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1-6

PC100 Series

Installation and Operation Manual

X-PR-PC100-Series-PC-eng

Part Number: 541B207AAG

May, 2017

Section 1 General Information

Figure 1-2 LCD Display

• Zero button to easily re-zero the device during scheduled maintenance.
Zero button will zero pressure transducer of thermal sensor depending on
what is visible on the display.

This combination of features results in limited service interruption and
reduced downtime.

Communication Interfaces

The PC100 Series supports DeviceNet™ communication protocol.
DeviceNet is a multi-drop connection that allows a maximum of 64 devices
to be connected on the same network. Brooks Instrument’s DeviceNet
profile has been certified by the ODVA™ (Open DeviceNet Vendor’s
Association).

1-10 Specifications for PC100 Series Devices

See Table 1-3 for specifications for the PC100 Series.

See Figure 1-3 for dimensions for the PC100 Series

Summary of Contents for PC125

Page 1: ...tion and Operation Manual X PR PC100 Series PC eng Part Number 541B207AAG May 2017 PC100 Series Ultra High Purity Digital Pressure Control Devices PC115 Pressure Controller Model PC125 Pressure Contro...

Page 2: ...nd national codes Connect all products to the proper electrical and pressure sources Operation 1 Slowly initiate flow into the system Open process valves slowly to avoid flow surges 2 Check for leaks...

Page 3: ...earch and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior p...

Page 4: ...Installation and Operation Manual X PR PC100 Series PC eng Part Number 541B207AAG May 2017 PC100 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 5: ...ions 2 2 2 8 In Line Filter 2 2 2 9 Mechanical Installation 2 3 2 10 Flow Controller Installation Arrangement 2 3 2 11 Purge the Gas Supply Line Before PC100 Series Installation 2 4 2 12 Position and...

Page 6: ...pplications 2 5 2 3 PC100 Series Mounting Attitude Positions for DOWNSTREAM Applications 2 5 2 4 Display with PSI Reading 2 7 2 5 Display Reading Zero PSI 2 7 2 6 Display Set to FS 2 8 2 7 Flow Displa...

Page 7: ...ng includes N2 and H2 gases with full scale 1000 Torr pressure operation An independent diagnostic service port to to tune the pressure controller without removing the unit Long term stability due to...

Page 8: ...dicates a potentially hazardous situation which if not avoided COULD result in death or serious injury A CAUTION statement indicates a potentially hazardous situation which if not avoided MAY result i...

Page 9: ...t method for determining reliabilty of MFCs SEMI E68 Test method for determining warm up time of MFCs SEMI E69 Test method for reproducibilty and zero drift for thermal MFCs SEMI E80 Test method for d...

Page 10: ...PI Epitaxy EPI A process technology where a pure silicon crystalline structure is deposited or grown on a bare wafer enabling a high purity starting point for building the semiconductor device F S Ful...

Page 11: ...eliminates thermal siphoning effects This unique sensor configuration includes an optimized temperature profile for gases prone to thermal decomposition This design results in Enhanced signal to noise...

Page 12: ...his combination of features results in limited service interruption and reduced downtime Communication Interfaces The PC100 Series supports DeviceNet communication protocol DeviceNet is a multi drop c...

Page 13: ...curacy N A 1 of reading 35 F S 0 35 of F S 2 to 35 F S Repeatability N A 0 2 of F S Resolution N A 0 1 of F S Zero Temp Coefficient N A 0 05 of F S C Span Temp Coefficient N A 0 08 of reading C Zero S...

Page 14: ...8 PC100 Series Installation and Operation Manual X PR PC100 Series PC eng Part Number 541B207AAG May 2017 Section 1 General Information Figure 1 3 Dimensions PC100 Series PC100 Series VCR Configuratio...

Page 15: ...ing materials Inspect for damaged or missing parts This device has been assembled calibrated and double vacuum bagged in a Class 100 clean room In your semi clean area remove the outer bag only Pass t...

Page 16: ...ded refer to 2 3 Recommended Storage Practice on p 2 1 it should be subjected to a pneumatic pressure test in accordance with applicable vessel codes To maintain a devices ultraclean integrity this se...

Page 17: ...nes are as follows The device should be located in a clean dry atmosphere relatively free from shock and vibration Leave sufficient room for access to the user interface display and MAC ID and baud ra...

Page 18: ...Tag the valve at this point to prevent accidental re exposure of the process gas to the gas line 2 Cycle purge the gas line with dry nitrogen or argon to fully flush out the process gas Cycle purging...

Page 19: ...pointed in the direction of the flow arrow on the PC100 Series rear S N label The various mounting positions for UPSTREAM applications are described in Figure 2 2 and the mounting positions for DOWNS...

Page 20: ...grammed to turn on before the PC100 Series is turned on and turned off after the PC100 Series is turned off The following steps are required before the PC100 Series is zeroed 1 Make sure that the PC10...

Page 21: ...Torr until the LCD displays the labels PSI kPa or Torr The PC100 Series will display pressure in units of PSIA kPa or Torr Press and hold down the Zero button a minimum of 5 seconds or until the disp...

Page 22: ...Place the PC125 Series under normal inlet operating pressure Close the down stream valve to prevent any flow 2 Looking at the top of the PC125 Series press the Display button until the LCD display lab...

Page 23: ...cks This section describes how to zero and sequence the PC100 Series devices for proper operation The PC100 Series must be warmed up for at least 30 minutes The active gas page must be correct The PC1...

Page 24: ...e D dering Code D dering Code D dering Code D dering Code DX X X X X Description Industry standard ODVA compliant DeviceNet interface M12 Pin No Signals 1 Drain 2 V 11 25 Vdc 3 V 4 CAN H 5 CAN L Figur...

Page 25: ...cer When the system pressure changes the PC100 Series will manipulate the flow to achieve and maintain pressure setpoint Unlike traditional pressure control devices the PC125 Pressure Controller lever...

Page 26: ...3 2 PC100 Series Installation and Operation Manual X PR PC100 Series PC eng Part Number 541B207AAG May 2017 Section 3 Operation THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 27: ...d that you send the device to a Brooks Service Center for cleaning and recalibration Please follow the instructions for removal product packaging and product return instructions found in Section 2 Ins...

Page 28: ...4 2 PC100 Series Installation and Operation Manual X PR PC100 Series PC eng Part Number 541B207AAG May 2017 Section 4 Maintenance Troubleshooting...

Page 29: ...and isolating malfunctions in the system a difficult one An incorrectly diagnosed problem can cause hours of unnecessary down time When possible follow the troubleshooting checks before removing a su...

Page 30: ...tool software to verify tool system at 0 00 Has the PC100 been commanded Use the tool software to verify off by an active valve closed input 2 Pressure controller cannot achieve setpoint Is the gas i...

Page 31: ...0 Series if leakage is detected 6 PC100 Series pressure reading oscillates Is there too much gas pressure Verify that the pressure is correct for across the PC100 Series this gas and range If required...

Page 32: ...ct MFC zero Is the PC100 Series mounted in the proper attitude Is the flow output signal of the PC100 Series really zero 9 Zero Drift Improper zero of the PC100 Series PC100 Series aging or sensor sta...

Page 33: ...e Setting Setting Setting Producer Consumer Transition Rate D0 D0 D0 D0 D0 Idle Count Integer 6000h 2 7 Executing 500KB D1 D1 D1 D1 D1 Idle Count Integer 6000h 21 7 Executing 500KB D2 D2 D2 D2 D2 Idle...

Page 34: ...5 2 PC100 Series Installation and Operation Manual X PR PC100 Series PC eng Part Number 541B207AAG May 2017 Section 5 Product Description Code THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 35: ...Instrument Brooks Instrument x x x Brooks Instrument x x x 1 2 x Brooks Instrument x PED 0 5 bar g 25 mm 1 inch PED x PED x 2014 34 EU x Brooks Instrument 1 x 25 mm 1 inch I II III PED x 25 mm 1 inch...

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Page 38: ...kan dit leiden tot thermische expansie van de vloeistof waardoor het apparaat kan barsten en lichamelijk letsel kan veroorzaken PED Pressure Equipment Directive Alle drukapparatuur met een interne dr...

Page 39: ...ojuse m jul paisuda niiv rd et seade puruneb See v ib p hjustada raskeid kehavigastusi Euroopa surveseadmete direktiiv PED Euroopa surveseadmete direktiiv kohaldub k ikidele surveseadmetele mille sise...

Page 40: ...ista joka saattaa johtaa laitteen rikkoutumiseen ja henkil vahingon vaaraan Eurooppalainen painelaitedirektiivi PED Painelaitteet joiden paine on suurempi kuin 0 5 bar g ja joiden koko on suurempi kui...

Page 41: ...t une ventuelle dilatation thermique du fluide peut casser l appareil et provoquer des blessures Directive europ enne quipements sous pression PED Tous les quipements sous pression dont la pression in...

Page 42: ...nderenfalls kann es zu einer thermischen Ausdehnung der Fl ssigkeit und damit zum Bruch des Ger tes kommen Personensch den k nnen die Folge sein Europ ische Druckger terichtlinie PED Alle Druckger te...

Page 43: ...ries Greek Brooks Instrument Brooks Instrument x x x Brooks Instrument x x x 1 2 x Brooks Instrument x PED 0 5 bar g 25 mm 1 PED x PED x 2014 34 EU x Brooks Instrument 1 x 25 mm 1 PED x 25 mm 1 SEP EM...

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Page 45: ...l apparecchiatura L inosservanza pu causare la dilatazione termica del liquido che pu danneggiare l apparecchiatura e provocare lesioni alle persone Direttiva europea relativa alle apparecchiature a...

Page 46: ...l des un izpl des v rstus k da iemesla d ir j aizver no ier c m ir j izlai viss idrums Pret j gad jum idrums var termiski izplesties p rraut ier ci un rad t traumas Eiropas spiedieniek rtu direkt va P...

Page 47: ...leisti vis skyst To nepadarius galimas iluminis skys io pl timasis galintis sugadinti rengin ir su eisti mon s Europos sl gin s rangos direktyva PED Visa sl gin ranga kurios vidinis sl gis didesnis ne...

Page 48: ...zawory wej ciowe i wyj ciowe maj by z jakiego powodu zamkni te to urz dzenie musi zosta ca kowicie opr nione z ciek ego medium Niedope nienie tego zalecenia mo e doprowadzi do termicznego zwi kszenia...

Page 49: ...jusante do equipamento tenha em aten o que o mesmo dever ser previamente esvaziado do flu do que o atravessa Esta obriga o surge do facto de existir a possibilidade de ocorrer dilata o t rmica do l q...

Page 50: ...limitrofe instala iei instala ia trebuie complet golit Neglijarea acestui lucru poate avea ca efect dilatarea termic a fluidului care poate defecta instala ia i poate produce r niri de persoane Direc...

Page 51: ...tupn a v stupn ventily zariadenie je potrebn plne vypr zdni Zanedbanie vyp ania m za n sledok po kodenie zariadenia s mo nos ou zranenia obsluhy z d vodu tepelnej roz a nosti n plne Eur pska smernica...

Page 52: ...dite lahko pride do toplotnega raztezanja teko ine zaradi katerega se lahko naprava prelomi in povrzo i telesne po kodbe Evropska direktiva o tla ni opreni PED Vsa tla na oprema z notranjim tlakom ki...

Page 53: ...es deber n ser completamente vaciadas La omisi n de esto ltimo puede provocar la dilataci n t rmica del l quido lo que puede da ar al equipo y conducir a da os personales Directriz Europea de los Equi...

Page 54: ...nliga skador European Pressure Equipment Directive PED R dets Direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckb rande anordningar Alla utrustning f r tryck med ett tryck ver 0 5 Bar g b...

Page 55: ...Installation and Operation Manual X PR PC100 Series PC eng Part Number 541B207AAG May 2017 PC100 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 56: ...ument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applic...

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