Anest Iwata ISP-50, Instruction Manual, Page: 9 / 34

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Contents
Important infomation ..................................................................................................................1
Important information .............................................................................................................1
For safe operation ...................................................................................................................2
Contents.......................................................................................................................................7
1. Before use................................................................................................................................8
1.1 Check the product.............................................................................................................8
2. Name and structure of each section...................................................................................11
3. Installation .............................................................................................................................12
3.1 Wiring................................................................................................................................13
3.2 Test operation..................................................................................................................17
3.3 Connection to vacuum system (chamber) ...................................................................18
4. Operation ...............................................................................................................................19
4.1 Standard operation .........................................................................................................21
4.1.1 Start-up ......................................................................................................................21
4.1.2 Shut-down .................................................................................................................21
4.2 Air-flush operation ..........................................................................................................22
4.2.1 Preparation ................................................................................................................22
4.2.2 Start-up and shut-down ...........................................................................................23
4.2.3 When returning to standard operation...................................................................23
5. Maintenance and inspection................................................................................................24
5.1 Daily maintenance and inspection ................................................................................24
5.2 Maintenance.....................................................................................................................25
6. Problems and remedies .......................................................................................................26
7. Disposal .................................................................................................................................27
8. Specifications ........................................................................................................................28
8.1 Specifications ..................................................................................................................28
8.1.1 ISP-50.............................................................................................................................28
8.2 Dimensions ......................................................................................................................29
8.2.1 ISP-50-SV1.....................................................................................................................29
8.3 Performance data ............................................................................................................30