Asyst Technologies VersaPort 2200, Technical Manual

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Released Rev. C 2000-1252-01 Page 85
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP3 – Align Wafer Seater Mechanism
a
_____13. Loosen the two actuator arm set screws. If vibration was observed, push down
slightly on the actuator arm to increase preload (approximately 1 to 2 pounds)
on the wavy washer. Tighten one of the set screws. Ensure the position of the
wafer seater arm still provides 0.30 to 0.50 clearance as described in Step 10.
Tighten the second set screw.
NOTE . . .
I
NCREASING PRELOAD WILL CAUSE THE SEATER ARM TO RAISE VERY SLIGHTLY
WAY FROM THE LASER BRACKET COVER
. R
EDUCING PRELOAD WILL CAUSE
SEATER ARM TO MOVE AWAY FROM BOTTOM OF PORT PLATE
.
There should be approximately 1 to 2 pounds of preload on the wave washer to
eliminate vibration and noise, and to keep the wafer seater arm away from the
laser bracket cover.
If the gap is too big between the seater roller and the laser bracket, the
excessive wafer protrusion sensor will be actuated during self test.
If the actuator arm does not move, the wafer seater mechanism is jammed
against the port plate and must be adjusted. At the sensor PC board, using a
No. 0 Phillips screwdriver, loosen the screws securing the board to the port
plate. Rotate the sensor board very slightly toward the port door. Tighten
screws. This will cause the actuator arm flag to contact the PC board sensor
sooner and limit wafer seater mechanism movement.
If sensor PC board required adjustment, repeat Step 5 and check that roller
end of wafer seater arm is not contacting laser bracket and wafer seater has
slight amount of play.
_____14. Verify the wafer seater arm is not obstructing the Excessive Wafer Protrusion
Sensor. Grasp the actuator arm and rotate it slightly inward toward the sensor.
There should be a small amount of play. Lower the minienvironment. Using
ISIM;
_____a. From MANUAL menu select F5 (Goto Pos)
_____b. At the dialog box, in “ Target Pos (inch):___ ” field, type 8 and press Enter
key three) times to raise the port plate.
_____c. If the port plate rises, the sensor has not been obstructed. Proceed to next
step. If port plate did not move, adjust sensor PC board as described in
Step 12, paragraph 3 and 4. Move sensor PC board very slightly away
from port door to increase seater arm travel.
_____d. Clear ISIM error condition by pressing F8, and repeat this step.
_____15. Return port plate to previous position with test wafer in front of wafer seater;
_____a. From MANUAL menu select F5 (Goto Pos)
_____b. At the dialog box, in “ Target Pos (inch):___ ” field, type 9 and press Enter
three times to raise the port plate.