© Arun Microelectronics Ltd 2020. All rights reserved
Page 15
Prevents Ion Gauge from starting, or stops emission, if Interlock
gauge pressure is above a specified threshold, preventing restart
without user intervention.
The behaviour of manual mode applies, in addition:
•
An Interlock gauge is selected, either Pirani 1 or the
Active Gauge.
•
An Interlock pressure is specified.
•
Ion Gauge is only allowed to start if the Interlock
gauge measures a pressure less than the Interlock
pressure at the time when the Function Switch is
turned to an emission position.
•
If the Interlock gauge measures a pressure greater
than or equal to the Interlock pressure, then emission
is prevented from starting (if the Function Switch was
just turned to an emission position) or stopped
immediately (if emission was in progress) and a
warning message is displayed according to the
chosen Interlock gauge.
•
Once in the Interlocked state, the Function Switch
must be returned to OFF before another attempt can
be made to start emission.
•
If the Interlock gauge is not switched on (Pirani 1) or
not used (Active Gauge) then a warning message is
shown and emission cannot be started.
•
If the Interlock gauge is Pirani 1, and Pirani 1 fails
open circuit, emission will be aborted if in progress, or
prevented from starting. This is considered a fault
condition, requiring the Function Switch to be
returned to OFF before another attempt can be made
to start emission.
Summary of Contents for NGC3
Page 2: ......
