1-3
SLA7900 Series
Installation and Operation Manual
X-TMF-SLA7900-MFC-eng
Part Number: 541B022AAG
August, 2009
Section 1 Introduction
RATINGS:
Pressure Equipment Directive (PED) 97/23/EC
See Table 1
Mounting Attitude Sensitivity
0.2% of FS maximum deviation after rezeroing
Valve Leak-By:
< 0.5% F.S.
Leak Integrity
Inboard to Outboard: less than 1x10
-10
atm scc/sec Helium max.
Ambient Temperature Limits
Operating: 0°C to 65°C (32°F to 149°F)
Non-Operating: -25°C to 100°C (-13°F to 212°F)
Maximum Operating Pressure Range
1500 psig (10,342 kPa) maximum
150 psig (106.2 kPa) and below recommended for
best performance.
Differential Pressure Range
5 - 50 psid (broader depending on customer conditions;
consult factory for details.)***
(34.5 - 344.7 kPa)
(259 - 2586 torr)
Particulate
Zero particles per cubic foot greater than 0.1 microns under process
conditions. Less than 4 particles per cubic foot greater than 0.02 microns
under process conditions.
PHYSICAL:
Materials of Construction
316L Vacuum Arc Remelt (VAR), 316L
and high-alloy ferritic stainless steel.
External/internal seals:
Nickel
Valve seat: 17-7PH stainless steel - standard
Process Connections
Integral 1/4" male VCR
TM
CS Seal (SEMI 2787.5 or SEMI F82-0304 R1-1)
C Seal (SEMI 2787.1 or SEMI F82-0304 R1-2)
W Seal (SEMI 2787.3 or SEMI F82-0304 R1-3)
Table 1 PED Rating
Mass Flow
Flow Ranges
Pressure
PED Module H
Controller
N2 Equivalent Ratings
Category
Models
Min. f.s. Max f.s.
Unit
Bar
SLA7950/
3.0
50,000
sccm
100 Bar
SEP
SLA7960
