilitates the grouping of coherent data e g spectra result listings and the associated sample images By sending combined objects to the project via the corresponding Import Export menus the tree structure is organized automatically Measurement and analysis area workspaces The different workspaces can be selected by using the b...

Page 38: ...n and analysis options Also a number of text icons can be clicked to get access to option dialogs settings and selection boxes In many cases diagram axis descriptions and column titles can be clicked to toggle selections Active screen items are indicated with small right facing arrows active items will react when the mouse cursor is moved over them Clicking into data lists and thumbnail images res...

Page 39: ...tions Special sections image display spectrum display can be enlarged to complete screen size by the green arrow in their upper right corner 5 1 5 Analysis options Standardless analysis The software includes standardless quantification option MQuant based on Fundamental Parameter FP which allows to quantify a large variety of samples including plastics oxides metals Layer thickness analysis The so...

Page 40: ...are supported Examples are common graphic formats like bmp jpg tiff and png EXCEL formats and EMSA MSA spectra Proprietary file formats ensure complete data conservation including all secondary information attached to an object Multiple data can be grouped in project files Graphic export Typical data like spectra and concentration profiles can be exported in form of data or graphic files Graphics ...

Page 41: ...forms about the start of installation Select the type of device you would like to operate M4 TORNADO or M6 JETSTREAM The third step informs about the path for the installation This path can be changed according the PC requirements It is recommended to install in C Here the path and name for saving the personal measurement data can be set ...

Page 42: ...procedure has to be finished After finishing the setup assistant the M4 TORNADO program is available M4 TORNADO can be started with the entry in the Start menu or the Desktop Icon 5 2 2 Installation of the USB camera driver If the instrument is connected to the USB port the driver has to be installed separately The current drivers are µEye32_39000 exe and µEye64_39000 exe for 32 and 64 bits respec...

Page 43: ...s and each of them has 2 drivers 5 2 3 Connection of PC and instrument The instrument and the PC are connected via USB for the camera image transfer and Ethernet for all additional instrument communication Both connections have to be activated i e the USB drivers have to be installed see section 5 2 2 and the Ethernet address of PC and instrument has to be set The Ethernet connection between instr...

Page 44: ...onnection between instrument and instrument PC Windows XP Dialog Description Selection of Network connections on the PC Select Local Area connections Select the Internet Protocol TCP IP Use the following addresses IP address 192 168 10 1 sub net mask 255 255 255 0 ...

Page 45: ...cription Selection of Network connections on the PC Select Local Area connections Select properties Select the Internet Protocol Version 4 TCP IPv4 Use the following addresses IP address 192 168 10 1 sub net mask 255 255 255 0 For definition of the address of the instrument go to the System workspace and select the System button ...

Page 46: ...are version New software versions are delivered as an Install CD Here the Install exe file has to be executed Before doing that the path of the existing program should be changed The path is C programs Bruker M4 Tornado This can be renamed to for example M4 TornadoX Then the update can be started Table 13 Installation of a new software version Step Description Terminate the QUANTAX communication s...

Page 47: ...ls and information for troubleshooting are provided too The communication server runs on the instrument PC Clicking the Bruker icon in the Windows task bar of the instrument PC opens the console of the communication server With exception of the actions described below no changes to the communication server settings are allowed Unauthorized altering of settings can render the system useless and lea...

Page 48: ...assigned users If users have to be deleted anyway it has to be made sure that all user data to be retained is copied to public volumes To delete a user highlight the user name in the list provided in the QuanTax user tab of the communication server After clicking Delete the deletion of the user data has to be confirmed separately Caution once confirmed the deletion cannot be revoked If the deletio...

Page 49: ...ications Please check the detector manual to decide which of the above options is the most suitable for your purpose Detector window The X ray detectors can be equipped with a beryllium window detection range starting from sodium or a light element window Both kinds of windows are extremely thin fragile and contact sensitive In general cleaning of the windows is neither necessary nor permissible I...

Page 50: ...re switching it on For operation start the operator must be familiar with the measurement and evaluation software For a detailed description of the particular functionalities please refer to the following software description During operation error messages can occur resulting from operating errors or technical problems Table 14 describes the steps that must be observed when starting the instrumen...

Page 51: ...t it has to be decided which is the best procedure for the X ray tube The tube needs to be warmed up for high stability in particular for quantification On the other hand the filament will be stressed in case of too long running with high heat current or if the filament is switched on and off very often Therefore it is recommended to run the tube all day but in case of no measurement the tube curr...

Page 52: ...The M4 TORNADO Software 52 User Manual Reduce the tube parameters Move the stage to the park position Shut down the X ray tube Vent the sample chamber Fig 11 Switching off the instrument ...

Page 53: ...Start up screen of the program M4 TORNADO Table 15 Functions and settings of the start up screen Object Description Hints Username Every user can have its own account Password The account has to be opened with a password Server selection dropdown list Remember password on this computer Login current user ...

Page 54: ...es measurement data and results are compiled in Table 16 Table 16 Functions for display control Object Description Hints Title bar Minimize program window Full screen mode on off Close program Closes window and shuts down program General Full screen mode Toggles between normal and maximized window display Import Export menu Image capturing Display of measurement data Display of results Title bar H...

Page 55: ...s and peak finder Searches volumes for similar spectra Spectrum arithmetic Zoom function Auto scales spectrum window according to foreground spectrum Scales the displayed spectrum in the foreground for full intensity and energy Edits display settings Recycle bin Deletes the highlighted spectra from the list Result window Edits display settings Further display and control elements are described in ...

Page 56: ...ber door Danger If the door is moving do not put your fingers close to it In case of touching the bottom corner of the door during movement the door will stop automatically Switching off the HV for the X ray tube The actual tube parameters will be displayed in the device area see section 6 2 2 If the instrument has two tubes each tube has an own icon Display of the shutter position red open grey c...

Page 57: ...evice name opens a dialog for setting up device parameters The colored status signal left of the text lines informs about the device status This status signal can be green or red In the latter case the hardware component is not ready to work Clicking onto a hardware line will select this component as the active one in case of two tubes or two spectrometers for subsequent spectrum acquisition The s...

Page 58: ...at the temperature is controlled and allows stable energy resolution Maximum means that the temperature is reduced to minimum value please note that this reduces the detector stability Detector temperature 6 2 2 2 X ray tube settings The tube line shows the following information Anode material of the tube Actual values for tube voltage and current Set values for tube voltage and current The downwa...

Page 59: ...nt are controlled for maximum power Tube current Setting of the current tube current Standby after Idle time of X ray tube before going in standby modus Can be checked or unchecked unchecking will wake the tube from standby Filter Selection of the current filter 6 2 2 3 Stage settings The stage line shows the actual stage position for X Y and Z Fig 17 Stage line The downward facing arrow opens a d...

Page 60: ...sition of the cross hair on the stage this position can be defined as measurement position with Use as load position The setting limits option can be switched to the movement option After activating the movement option it is possible to move the table in X Y and Z direction by clicking on the table and the Z bar Speed and acceleration will be set for the 10x mag for the 100x it is slower It will b...

Page 61: ...the project via the Import Export menus of the specific workspaces Objects saved in a project can be retained including all primary data relevant settings and attached information This allows the combination of different data types spectra images element distributions results element lists etc in one file Some of the M4 TORNADO objects can only be saved by embedding them in project files Fig 18 sh...

Page 62: ...ens an information dialog that shows the measurement conditions and offers the opportunity to give a name for the project or to add a comment 6 2 3 1 Starting a new project To start a new project open the Import Export menu of the screen area Project icon in line with the word Project and click the option New Select an element of the project and click at the end of the element line to enter your u...

Page 63: ...ng to the item type Hierarchical objects are sent to the project using the Import Export menu at the top right of the workspace display area A subfolder is created containing all selected elements Dragging items Spectra and images can be dragged with the mouse directly into the desired project line This way the project tree can be organized by hand Prior to dragging the item to the required locati...

Page 64: ...1 1 Spectrum preview The spectrum preview mode displays a continuously refreshed spectrum Any change of the sample position or settings will immediately be reflected by the spectrum on the screen The dialog that opens by clicking the downward facing arrow next to the button in the Point workspace offers the possibility to set the refresh time for the spectrum preview Fig 19 Setting the refresh tim...

Page 65: ...omatic timing a linear scale is provided With manual timing the estimated precision according to the count statistics is used as an indicator The green range spans a statistical error of about 5 to 0 1 absolute deviation This allows flexible timing according to the purpose of the analysis 6 3 2 Spectrum display and manipulation Spectrum name As soon as the acquisition is started the settling spect...

Page 66: ...s already been saved or it is stored on a temporary folder on the harddrive after a software restart a disc symbol appears next to the spectrum name Multiple spectra can be exported at once by highlighting several lines at a time Just keep the SHIFT or CTRL key pressed while clicking into the desired spectra To highlight more than one line hold the SHIFT or CTRL key while clicking onto the spectru...

Page 67: ...thod is possible see section 6 4 3 2 Changes Y axis units on top of the Y axis Toggles between cps eV and Pulses eV It also applies to the similar control above the spectra list Function bar on the right hand side Display of spectra Maximize minimize spectra window in upper right corner Toggles between normal and maximized spectrum window display covers project and devices areas Import Export menu...

Page 68: ...highlighted spectra from the list Functions below the spectrum display Display of results Display of spectra results The icon at the beginning of the line means that this spectrum is stored If a spectrum is highlighted the corresponding measurement point in the sample image will be highlighted too Selects all spectra for display Changes X axis units Toggles between energy in keV and channel displa...

Page 69: ... menu They can be saved in different formats txt xls and several image formats Net sum intensity as calculated by quantification ROI net sum intensities background subtracted ROI sum intensity summed up including background Lists the elements in alphabetical order Definition of the sequence of displayed results by atomic number or value Hot keys Alt left mouse button and move cursor in spectrum im...

Page 70: ...ectra may be found similar that are actually not comparable by their element content The matching procedure can also be used as a qualitative analysis option for spectrum identification In this case the spectrum of an unknown sample is compared with spectra from a library The result is a ranking showing which library spectrum is the most similar to the analyzed spectrum For the matching procedure ...

Page 71: ...le Sets the sensitivity for searching Starts the search process When completed the number of searched spectra and identified spectra is displayed After changing the sensitivity the spectrum search has to be started again Right side of the dialog Displays matching results The results are presented in the spectrum display For a detailed description of the display options please refer to section 6 3 ...

Page 72: ...ble click into the spectrum window The tool opens in form of a semi transparent dialog The dialog provides different operating modes which can be selected by clicking the tabs in the headline The bottom line controls e g for clearing the complete selection adding elements by name and controlling display of line markers are the same for all operating modes Periodic table of elements The table of el...

Page 73: ... actually present in the sample After clicking one of the element symbols in the finder list this symbol will be highlighted and the corresponding element is added to the identification list The complete list is indicated in the top line of the finder display Clicking or double clicking individual element symbols performs the same action as in the other operating modes New elements can be also add...

Page 74: ...o the button The opened Configuration dialog allows several selections The dialog contains the periodical table of elements Elements marked in grey are forbidden elements Forbidden elements The identification of peaks may be ambiguous due to severe overlapping of X ray lines when all elements of the periodic table are to be considered in a given situation To support fully automatic element identif...

Page 75: ...tarted by clicking the button of the corresponding workspace Quantitative results are provided in a result dialog at the end of the evaluation procedure and are then attached to the corresponding spectrum Results can also be checked at any time from the quick information section of the spectrum list the parameter editor or a result list The setup of the element identification controls the display ...

Page 76: ...ntification method Description Click the button to start the quantification Select A for automatic quantification or i for interactive quantification The downward facing arrow next to the button allows to load a selected quantification method FP standard based or layer thickness The rightward facing arrow below the button allows the definition of the FP quantification method using the method edito...

Page 77: ...element The different options offered by this dialog are described in the table below Fig 25 Method editor Table 26 Options for the definition of element properties for quantification Option Description Display of elements with pre settings for quantification color coded These settings define how the elements should be used during quantification and are used independent of the type of peak ID The ...

Page 78: ...ill be displayed with a grey background and handled as a forbidden element Element presence unknown The element will be displayed normal and can be searched as additional element Special properties of selected elements In this field it is possible to define settings for every selected element Compound If certain elements are present in stoichiometric compounds it is possible to use this knowledge ...

Page 79: ... background and are correspondingly marked in the special property of the element This function can be used for peaks that do not come from the sample but are generated by the spectrometer Quantify by difference If an element should be quantified by difference it can be selected These elements are displayed with a red background and are correspondingly marked in the special property of the element...

Page 80: ...chosen When started with the button the analysis procedure always refers to the spectrum or spectra currently highlighted in the spectrum list foreground spectrum in the display regardless if this is loaded from file acquired but not stored or even currently under acquisition In case of automatic quantification the results will be displayed immediately in the result table and below the spectrum di...

Page 81: ...icon opens the tool box for the definition of the type of results that should be displayed Spectra Display of the original measured spectrum the calculated background spectra the reconstructed sum of fitted pure element spectra and all fitted pure element spectra The comparison between measured and sum of deconvolution allows the identification of all elements The identification of further element...

Page 82: ...nd side of the screen The Spectrum tab displays the results for the current spectrum with the statistical error Sigma see Table 3 The Table tab displays the results of N measurements together with the mean value and the standard deviation Sigma of the N results Sigma mean is the standard error of the mean values calculated by division of the mean value with the square root of N and therefore gives...

Page 83: ...r tab presents measurement data of the current spectrum such as General data like measurement date measurement time live real Excitation parameter like HV tube current tube target used filter and Detector data like detector type used window etc Fig 28 Parameter tab The Spectrum tab offers the possibility for the energy calibration of the current spectrum The energy calibration can be performed wit...

Page 84: ...finition of the two energies it is also possible to use the zero peak In this case the symbol is 0 It is necessary to define which line series should be used The energies of the selected lines will be automatically defined The energy calibration will be started with the icon After calibration the new calibrated values are written into the corresponding fields They have the following meaning linear...

Page 85: ...ownward facing arrow right of the button 6 4 5 Quantitative analysis of coating systems layer thickness In layer systems both thickness and in case of alloyed layers the composition is of interest The quantification procedure runs in the same way as the standard based quantification Herefore an prepared XADF file for the specific layer thickness application is required see 6 4 4 The XADF contains ...

Page 86: ...ent point View from the top of the sample with a size of 1 4 mm x 1 1 mm a circle marks the position of the measurement point Look inside the sample chamber from the door with a fisf eye camera Use the corresponding tab to switch between the different sample views Import Export menu for images See Fig 9 Toggle switch for click drag This function allows easy sample positioning by clicking on the po...

Page 87: ...croll bars Full screen of current sample image Enlarge the image view for full screen size and reduce back to normal view Allows to position the measurement spot easily Adjustment of image quality Adjustment of exposure time amplification brightness and saturation Settings for image legend Separate control of illumination of sample and sample chamber Scale bar for every image 6 5 1 2 Mosaic imagin...

Page 88: ...ion improves the image quality by correcting the brightness distribution taken of a white surface Collection with Reduced image range herefore the shadow free inner part of the image is used for creating the mosaic Collection with High Image Resolution no image compression Mosaic image of the sample Single images can be identified by shadows at the corners Improvement of image quality by applying ...

Page 89: ...ton The stage moves then to the position of the defined point and the measurement is started Fig 32 Point analysis result The spectra and results can be displayed and evaluated as described in Table 21 6 5 3 Quantification Quantification can be performed as described in section 6 4 3 6 6 Multi Point Analysis The Multi Point workspace permits the analysis of different points objects in defined patt...

Page 90: ...e described in the next table Table 32 Functions of the Multi Point workspace Object Description Hints Object selection Click this icon to be able to select objects already drawn Defines points with mouse cursor Points will be listed and numbered Allows to create an rectangular area where a predefined number of points can be set automatically as a grid or randomly Allows to create an elliptical ar...

Page 91: ...irectly Position points randomly within field of view The points are randomly distributed Number of points to be created Name of the measurement point Enter a name for the point to be used in the spectra If Automatic numbering is activated all spectra will receive this name plus a consecutive number beginning with the one entered under Image number Otherwise a unique name has to be entered for eve...

Page 92: ...he measurement can be started with the button The stage moves then to the first position of the defined points and the measurement is started Fig 35 The Multi Point workspace result The spectrum of every object will be saved and displayed in the list of the measured spectra From there they can be manipulated evaluated and quantified see section 6 3 and 6 4 The functions for the data evaluation in ...

Page 93: ...sample positioning has to be performed according to the description in section 6 5 1 Different patterns like single points lines and matrices can be defined Positions for the measurement points can be defined in all sample images high magnification low magnification and mosaic see section 6 5 1 1 The available functions for setting the measurement points are described in Table 33 Table 33 Function...

Page 94: ... will be saved into the table Pre setting of the number of points in lines X and matrices X Y The number of points can also be changed in the table by highlighting with double click and editing Every measurement point will be displayed Before a measurement an autofocus run will be performed in the measurement position This function can be helpful in case of non regular shaped samples Single object...

Page 95: ...sition By moving the stage into another position or by defining another position with the mouse and saving with the current pattern will be adjusted Shift selected element allows the shift of a selected element into another position according to the given shift parameters The adjustment can be performed for a every single object The shift function is helpful in case of repeated patterns in the per...

Page 96: ...nt time or preset counts in a defined energy region Settings for quantification Fig 37 Definition of acquisition parameters 6 7 2 Measurement and data evaluation The measurement can be started with the button The stage moves then in the first position of the first defined object and starts the measurement The following hints can be important for the measurement It is possible to set the element li...

Page 97: ...space in the spl format can be opened both in the Point and in the Multi Point workspace In case of selecting a file all spectra will be displayed in separate images see Fig 39 It is possible to select all or single ones for the display in the spectrum field Fig 39 Spectrum selection in the spl format 6 7 3 Quantification Quantification can be performed as described in section 6 4 3 ...

Page 98: ...f the scan line to the desired positions Information on the image scan and spectrum windows can be found in the corresponding sections Table 34 Functions of the Line workspace Object Description Hints Display of length of the line scan Set number of points along the scan line or the distance between points The minimum step size is 4 µm Both selections will alter The value for the other selection i...

Page 99: ...y on the line Scale profile window Y axis in mass or atomic percent Quantify has to be clicked beforehand for this option to work Acquires line scan Starts the measurement Sets acquisition parameters See section 6 3 1 2 Quantify line scan Starts quantification Select quantification method Edit selected quantification method Pre setting of measurement mode Measurement time per pixel Mode of stage m...

Page 100: ... the Line workspace Table 35 Options for data evaluation in the Line workspace Object Description Hints Tab to access the profile window Upper part of the workspace Display of the distribution of intensity or concentration Lower part of the workspace Display of the line scan area in the sample image Import Export menu See Fig 9 Element identification See section 6 3 3 Auto scale profile window Opt...

Page 101: ...ed It is also possible to define a section of the line scan Click Drag The sum spectrum of this section will be displayed 6 8 3 Quantification of line distributions Since a complete spectrum is saved for every point of a line scan it is possible to quantify the spectra and calculate the concentration distribution along the line For that purpose the quantification method has to be selected as descr...

Page 102: ...ge in every presentation mode by moving the edges with the mouse Table 36 Options of the Area workspace Object Description Hints Top left Defining the mapping area Image with highlighted area The sample image can be prepared in all magnifications Mosaic 10x 100x The green highlighted area defines the mapping area Move the mapping area by click drag on the corners Functions keys right and below the...

Page 103: ...ttom left Settings for display of element distribution Filter options for the video imaging processing Filter options for the element data processing With this filter different mathematical models are applied to improve the element distribution display Top right Options for data acquisition and evaluation Acquiring area Starts the measurement Setting up acquisition parameters See section 6 3 1 2 Q...

Page 104: ...h fast mapping however the acquired spectra are not saved Click the downward facing arrow next to the button to open the method browser click the method name to evoke the method editor for detailed settings The button can be used to quantify spectra of selected regions in the Hypermap A colored phase image that reveals the local distribution of different phases in a sample can be produced by click...

Page 105: ...stribution map Map result tab Spectra from different objects Spectrum tab Element distribution along any line in the map Line scan tab Phase analysis Phases tab The corresponding presentation mode can be selected with the tabs that will be described in the next sections 6 9 3 The Map result tab Fig 46 Map result display on the Area workspace ...

Page 106: ...ve to standard mapping colors see section 6 9 3 5 Element chart with histogram of intensities binary and ternary diagrams Allows simple chemometric data evaluation see Table 39section 6 9 3 6 Definition of objects for analysis See section 6 9 3 2 Spread the distribution image to full size of the screen Changes the size of the distribution image to the accumulated pixel resolution Drawing tool Show...

Page 107: ...ing in pixel and µm and pixel size the number of frames and the measurement time per pixel and total the excitation conditions tube parameters filter Fig 47 Display of mapping information 6 9 3 2 Defining objects Points lines rectangles ellipses and polygons can be drawn as an object into the map For those objects the sum spectra will be calculated and displayed in the Spectrum tab In case of draw...

Page 108: ...tions Element legend on off Mixture of element distribution Standard only allows the sum of element intensity Enhanced allows to sum and to subtract element intensities These symbols appear on the bottom right of the thumbnail and can be changed by a mouse click Note that for the substraction of element intensities they have to have the same color The intensity of each element can be regulated wit...

Page 109: ... spectrum can be selected from the thumbnail list at the bottom and displayed as single or multiple element distribution Each with one colour were saturation correlate with intensity of the signal Brightness and saturation can be set with the scroll bars below the image False colour display showing the distribution for the selected element Sensitivity and saturation can be set with the scroll bars...

Page 110: ...en similar intensity in different pixels for two elements The elements of interest can be selected in pull down menus the sensitivity for colouring with the scroll bars The ternary map shows the relation between two selected elements and all others The elements of interest can be selected in pull down menus the sensitivity for colouring with the scroll bars 6 9 4 The Spectrum tab The Spectrum tab ...

Page 111: ...nt of the pixel This spectrum allows the identification of elements that are concentrated only in hotspots With this knowledge the calculation of the distribution of these elements is possible All other functionalities of the spectrum display are the same as described in section 6 3 2 Fig 51 The Spectrum tab 6 9 5 The Line scan tab Fig 52 The Line scan tab The functionality is the same as describe...

Page 112: ...s offers the possibility of supervising the process see 6 9 6 2 All three methods work based on the number of elements chosen e g via the periodic table and selected within the clipboard for the mixed map image within the Map result tab the order the elements are displayed within the clipboard under the Map result tab In general the best results are achieved for a phase image when the elements tha...

Page 113: ...clipboard under the Map result tab The Phases tab offers the following functionalities Table 40 Options of the Phases tab Object Description Hints Activates histogram method enables PCA and auto binning Works directly on the element intensities QMap concentrations optionally performs Principal Components Analysis PCA before binning optionally creates bins automatically instead of fixed size Activa...

Page 114: ...mage The lower the value is set on the area slide bar the more phases are detected and less pixels remain unassigned Allows the control of the sensitivity used to connect small phases The higher the value on the edges slide bar the more small phases which are mostly found along grain boundaries are merged into a single phase This feature can be turned off by unchecking the box next to it Map contr...

Page 115: ...and merges pixels with similar composition into one phase depending on the sensitivity chosen The higher the value is set on the Sensitivity slide bar the more phases are identified With the Object method a phase image can be produced based on the user s knowledge of the sample Every phase that should appear within the phase image needs to be pre selected under the Map result tab using the pipette...

Page 116: ... phases can be added or deselected by double clicking on the image 6 9 7 Quantification of area distributions The quantification of all single pixel spectra of an area distribution is not recommended since the number of counts per pixel is usually too low and the calculation time is too long Therefore it is recommended to bin pixels So the counts per spectrum are increased to obtain better quantif...

Page 117: ...surement data of spectra images mapping etc That means if a spectrum is shown in the report the spectrum data is also maintained in this report This allows rescaling copying back to the workspace or even evaluating spectra from within the report editor As long as the report is saved using the internal report format rpt this data can be fully retrieved at any time and any place where the M4 TORNADO...

Page 118: ...Static graphics like logos rulers and boxes can be loaded from a file or included in the corresponding template for unlimited reuse Moving and scaling To move an object highlight it by clicking into it and then drag it while holding the mouse key To scale an object it has to be selected and then be dragged by using one of the displayed seizing handles Moving between pages To move or copy an object...

Page 119: ... object editors for data objects provide automatic titles The title can be placed above or below the graphic or hidden by clicking the according button Clicking the Edit button will open a dialog for designing and customizing the title Additional comments can also be added Double clicking on a title will open the editing dialog 6 10 2 Add drawings and text Drawing objects To draw a crosshair round...

Page 120: ...To save a new template create or edit a report or edit an existing template select Save from the subsection Templates of the Import Export menu icon When saving a report as template there is the possibility to include only placeholders placeholders and fixed objects or all items of the current design Templates can be saved within the private or public template volumes or on a local drive When send...

Page 121: ...late either click New in the subsection Report or open the template browser via Open from the subsection Template In the first case only the private template selection is available Saving To save the complete report to file click Save in the subsection Report to export only a single object highlight the object and click Save from the subsection Marked object Export to WORD To export a complete des...

Page 122: ...able by different tabs in the workspace where changes can be done 6 11 1System Assignments The panel System displays information about the program version the licence and the connected spectrometers and allows the actualisation of these settings Number 1 and 2 would be the mounted spectrometers in case of a double detector system Fig 55 The panel System Table 42 Functions in the system panel Objec...

Page 123: ...dentified hardware components spectrometers The spectrometers will be shown with their name connection and type These settings should not be changed without necessity Reset device Device data Do not change without necessity Send low level command to device Reserved for service engineer use Auto update of device list 6 11 2General display settings This panel allows the definition of the User interf...

Page 124: ...ngs for the Y axis Scaling in Counts s or Pulses eV Displays the Y axis in linear logarithmic square root scale Individual Y axis scaling If Individual scaling is checked different Y axis scaling for every spectrum in the list will be accepted If Automatic is checked you may right click and drag the mouse across an area of the spectrum window All background spectra will be scaled to this region of...

Page 125: ...lines Clear all changes made to element settings Accept all changes made in this panel Otherwise changes will be lost 6 11 3Spectrometer calibration The panel Spectrometer is mainly used for the energy calibration of the instrument The energy calibration of the XFlash detectors typically is very stable Nevertheless it should be performed if peaks of the measured spectrum do not correctly fit the K...

Page 126: ...st applications fine accurate but time consuming Start or cancel calibration procedure Determine energy resolution for various elements Without changing current settings Select element and element line for calibration in the PSE Click on the desired element of the displayed periodic table For the energy calibration of the spectrometer the following steps are necessary Table 45 Steps for the energy...

Page 127: ...e panel Imaging Table 46 Functions in the imaging panel Object Description Hints Left hand section Select the actual camera for calibration or settings Settings for the illumination of the sample and the chamber Move the scroll bar and check the illumination required for the sample Assignment of the cameras to the image ports Select a magnification and the corresponding camera Accept the settings ...

Page 128: ...the cross hair 10x and the circle 100x can be adjusted in the menus of each camera The X ray spot makes a fluorescence in the optical range which can be observed with the camera The cross hairs or circle have to correspond with the position of the spot in the image It should be 0 or close to 0 Setting of the X ray spot size This setting is required for the display of the spot distance in distribut...

Page 129: ...tion of the mosaic image Position a white paper in the focal plane and confirm with 6 11 5X ray tube settings The panel X ray tube displays the configuration of the tube tube and chassis housing and of the filters It is possible to use two X ray tubes Fig 59 The panel X ray tube Furthermore the calibration files can be loaded here With Load calibration data the Import Export box for files will be ...

Page 130: ...lly by the software Therefore in case of using another USB port on the PC it is possible that the attribution of the cameras changes avoid this if possible please keep the original video USB port The correct definition of the cameras to the ports is possible in the workspace System Imaging Fig 61 Selection of the camera ports For that purpose the cameras have to be selected with the Tabs The corre...

Page 131: ...n 30 mm s 35 mm s 50 mm s2 Autofocus speed limit 2 mm s 2 5 mm s Joystick sensitivity 100 Fig 62 Settings for stage speed and joystick sensitivity Speed and acceleration will be set for the 10x mag for the 100x it is more slowly It will be calculated automatically Speed and acceleration are the same for the X and Y axes for the Z axis the speed is slower The joystick sensitivity can be set for all...

Page 132: ... 63 Taking a white standard 6 12 4Adjustment of the image size The image size for both low and high magnification can be set in the workspace System Imaging These settings are stable and do not need repeated adjustments Fig 64 Adjustment of image size ...

Page 133: ...pose a white sample should be positioned on the stage The sample illumination has to be set to a medium value the illumination of the sample chamber can be neglected in this case The settings depend on the reflectivity and the sample colour therefore it can be necessary to change them Table 47 Settings of image parameters Object Description Settings for illumination Open the setting window with th...

Page 134: ... magnification image check location in the 10x magnification image In case of double excitation only the lens can be adjusted and the collimator position is set at the factory Fig 65 Adjustment of the X ray spot position The display of the spot size red circle can be adjusted to the real spot size of the optic with the value in d µm Note that this value is defined by the manufacturer and does not ...

Page 135: ...mosaic images show the edges of every image For the improvement of the image quality there are two possibilities 6 12 8 1 Selection of the image part used for the mosaic Herefore the best part of the image is used for creating the mosaic These reduce changes in the brightness of the images For that purpose a homogeneous white sample piece of paper should be positioned in the sample chamber and the...

Page 136: ...ositioned in the focal plane and its image can be captured and saved The shadowing is then used to correct the other images Note That only works properly if the reflectivity of the samples is comparable Fig 68 Background correction of brightness control The display of the spot size red circle can be adjusted to the real spot size of the optic with the value in d µm Settings must be confirmed with ...

Page 137: ...time Single point analysis of metallic samples 50 kV 200 µA 30 50 20 s 100 s Single point analysis of light matrix samples e g oxides 50 kV 600 µA not higher than 30 depends on statistics 120 s 300 s Multi Point 50 kV 200 µA 30 50 20 s 100 s Auto Point 50 kV 200 µA 30 50 20 s 100 s LineScan Line 50 kV 300 µA 600 µA depends on the matrix 50 100 ms several cycles can be defined Mapping Area 50 kV 60...

Page 138: ...Often Used Analytical Procedures 138 User Manual 7 2 Point Fig 69 Point analysis ...

Page 139: ...6 Move the sample into the focal plane with Autofocus 7 Make final positioning with click drag or joystick first in 10x and then in 100x mag image 8 Set the correct tube parameters in the device area X ray tube 9 Check count rate and dead time on the device area spectrometer after starting the measurement by Preview Dead time should be less than 60 10 Set the final tube parameters in the device ar...

Page 140: ...Often Used Analytical Procedures 140 User Manual 7 3 Multi Point Fig 70 Multi Point analysis ...

Page 141: ...rol if the sample is flat over the line scan area 7 Define the objects for measurement as single points or as matrices In case of matrices the number of points in the matrix and their distribution has to be defined 8 The name of the different objects and their automatic numbering has to be defined 9 Autofocus for every point can be defined 10 Check count rate and dead time on the device area spect...

Page 142: ...Often Used Analytical Procedures 142 User Manual 7 4 Auto Point Fig 71 Auto Point analysis ...

Page 143: ... in case that the measurement pattern should be repeated 7 Define the complete measurement pattern with single point lines or matrices or load a saved measurement pattern 8 Adjust the defined pattern with the Edit function and adjust it in case of a loaded pattern 9 Autofocus for every point can be defined 10 Check count rate and dead time on the device area spectrometer after starting the measure...

Page 144: ...Often Used Analytical Procedures 144 User Manual 7 5 Line scan Fig 72 Line scan analysis ...

Page 145: ...cal plane with Autofocus control if the sample is flat over the line scan area 7 Switch to the workspace for Line analysis 8 Define the line for LineScan in the image 9 Set the pixel distance or number of pixels in the workspace Line 10 Set the correct tube parameters in the device area X ray tube 11 Check count rate and dead time on the device area spectrometer after starting the measurement by P...

Page 146: ...Often Used Analytical Procedures 146 User Manual 7 6 Area Analysis Fig 73 Area analysis Mapping ...

Page 147: ...t over the line scan area 7 Switch to the workspace for Area analysis 8 Define the area for the map in the image 9 Set the pixel distance or number of pixels in the workspace Area 10 Set the tube parameters in device area X ray tube set for highest count rate to get a small statistical error in short measurement time per pixel 11 Set the measurement time and stage mode with the downward facing arr...

Page 148: ...ot Table 54 Steps for the quantification of a single point spectra Step Examples hints 1 Select the spectrum that should be quantified by highlighting it in the list below the spectrum display 2 Select the quantification method via the downward facing arrow next to the Quantify button 3 Define the special conditions for the quantification with the right facing arrow below the Quantify button metho...

Page 149: ...he fitted single element spectra and the sum This allows the identification of missed elements e g Fe at the marked cursor position at 6 396 keV which could be immediately included into the quantification using the periodic table on the right hand of the spectrum 7 7 2 Quantification of distribution measurements Spectra measured in single pixels of distribution measurements LineScan Mapping contai...

Page 150: ...on method editor 4 Special settings for quantification are possible for the Fundamental Parameter model standardless 4a Peak identification as defined in the actual spectrum in the displayed list by automatic identification 4b Define the special properties of every element 5 Define the resolution for the quantification The settings have the following meaning 1x1 every pixel will be quantified 3x3 ...

Page 151: ...y switch 8 2 Stand by Operation The stand by operation of the instrument implies to reduce the tube current while the M4 TORNADO and the measuring computer including the measuring software remain active This operation mode is recommended if the X ray tube should be spared and at the same time the stability of the electronics should not be altered If the instrument is only used during the day it is...

Page 152: ...d with two safety fuses 2 5 A T H which are located in the mains socket on the rear panel of the instrument Malfunctions in the instrument or voltage fluctuations can cause a blow of this fuse This fuse could be the reason why the green power lamp on the front panel is not lit even though the key switch has been activated and the mains connection is correct The replacement of the fuse will be done...

Page 153: ...g it is recommended to use a soft tissue or exhaust in case of stronger contamination The stage should be cleaned only with non aggressive cleansing agents Caution The detector is located close above the measurement position It has a beryllium window which should never be touched The exposure to beryllium is poisonous This part is protected by a sheet Never remove this sheet It is also not permitt...

Page 154: ...ied with the help of lifting tools Caution Danger of instrument damage due to impacts coldness and moisture The transportation must be performed carefully The instrument must not be exposed to intensive vibrations of impacts During transport and storage the instrument must be protected from moisture and temperatures below 10 C Caution All samples must be removed from the instrument before transpor...

Page 155: ...ce Beryllium The disposal of these components must be executed by the manufacturer All components of the M4 TORNADO excepting the X ray tube and the detector are disposed as hazardous waste The components X ray tube and detector contain the toxic substance Beryllium and thus are taken back by the manufacturer In case of disposal please send the X ray tube and the detector to the following address ...

Page 156: ...ed The result panel provides various tools for checking element identification peak deconvolution and net peak area estimation Individual parts of a reconstructed spectrum can be selected for display and compared with the acquired spectrum The result display is configured according to the method settings This default settings can be overwritten within the result options panel which can be opened v...

Page 157: ...f absorption edges to intensity ratios Spectrum comparison The calculated and measured spectra are compared based on Chi values If the convergence is not sufficient new concentrations are calculated and with this the complete loop is repeated For next loops the convergence is checked for changes of concentrations If the convergence is satisfying the concentrations are used as results Further uncer...

Page 158: ...e optic calibration has to be repeated Sensitivity calibration For the calibration of sensitivity several pure elements and stoichiometric compounds with both K and L lines has to be measured The target is to get concentrations that have a very small deviation from the given values These element dependent correction factors are fitted by a polynomial function to get correction factors for all ener...

Page 159: ... program M4 TORNADO 1 monitor keyboard and mouse 1 vacuum pump with control electronics vent and vacuum hose 1 serial connection cable for vacuum pump 4 power connection cable for M4 TORNADO PC monitor vacuum pump 1 USB signal connection between M4 TORNADO and PC 1 Ethernet signal connection between M4 TORNADO and PC 1 M4 TORNADO User Manual 2 Pure element sample with 8 elements Au Ag Pt Pd Cu Zn ...

Page 160: ...lic it is 1 mSv in a year It is highly unlikely that the radiation worker dose limits will be exceeded when trained and qualified personnel use such devices Read the section Safety Instructions of this manual chapter 2 before turning on the system Please observe local regulations for the operation of X ray systems If you suspect that the safety system does not work correctly or that radiation prot...

Page 161: ...ugh and tissues fail to function Tissue sensitivity In general the radiation sensitivity of a tissue is proportional to the rate of proliferation of its cells inversely proportional to the degree of cell differentiation For example the following tissues and organs are listed from most radiosensitive to least radiosensitive Most Sensitive Blood forming organs Reproductive organs Skin Bone and teeth...

Page 162: ...diation have shown that there is a risk of cancer induction associated with high doses The specific types of cancers associated with radiation exposure include leukemia multiple myeloma breast cancer lung cancer and skin cancer Radiation induced cancers may take 10 to 15 years or more to appear There may be a risk of cancer at low doses as well ...

Page 163: ...ents 32 Instrument adjustment 130 Intended usage 12 Joystick settings 131 Key switch 17 Liability 12 Line scan tab 111 Main program window 54 Main system components 28 Maintenance 152 Map display options 108 Map paint tool 108 Map result tab 105 Mapping 146 Mapping information 107 Measurement conditions 86 Measurement parameters 137 Mosaic image 135 New software version installation 46 New users 4...

Page 164: ...quisition 64 Spectrum composition 23 Spectrum display 66 Spectrum evaluation 24 Spectrum manipulation 66 Stage settings 59 131 Stand by 151 Start up 53 Statistical error Sigma 25 System Assignments 122 Tab Imaging 127 Tab Spectrometer 125 Tab X rax tube 129 Technical parameters 30 Transportation 154 Turntable cleaning 153 USB driver 42 User administration 47 User information 11 User interface 123 ...

Page 165: ...M4 TORNADO 165 ...

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