Brooks
®
Model 5851E
4-1
Section 4 Maintenance
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
4-1 General
No routine maintenance is required on the Model 5851E. If an in-line filter
is used, the filtering element should periodically be replaced or
ultrasonically cleaned.
4-2 Troubleshooting
The end block screws (31) and the valve screws (3) are not
interchangeable. The end block screws are stronger and are needed
to achieve the pressure rating. The end block screws are darker in
color and can be attracted by a magnet.
CAUTION
A. System Checks
The Model 5851E is generally used as a component in gas handling
systems which can be quite complex. This can make the task of isolating a
malfunction in the system a difficult one. An incorrectly diagnosed
malfunction can cause many hours of unnecessary downtime. If possible,
make the following system checks before removing a suspected defective
mass flow controller for bench troubleshooting or return, especially if the
system is new.
1. Verify a low resistance common connection, correct power supply
voltage and that signals are reaching and leaving the controller. The
breakout board, P/N S273Z649AAA Card Edge version or P/N
S273Z668AAA D-Connector version listed in Section 5, will make this
job much easier.
