MagnaTran 7.1 User’s Manual
Command Reference
MN-003-1600-00
Error Code Reference
Brooks Automation
Revision 2.2
8-181
Z motor spring constant -----------
Extension arm Angle ---------------
Retract arm Angle -------------------
Error 414:
Push value must be Positive.
Error 415:
Station R+PUSH value is Invalid.
Error 416:
Station not initialized.
Error 417:
Offset too large.
Error 418:
Bad retract position.
Invalid RTRCT2.
Robot Internal Errors
Error 508:
Wafer sensor not defined.
Error 509:
No Z axis on robot.
Error 527:
MCC communication error.
Error 528:
MCC Queue Full.
Error 550:
Station parameter out of range.
Error 551:
Servo parameter out of range.
Error 552:
Sensor out of range.
Error 554:
Cannot resume due to unsuccessful HALT.
Error 555:
Cannot resume because robot not HALTED.
Error 557:
Robot did not respond.
Error 558:
Robot unknown.
Dispatcher/Communications Errors
Error 602:
Command sequencer busy.
Wait for the robot to complete its last operation. If the error persists, reset the robot by issuing
the RESET command or toggling power.
Error 603:
Command halted.
A HALT command was issued to stop robot motion. The robot remains referenced.
Error 604:
CDM in control of the robot.
The command issued requires control of the robot. Turn off the CDM prior to continuing.
Error 605:
Digital I/O in control of robot.
To release digital I/O control of robot, enter the command DIO STOP. Refer to
for additional information.
Error 606:
Serial I/O in control of robot.
To initiate digital I/O control of robot, enter the command DIO START.
Refer to
for additional information.
Error 607:
MCC processor not alive.
Verify that no FETs of the theta driver board have shorted-out. For each FET, apply an ohmme-
ter between pins 1 and 3 to verify resistivity. If a FET has shorted-out, replace theta driver
