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Brooks SLA7810 Series, Installation And Operation Manual

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1-3

Section 1 Introduction

Model SLA7810 & SLA7820

Installation and Operation Manual

X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008

Figure 1-2 Model SLA7810/SLA7820 Silicon Chip Configuration

Figure 1-3 Model SLA7810/SLA7820 System Block Diagram.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Summary of Contents for SLA7810 Series

Page 1: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

Page 2: ...r 2008 Model SLA7810 SLA7820 Brooks Metal Sealed Pressure Controllers Model SLA7810D SLA7820D Digital I O DeviceNetTM Pressure Controller Model SLA7810A SLA7820A Analog I O Pressure Controller Artisan...

Page 3: ...zards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to prevent electrical shock an...

Page 4: ...instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is...

Page 5: ...tion Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 Model SLA7810 SLA7820 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOU...

Page 6: ...on 3 1 Overview 3 1 3 2 Proportional Band and Integration Time Constant Adjustment 3 2 Section 4 Maintenance 4 1 Overview 4 1 4 2 Troubleshooting 4 2 Section A CE Certification CE Certification of Mas...

Page 7: ...A7820 Installation and Operation Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentation Guaranteed 888...

Page 8: ...nd responsive controllers on the market today Superior Valve Technology The co planar valve offers unmatched performance Due to its simplified construction the valve exhibits superior repeatability st...

Page 9: ...pressure A system block diagram is shown in Figure 1 3 The integration of pressure transducer control electronics and control valve into one unit results in a compact size The mounting dimensions are...

Page 10: ...on Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 Figure 1 2 Model SLA7810 SLA7820 Silicon Chip Configuration Figure 1 3 Model SLA7810 SLA7820 System Block Diagram Artisan Technology...

Page 11: ...Part Number 541B047AAG December 2008 Figure 1 4 Model SLA7810A SLA7820A Analog I O Controller with 1 4 VCR Connections Figure 1 5 Model SLA7810D SLA7820D Digital I O DeviceNet Controller with 1 4 VCR...

Page 12: ...ed quantity of process gas flows In this figure the mass flow controllers will supply the desired quantity and mixture of process gas while the pressure controller will maintain the desired reactor pr...

Page 13: ...Downstream Controller Mode The controller is set to maintain the downstream process pressure constant independent of upstream pressure or flow variations This is factory configured Normally Open Norma...

Page 14: ...Accuracy 0 5 F S including linearity and hysteresis for precision control Repeatability 0 1 full scale Control Range 20 1 Zero Stability 0 1 full scale per 30 days Ambient Temperature Limits Operating...

Page 15: ...and I settings Input Output Offset 0 2 full scale voltage Proportional Gain User adjustable via Service port or over DeviceNet interface Integration Time User adjustable via Service port or over Devic...

Page 16: ...5 5 Vdc 110 F S 5 Volt Reference Output 5 Volts 0 2 min Load 1 Kohms Pressure Setpoint Signals Command Setpoint Input Analog I O option only 0 5 Vdc Input will accept signals to 5 5 Vdc 110 F S Input...

Page 17: ...A7810 SLA7820 Installation and Operation Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentation Guarant...

Page 18: ...etherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 318 549 309 E mail BrooksEu BrooksInstrument com Remove the envelope containing the packing list Outside...

Page 19: ...nce with the following Completion of form RPR003 1 Brooks Instrument Decontamination Statement A copy of this form can be downloaded from the Brooks website www brooksinstrument com or is available fr...

Page 20: ...f positive shut off is required it is recommended that a separate shut off valve be installed in line 2 7 Gas Connections Standard inlet and outlet connections supplied on the Model SLA7810 and Model...

Page 21: ...tallation however it is recommended that the minimum porosity that does not restrict the flow rate being used The filtering element should be periodically replaced or cleaned 2 10 Electrical Interface...

Page 22: ...erface in DeviceNet mode is covered in the DeviceNetTM Supplemental Instruction Manual for Brooks Models SLA7810 and SLA7820 X DeviceNet PC eng 2 11 Remote Setpoint Command Input Analog Mode If the pr...

Page 23: ...tion and Operation Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 Model SLA7800 SLA7820 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentation Guarant...

Page 24: ...parameters in the intended application by the user The tuning of the P and I constants does not affect the calibration of the instrument Definitions Both proportional and integral control actions are...

Page 25: ...es are interactive the P I controller is somewhat more difficult to tune Tuning the P I control Using the Brooks Service tool read the current values of P and I It is highly recommended that the P and...

Page 26: ...1 Overview N o Routine maintenance is required on the Models SLA7810 and SLA7820 If an in line filter is used the filtering element should be periodically replaced This section provides the Following...

Page 27: ...e controller appears to be functioning but cannot achieve setpoint verify that sufficient inlet pressure and pressure drop are available at the controller to provide the required flow 4 Verify correct...

Page 28: ...brated to 1000 torr full scale b 100 output equals 1000 torr c When the pressure controller is open to atmosphere the actual output signal from the pressure controller is 78 Atmospheric pressure is no...

Page 29: ...ion and Operation Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 Model SLA7810 SLA7820 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentation Guarante...

Page 30: ...West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 1996 Nach erfolgreichen Tests enstprechend den Vorschifte...

Page 31: ...al Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos de Caudal M sico Fecha Enero 1996 Los equipo...

Page 32: ...rooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser un c ble blind 100 Les connecteurs D ou de ty...

Page 33: ...ring Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Italiano Brooks Instrument 407 West Vine St Hatfield PA...

Page 34: ...ertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Assunto Adenda...

Page 35: ...een oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment...

Page 36: ...Installation and Operation Manual X PR SLA7800 PC eng Part Number 541B047AAG December 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOU...

Page 37: ...only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application...

Page 38: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

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