High Voltage
The Main Circuit Breaker must be switched to the OFF
position before performing any work on the electrical
components of the On-Board 8F Cryopump for 300mm
PVD System to prevent electric shock.
High Capacity Helium Compressor
Introduction
Manual
Electrical Box Rear Panel Component Description
Brooks Automation
8040600
Revision A
1-15
CCJ1/CCP2 Connectors
The CCJ1 (EMO Out) and CCP2 (EMO In) connectors allow connection of the
High Capacity Helium Compressor to the process system Emergency Off
(EMO) system. When connected, and if the EMO button on the front panel of
the High Capacity Helium Compressor is pressed, the power to the entire
process tool and High Capacity Helium Compressor system will be turned
OFF.
The schematic diagram for the connectors is shown in
Figure B-3
. If the EMO
is not connected to the process system EMO, pushing the High Capacity
Helium Compressor EMO will shut down the compressor.
Reverse Phase
The Reverse Phase indicator illuminates when the High Capacity Helium
Compressor power cable has been connected out of phase. An out-of-phase
condition will prevent the High Capacity Helium Compressor from operating.
Refer to
.
Main Circuit Breaker
The Main Circuit Breaker (CB1) provides circuit breaker protection for all
high voltage components. Refer to
.
