Brooks On-Board 8, Installation And Maintenance Instructions Manual

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©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 vii
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List of Figures
Figure 1-1: On-Board 8 and On-Board 8 GLE Cryopumps . . . . . . . . . . . . . . . . . . . 1-3
Figure 1-2: On-Board 8F GLE Cryopump with PCM . . . . . . . . . . . . . . . . . . . . . . . 1-5
Figure 1-3: On-Board 8F GLE Cryopump with Optional On-Board Vacuum Network
Controller Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Figure 1-4: Typical On-Board 8 GLE Cryopump System . . . . . . . . . . . . . . . . . . . 1-12
Figure 1-5: Cutaway View of a Typical On-Board 8F GLE Cryopump Vessel. . . 1-13
Figure 1-6: Typical Flat On-Board 8 GLE Cryopump Component Identification . 1-14
Figure 1-7: Cutaway View of a Typical On-Board 8 GLE Cryopump Vessel. . . . 1-15
Figure 1-8: Typical On-Board 8 Cryopump Component Identification . . . . . . . . . 1-16
Figure 2-1: Block Diagram for On-Board GLE Cryopump Installation . . . . . . . . . 2-1
Figure 2-2: Setpoint Relays Connector Pin Identification . . . . . . . . . . . . . . . . . . . . 2-6
Figure 4-1:Decontamination Flowchart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Figure 4-2: On-Board GLE Cryopump Helium Supply and Return Lines. . . . . . . . 4-8
Figure 4-3: Maintenance Manifold Part Number 8032051G001 . . . . . . . . . . . . . . 4-13
Figure 4-4: Proper Helium Line Coupling Disconnection/Connection . . . . . . . . . 4-14