Bronkhorst®
Instruction Manual EL-FLOW® Classic series
9.17.085D
6
1
Introduction
1.1
Scope of this manual
This user guide describes the
EL-FLOW® Classic
series mass flow controllers for gases. It covers product information,
installation instructions, operation, maintenance, troubleshooting tips and technical specifications.
1.2
Intended use
EL-FLOW® Classic
instruments were designed to measure an/or control gas flow rates of the specified gas as stated on the
instrument label. The gas must be clean and dry. The instruments can be used for either (fast) switching or controlling a
constant flow rate.
The end user is considered to be familiar with the necessary safety precautions, and to comply with the appropriate
protective measures as described in the Material Safety Data Sheets of the media to be used in the system (if applicable).
The wetted materials incorporated in the EL-FLOW® Classic are compatible with media and conditions (e.g. pressure,
temperature) as specified at ordering time. If you are planning to use the product (including any third party components
supplied by Bronkhorst, such as pumps or valves) with other media and/or other conditions, always be sure to check the
wetted materials (including seals) for compatibility. See the technical specifications of the product and consult third party
documentation (if applicable) to check the incorporated materials.
Responsibility for the use of the equipment with regard to suitability, intended use, cleaning and corrosion resistance of the
used materials against the applied media lies solely with the end user. Bronkhorst High-Tech B.V. cannot be held liable for
any damage resulting from improper use, use for other than the intended purpose or use with other media and/or under
other conditions than specified on the purchase order.
1.3
Other documents
Basic instructions
Technical drawings
Quick installation guide EL-FLOW® Classic
Document no. 9.17.086
Hook-up diagram EL-FLOW® Classic
Document no. 9.16.117
Dimensional drawing F-201CL
Document 7.15.182
These documents can be found at
http://www.bronkhorst.com/en/qrclassic
