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P a g e
1. Overview
All
contact
information
can
be
found
at
the
end
of
this
manual.
This
manual
provides
essential
information
for
the
operation
of
the
MF5700
series
of
gas
mass
flow
meters
general
‐
purpose
gas
metrology
applications.
The
product
performance,
maintenance,
and
trouble
‐
shooting
as
well
as
the
information
for
product
order,
technical
support,
and
repair
are
also
included.
The
MF5700
mass
flow
meter
is
one
of
the
best
‐
selling
mass
flow
meter
products
on
market,
due
to
its
performance
and
cost
‐
effective
design
enabled
with
the
company’s
proprietary
MEMS
(micro
‐
electro
‐
mechanical
systems)
thermal
sensing
technology.
The
current
model
is
the
3
rd
generation
of
the
products
having
significantly
upgraded
features
since
its
first
release
in
2010.
The
upgrade
includes
much
‐
improved
accuracy,
an
additional
model
to
cover
flow
range
and
channel
size
compatibility;
significantly
extended
measurement
dynamic
range,
wireless
data
options,
and
valve
options.
The
upgrade
also
ensures
back
‐
compatibility
for
our
existing
customers.
ATO
is
committed
to
continuing
product
innovation
while
offering
the
best
value
to
our
customers.
This
serial
of
products
is
designed
for
general
purpose
mass
flow
sensing
and
control
purposes.
The
wetted
materials
of
the
products
are
compatible
with
most
of
the
common
gases
such
as
oxygen,
nitrogen,
air,
argon,
carbon
dioxide,
etc.
ATO
also
offers
a
wide
spectrum
of
off
‐
the
‐
shelf
and
customized
flow,
pressure,
temperature/humidity,
and
gas
concentration
sensing
products
and
provides
integration
and
turn
‐
key
solutions
to
our
customers.
Please
contact
the
manufacturer
for
additional
information.
MF5700
User
Manual
www.ato.com
18005851519
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