4-10
Brooks
®
Model 5851E
Section 4 Maintenance
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Figure 4-3 Voltmeter Connections for Valve Adjustment
Section 4-4A. Note the number, locations and thickness of all
spacers (9 and 10).
d. Decrease the preload of the valve by 0.005 inches by either remov-
ing a 0.005 inches small preload spacer or by adding a 0.005 inches
large preload spacer. Refer to Figure 4-2.
e. Reassemble the valve following the assembly procedure in Section
4-4A.
f. Command 0% flow, apply normal operating gas pressure and check
for valve leak-thru by observing the output signal.
g. If the valve leaks-thru increase the preload by 0.005" and go to Step
h. If the valve does not leak-thru repeat Steps d, e, f and g.
h. Apply the normal operating gas pressure and command 100% flow
(5.000 Volts on Terminal A, Pin 2).
1.95 x TP3 + 33.4