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Asyst Technologies VersaPort 2200, Technical Manual

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Asyst Technologies VersaPort 2200 Technical Manual Download Page 43

Released Rev. C

2000-1252-01

Page 25

VersaPort 2200 Technical Manual

Chapter 2:  Theory of Operation

VersaPort Components

a

The laser diode, beam splitters, and mirrors are mounted on a laser bracket assembly 
that is installed to the bottom of the port plate assembly. 

•  Wafer Present Sensor, Horizontal View

The laser beam is first directed to a precision beam splitter that reflects a portion 
and transmits a portion of the beam. The reflected beam travels across the mid 
point of the port opening. On the opposite side of the port door opening, the beam 
is directed through an aperture and strikes the wafer sensor. This sensor is used 
to furnish positional information about individual wafers. The information is stored 
into memory as internal data collected for cassette wafer mapping. The mapping 
information is available for use by the Host system to direct the pick and place arm 
to accurately retrieve wafers from the VersaPort. This sensor is also used to 
determine cross-slotted errors.

•  Cassette Slot Sensor

The transmitted laser beam from the first beam splitter is directed at a second 
beam splitter. This beam splitter evenly splits the light into two beams. The 
reflected beam travels at an angle across the port opening. The beam angle is 
aligned to pass on one side of the cassette slot opening as the port plate travels 
up or down on the elevator. The beam is projected to the other side of the port 
door opening and through an aperture to the cassette slot sensor. The slot 
information is available for use by the Host system to direct the pick and place arm 
to accurately place wafers back into the cassette.

F

IGURE

 

7

 

Laser Detector System

WAFER

PROTRUSION SENSOR

SILICON WAFER

CASSETTE SLOT SENSOR

WAFER PRESENT SENSOR

PARTIAL VIEW OF 
CASSETTE SLOTS

BEAMSPLITTER

BEAMSPLITTER

10 mm

FIRST SURFACE
MIRRORS

2 

WAFER  AT AN

EXCESSIVELY PROTRUDED

POSITION

<1 mW
LASER DIODE

67O NM VISIBLE RED

BREAK-THE-BEAM

INFRARED SENSOR FOR
EXCESSIVE WAFER

PROTRUSION

(Vertical view)

 

Summary of Contents for VersaPort 2200

Page 1: ...Tool Picture Rev C Date 6 12 2007 Printed on Cleanroom Paper P N 2000 1252 01 Copyright 2007 Asyst Technologies Incorporated All rights reserved VersaPort 2200 Technical Manual ...

Page 2: ......

Page 3: ...the Asyst logo s and MANUAFACTURING CONNECTIVITY are registered trademarks of Asyst Technologies Inc VERSAPORT INX LINK MANAGER SMART TAG SMART TRAVELER SMART COMM are trademarksTM of Asyst Technologies Inc All other product and company names mentioned herein may be trademarks and or service marks of their respective owners Equipment Modification Any change alteration or modification to this equip...

Page 4: ...Asyst Technologies Inc Technical Publications Manager 46897 Bayside Parkway Fremont CA 94538 Or fax Attention Tech Pubs Manager at 1 510 661 5157 Or E mail TechPubs asyst com Name Company Contact Phone in case we have questions Email Location of comment page number or other reference Comments The more specific the comments the more useful they are to us Thank you for helping us to make the manuals...

Page 5: ...n Revision Information 6 12 2007 R Tonomura S Sondergaard K Kellerman C Release ECN 08479 Updated content with engineering changes and reviewer comments and similar material Added procedure for replacing Printed Circuit Board Added notes on removing VersaPort from Host Tool ...

Page 6: ...Page vi 2000 1252 01 Released Rev C VersaPort 2200 Technical Manual a ...

Page 7: ...Service Procedure ECN Engineering Change Notice IR Infrared ISIM Indexer Simulation Software MCBF Mean Cycles Between Failures MRP Multiple Reticle Pod MSC Micro Station Controller PIO Parallel Input Output P N or PN Part Number PSP Preventive Service Procedure RFID Radio Frequency Identification SAM Smart Arm Master ...

Page 8: ...VersaPort 2200 Technical Manual Page viii 2000 1252 01 Released Rev C a ...

Page 9: ...History v Acronyms vii Table Of Contents ix List Of Figures xv List Of Tables xvii Preface 1 Introduction 1 Core Products 1 Options 1 Audience 1 About this Manual 2 Conventions 3 Chapter 1 Safety 5 General Safety Identifiers 5 Responsibility 7 ESD EMI Precautions 7 EMO Electrical Power 7 Equipment Lockout Tagout Procedure 8 Laser Safety 9 User 9 Service Technician 9 Safety Interlocks 9 Laser Inter...

Page 10: ...1 CPU 22 Program Memory 22 SRAM 22 Quad Serial I O 22 Interlocks Parallel I O 23 Digital I O 23 Interrupt Controller 23 Sensors 23 Laser Detector System 24 Excessive Wafer Protrusion Sensor Vertical View 26 Motor Controls 26 Port Plate Elevator and Cassette Shuttle Motors 27 Pod Latch and Wafer Seater Motors 27 Pod Door Lock Unlock Motor 27 Air Exhaust Motor 28 Status Indicators 28 Power Indicator...

Page 11: ...al Safety 58 Chemical Safety 58 Tool Requirements 58 Notes on Removing and Replacing VersaPort 59 Preventive Service Procedures 60 PSP1 Verify Laser Sensor DAC Values 61 Verify DAC Values and Operation 61 Calibration Alignment Procedures 63 CAP1 Align Laser Detector System 64 Pre Service 64 Remove Minienvironment 64 Service 65 Adjust Laser Beam Orientation 65 Adjust Wafer Sensor Beam 67 Adjust Slo...

Page 12: ... 91 CAP5 Align Pod Hold Down Latches 92 Pre Service 92 Service 92 Post Service 93 CAP6 Align Pod In Place Switch 94 Corrective Service Procedures 98 CSP1 Pod Latch Motor Replacement 99 Pre Service 99 Service 99 Post Service 101 CSP2 Pod Door Lock Motor Replacement 102 Pre Service 102 Remove minienvironment 102 Service 103 Post Service 106 CSP3 Laser Diode Replacement 107 Pre Service 107 Post Servi...

Page 13: ...62 MSC INTERLOCK ECID 13 162 SORT MODE ECID 16 163 MIN WAFER POS ECID 32 163 STAGE POS ECID 33 163 SLOT COUNT ECID 34 163 SLOT PITCH ECID 35 163 SINGLE PORT ECID 37 163 HOST OPTION ECID 38 164 Cassette Size Option ECID 39 165 DEVICE I D ECID 40 165 BAUD RATE ECID 41 165 SECS Communication Timeout T1 ECID 50 165 SECS Communication Timeout T2 ECID 51 165 SECS Communication Timeout T3 ECID 52 166 Cas...

Page 14: ... Syntax 181 Message Summary 182 Quick Reference 182 ASCII Details 183 Parallel Communication 197 Summary of Control Signals 197 Control Signal Descriptions 197 Event Flow 200 Appendix C Material Safety Data Sheets 203 Loctite 222 203 Loctite 242 203 Loctite 290 204 Loctite 680 204 Krytox GPL 20X and 50X Fluorinated Grease 205 Appendix D Wiring Diagrams and Drawings 207 Index 269 ...

Page 15: ... System bottom view 66 Figure 20 Laser Beam Orientation 66 Figure 21 Laser Bracket Assembly 67 Figure 22 Spring Tension 68 Figure 23 Mirror adjustment 70 Figure 24 Wafer Excessive Protrusion Sensor 78 Figure 25 Excessive Protrusion Sensor 79 Figure 26 Wafer Seater Mechanism top view 82 Figure 27 Wafer Seater Mechanism side view 83 Figure 28 Wafer Seater Mechanism bottom view 84 Figure 29 200mm Por...

Page 16: ...Page xvi 2000 1252 01 Released Rev C VersaPort 2200 Technical Manual List of Figures a ...

Page 17: ... Mode 124 Table 12 Manual Mode 126 Table 13 MSC SAM Menu 128 Table 14 Status Menu 129 Table 15 Configuration Menu 131 Table 16 Tag8400 Menu 134 Table 17 SMIF Option Menu 135 Table 18 List of Control Characters 138 Table 19 SECS Message Summary 140 Table 20 Data Dictionary 150 Table 21 ASCII Command Summary 182 Table 22 Event Messages 183 Table 23 Equipment Constant Acknowledgments 185 Table 24 Equ...

Page 18: ...Page xviii 2000 1252 01 Released Rev C VersaPort 2200 Technical Manual List of Tables a ...

Page 19: ...a horizontal shuttle Options BOLTS Interface The SEMI standard BOLTS interface frame can be used with either of the core products above and optionally one of the options below Reticle option RFID option MOCA NOTE THE RETICLE RFID AND MOCA OPTIONS CAN BE USED WITH EITHER PLATFORM MOUNT STANDARD OR SHUTTLE OR WITH THE VERSAPORT MOUNTED TO A BOLTS INTERFACE THE OPTIONS HOWEVER CANNOT BE USED SIMULTAN...

Page 20: ...ailed technical specifications and outline drawings Chapter 3 Diagnostics and Troubleshooting provides diagnostic fault isolation for troubleshooting operation errors and malfunctions Chapter 4 Service describes service requirements and procedures Appendix A ISIM provides information on the indexer simulator Appendix B Communications Software describes the VersaPort software configuration SECS com...

Page 21: ...Courier New For example Use the C Folder SubFolder SubFolder2 to access this file Source code or DOS commands use courier new Hexidecimal streams and examples Double quotes Used when discussing or describing an action functional word or definition Folder Used instead of Directory unless discussing DOS movement commands Italic Italics are used to show computer entry from the user s keyboard Press S...

Page 22: ...Page 4 2000 1252 01 Released Rev C VersaPort 2200 Technical Manual Conventions a ...

Page 23: ...identify potential hazards to personnel and equipment Examples are provided below MECHANICAL HAZARD DANGER DANGER FLAGS INDICATE AN IMMINENTLY HAZARDOUS SITUATION WHICH IF NOT AVOIDED WILL RESULT IN DEATH OR SERIOUS PERSONAL INJURY DANGER FLAGS ARE LIMITED TO THE MOST EXTREME SITUATIONS THE DANGER FLAGS SPECIFY THE TYPE OF HAZARD THE STEPS TO TAKE TO AVOID INJURY AND THE CONSEQUENCES FOR FAILING T...

Page 24: ...S ALERT PERSONNEL TO ACTIONS THAT MAY DAMAGE THE VERSAPORT OR THE MATERIAL BEING PROCESSED THE CAUTION SPECIFIES THE TYPE OF DAMAGE THE STEPS TO TAKE TO AVOID THE DAMAGE AND THE RISK IN FAILING TO TAKE THOSE PRESCRIBED STEPS All warnings and cautions precede the step or operation in which the hazardous condition may be encountered All personnel operating or performing service on Asyst equipment mu...

Page 25: ...tions The service technician must follow these instructions to provide ESD protection and reduced EMI emissions A braided copper ground wire minimum 12 gauge with ring lug connectors sized for No 8 screw must be connected between the VersaPort ground connection and the Process Tool power supply earth ground point Communications cables to be constructed with shielded cable and provided with metal c...

Page 26: ...1 Notify all affected employees and users that service is to be performed and that the equipment needs to be shut down and locked out 2 The Process Tool must be powered down or the circuit that provides power to the VersaPort must be switched off 3 Lock out the circuit with an assigned lock 4 Test to make sure the VersaPort cannot be turned on accidentally 5 Tag the locked circuit with a statement...

Page 27: ...RE TO THE OPERATOR COVERS MUST NEVER BE REMOVED BY THE OPERATOR IF COVERS AND A SMIF POD ARE NOT USED THE VERSAPORT IS A CLASS II NOT A CLASS I LASER PRODUCT FAILURE TO COMPLY MAY RESULT IN INJURY Service Technician During installation there are no requirements for cleaning servicing or electro optical inspections of the laser system Service procedures for laser replacement and alignment are inclu...

Page 28: ...IDUALS AND EQUIPMENT PRIOR TO USING ISIM TO OPERATE THIS EQUIPMENT FAILURE TO COMPLY MAY RESULT IN INJURY OR MECHANICAL DAMAGE Seismic Follow all installation procedures to ensure compliance with S2 0200 Safety Guidelines For Semiconductor Manufacturing Equipment Seismic Requirements Pinch Points A pinch hazard exists at the port plate when the VersaPort is being serviced and the minienvironment i...

Page 29: ...Technical Manual Chapter 1 Safety Laser Safety a MECHANICAL HAZARD DANGER THE VERSAPORT SHOULD BE OPERATED ONLY WITH A SMIF POD USE OF AN OPEN CASSETTE ADAPTER CREATES A PINCH HAZARD AT THE PORT PLATE FAILURE TO USE A SMIF POD MAY RESULT IN SEVER INJURY ...

Page 30: ... attached to the laser bracket cover on the Process Tool edge of the VersaPort port plate 7500 3204 01 3 CE This label identifies equipment that conforms to testing and certification requirements of the European Community The CE label is located at the user side of the Versaport behind the minienvironment shield 4001 8750 01 4 Model Serial Number The model and serial number label for the VersaPort...

Page 31: ...ort only by the upper corners during movement and installation It is located on the Process Tool side of the interface frame 4002 0207 01 8 Pinch Warning The pinch hazard label is located at the outer edges of the port plate behind the minienvironment shield and warns of a pinch hazard when the shield is removed 4001 7570 01 9 Seismic The seismic label is mounted on the BOLTS model only It is loca...

Page 32: ...f the BOLTS frame 4001 8359 01 11 Power The power panel contains these indicators POWER When this indicator is lighted power is being applied to the VersaPort READY When this indicator is lighted the VersaPort is ready to accept a new command from the Host POD IN PLACE When this indicator is lighted a Pod has been properly placed on the port When it is off either a Pod is missing or it is improper...

Page 33: ... Label Placement BOLTS model process tool side CAUTION LASER RADIATION WHEN OPEN AND INTERLOCK DEFEATED DO NOT STARE INTO BEAM DANGER PINCH HAZARD Do Not Insert Fingers Into Vertical Opening Failure To Comply May Result In Finger Injury NOTE CE label and Pinch label behind shield ASCII SECS MSC 46897 BAYSIDE PKWY SEISMIC ATTACHMENT POINT NOTICE HANDLE CORNERS TO MOVE AND INSTALL MO DEL SERIALNO 46...

Page 34: ...aPort 2200 Technical Manual Chapter 1 Safety Labeling a FIGURE 3 VersaPort Label Placement Standard model Model Serial number label Laser interlock label Pinch hazard labels CE label Ground label Laser label located on bracket cover Tool side ...

Page 35: ...le to a maximum distance of four and one half inches to position 200mm wafers at the proper location for transfer A laser based sensing system on the VersaPort provides precision cassette slot location and wafer mapping The laser beam also detects cross slotted wafers It senses protruding wafers horizontal view so a built in wafer seater can reseat them in the cassette A vertical view retro reflec...

Page 36: ...nting platform or with an Asyst supplied SEMI standard E 63 BOLTS interface frame FIGURE 4 VersaPort components with BOLTS interface Smart Probe embedded in port plate Cassette shuttle and motor in base Fan motor in base Port plate assembly Vertical drive column lead screw with motor in base Connector panel behind minienvironment shield routed below base on BOLTS model Rear shroud ...

Page 37: ... Theory of Operation a FIGURE 5 VersaPort components standard Cassette shuttle and motor in base Fan motor in base Connector panel behind minienvironment shield Rear shroud Vertical drive column lead screw with motor in base Smart Probe embedded in port plate Port plate assembly ...

Page 38: ...The Process Tool sends a OPEN Stage command to the VersaPort The VersaPort raises the port plate and Pod top to the configured Stage position exposing the cassette While the port plate is rising the attached laser system maps the wafers in the cassette so they can be extracted by the Process Tool s Z axis robot 2 If the optional cassette shuttle is installed the port door with cassette attached mo...

Page 39: ...osed position Port Door Standard VersaPort no shuttle The port door is fixed to the base assembly The port door contains the Pod door lock unlock mechanism and Pod in Place switch VersaPort with shuttle The port door is mounted to the base assembly on a horizontal lead screw and track The port door is driven with a timing belt by a servo motor and is programmable to a maximum of four and one half ...

Page 40: ... CPU The CPU microprocessor is the 80C188 This processor provides a 16 bit internal and 8 bit external data transfer bus running at 16 MHz Program Memory The program memory is contained in an erasable programmable random access memory EPROM SRAM The SRAM is battery backed to provide a long term non volatile random access memory NOVRAM This is a readable writeable memory source for the storage of e...

Page 41: ...tors Inputs for interlocks parallel communications limit switches and sensors are read into the CPU via the input lines of the digital I O Watchdog Timer The watchdog timer resets the CPU on powerup If the watchdog timer fails to receive a pulse from the CPU via the digital I O every 600 msec the CPU will be reset The watchdog timer will halt the CPU if the CPU voltage falls below 4 5 vdc This ens...

Page 42: ...is voltage level is detected by a comparator whose reference is set by a digital to analog converter DAC Here a 0v to 5 0v input level will equal a 0 to 255 count from the CPU to the DAC The outputs of the comparator are processed via the digital I O Laser Detector System The laser system incorporates a laser diode emitter which produces a beam at 670 nanometers wavelength integrated with a regula...

Page 43: ...curately retrieve wafers from the VersaPort This sensor is also used to determine cross slotted errors Cassette Slot Sensor The transmitted laser beam from the first beam splitter is directed at a second beam splitter This beam splitter evenly splits the light into two beams The reflected beam travels at an angle across the port opening The beam angle is aligned to pass on one side of the cassette...

Page 44: ...to create a break the beam sensor system If a wafer is positioned too far out of the cassette for the wafer seater to correct the wafer will interrupt the beam sent from the emitter to the receiver causing the VersaPort to immediately stop so the wafer can be manually reseated into the cassette slot Motor Controls The VersaPort contains six motors five if the cassette shuttle option is not present...

Page 45: ...ble via the software The port plate elevator and cassette shuttle both use limit switches to confirm they are at the Home position The encoder is used to indicate an over travel condition The port plate elevator motor includes a brake which engages when power is removed to prevent back travel of the port plate Pod Latch and Wafer Seater Motors DC stepper motors The Pod latch and the wafer seater s...

Page 46: ...The state of this indicator however has no affect on commands initiated by the MSD SAM or commands interrogating the VersaPort status Pod in Place Indicator The POD IN PLACE indicator when lighted indicates the presence of a Pod on the port When the indicator is lighted a Pod has been properly placed on the port When it is off either a Pod is missing or it is improperly seated on the port Communic...

Page 47: ...3 IF A 5 WIRE CABLE IS USED FOR HOST CONTROL ONLY NO SMART TAG READ WRITE THEN THE CTS LINE MUST NOT BE ACTIVE THE VERSAPORT WILL INTERPRET A SIGNAL ON THE CTS LINE AS INDICATING TAG DATA BEING SENT Parallel Communications Interface The parallel I O communication interface supports a single mode of operation OPEN and CLOSE The OPEN function opens the Pod and raises the port plate to a fixed stage ...

Page 48: ...oftware The inputs and outputs use optical isolation therefore electrical isolation is maintained only as long as a separate Host 5 VDC and ground is used to drive the outputs The VersaPort internal 5 VDC and Ground can be used but will not provide electrical isolation of I O pins See Table 3 for the function of each pin TABLE 3 Parallel Communications Interface Asyst Compatible Pin No Type Config...

Page 49: ... to and retrieved from the NOVRAM during VersaPort operation The NOVRAM data is updated whenever changes have occurred Configuration The configuration data Equipment Constant Identification ECID is written to the NOVRAM and updated as necessary to provide repeatable VersaPort operation parameters A complete description of ECID values and default settings is provided in the Communications Software ...

Page 50: ...tions Recoverable errors This is the total number of recoverable errors recorded Non recoverable errors This is the total number of non recoverable errors recorded Last Error This is the error code of the most recently occurring error condition in the VersaPort The value of the Last Error cannot be cleared by cycling power to the VersaPort It can only be over written by the error code of a new err...

Page 51: ...utline drawings Port Plate Height at Home position 158 75mm 6 25 in 900mm 35 43 in Speed 76 2mm 3 0 in per second constant velocity Mounting Customer supplied mounting platform See Outline drawing for specifications Direct mount to Process Tool using a SEMI E63 BOLTS interface frame Power 24 vdc 10 5 from external source 1 5 Amps standby 3 0 Amps typical during operation 4 0 Amps maximum Laser Dio...

Page 52: ...Page 34 2000 1252 01 Released Rev C VersaPort 2200 Technical Manual Chapter 2 Theory of Operation Specifications and Outline Drawing a FIGURE 10 Outline Drawing Side View ...

Page 53: ...Released Rev C 2000 1252 01 Page 35 VersaPort 2200 Technical Manual Chapter 2 Theory of Operation Specifications and Outline Drawing a FIGURE 11 Outline Drawing Rear View ...

Page 54: ...Page 36 2000 1252 01 Released Rev C VersaPort 2200 Technical Manual Chapter 2 Theory of Operation Specifications and Outline Drawing a FIGURE 12 Outline Drawing Front View I O Panel ...

Page 55: ...Released Rev C 2000 1252 01 Page 37 VersaPort 2200 Technical Manual Chapter 2 Theory of Operation Specifications and Outline Drawing a FIGURE 13 Outline Drawing Overhead View ...

Page 56: ...e 38 2000 1252 01 Released Rev C VersaPort 2200 Technical Manual Chapter 2 Theory of Operation Specifications and Outline Drawing a FIGURE 14 Outline Drawing I O Panel Detail I O PANEL DETAIL GROUND POINT ...

Page 57: ...Released Rev C 2000 1252 01 Page 39 VersaPort 2200 Technical Manual Chapter 2 Theory of Operation Specifications and Outline Drawing a FIGURE 15 Recommended Mounting Method TOOL SIDE OPERATOR SIDE ...

Page 58: ...Page 40 2000 1252 01 Released Rev C VersaPort 2200 Technical Manual Chapter 2 Theory of Operation Specifications and Outline Drawing a FIGURE 16 BOLTS Interface ...

Page 59: ...eased Rev C 2000 1252 01 Page 41 VersaPort 2200 Technical Manual Chapter 2 Theory of Operation Specifications and Outline Drawing a FIGURE 17 VersaPort Mounted on BOLTS Interface in Free Standing Position ...

Page 60: ...apter 2 Theory of Operation Specifications and Outline Drawing a FIGURE 18 VersaPort Terms Port Door User operator side Vertical Drive Column Port Plate Connector Panel behind minienviron ment shield Process Tool Side front Minienvironment Copper Interlock Pin Provisions ...

Page 61: ...T PERSONNEL SHOULD BECOME THOROUGHLY FAMILIAR WITH ALL ASPECTS OF SAFETY FOR INDIVIDUALS AND EQUIPMENT PRIOR TO USING ISIM TO OPERATE THIS EQUIPMENT NOTE ISIM IS ONLY TO BE USED BY APPROPRIATELY TRAINED OPERATORS AND TECHNICIANS CONTACT ASYST TECHNOLOGIES FOR TRAINING Asyst simulator ISIM software is provided with the installation The software runs on a PC type computer to control the VersaPort wh...

Page 62: ...e VersaPort will reject any command that requires an Auto mode setting regardless of the command that is issued through SECS ASCII or parallel Host control signals Either ISIM or the Process Tool can issue an Auto command to return the VersaPort operation to Auto mode This command is available through both SECS and ASCII interfaces provided that the Host software has included the command in its im...

Page 63: ... VersaPort is fully in Home position Indication The POD IN PLACE light will not light when a Pod is placed on the VersaPort port plate The Pod is not properly seated on the port plate Electronic problem Pod in Place switch is not properly aligned Ensure that the Pod is sitting flat on the port plate in the proper orientation Check signal cables Perform CAP6 Align Pod In Place Switch on page 94 Ind...

Page 64: ...ort is not properly configured for use with a computer 3 During servicing the VersaPort was placed in MANUAL mode and was not returned to AUTO mode prior to operation 4 The VersaPort PCB needs replacement 5 Software is locked 1 Attach the communication cable to the proper VersaPort connector and tighten the connector hold down screws 2 Using ISIM software from the Main Menu select Config Menu Sele...

Page 65: ...CTS OF SAFETY FOR INDIVIDUALS AND EQUIPMENT PRIOR TO USING ISIM TO OPERATE THIS EQUIPMENT NOTE ISIM IS ONLY TO BE USED BY TRAINED OPERATORS AND TECHNICIANS CONTACT ASYST TECHNOLOGY FOR TRAINING Self test can be run using ISIM software From the MAIN Menu press F2 MANUAL From the MANUAL Menu press F3 SELF TEST The VersaPort performs the test and returns a screen message If no errors were encountered...

Page 66: ...BE USED BY TRAINED OPERATORS AND TECHNICIANS CONTACT ASYST TECHNOLOGY FOR TRAINING WARNING MECHANICAL HAZARD USAGE OF ISIM CAN PUT THE VERSAPORT IN AN UNSAFE MODE FOR OPERATORS AS INTERLOCKS CAN BE DISABLED PINCH HAZARDS MAY BE PRESENT PERSONNEL SHOULD BECOME THOROUGHLY FAMILIAR WITH ALL ASPECTS OF SAFETY FOR INDIVIDUALS AND EQUIPMENT PRIOR TO USING ISIM TO OPERATE THIS EQUIPMENT From the MAIN Men...

Page 67: ...n recoverable 6 Warning recoverable Alarm ID alarm occurs during S5 F1 1 Move to stage 2 Return Home 4 Tweek up or down 8 Get reticle map 32 Port lock or unlock 34 Move to a specified position 35 Move to the next reticle 36 Move to the next slot 37 Others Error Messages See Table 6 on page 50 and Table 7 on page 50 for a description of error messages ...

Page 68: ...assette not present As the Pod is opened during a load cycle a The laser slot sensor did not detect the cassette if the sensor is turned on b The reticle sensor did not detect any cassette on the Pod door if the slot sensor is turned off Auto return to Home Cassette present The Pod is opened during an unload cycle and a cassette was detected by either the slot sensor or the reticle sensor TABLE 7 ...

Page 69: ...memory and drifted out of its normal traveling range The elevator over travel limit was not adjusted correctly Excessive wafer out error Either The gain of the vertical protrusion sensor amplifier was too high An obstacle was blocking the vertical protrusion sensor Wafer sensor malfunction or misaligned Either a The reticle sensor mirror has been misaligned b The reticle sensor is in a constant bl...

Page 70: ...plex Removed W6 CTSD input 1 to 2 allows RS232 2 to 3 allows RS485 1 to 2 W7 RxD input 1 to 2 allows RS232 2 to 3 allows RS485 1 to 2 W8 RxD input 1 to 2 selects RS232 2 to 3 selects RS485 1 to 2 W9 When installed provides RxD and RxD terminator for RS485 1Removed W10 When installed connects TxD to RxD input for RS485 half duplex Removed W11 When installed allows RS485 TxD output Removed W12 1 to ...

Page 71: ...ime brake selection 2 to 3 allows brake selection any time 1 to 2 W30 When jumpered 5vdc supplied to parallel port J10 on pins 1 and 13 Removed W33 1 to 2 controls laser via software 2 to 3 laser is on continually 1 to 2 W34 Ties together Power Fault with Over current lines Removed W35 Connects Power Fault LED lamp 1 to 2 W36 Selects over current limit for Pod lock motor 2 to 3 W37 Over current te...

Page 72: ...emoved W4 Installed for normal operation Removed only for troubleshooting Installed W5 Removed for 600 msec Watchdog Timer delay Installed for 150 msec Watchdog timer delay Removed Not User Selectable Function Jumpers As Shipped W101 Connects address line A18 to EPOM If open 256k bytes are addressable When shorted 512k bytes are addressable Removed W102 Connects address line A17 to SRAM If open 12...

Page 73: ...d can be used for connecting mechanical switches Installed on pins 1 and 2 W106 Over current disable for Pod Lock Motor When open over current protection is enabled When shorted current protection is disabled Removed W36 Works in conjunction with W38 to provide current limit protection to the Pod Lock Motor When connecting 1 and 2 the motor is limited for 700ma current When connecting 2 and 4 the ...

Page 74: ...Page 56 2000 1252 01 Released Rev C VersaPort 2200 Technical Manual Chapter 3 Diagnostics and Troubleshooting Jumper Post Configurations a ...

Page 75: ...VIDED IN THE SAFETY SECTION AT THE BEGINNING OF THIS MANUAL All warnings and cautions immediately precede the step or operation in which the hazardous condition may be encountered All personnel involved in service on Asyst equipment must fully understand warnings cautions and all general safety regulations associated with electromechanical equipment The following general precautions should be obse...

Page 76: ...y ground Mechanical Safety Pinch hazards exist when the VersaPort is in service mode Ensure that fingers are not placed in the path of moving mechanical components when the VersaPort is operating If the VersaPort is removed from the Process Tool make sure the VersaPort is placed in a stable condition before servicing Chemical Safety Ensure that any cleaning chemicals with vapors are used in a well...

Page 77: ...e Tool The removal process for a Platform Mount VersaPort will vary depending on the Tool s configuration but will include removing mounting hardware from the leveling rods and moving the VersaPort away from the Host Tool to disengage the Block Guide from the Guide Pin The removal process for a BOLTS Interface VersaPort will vary depending on the Tool s configuration but will include removing the ...

Page 78: ...ensure the system is properly aligned Perform Verify DAC Values procedure beginning next page At the same time visually inspect the VersaPort to ensure no components are out of alignment and there is no sign of undue wear If adjustments are required refer to the applicable Calibration Alignment Procedure to resolve the problem This section lists the VersaPort preventative maintenance tasks Descrip...

Page 79: ...t 24vdc power Use ISIM software to test the operation of the VersaPort For information on using the software see Appendix A ISIM on page 123 _____a From the Main menu select F9 SMIF OPTION Use the arrow keys to select LPO VersaPort and press Enter _____b From the Main menu select F2 MANUAL _____2 Check the DAC values for all three sensors individually Verify they are all less than or equal to 30 _...

Page 80: ...T LOWERS TO THE PORT DOOR KEEP HANDS AWAY FROM THE PORT PLATE PATH A PINCH HAZARD MAY EXIST AT THE BOTTOM OF THE MINIENVIRONMENT WHEN THE PORT PLATE REACHES THE HOME POSITION KEEPS HANDS AWAY FROM THE MINIENVIRONMENT PATH _____a Place the Alignment Tool back on the port door _____b Select F10 MAIN Menu _____c From the MAIN Menu select F1 AUTO _____d From the AUTO menu select F2 HOME The port plate...

Page 81: ...ired after corrective service procedures have been performed This section lists procedures to be performed on an as needed basis Description CAP1 Align Laser Detector System on page 64 CAP2 Align Excessive Wafer Protrusion Sensor Vertical View on page 76 CAP3 Align Wafer Seater Mechanism on page 81 CAP4 Calibrate Shuttle Homing Offset on page 87 CAP5 Align Pod Hold Down Latches on page 92 CAP6 Ali...

Page 82: ...the top of the port plate Do not remove screws CAUTION THE MINIENVIRONMENT CAN BE EASILY DAMAGED BY MIS HANDLING USE CAUTION WHEN REMOVING AND REPLACING THE MINIENVIRONMENT _____2 The minienvironment is attached to the port plate in a track just below the plate s top edge Grab the minienvironment at both sides and gently pull away from the port plate Hold both pieces of the shield to avoid the inn...

Page 83: ...ISIM on page 123 _____a From the Main menu select F9 SMIF OPTION Use the arrow keys to select LPO VersaPort and press Enter _____2 The VersaPort should be at a height that allows access to the laser bracket mounted to the bottom of the port plate Raise the port plate _____a From the Main menu select F2 MANUAL _____b From the Manual menu select F5 GOTO POS _____c At the dialog box enter 10 on the T...

Page 84: ...of the beam must be parallel with the orientation of the wafers see Figure 20 _____5 If the laser beam is not parallel to the wafers continue with the next step to align the beam If the laser is properly orientated proceed to Wafer Sensor Beam Adjustment FIGURE 19 Laser Detector System bottom view FIGURE 20 Laser Beam Orientation Laser Diode Wafer Protrusion Sensor Mirrors and Beamsplitters inside...

Page 85: ...N PRESENT WHEN POWER APPLIED AND INTERLOCK DEFEATED AVOID DIRECT EYE EXPOSURE _____1 Using ISIM software at the PC if not already done _____a From the MANUAL Menu select F4 DAC _____b From the DAC Menu use the arrow key to select Sensor Alignment _____c From the SENSOR ALIGNMENT Menu use the arrow key to select Wafer Sensor _____2 Wait for the software message from the VersaPort The message should...

Page 86: ...the beam by slightly turning the adjustment screws not the screws with spring See Figure 21 for correct screw Visually verify that the laser beam is hitting directly on the center of the wafer sensor aperture NOTE IF THE ADJUSTMENT SCREWS ARE TIGHT AND THE BEAM DOES NOT MOVE LOOSEN THE TWO SCREWS WITH SPRINGS ATTACHED APPROXIMATELY ONE QUARTER TURN _____4 Adjust the beam until the PC displays a th...

Page 87: ... message should read Sensor calibration in progress SLOT Adjust sensor until threshold is 30 Press F4 key to stop calibration DAC 1 threshold xx where xx is the DAC threshold value of the sensor and it could range anywhere from 0 to 255 The DAC threshold value xx needs to be as small as possible If the displayed value is less than or equal to 30 proceed to Wafer Protrusion Sensor Adjustment If the...

Page 88: ...30 _____8 At the PC press the F4 key to stop calibration Adjust Corner Mirror WARNING LASER HAZARD LASER RADIATION PRESENT WHEN POWER APPLIED AND INTERLOCK DEFEATED AVOID DIRECT EYE EXPOSURE _____1 If the laser beam is properly aligned as in Figure 23 below proceed to Adjust Wafer Protrusion Sensor on page 71 Otherwise proceed to Step 2 _____2 Use a 0 050 inch Allen wrench to turn the corner mirro...

Page 89: ...n springed screws Loosen the springed screws and repeat the adjustment if beam is not centered on wafer protrusion mirror _____7 Verify both bottom and top screws with springs are tight Adjust Wafer Protrusion Sensor WARNING LASER HAZARD LASER RADIATION PRESENT WHEN POWER APPLIED AND INTERLOCK DEFEATED AVOID DIRECT EYE EXPOSURE _____1 At the PC _____a From the MANUAL Menu select F5 GOTO POS WARNIN...

Page 90: ... steps below Adjust Mirrors _____1 Verify the Laser Beam is approximately centered in the Protrusion Mirror as shown in Figure 23 on page 70 NOTE IF THE ADJUSTMENT SCREWS ARE TIGHT AND THE BEAM DOES NOT MOVE LOOSEN THE TWO SCREWS WITH SPRINGS ATTACHED APPROXIMATELY ONE QUARTER TURN _____2 Tighten bottom screw with spring until the screw is tight and the spring coils touch Do not over tighten _____...

Page 91: ...If the DAC value is less than 30 and the beam is centered on the Alignment Tool tighten the top screw with spring until the screw is tight and the spring coils touch Do not over tighten _____6 Check DAC value again If the DAC value is less than 30 and both screws with springs are tight continue _____7 If the DAC value is 255 loosen the top springed screw and use the adjustment screws to lower the ...

Page 92: ...u select F1 AUTO _____c From the AUTO menu select F2 HOME The port plate returns to the Home position _____6 Place a Pod with cassette on the port and Autocycle the VersaPort to verify operation _____a From the MAIN Menu select F1 AUTO _____b From the AUTO menu select F9 AUTOCYCLE _____c If the VersaPort cycles properly stop the Autocycle function by pressing F9 again The VersaPort will complete a...

Page 93: ...24 vdc power and communications cable from the VersaPort Post Service _____1 If necessary return the VersaPort to the Process Tool _____2 Reinstall the minienvironment shield _____3 The procedure is complete when the VersaPort has been remounted to the Process Tool with the minienvironment reinstalled and has been Autocycled ten times ...

Page 94: ...ALIGN LASER SYSTEMS AND AWARE OF LASER SAFETY PRACTICES 2 EXCESSIVE WAFER PROTRUSION SENSOR ALIGNMENT MAY BE PERFORMED WITH THE VERSAPORT MOUNTED TO THE PROCESS TOOL IF THERE IS NOT ENOUGH ACCESS TO THE VERSAPORT THE VERSAPORT SHOULD BE REMOVED TO A SUITABLE SERVICE LOCATION OTHERWISE SIMPLY REMOVE THE MINIENVIRONMENT SHIELD Remove minienvironment _____1 Remove the outer shields of the minienviron...

Page 95: ...nnector cover panel to the VersaPort base Set cover aside Disconnect power communications and ground cable from the VersaPort Service _____1 Connect a PC with null modem cable to the Host port of the VersaPort Connect 24vdc power Use ISIM software to test the operation of the VersaPort For information on using the software see Appendix A ISIM on page 123 _____a From the Main menu select F9 SMIF OP...

Page 96: ...sive Wafer Out error message should be displayed on the PC _____6 Reset the error Select F10 MAIN Menu then F2 MANUAL and F8 to CLEAR ERROR _____7 If the VersaPort detected the wafer no alignment is necessary Select F10 MAIN Menu then F1 AUTO and F2 HOME to return the VersaPort to home Disconnect the PC If the VersaPort did not halt proceed with the Service section below Service The potentiometer ...

Page 97: ...nt does not correct the problem troubleshoot the sensor circuitry or sensor placement alignment _____6 Autocycle the VersaPort to verify operation _____a From the MAIN Menu select F1 AUTO _____b From the AUTO menu select F9 AUTOCYCLE _____c If the VersaPort cycles properly stop the Autocycle function by pressing F9 again The VersaPort will complete a cycle and stop at Home _____d Press F10 to retu...

Page 98: ...chnical Manual Chapter 4 Service CAP2 Align Excessive Wafer Protrusion Sensor Vertical View a _____3 The procedure is complete when the VersaPort has been remounted to the Process Tool with the minienvironment reinstalled and has been Autocycled ten times ...

Page 99: ...ANDLING USE CAUTION WHEN REMOVING AND REPLACING THE MINIENVIRONMENT _____2 The minienvironment is attached to the port plate in a track just below the plate s top edge Grab the minienvironment at both sides and gently pull away from the port plate Hold both pieces of the shield to avoid the inner shield falling as the minienvironment is removed Set the minienvironment aside _____3 Loosen the two c...

Page 100: ...s to select LPO VersaPort and press Enter _____3 Place a Pod with cassette and test wafer in slot 25 on the port plate Raise the port plate nine inches to position slot 25 in front of the wafer seater _____a From MAIN menu select F2 MANUAL _____b From MANUAL menu select F5 Goto Pos _____c At the dialog box in Target Pos field type 9 and press Enter three times to raise the port plate _____4 At the...

Page 101: ... Use a Phillips screwdriver to loosen but not remove the two screws securing the wafer seater motor to the port plate Rotate the motor counter clockwise until resistance is felt then move back clockwise a few degrees Tighten screws _____8 Repeat the Seater Out Seater In step above to establish new motor Home position _____9 At the bottom of the port plate push the wafer seater arm into the laser b...

Page 102: ...tion and noise Ensure arm does not contact laser bracket cover or bottom of port plate as it returns Home _____11 Verify there is play in the seater arm movement by gently gripping the actuator arm on the vertical shaft and moving it back and forth see Figure 27 on page 83 There should be a small amount of movement in the arm 0 030 to 0 050 inch allowing the wafer seater to move slightly _____12 I...

Page 103: ...e board to the port plate Rotate the sensor board very slightly toward the port door Tighten screws This will cause the actuator arm flag to contact the PC board sensor sooner and limit wafer seater mechanism movement If sensor PC board required adjustment repeat Step 5 and check that roller end of wafer seater arm is not contacting laser bracket and wafer seater has slight amount of play _____14 ...

Page 104: ...river to loosen screw in middle of actuator arm Move the sensor flag away from the port door to increase the travel and position wafer deeper in cassette Move sensor flag toward the port door to reduce travel Tighten the sensor flag screw _____19 Repeat step 16 Verify the gap between the wafer seater roller and the edge of the port plate is maintained at 0 30 0 50 inch If not repeat Step 12 paragr...

Page 105: ...ULT OF ONE OF TWO SITUATIONS THE SENSOR IS POSITIONED TOO FAR BACK FROM THE PROCESS TOOL OPENING TO DETECT THE PORT OR THE CASS OFFSET VALUE IN THE CONFIGURATION IS SET TOO FAR FORWARD CHECK SENSOR POSITION IF PORT DOOR IS PROPERLY CENTERED IN PORT PLATE OPENING SEE STEP 8 IN THE ADJUST CASSETTE SHUTTLE HOME POSITION PROCEDURE Service _____1 Connect a PC with null modem cable to the Host port of t...

Page 106: ...g box appears At the Distance line enter 6 to raise the port plate six inches Press ENTER three times to activate the elevator _____e From the Manual Menu select F6 DC MOTOR _____f A dialog box appears Use the arrow keys to move down to Calib Shuttle Press ENTER The shuttle will move out slightly and then retract and calibrate its Home position _____6 When the cassette shuttle Home position has be...

Page 107: ...Menu select F6 DC MOTOR _____b At the dialog box use arrow keys to select RELEASE BRAKE and press ENTER _____4 At the shuttle motor verify the shuttle sensor is pushed as far toward the Process Tool opening as possible Loosen the screws on the sensor and slide toward the opening Tighten screws _____5 Remove the vertical lead screw cover by removing the two hex screws securing it to the enclosure _...

Page 108: ...TH SERVO MOTOR CONTROLS _____a From the Main Menu select F2 MANUAL _____b From the Manual Menu select F8 CLEAR ERROR _____10 Recalibrate cassette shuttle Home position _____a At the Main Menu select F2 MANUAL _____b From the Manual Menu select F5 GO TO POS _____c A dialog box appears At the Distance line enter 6 to raise the port plate six inches Press ENTER three times to activate the elevator __...

Page 109: ...RS ARE ENCOUNTERED DURING THE AUTOCYCLE FUNCTION CLEAR THE ERROR BY SELECTING F10 TO RETURN TO THE MAIN MENU THEN SELECT F2 MANUAL AND F8 CLEAR ERROR _____15 If no errors were encountered select F10 to return to the Main menu If errors persist repeat necessary steps Post Service _____1 If necessary return the VersaPort to the Process Tool _____2 The procedure is complete when the VersaPort has bee...

Page 110: ...ver onto the port door Set the hardware aside _____3 Connect a PC with null modem cable to the Host port of the VersaPort Connect 24vdc power Use ISIM software to test the operation of the VersaPort For information on using the software see Appendix A ISIM on page 123 _____a From the Main menu select F9 SMIF OPTION Use the arrow keys to select LPO VersaPort and press Enter _____b From the MAIN men...

Page 111: ...le of the vertical rise portion of the Flag Sensor Bending the flag toward the sensor circuit board will cause the motor to run longer and will advance the hold down latch position Ensure that the top portion of the flag remains horizontal to the sensor board _____c From the DC MOTOR menu select Open Latch _____d From the DC MOTOR menu select Close Latch followed by Open Latch _____6 Repeat Close ...

Page 112: ...at Lockout Tagout of the host tool has been performed before beginning the service _____1 Verify the VersaPort is under lockout tagout conditions This procedure may be performed while mounted on the host tool or after it has been removed _____2 Remove the Minienvironment shields CAUTION THE MINIENVIRONMENT CAN BE EASILY DAMAGED BY MIS HANDLING USE CAUTION WHEN REMOVING AND REPLACING THE MINIENVIRO...

Page 113: ...iew Pod in Place Switch _____4 Using a measuring device or Pod in Place Sensor Tool Go side Asyst PN 1000 0211 01 depress switch plunger on the port door top 0 045 to 0 060 inches See Figure 30 on page 96 _____5 With the plunger depressed 0 045 to 0 060 inches on the underside of the port door using a No 1 Phillips screwdriver slowly and alternately turn the two Pod in Place switch screws clockwis...

Page 114: ...d in place switch screws until it lights _____8 Continue adjusting See 4 through 7 above until you can verify proper switch function Step 3 Switch Verification with Pod _____1 Place an empty 200mm Pod on the VersaPort and observe the POD IN PLACE LED light _____2 If LED lights properly remove 24 VDC power from the VersaPort _____3 If adjustment was not successful readjust See Step 2 Adjust Pod in ...

Page 115: ...L BE DE ENERGIZED PER LOCKOUT TAGOUT PROCEDURES PRIOR TO REPLACING THE VERSAPORT LOCKOUT TAGOUT IS REQUIRED TO PREVENT OPERATOR EXPOSURE TO SHOCK HAZARDS AND CRUSH PINCH HAZARDS AS WELL _____1 Replace the VersaPort in the Host Tool according to the VersaPort Installation Instructions PN 2000 1253 xx Platform Mount or 2000 1276 xx with BOLTS Interface _____2 Verify communications with the Host Tool...

Page 116: ...hat have failed or no longer meet the adjustment criteria Following the replacement procedure calibration may have to be performed This section lists procedures to be performed on an as needed basis Description CSP1 Pod Latch Motor Replacement on page 99 CSP2 Pod Door Lock Motor Replacement on page 102 CSP3 Laser Diode Replacement on page 107 CSP4 Cassette Shuttle Motor Replacement on page 109 CSP...

Page 117: ... rear user side port plate cover Remove cover exposing pod hold down latch unlatch motor Let cover rest on port door and set hardware aside _____2 Unplug connector P15 from connector J15 _____3 Take replacement motor and plug motor connector into J15 Use ISIM software program to test the motor Refer to Appendix A ISIM on page 123 for instructions on using the software _____a From Main menu select ...

Page 118: ...urns to retract screws slightly _____10 At the port plate position U shaped link screw into actuator bracket clip Attach motor bracket to port plate with two hex screws Plug P15 connector into J15 connector and reroute ribbon cables over motor _____11 Restore 24vdc power Use ISIM program and observe the Pod latch unlatch motor operation while sending commands _____a From the Manual Menu select F6 ...

Page 119: ...ction of cables when returned to the Process Tool _____a From the MAIN menu select F2 Manual _____b From the MANUAL menu select F5 Goto Pos _____c At the Target Pos Distance inch line type 10 and press Enter three times to raise the minienvironment ten inches _____16 Remove 24vdc power from the VersaPort Remove communications cable Post Service _____1 If necessary return the VersaPort to the Proce...

Page 120: ...IENVIRONMENT SHIELD NOTE POD DOOR LOCK MOTOR REPLACEMENT REQUIRES SOLDERING THEREFORE IT MAY BE PREFERABLE TO PERFORM THIS PROCEDURE OUTSIDE OF A CLEANROOM Remove minienvironment _____1 Remove the outer shields of the minienvironment by loosening the four screws at the top of the port plate Do not remove screws Tools Motor w gearhead Asyst PN 7500 0373 01 Screwdriver Phillips No 1 Allen wrench 9 6...

Page 121: ... Attach a PC computer running ISIM software to the SECS host port Replace 24vdc power WARNING LASER HAZARD LASER RADIATION IS PRESENT WHEN POWER APPLIED AND INTERLOCK DEFEATED AVOID DIRECT EYE EXPOSURE _____2 Use ISIM to raise the port plate to access the bottom of the port door _____a From the MAIN menu select F2 Manual _____b From the MANUAL menu select F5 Goto Pos _____c At the Target Pos Dista...

Page 122: ...ONLY BEND ONE 1 TIME FAILURE TO COMPLY MAY RESULT IN A BROKEN TAB AND REQUIRE NEW MOTOR REPLACEMENT _____12 Identify the motor electrical leads and solder each wire to the proper motor terminal Slide shrink tube down over soldered section and shrink into place _____13 Place timing belt around motor pulley Slide motor into position on motor bracket aligning grommets with curved ends of bracket Ensu...

Page 123: ...sket is flat inside the cover see Figure 31 Ensure that the cable fits in the opening in the cover see Figure 32 Secure with four screws FIGURE 31 Gasket Inside Port Door Cover FIGURE 32 Routing Cable Through Opening in Port Door Cover _____18 Rotate the port door to the normal position and place on standoffs Secure port door with four Allen screws _____19 Return VersaPort to the Home position ___...

Page 124: ...mmands in Step 14 If door locks properly proceed If ISIM errors are encountered repeat necessary adjustments _____21 Ensure pod door is in Unlock position Remove Pod from the VersaPort Remove PC null modem cable connection Remove 24vdc power Post Service _____1 If necessary return the VersaPort to the Process Tool _____2 Reinstall the minienvironment shield _____3 The procedure is complete when th...

Page 125: ... cover to gain access to laser diode tube Set cover and screws aside _____2 Remove the two Phillips screws securing laser cable cover to expose laser wires Set cover and screws aside _____3 At the laser diode cut the two wires leading from the port plate Leave enough wire to make new connections _____4 At the laser diode use a 5 64 inch Allen wrench and loosen the screw securing the laser bracket ...

Page 126: ...ghten fully _____10 From the Laser Diode Kit locate the CAUTION label Write the date and serial number as printed on replacement laser wire on the CAUTION label Remove adhesive back and attach the label to laser bracket assembly cover Place over existing CAUTION label if one is present _____11 Connect the two plug halves Insert wires and connector into port plate slot _____12 Replace laser wire co...

Page 127: ...RTICAL DRIVE MOTOR PULLEY TO TURN THE LEAD SCREW AND RAISE THE PORT PLATE Remove minienvironment _____1 Remove the outer shields of the minienvironment by loosening the four screws at the top of the port plate Do not remove screws CAUTION THE MINIENVIRONMENT CAN BE EASILY DAMAGED BY MIS HANDLING USE CAUTION WHEN REMOVING AND REPLACING THE MINIENVIRONMENT _____2 The minienvironment is attached to t...

Page 128: ...e motor to the mount Remove the pulley belt Remove the two screws for the resistor mount and the one screw for the wiring clamp Cut the cable ties leading to the base assembly cutout where the P2 connector should be visible _____6 Turn the shuttle lead screw pulley to advance the port door forward and move the black plastic cable guide away from the motor Grasp the motor and slide it out of the mo...

Page 129: ...the shuttle position _____d Place a Pod with cassette on the port door Perform an autocycle to verify operation of the VersaPort _____e From the Auto menu select F9 AUTOCYCLE The VersaPort will raise to the Stage position move the shuttle forward retract the shuttle and return to the Home position _____f The VersaPort will continue to cycle until F9 is pressed to stop the Autocycle function Press ...

Page 130: ...cal track in the VersaPort and the outer shield s detent will insert into the slot on the VersaPort Push the minienvironment securely into the VersaPort Repeat the alignment for the other side of the minienvironment Tighten the four hex screws on the top of the port plate to secure the minienvironment _____4 If necessary re install the VersaPort to the Process Tool _____5 The procedure is complete...

Page 131: ...ISED IF THE VERSAPORT CANNOT BE POSITIONED AT HOME PERFORM THIS PROCEDURE WITH THE VERSAPORT ROTATED ON ITS PROCESS TOOL SIDE TO REMOVE THE PINCH HAZARD The minienvironment does not need to be removed to replace the vertical drive motor Raise the port plate at least four inches to access the connector panel cover to remove the VersaPort from the Process Tool mounting platform Service _____1 Remove...

Page 132: ...ack Replace the top cover and secure the two screws If necessary rotate the VersaPort back to normal operating position _____6 Connect a PC with null modem cable to the Host port of the VersaPort Connect 24vdc power Use ISIM software to test the operation of the VersaPort For information on using the software see Appendix A ISIM on page 123 _____a From the Main menu select F9 SMIF OPTION Use the a...

Page 133: ...nd return to the Home position Remove the Pod from the port plate _____g Close the ISIM program Press F10 MAIN to select the Main menu _____h From the Main menu select F8 EXIT Use the arrow keys to select Yes and press Enter to close the program _____7 Remove 24vdc power and communications cables from the VersaPort Post Service _____1 If necessary re install the VersaPort to the Process Tool _____...

Page 134: ... Tagout of the host tool has been performed before beginning the service Verify that Lockout Tagout of the host tool has been performed by attempting to start or operate the VersaPort Remove the VersaPort from the Host Tool per tool specifications Step 2 Remove Existing Boards 1 On VersaPort base assembly using a Phillips screwdriver remove four 4 screws on the power connector See Figure 33 Set ha...

Page 135: ...n the screw on the clamp securing the circuit board Remove circuit board and set aside screws Place circuit board on flat surface 6 At circuit board using a 3 16 inch nut driver remove ten 10 jack screws holding connector plate to connectors Set plate and screws aside 7 If applicable using a Phillips screwdriver on CPU circuit board attached to main circuit board remove two 2 screws and lock washe...

Page 136: ...o motor drivers Step 4 Install New Board 1 Take new replacement main board and secure heat sink to motor with two 2 screws 2 Take connector plate and place over connectors on new circuit board and secure with ten 10 jack screws 3 Set main circuit board onto bottom cover Replace three 3 screws securing main circuit board Using a 3 32 inch Allen wrench tighten screws Ensure that fish paper insulator...

Page 137: ...M in proper socket See Figure 35 FIGURE 35 VersaPort Circuit Board NOTE NOVRAM MUST REMAIN ATTACHED TO BATTERY REMOVAL FROM BATTERY COULD ERASE VERSAPORT CONFIGURATION DATA 5 On existing CPU circuit board locate NOVRAM battery and remove from socket by pulling up on battery Do not remove NOVRAM only On new circuit board firmly mount NOVRAM battery in proper socket EPROM NOVRAM MOUNTED ON BATTERY N...

Page 138: ...to the Stage position c From AUTO Menu select F2 HOME The VersaPort returns to Home d Repeat F1 and F2 commands several times Ensure VersaPort is returned to HOME position Remove SMIF Pod 4 Remove 24 VDC power and null modem connection from VersaPort Step 6 Postservice ELECTRICAL HAZARD WARNING POTENTIAL ACCESS TO HIGH VOLTAGES REQUIRES THAT THE HOST TOOL BE DE ENERGIZED PER LOCKOUT TAGOUT PROCEDU...

Page 139: ...e Printed Circuit Board a EXPOSURE TO SHOCK HAZARDS AND CRUSH PINCH HAZARDS AS WELL 1 Replace the VersaPort according to the VersaPort Installation Instructions see PN 2000 1253 xx Platform Mount or 2000 1276 xx with BOLTS Interface 2 Verify Host Tool communications according to Host Tool guidelines ...

Page 140: ...Page 122 2000 1252 01 Released Rev C VersaPort 2200 Technical Manual Chapter 4 Service CSP6 Replace Printed Circuit Board a ...

Page 141: ...S CONTACT ASYST TECHNOLOGY FOR TRAINING Indexer Simulator ISIM Menu List FIGURE 36 ISIM Main Menu F Key Function F1 AUTO mode menu screen F2 MANUAL mode menu screen F3 MSC menu screen F4 DEMO mode menu screen DEMO mode is not supported for the VersaPort F5 STATUS menu screen F6 CONFIGuration menu screen F7 Tag8400 menu screen F8 EXIT for leaving ISIM program F9 SMIF OPTION menu screen ...

Page 142: ...ticle wafer Previous Moves elevator up to previous reticle wafer Get Wafer Map Directs open stage from any position F4 FIND SLOT Next Moves elevator down to next empty slot Previous Moves elevator up to previous empty slot Specify Slot Moves elevator to specified slot F5 GOTO POS Absolute Position Moves elevator down to entered position from port plate Relative Distance Moves elevator up or down a...

Page 143: ... Alarm Resets alarms Calibrate Homing Calibrates HOME position Abort Indexer Abort VersaPort operation Stop Indexer Stops the VersaPort operation F9 AUTO CYCLE Performs continuous Stage and HOME cycles F9 toggles between stop auto cycle and returning to HOME F10 MAIN Returns to Main menu TABLE 11 Auto Mode Continued F Key Main Menu F Key Sub Menu Menu Options Explanation ...

Page 144: ...AGE THE VERSAPORT WHEN ACTIVATING THIS FUNCTION TABLE 12 Manual Mode F Key Main Menu F Key Sub Menu Menu Options Explanation F2 MANUAL F1 SERVO CRTL Enable Servo Enables servo motor chip Disable Servo Disables servo motor chip F2 IO IO Channel Channel a b or c IO Bit No On Off F3 SELF TEST Self test of servo DC motors sensors and IRQs F4 DAC DAC Calibration Calibrates DACs and gives thresholds Sen...

Page 145: ... takes no action in response to these commands Seater Out Reticle VersaPort takes no action in response to these commands F7 MOTOR STATUS Gives Controller status Current position Desired position Fan count F8 CLEAR ERROR Resets all errors F9 AUTO CYCLE STOPS CYCLE Top position during auto cycle Performs up down auto cycle to entered values of top and bottom position plus speed and acceleration F9 ...

Page 146: ...Appendix A ISIM Indexer Simulator ISIM Menu List a FIGURE 39 F3 MSC SAM Menu TABLE 13 MSC SAM Menu F Key Main Menu F Key Sub Menu Menu Options Explanation F3 MSC Keep Port Lock Performs MSC originated commands Port Immaterial Enable Indexer Disable Indexer Blink STS LED ...

Page 147: ...ain Menu F Key Sub Menu Menu Options Explanation F5 STATUS F1 ARE YOU THERE Sends S1 F1 message and gives S1 F2 reply F2 LOOPBCK DIAG Sends S2 F25 message and gives S2 F26 reply F3 INDEX STATUS Sensor Status Software Part No Wafer Map Status History data F4 READ PIO Sends S2 F41 gives status of PIO 1C 2A 2B F5 SERVO TUNING RP Not available in released versions kd Si Ri Il ...

Page 148: ...Simulator ISIM Menu List a F6 IRQ COUNTS Sends S2 F41 gives back interrupt counts F8 REVIEW MSG Displays last messages in hex format F9 MOTOR STATUS Displays all motor parameters F10 MAIN Returns to MAIN menu TABLE 14 Status Menu Continued F Key Main Menu F Key Sub Menu Menu Options Explanation ...

Page 149: ...ions Explanation F6 CONFIG F1 DEVICE ID Device Enter Host device identity code F2 COMM PORT COM1 COM2 Select COM1 or COM2 of Host computer F3 READ CONFIG Displays VersaPort configuration External Host PIO Interlock Mode MSC SAM Interlock Mode Send Receive Mode Slot Offset Wafer Offset Min Wafer Position Open Position Slot Count Slot Width Tweek Distance Port Assignment Comm Protocol Cassette Size ...

Page 150: ...HM Cal Offset Tag Baud Rate Reticle Height Slot opening RCS PortEvent Cass Offset Indexer Type F4 MODIFY CONFIG MODIFY CONFIG Modifies VersaPort configurations listed above F5 PC BAUD RATE PC BAUD RATE Modify Host simulator baud rate 2400 4800 9600 19200 28800 38400 57000 F6 EVENT OPTION Enable All Disable All Select Event F7 DEBUG Debug Msg On Debug Msg Off Comm Msg On Comm Msg Off F9 FILE Enable...

Page 151: ...Released Rev C 2000 1252 01 Page 133 VersaPort 2200 Technical Manual Appendix A ISIM Indexer Simulator ISIM Menu List a F10 MAIN Returns to Main menu TABLE 15 Configuration Menu ...

Page 152: ...pendix A ISIM Indexer Simulator ISIM Menu List a FIGURE 42 F7 Tag8400 Menu TABLE 16 Tag8400 Menu F Key Main Menu F Key Sub Menu Menu Options Explanation F7 Tag8400 F1 ARE YOU THERE F2 LCD FILE Tag Serial Number F3 TAG STATUS Status of the Tag F10 MAIN Returns to Main menu ...

Page 153: ...M Indexer Simulator ISIM Menu List a FIGURE 43 F9 SMIF OPTION Menu TABLE 17 SMIF Option Menu F Key Main Menu F Key Sub Menu Menu Options Explanation F9 SMIF OPTION Indexer LPO Ext Height INX 150 mm Reticle INX Used for VersaPort also 200 mm Reticle INX Versaport VPO Versaport Reticle ...

Page 154: ...Page 136 2000 1252 01 Released Rev C VersaPort 2200 Technical Manual Appendix A ISIM Indexer Simulator ISIM Menu List a ...

Page 155: ...ASCII Serial Text Interface on page 180 This section gives a brief description of the ASCII Serial Text Interface guidelines VersaPort message format types and variables and detailed VersaPort configuration information Parallel Communication on page 197 This section describes parallel communications and the commands available for the VersaPort NOTE INFORMATION IN THIS MANUAL APPLIES TO ASYST TECHN...

Page 156: ...ications Protocol Information is transmitted within formatted message blocks preceded by control characters Table 18 gives a list of control characters and Figure 44 shows the format of the message block The protocol for sending a single block of data is as follows TABLE 18 List of Control Characters Control Character HEX Value Meaning ENQ 05 Line Bid EOT 04 Accept Bid ACK 06 Positive Acknowledge ...

Page 157: ... is always 10 bytes in length and has a fixed format see Figure 44 on page 138 The following fields in the following order are always present in the header Device ID 2 bytes The device I D uniquely identifies which piece of equipment the message originated from or is destined for The device I D always refers to the equipment the Host has no device I D The high order bit bit 15 of the field is call...

Page 158: ...is transmitted as two bytes with the more significant byte first Text 0 to 244 bytes Checksum 2 bytes The minimum size block consists of a header and no text With the length byte and checksum the block has 13 bytes The maximum size block consists of a header 10 bytes and text The length byte specifies 254 bytes text 10 With the length byte 1 byte and checksum 2 bytes the block has a total of 257 b...

Page 159: ...LER S H E reply S2 F36 Link Event Report Acknowledge LERA S H E S2 F37 Enable Disable Event EDER S H E reply S2 F38 Enable Disable Event Report Acknowledge EERA S H E S2 F41 Host Command Send HCS S H E reply S2 F42 Host Command Acknowledge HCA S H E S5 F1 Alarm Report Send ARS S H E S5 F3 Enable Disable Alarm Send EAN S H E reply S5 F4 Enable Disable Alarm ACK EAA S H E S6 F13 Annotated Event Repo...

Page 160: ...ure Header only Exceptions None S1 F2 On Line Data D S H E Description This code signifies that the equipment is alive Structure L 2 1 MDLN 2 SOFTREV S1 F5 Formatted Status Request FSR S H E reply Description This is a request for the VersaPort to report the status according to a predefined fixed for mat Structure SFCD Exceptions None S1 F6 Formatted Status Data FSD S H E Description This data mes...

Page 161: ...re part number 3 L 3 1 EED Event report On Off 2 ALED Alarm enable disable 3 SORTMODE Send receive both For response to From Code 2 L 2 1 SFCD Echoes Form Code 2 2 L n 1 SLOT 1STAT Slot 1 status empty full unlk n SLOT n STAT Slot n status For response to From Code 3 L 3 1 SFCD Echoes From Code 3 2 L 8 1 TOTAL_PU PIO status 2 TOTAL_STAGE PIO status 3 TOTAL_HOME PIO status 4 TOTAL_MAP PIO status 5 T...

Page 162: ...Host interface mode and Stage access position Structure L n 1 L 2 1 ECID1 2 ECV1 n L 2 1 ECIDn 2 ECVn Exceptions If n 0 then no response exists S2 F16 New Equipment Constant Acknowledge ECA S H E Description Acknowledge or Error Structure EAC S2 F21 Remote command Send RCS S H E reply Description Simplified message for internal Host material tracking control Primarily used in conjunc tion with the...

Page 163: ...ck Diag Data LDD S H E Description The echoed binary string Structure ABS Exceptions None S2 F33 Define Report DR S H E reply Description This code defines a set of event reports S6 F13 to be sent by the VersaPort to the Host First the Host defines reports VID list of data items using this message These reports are linked to events by the LER message S2 F35 When the event actually occurs the annot...

Page 164: ...ion A list of zero length following CEID deletes all report links to that event S2 F36 Link Event Report Acknowledge LERA S H E Description Acknowledge or Error Structure LRACK S2 F37 Enable Disable Event EDER S H E reply Description This code allows the Host to enable or disable an event report AERS S6 F13 for any or all events Some events are enabled by default upon VersaPort power up see messag...

Page 165: ...ecific error message text Exception After any non recoverable error has occurred the VersaPort will enter into an error state which inhibits acceptance of any action command until after an error reset command has been issued by the Host The reset command to be issued is S2 F41 Host command send HCS 1 RCMD 16 HCS_RESET_ERROR S5 F3 Enable Disable Alarm Send EAN S H E reply Description The Host can u...

Page 166: ... VIDc 2 Vc Exception A zero length list for the number of reports means that there are no reports linked to the given CEID S6 F14 Annotated Event Report Send Acknowledge AERA S H E Description Acknowledge or error Structure ACKC6 S9 F1 Unrecognized Device ID UDN S H E Description The device ID in the message block header did not correspond to any known device ID in the node detecting the error Str...

Page 167: ...play Single VTN S H E reply Description This is the terminal services for the VersaPort diagnostic messages The data is to be dis played on the Host terminal The reply message S10 F4 is optional the W bit is not set Structure L 2 1 TID 2 TEXT S10 F4 Terminal Display Single Acknowledge VTA S H E Description Acknowledge or error Structure ACKC10 ...

Page 168: ...cknowledge Code 1 Byte 0 Accepted 1 Denied S5 F4 21 ACKC6 Acknowledge Code 0 Accepted 1 Error S6 F14 21 ACKC10 Acknowledge Code 1 byte 0 Accepted for display 1 Message will be displayed 2 Terminal not available S10 F4 21 ALCD Alarm Code 5 Non recoverable 6 Warning S5 F1 21 ABS Any binary string n bytes Bit 8 1 enable alarm Bit 8 0 disable alarm S2 F25 S2 F26 21 ALED Alarm Enable Disable 1 byte Bit...

Page 169: ...ater failed to move out Elevator fails to reach target pos Wafer protrusion sensor malfunction Slot sensor malfunction Wafer sensor malfunction or misaligned Flash sensor malfunction Tripping of elev over travel limit Missing pod door System internal time out Excessive wafer out error Servo controller command error System error Loss of configuration data Inadequate fan flow Motion error not at tar...

Page 170: ...6 Failed Reach pos 57 Map completed 58 Failed get map 59 End sensor calibration 60 Failed sensor calibration 61 End self test 62 Failed self test 63 MSC interlock enable 64 MSC interlock disable 65 PIO interlock enable 66 PIO interlock disable 142 Latch Locked 143 Abort Latch Lock 144 Latch Unlocked 145 Abort Unlock Latch 168 Shuttle Config Chng 169 End home calibration 170 Failed Home Calibration...

Page 171: ...nt along with the Host command in S2 F41 Refer to RCMD for parameters list S2 F41 A9 DATAID Data I D 0 S2 F33 S2 F35 S6 F13 A5 DEVICE_ID ID number of the VersaPort unit Available value 1 32767 S2 F13 S2 F15 A9 DRACK Define Report Acknowledge code 0 Accepted 1 Denied insufficient space 2 Denied invalid format 3 Denied at least one RPID already defined 4 Denied at least one VID does not exist 4 Othe...

Page 172: ...ICATED TAG Default off PROTOCOL 50 SECS TIMEOUT T1 Default 1 sec 51 SECS TIMEOUT T2 Default 2 sec 52 SECS TIMEOUT T3 Default 0 0 means 6 sec 59 SUBSTRATE HGT Default 30 61 ELEV HOME OFFSET Default 0 63 DEFAULT CASSETTE Default 0 PRESENT CONFIRMATION 67 CASSETTE BASE OFFSET Default 0 85 FSD ASCII OPTION Default 0 86 STAGE SEATER OUT Default 0 87 SHUTTLE ADV POS Default 4100 89 SHUTTLE OPTION Defaul...

Page 173: ...t home 6 VersaPort busy 7 Pending alarm not cleared 8 Home calibration pending 9 Fan flow error 10 Cannot perform manual mode required 11 Cannot perform Host in parallel host control mode 64 In manual service mode 65 Pod missing 66 Host not ready 68 Already done 69 MSC not ready S2 F42 21 HOMEST VersaPort Home status 0 Versa not at Home 1 VersaPort home S1 F6 S2 F33 A5 HOST_OPTION 0 Serial SECS in...

Page 174: ... time out 19 Pod hold down close time out 20 Wafer seater failed to move toward wafer 21 Wafer seater failed to return home 22 Port failed to reach target position 24 System error 27 Loss of configuration data 28 Cassette not present 29 Loss of air flow 30 Fatal pod removed 35 Cassette present 37 User soft abort 38 Fatal wafer seating 39 Encoder error 40 Shuttle following error 49 Failed reach tar...

Page 175: ...vailable via MSC port S2 F13 S2 F15 S2 F33 A5 MSC_INTLK MSC interlock option 0 Disables interlock 1 Enable interlock MSC enable required for Pod opening S2 33 A5 PIO_ENABLE Value of parallel interlock 0 Interlock off 1 Interlock on enabled S1 F6 S2 F33 A5 PIO_MODE 1 Parallel interlocks required 0 Parallel interlocks disabled default S1 F6 S2 F13 S2 F15 S2 F33 A5 PIO_1 PIO_2 PIO_3 PIO_4 PIO_5 Reser...

Page 176: ...e in mils 18 A M Switch out of normal operation mode and into service mode None 19 A Home position calibration None 20 A M Emergency stop None 83 A M Soft stop None 84 Verify cassette 0 Do not care 1 Confirm cassette present 2 Confirm cassette not present 90 Stage seater out 128 A M Get motor status None 129 M Close port lifter servo loop None 130 M Open port lifter servo loop None 131 M Reset ser...

Page 177: ... M Unlock Pod door None 143 Lock Pod hold down latch None 144 Unlock Pod hold down latch None 145 Move wafer seater toward cassette None 146 Return wafer seater to Home None 147 Lock hold down latch unlock door None 148 Lock door unlock hold down latch None 151 Reserved for future use 154 Brake off 155 Brake on 161 Advance shuttle 162 Retract shuttle 170 Calibrate shuttle 171 to 190 Reserved for f...

Page 178: ... Do not know 1 Wafer present 2 Empty 4 Cross slotted wafer S1 F6 S2 F33 A5 SLOT_PITCH Distance from slot to slot in cassette mils Default 250 mils S2 F13 S2 F15 A9 SLOT_POS Current port lifter slot position one byte 0 Home 1 25 slot number 255 Beyond slot number 25 S2 F13 S2 F33 A5 SOFTREV Software Revision code 6 bytes maximum S1 F2 41 STAGE_POS Stage position in thousandths of inch from top defa...

Page 179: ...ost 1 Enable S2 F21 commands from External Host The commands RCMD 20 RCS_KEEP_PORT_LOCK and RCMD 21 RCS_PORT_LOCK_IMMATERIAL will be accepted from External Host TOTAL_RECERR Total number of recoverable errors that have occurred since install S1 F6 71 TOTAL_STAGE Total number of stage operations since installation S1 F6 71 TOTAL_SSEARCH Total number of slot search operations since installation S1 F...

Page 180: ...ides an interlock between multiple Hosts that control the VersaPort wafer transfer function and SMART Tag material tracking If a Tag is attached to the Pod the MSC can access the information on the Tag and verify that the product lot is the proper lot that is to be processed by this particular Process Tool at this particular time If yes then the lot is validated and an RCS command can be sent to t...

Page 181: ...ween the center of one slot to the center of an adjacent slot Default 250 mils SINGLE PORT ECID 37 This option allows the Host to combine the control of the motion function and SMART Traveler System material tracking through a single RS 232 port Normally with the Single Port option set to value 0 the motion function is controlled through the Host port while the STS function is controlled through t...

Page 182: ...1 and other commands reports ASCII port Standard ASCII commands and protocol 7 MSC port not supported Host port access HCS S2 F41 and other commands reports and Smart Tag 8400 read write ASCII port STS commands reports such as RCS Default 0 NOTE IF OPTION 2 IS CHOSEN ALL INCOMING DATA ARRIVING THROUGH THE MSC PORT WILL BE PASSED THROUGH TO THE SMART TAG PROBE REGARDLESS OF WHETHER THE RTS LINE IS ...

Page 183: ...RATE ECID 41 This option allows a Host to modify the VersaPort serial communication baud rate through the HOST Equip port and ASCII port Four baud rates are available 2400 baud 4800 baud 9600 baud 19200 baud Default 9600 baud SECS COMMUNICATION TIMEOUT T1 ECID 50 This option specifies the maximum time delay tolerated between characters within a SECS data block If the SECS message receiver fails to...

Page 184: ... During Stage Open operation if no cassette is on the pod door and ECID 63 is 0 the elevator will return Home and send an alarm Cassette not present If there is a cassette on the pod door and ECID 63 is 2 the elevator will return Home and send an alarm Cassette present 0 Confirm cassette present during Pod opening 1 Do not care 2 Confirm cassette not present for cassette unload only Default 0 Conf...

Page 185: ...he Process Tool Controlling Lots through the MSC The Asyst Technologies MicroStation Controller MSC provides the means for a host to track one or more processes There is a limited set of SECS commands that the external host can send to the VersaPort through the MSC These commands are as follows S2 F21 Remote command Send RCS S H E reply Description Simplified message for the internal Host material...

Page 186: ...S1 F1 Block number 1 System bytes F8 02 00 00 02 64 Check Sum 4 VPORT replies 06 ACK 5 VPORT sends 05 ENQ 6 Host replies 04 EOT 7 VPORT sends 1C Length Byte 28 Bytes i e header plus 18 bytes of data 80 FB 01 02 80 01 F8 02 00 00 Header Device ID 251 S1 F2 Block number 1 System bytes F8 02 00 00 01 02 41 06 49 4E 44 58 20 20 41 06 30 30 31 2E 32 30 Data List of 2 items Equipment Model Type ASCII 6 ...

Page 187: ...1 12 00 00 00 21 01 00 01 C8 Stream 2 Function 42 HCACK 0 accept Host 06 2a Host issues command to move to stage position Host 05 VPORT 04 Host 11 00 FB 82 29 80 01 14 00 00 00 01 02 A5 01 09 01 00 02 5A Stream 2 Function 41 RCMD 9 VPORT 06 2b VPORT accepts the stage command VPORT 05 Host 04 VPORT 0D 80 FB 02 2A 80 01 14 00 00 00 21 01 00 01 CA Stream 2 Function 42 HCACK 0 accept Host 06 2c VPORT ...

Page 188: ...PORT 0D 80 FB 02 2A 80 01 17 00 00 00 21 01 00 01 CD Stream 2 Function 42 HCACK 0 Host 06 3c VPORT has reached Home and sends event message VPORT 05 Host 04 VPORT 14 80 FB 06 0D 80 01 75 00 00 00 01 03 A5 01 00 A5 01 12 01 00 03 E7 Stream 6 Function 13 CEID 18 End home Host 06 4a Host issues a command to move VPORT s port plate lifter four inches above Home Host 05 VPORT 04 Host 15 00 FB 82 29 80 ...

Page 189: ...f zero see example 18a 5a Host issues the command to place VPORT to service mode Host 05 VPORT 04 Host 11 00 FB 82 29 80 01 2C 00 00 00 01 02 A5 01 12 01 00 02 7B Stream 2 Function 41 RCMD 18 VPORT 06 5b VPORT accepts the command to be placed in service mode VPORT 05 Host 04 VPORT 0D 80 FB 02 2A 80 01 2C 00 00 00 21 01 00 01 E2 Stream 2 Function 42 HCACK 0 Host 06 5c VPORT sends an event message t...

Page 190: ...dicate self test is done VPORT 05 Host 04 VPORT 24 80 FB 0A 03 80 01 14 01 00 00 01 02 A5 01 01 41 13 53 65 6C 66 2D 74 65 73 74 20 63 6F 6D 70 6C 65 74 65 64 0A 70 Stream 10 Function 3 message SELF TEST COMPLETED Host 06 6e VPORT multiple terminal messages to report the results of self test VPORT 05 Host 04 VPORT 44 80 FB 0A 03 80 01 15 01 00 00 01 02 A5 01 01 41 33 54 68 65 20 66 6F 6C 6C 6F 77 ...

Page 191: ...00 FB 82 29 80 01 36 00 00 00 01 02 A5 01 10 01 00 02 83 Stream 2 Function 41 RCMD 16 VPORT 06 7b VPORT accepts the command to clear error VPORT 05 Host 04 VPORT 0D 80 FB 02 2A 80 01 36 00 00 00 21 01 00 01 EC Stream 2 Function 42 HCACK 0 Host 06 8a Host issues a command to read VPORT configuration data Host 05 VPORT 04 Host 2A 00 FB 82 0D 80 01 37 00 00 00 01 0A A5 01 04 A5 01 06 A5 01 0D A5 01 2...

Page 192: ...CID 34 25 Slot pitch ECID 35 250 mils Single port option ECID 37 0 Disable Parallel host option ECID 38 0 Disable Cassette size option ECID 39 0 Std 200mm Host 06 9a Host issues a command to modify the VPORT equipment constant Changing slope position to 10 2 inches below Home position Host 05 VPORT 04 Host 15 00 FB 82 0F 80 01 3C 00 00 00 01 01 01 02 A5 01 21 A9 02 27 D8 04 2B Stream 2 Function 15...

Page 193: ... a new DAC threshold Host 05 VPORT 04 Host 15 00 FB 82 29 80 01 0C 00 00 00 01 02 A5 01 89 01 01 A9 02 00 01 03 7F Stream 2 Function 41 RCMD 137 Parameter 1 1 slot sensor VPORT 06 11b VPORT accepts the HCS command VPORT 05 Host 04 VPORT 0D 80 FB 02 2A 80 01 0C 00 00 00 21 01 00 01 C2 Stream 2 Function 42 HCACK 0 Host 06 11c VPORT reports the value of the DAC threshold for the requested sensor VPOR...

Page 194: ...r position and current slot number at transfer height with the following event reports a Reach new wafer 12a Host issues a command to inquire about the VPORT cassette map status Host 05 VPORT 04 Host 0D 00 FB 81 05 80 01 0D 00 00 00 21 01 02 01 9F Stream 1 Function 5 Form code 2 VPORT 06 12b VPORT reports the VPORT cassette wafer map status VPORT 05 Host 04 VPORT 5C 80 FB 01 06 80 01 0D 00 00 00 0...

Page 195: ...1 05 00 00 00 21 01 00 01 B7 Stream 2 Function 38 ERACK 0 Host 06 14a Host issues a DR command to clear all defined reports Host 05 VPORT 04 Host 11 00 FB 82 21 80 01 04 00 00 00 01 02 A5 01 00 01 00 02 39 Stream 2 Function 33 List 0 Clears all report VPORT 06 14b VPORT accepts the DR command VPORT 05 Host 04 VPORT 0D 80 FB 02 22 80 01 04 00 00 00 21 01 00 01 B2 Stream 2 Function 34 DRACK 0 Accept...

Page 196: ...ost 04 VPORT 0D 80 FB 02 22 80 01 08 00 00 00 21 01 00 01 B6 Stream 2 Function 34 DRACK 0 Host 06 17a Host issues an LER command to link new data reports with an event message Host 05 VPORT 04 Host 4D 00 FB 82 23 80 01 0A 00 00 00 01 02 A5 01 00 01 06 01 02 A5 01 35 01 01 A5 01 02 01 02 A5 01 12 01 01 A5 01 02 01 02 A5 01 39 01 01 A5 01 02 01 02 A5 01 2D 01 01 A5 01 01 01 02 A5 01 33 01 01 A5 01 0...

Page 197: ...with messages 18 to 22 during power up the VPORT will send an annotated report message similar to below after completing a stage operation VPORT 05 Host 04 VPORT 23 80 FB 06 0D 80 01 31 00 00 00 01 03 A5 01 00 A5 01 35 01 01 01 02 A5 01 02 01 01 01 02 A5 01 0A A5 01 01 05 BC Stream 6 Function 13 CEID 53 Reach stage position attached report 2 VID 1 10 Pod in place 1 True Host 06 ...

Page 198: ...rt configuration data ASCII protocol is set up through the COMM_PROTOCOL option ECID 38 in the Load Port with the following modes 3 text interface with echo on 4 text interface without echo or 5 text interface with echo off and a two byte checksum on the text message If the value of COMM_PROTOCOL is 0 or 1 the mode will be the same as 4 non echo The COMM_PROTOCOL data is stored in the Load Port s ...

Page 199: ...m the Host port for a Host to perform data integrity check This is a one way echo that is applicable to messages initiated by the Host only NOTE THE HOST SHOULD NOT ATTEMPT TO ECHO MESSAGES INITIATED BY THE LOAD PORT REGARDLESS OF WHETHER THE ECHO OPTION IS TURNED ON OR NOT All unrecognizable commands or format will be rejected with a bell 07 All commands and data are case sensitive Only upper cas...

Page 200: ...tatus from the Load Port Send current Load port status to the Host Host E Host E FSR FSD S1F5 S1F6 CONFIGURATION Request to read the Load Port configuration parameters Send Load Port configuration parameters to the Host Host E Host E ECR ECD S2F13 S2F14 Set Load Port configuration parameters Reply to request to set configuration parameters Host E Host E ECS ECA S2F15 S2F16 MOTION COMMANDS Send com...

Page 201: ...ved Pod for VersaPort with P91 0 1 CARRIER_REMOVED Operator removed Pod for VersaPort with P91 1 1 POD_ARRIVED Operator placed Pod for VersaPort with P91 0 2 CARRIER_ARRIVED Operator placed Pod for VersaPort with P91 1 2 AUTO_MODE VersaPort entered auto mode 3 MANUAL_MODE VersaPort entered manual mode 4 POWER_UP VersaPort powered up 5 REACH_HOME VersaPort returned Home for VersaPort with P91 0 18 ...

Page 202: ... Completed the Homing calibration 49 ABORT_CAL Failed the Homing calibration 50 REACH_STAGE Reached the stage position for VersaPort with P91 0 53 ABORT_STAGE Failed to reach stage position 54 REACH_POS Reached position 55 ABORT_POS Failed to reach position 56 CMPL_MAP Map completed 57 ABORT_MAP Failed to get map 58 CMPL_SELF TEST End self test 61 FAILED_SELF TEST Failed self test 62 MSC_ENABLE_OP...

Page 203: ...nse to an ECS message Structure ECA space XX CR LF Where XX Equipment acknowledge code Alarm message received Motion aborted because ARS WARNING Cassette not present CR LF Cassette is missing ARS FATAL Port door failed to open CR LF Either pod door motor failed to move or pod door sensor has failed ARS FATAL Wafer protrusion sensor malfunction CR LF Wafer protrusion sensor is mis aligned or not fu...

Page 204: ... message Structure ECR space XX CR LF Where XX Equipment constant ID as defined in the ECS New Equipment Con stant Send Host Load Port on page 186 Examples ECS New Equipment Constant Send Host Load Port Description This message is used by the Host to set Load Port configuration parameters such as Host interface mode and stage access position Equivalent SECS S2F15 Primary Secondary Primary the resp...

Page 205: ...TCH P37 0 7 SINGLE_PORT P38 0 1 3 4 or 5 Note 4 HOST_COMMUNICATION_OPTION P39 0 2 4 5 7 or 8 Note 5 CASSETTE_SIZE_OPTION P40 0 TO 65535 default 251 DEVICE_ID P41 2400 4800 9600 or 19200 baud COMMUNICATION BAUD RATE P61 126 to 126 default 0 Elevator homing calibration offset P63 0 1 OR 2 DEFAULT CASSETTE PRESENT P67 126 to 126 default 0 CASSETTE BASE OFFSET P85 0 or 1 FSD ASCII OPTION P86 0 or 1 ST...

Page 206: ...her acknowledge or deny the Host s request to enable disable the Load Port event report option Equivalent SECS S2F38 Primary Secondary Secondary this is a response to an EDER message Structure EERA space XX CR LF Where XX can be either OK or DENIED Action ASCII Code Host sends to Load Port Modify Host option to echo text interface ECS space P38 3 CR LF Load Port replies to Host Host command is acc...

Page 207: ...event reports EDER space OFF CR LF Host sends to Load Port Enable all event reports EDER space ON CR LF Load Port replies to Host EDER command is accepted EERA space OK CR LF Load Port replies to Host EDER command is denied EERA space DENIED CR LF TABLE 25 Formatted Status Data Form Code 0 Variable Description PIO OFF Parallel interlocks not required ON Parallel interlocks required PIP FALSE No Po...

Page 208: ...ed ON Parallel interlocks required CIP FALSE No Carrier Pod present TRUE Carrier Pod present READY FALSE VersaPort is busy TRUE VersaPort ready for new command HOME FALSE VersaPort not Home TRUE VersaPort Home PODPOS HOME Port unlocked PORT Port locked OTHER None of the above ELOPEN FALSE Port lifter not at stage position or shuttle not at forward position TRUE Port lifter at stage position and sh...

Page 209: ...SD1 space 6005 1030 10 space REV space CR LF 3 Reply to cassette map status request FSR form code 2 FSD2 space S1 E space S2 E space S3 E space S4 E space S5 E space S6 E space S7 E space S8 E space S9 E S10 E space S11 F space S12 F space S13 F space S14 F space S15 F spa ce S16 F space S17 F space S18 F S19 C space S20 C space S21 U space S22 U space S23 U space S24 U sp ace S25 U CR LF Interpre...

Page 210: ... PRTST UNLK space ELDN FALSE space ELUP TRUE space ELSTAGE FALSE SEATER HOME space MODE AUTO spa ce SLOTPOS 0 space EVPORTS 0 CR L F Load Port replies to Host s status request FSR form code 1 FSD1 space 6005 1030 10 space REV sp ace CR LF Load Port replies to Host s status request FSR form code 2 Slots 1 to 10 are empty slots 11 to 18 are filled with wafers slots 19 and 20 have a crossed wafer and...

Page 211: ...ected FOUP not on Load Port 65 NOT_READY Command rejected Host interlock not enabled 66 OK Comment accepted 0 Action ASCII Code Host sends to Load Port Move port lifter 4 inches abs pos above port door HCS space GOTO space 4000 CR LF Load Port replies to Host Host command is accepted HCA space OK CR LF Load Port replies to Host Command rejected Load Port in alarm state HCA space ALARM CR LF Load P...

Page 212: ...l drive motion decelerated stop 83 CASSETTE LD Confirm cassette present 84 CASSETTE UNLD Confirm cassette not present 84 CASSETTE NA Do not care 84 CLEAR_SLOT_STATUS Clear slot status 85 ENABLE_SERVO Manual Enable the Servo motors 129 DISABLE_SERVO Manual Disable the Servo motors 130 RESET_SERVO Manual Reset the Servo motors 131 AUTO Switch VersaPort into AUTO mode 133 MAN_UNLK Manual Unlock comma...

Page 213: ...pos above port door HCS space GOTO space 4000 CR LF Load Port replies to Host Host command is accepted HCA space OK CR LF Load Port replies to Host Command rejected Load Port in alarm state HCA space ALARM CR LF Load Port replies to Host Unrecognizable Host command Bell TABLE 29 RCS Reply Messages XX Description ref SECS CMDA ALARM Command rejected Load Port in alarm state 7 BUSY Command rejected ...

Page 214: ...ion ref SECS RCMD KEEP_LOCK Advance FOUP to port and hold down FOUP 20 NC_LOCK Return FOUP to Home and release hold down 21 ENABLE_OPEN Enable open motion initiated by Host 23 DISABLE_OPEN Disable open motion initiated by Host 24 BLINK_STS Blink CARRIER light 22 STOP_BLINK Stop blink CARRIER light 27 Action ASCII Code Host sends to Load Port Advance FOUP to port and hold down FOUP RCS space KEEP_L...

Page 215: ...h the parallel communication interface will be ignored When the parallel host communication lines are connected the Host must set this line to active before an open command could be accepted by the VersaPort This signal does not affect the status of any output signal from the VersaPort to the Host Both the Ready to Open and Ready to Close signals should never be active at the same time TABLE 31 In...

Page 216: ... The VersaPort interprets this line in conjunction with the two host ready lines READY to OPEN and READY to CLOSE OPEN When the Host sets the OPEN CLOSE line active the VersaPort performs an OPEN operation if all of the following conditions are met VersaPort is powered ON VersaPort is configured for parallel communication VersaPort is in AUTO mode Pod is in place on the port plate VersaPort is idl...

Page 217: ...action command is issued by the Host and accepted by the VersaPort the READY signal goes inactive until the command has been completed If a serial host is also connected to the VersaPort and the serial host has issued a SECS command to change the operation of the VersaPort to MANUAL mode the unit will not accept any commands from a parallel host The READY signal will remain inactive until either t...

Page 218: ...is reset to inactive when the recovery action return home is completed HOME OUTPUT This signal is set to active whenever the VersaPort is in AUTO mode and is at the Home position ready to load or unload A Host can use this signal to determine what OPEN or CLOSE cycle to perform next AT OPEN POSITION Pin 5 on parallel communications port OUTPUT This signal is set to active when the vertical drive i...

Page 219: ...t is now idle and ready to accept a new command CLOSE Cycle A Host has confirmed that the VersaPort is not Home and ready to accept a new command it then enables the READY to CLOSE signal B Host issues a OPEN CLOSE command C VersaPort accepts the CLOSE command and acknowledges by de activating the READY signal The VersaPort then starts a close cycle D Host can remove the active OPEN CLOSE signal a...

Page 220: ...Page 202 2000 1252 01 Released Rev C VersaPort 2200 Technical Manual Appendix B Communications Software Parallel Communication a ...

Page 221: ...Y HILL CONNECTICUT 06067 Telephone Number for Information 860 571 5100 For Current MSDS data please visit the manufacturer s website http www loctite com Product Name or Number Loctite 242 Formula Generic Chemical Name Removable Threadlocker USDA Authorization Manufacturer s Name HENKEL CORPORATION Emergency Telephone Number 860 571 5100 Address 1001 Trout Brook Crossing ROCKY HILL CONNECTICUT 060...

Page 222: ...Crossing ROCKY HILL CONNECTICUT 06067 Telephone Number for Information 860 571 5100 For Current MSDS data please visit the manufacturer s website http www loctite com Product Name or Number Loctite 680 Formula Generic Chemical Name Retaining Compound High Strength USDA Authorization Manufacturer s Name HENKEL CORPORATION Emergency Telephone Number 860 571 5100 Address 1001 Trout Brook Crossing ROC...

Page 223: ...ytox GPL 20X and 50X Formula Generic Chemical Name Fluorinated Grease USDA Authorization Manufacturer s Name DuPont Emergency Telephone Number 800 441 3637 Outside US 302 774 1000 Address 1007 Market Street Wilmington DE 19898 Telephone Number for Information 800 441 7515 Outside US 302 774 1000 For Current MSDS data please visit the manufacturer s website http www krytox com ...

Page 224: ...Page 206 2000 1252 01 Released Rev C VersaPort 2200 Technical Manual Appendix C Material Safety Data Sheets a ...

Page 225: ...ages 3400 0089 XX Rev 005 Wiring Diagram VersaPort 6 9700 5219 XX Rev A Port Door Assembly 2 9700 5384 01 Rev A Final Assembly VersaPort 2200 Standard 9 9700 5384 02 Rev A Final Assembly VersaPort 2200 Cassette Advance Shuttle 10 9700 5551 XX Rev A Base Assembly Standard and Cassette Advance Shuttle 9 9700 5552 01 Rev G Port Plate Assembly 8 9700 5553 01 Rev 008 Vertical Drive Assembly 7 9700 5554...

Page 226: ...Page 208 2000 1252 01 Draft Rev C VersaPort 2200 Technical Manual Appendix D Wiring Diagrams and Drawings a ...

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Page 287: ...g8400 134 L labeling 12 languages iii laser classification 9 interlock 9 lockout tagout procedures 8 M mechanical components 18 21 MicroStation Controller communications 167 motor controls 26 N NOVRAM ECID storage 31 history data storage 31 O operation sequence 20 outline drawing 33 P parallel communication 197 event flow 200 parallel port input signals description 197 output signals description 1...

Page 288: ...assette slot 25 excessive wafer protrusion 26 list of 23 wafer present 25 wafer protrusion 26 serial communication configuring 137 service calibration alignment procedures CAP 63 corrective service procedures CSP 98 preventive service procedures PSP 60 software communications 123 137 see also ASCII SECS FLSIM specifications 33 stream and function codes SECS 142 T trademarks iii training iii ...

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