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Betriebsanleitung

Agilent TwisTorr 305 FSQ & 305 SF User Manual

Warnsymbole

Das Folgende ist eine Liste von Symbolen, die in Verbindung mit den Warnungen

auf dem TwisTorr 305 FSQ & 305 SF angezeigt werden. Die von ihnen beschriebene

Gefahr wird ebenfalls angezeigt.
Ein dreieckiges Symbol weist auf eine Warnung hin. Die Bedeutung der Symbole, die

neben Warnhinweisen in der Dokumentation oder auf dem Gerät selbst erscheinen

können, ist wie folgt:

Gleichstrom

Nicht berühren

Europäische

Konformitätserklärung

Allgemeine Gefahr

Herstellungsbetrieb

Ausschalten

Einschalten

Schutzerdungsanschluss

Summary of Contents for TwisTorr 305 FSQ

Page 1: ...Agilent TwisTorr 305 FSQ 305 SF User Manual...

Page 2: ...information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms...

Page 3: ...rio 19 Attrezzatura di protezione 20 Linee guida di sicurezza per pompe turbomolecolari 21 Trasporto Immagazzinamento 22 Descrizione del prodotto 23 Installazione 24 Preparazione per l installazione 2...

Page 4: ...keit 38 Definitionen und Terminologie 39 Definition von Vorsicht Warnung und Hinweis 39 Warnsymbole 40 Sicherheit 42 Sachgem e Verwendung 42 Unsachgem e Anwendung 43 Schutzausr stung 44 Sicherheitsric...

Page 5: ...ce 60 3 Mode d emploi 61 propos de ce manuel 62 Validit 62 D finitions et terminologie 63 Signification des messages d attention d avertissement et des notes 63 Symboles d avertissement 64 S curit 66...

Page 6: ...Torr 305 FSQ 305 SF 80 Arr t d urgence 80 Entretien 81 Dur e de vie du rotor 81 D marrage progressif 82 Nettoyage 82 limination 83 Service 84 4 Instrucciones de uso 85 Acerca del manual 86 Validez 86...

Page 7: ...n de la brida de alto vaciado 100 Instalaci n de la brida ISO K 101 Conexi n de la bomba pre vaciad 102 Puesta en marcha y funcionamiento de TwisTorr 305 FSQ 305 SF 103 Parada de la TwisTorr 305 FSQ 3...

Page 8: ...ts 8 Agilent TwisTorr 305 FSQ 305 SF User Manual 116 117 118 119 120 120 122 TwisTorr 305 FSQ 305 SF 123 124 ISO K 125 126 TwisTorr 305 FSQ 305 SF 127 TwisTorr 305 FSQ 305 SF 128 128 129 129 130 130 1...

Page 9: ...TwisTorr 305 FSQ 305 SF User Manual 9 6 133 134 134 135 135 136 138 138 139 140 141 142 143 144 144 146 TwisTorr 305 FSQ 305 SF 147 148 ISO K 149 150 TwisTorr 305 FSQ 305 SF 151 TwisTorr 305 FSQ 305 S...

Page 10: ...e 162 Improper use 163 Protective equipment 164 Safety guideline for Turbomolecular Pumps 165 Transport Storage 166 Product description 167 Installation 168 Preparation for installation 168 Set up 170...

Page 11: ...r 305 FSQ 305 SF Outline 190 Interconnections 195 Earth Ground Connection 196 Pump Operations 197 Inlet screen installation 197 Air Cooling Kit Installation 200 Water Cooling Kit Connection only for w...

Page 12: ...Istruzioni per l uso 12 Agilent TwisTorr 305 FSQ 305 SF User Manual...

Page 13: ...per pompe turbomolecolari 21 Trasporto Immagazzinamento 22 Descrizione del prodotto 23 Installazione 24 Preparazione per l installazione 24 Apertura 26 Fissaggio della TwisTorr 305 FSQ 305 SF 27 Coll...

Page 14: ...livello pi elevato di manutenzione personale appositamente addestrato per le operazioni di manutenzione non devono essere eseguite dall utente Per una corretta installazione e avvio arresto consultar...

Page 15: ...nti AVVERTENZA I messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali AT...

Page 16: ...r 305 FSQ 305 SF Viene mostrato anche il pericolo che descrivono Un simbolo triangolare indica un avvertenza I significati dei simboli che possono apparire accanto alle avvertenze nella documentazione...

Page 17: ...tivo manuale operativo o di servizio per la procedura corretta a cui fa riferimento tale etichetta di avvertenza I seguenti simboli appaiono sullo strumento per vostra informazione Messa a terra prote...

Page 18: ...ni in sicurezza Il prodotto descritto in questo manuale destinato esclusivamente all ambito specificato nelle istruzioni Il manuale fornisce inoltre indicazioni relative ai requisiti essenziali per l...

Page 19: ...ompaggio di vapori di condensazione pompaggio di liquidi pompaggio di polvere funzionamento con flusso di gas elevato improprio funzionamento con pressioni inadeguate per l alto vuoto funzionamento co...

Page 20: ...i sostanze pericolose durante la manutenzione o l installazione A seconda della peculiarit del processo le pompe per vuoto i componenti o i fluidi di funzionamento possono essere contaminati da sostan...

Page 21: ...i sicurezza per pompe turbomolecolari Le pompe turbomolecolari descritte nel seguente manuale contengono una grande quantit di energia cinetica dovuta all elevata velocit di rotazione in combinazione...

Page 22: ...C intervallo di umidit relativa da 0 a 90 senza condensa la durata di conservazione di una pompa turbomolecolare di 12 mesi dalla data di spedizione le pompe turbomolecolari devono essere sempre avvia...

Page 23: ...per applicazioni con vuoto elevato e altissimo che in grado di pompare qualsiasi tipo di gas o composto di gas non corrosivo e ossidante L azione di pompaggio si ottiene attraverso una turbina ad alta...

Page 24: ...in caso di conservazione per un lungo periodo di tempo o in caso di spedizione Non gettare i materiali di imballaggio in modo non autorizzato Il materiale riciclabile al 100 ed conforme alla Direttiva...

Page 25: ...Istruzioni per l uso Agilent TwisTorr 305 FSQ 305 SF User Manual 25 Figura 1 Imballo della TwisTorr 305 FSQ 305 SF...

Page 26: ...ispositivo solo in ambienti chiusi e non utilizzare la pompa in un ambiente esposto ad agenti atmosferici pioggia ghiaccio neve polvere gas aggressivi o in ambienti esplosivi o ad alto rischio di ince...

Page 27: ...si posizione Fissare la TwisTorr 305 FSQ 305 SF in una posizione stabile montando la flangia di ingresso della turbopompa sulla controflangia del sistema con una connessione in grado di resistere a un...

Page 28: ...STRUZIONI PER L USO In particolare prestare attenzione al design dei morsetti al materiale dei morsetti e ai bulloni e alla coppia di fissaggio dei bulloni Utilizzare solo morsetti o bulloni di classe...

Page 29: ...ia ISO K fissare le due flange con i morsetti modello IC63250DCMZ o equivalenti come mostrato nella figura seguente possibile utilizzare facoltativamente uno schermo protettivo Figura 3 Utilizzare il...

Page 30: ...o un tubo classificati come vuoto Se viene utilizzato un tubo rigido qualsiasi vibrazione generata dalla pompa meccanica deve essere attenuata attraverso l uso del soffietto NOTA La TwisTorr 305 FSQ 3...

Page 31: ...Information On board capitolo Technical Information 2 Trovare la posizione dei pin di ingresso START STOP e INTERLOCK nonch le relative caratteristiche elettriche Remote capitolo Technical Informatio...

Page 32: ...uali d uso del controller per trovare l insieme appropriato di istruzioni Remoto capitolo Informazioni tecniche Collegamento del controller e significati delle finestre A bordo Capitolo Technical Info...

Page 33: ...ce la 305 FS non funzionante nella scatola in cui vi era il pezzo di ricambio della 305 FSQ SF NOTA Prima di restituire una pompa per la riparazione o il servizio di sostituzione avanzata al produttor...

Page 34: ...r pi tempo rispetto all avvio standard l utente deve attendere che la pompa sia completamente a regime prima di arrestarla Dopo il primo avvio la centralina non riavvia la pompa in modalit soft start...

Page 35: ...sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a conta...

Page 36: ...ti di un servizio di sostituzione o riparazione avanzato si prega di contattare il distributore locale o spedire direttamente a vpt customercare agilent com vpl customercare agilent com necessario com...

Page 37: ...ausr stung 44 Sicherheitsrichtlinie f r Turbomolekularpumpen 45 Transport und Lagerung 46 Produktbeschreibung 47 Installation 48 Vorbereitung zum Einbau 48 Einrichten 50 Montage von TwisTorr 305 FSQ 3...

Page 38: ...sprechend geschultes Personal f r die Wartungsarbeiten d rfen nicht durch den Benutzer ausgef hrt werden F r eine korrekte Installation und Start Stopp das Kapitel Installation konsultieren F r eine d...

Page 39: ...ie Warnhinweise lenken die Aufmerksamkeit des Bedieners auf ein Verfahren oder einen spezifischen Vorgang der schwere Verletzungen von Personen zur Folge haben k nnte wenn er nicht korrekt ausgef hrt...

Page 40: ...gt werden Die von ihnen beschriebene Gefahr wird ebenfalls angezeigt Ein dreieckiges Symbol weist auf eine Warnung hin Die Bedeutung der Symbole die neben Warnhinweisen in der Dokumentation oder auf d...

Page 41: ...en Sie in der jeweiligen Betriebs oder Wartungsanleitung das richtige Verfahren auf das sich dieses Warnschild bezieht Die folgenden Symbole werden zu Ihrer Information auf dem Instrument angezeigt Sc...

Page 42: ...r t sicher funktioniert Das in dieser Anleitung beschriebene Produkt ist ausschlie lich f r den in der Anleitung angegebenen Anwendungsbereich bestimmt Das Handbuch enth lt auch Angaben zu den grundle...

Page 43: ...d oxidierende Gase Pumpen von explosiven Gasen Pumpen von kondensierenden D mpfen Pumpen von Fl ssigkeiten Pumpen von Pulver Betrieb mit unzul ssig hohem Gasdurchsatz Betrieb mit ungeeignetem Hochvaku...

Page 44: ...sgefahr durch gef hrliche Stoffe bei Wartung oder Installation Vakuumpumpen Komponenten oder Betriebsfl ssigkeiten k nnen je nach Prozessbesonderheit mit giftigen reaktiven oder radioaktiven Stoffen v...

Page 45: ...ie f r Turbomolekularpumpen Turbomolekularpumpen wie sie in der folgenden Betriebsanleitung beschrieben sind enthalten aufgrund der hohen Drehzahl in Kombination mit der spezifischen Masse ihrer Rotor...

Page 46: ...ftfeuchtigkeitsbereich von 0 bis 90 nicht kondensierend Die Haltbarkeit einer Turbomolekularpumpe betr gt 12 Monate ab Versanddatum Die Turbomolekularpumpen m ssen immer sanft gestartet werden wenn si...

Page 47: ...Ultrahochvakuumanwendungen die alle Arten von nicht korrosiven und oxidierenden Gasen oder Gasverbindungen f rdern kann Die Pumpwirkung wird durch eine Hochgeschwindigkeitsturbine max 60600 U min erzi...

Page 48: ...um ihn bei l ngerer Lagerung oder beim Versand wieder verwenden zu k nnen Entsorgen Sie das Verpackungsmaterial nicht auf unbefugte Weise Das Material ist zu 100 recycelbar und entspricht der EG Rich...

Page 49: ...Betriebsanleitung Agilent TwisTorr 305 FSQ 305 SF User Manual 49 Abbildung 5 TwisTorr 305 FSQ 305 SF Verpackung...

Page 50: ...nur in Innenr umen auf und verwenden Sie die Pumpe nicht in Umgebungen die Witterungseinfl ssen Regen Eis Schnee Staub aggressiven Gasen oder explosionsgef hrdeten Umgebungen ausgesetzt sind W hrend...

Page 51: ...Befestigen Sie den TwisTorr 305 FSQ 305 SF in einer stabilen Position und montieren Sie den Einlassflansch der Turbopumpe am Gegenflansch des Systems wobei die Verbindung ein Drehmoment von 1000 Nm um...

Page 52: ...n Drehmoment standh lt Achten Sie insbesondere auf die Ausf hrung der Klemmen das Material der Klemmen und Schrauben und den Anzugmoment der Schrauben Verwenden Sie nur Klemmen oder Schrauben mit hohe...

Page 53: ...beiden Flansche mit den Klemmen Modell IC63250DCMZ oder einem gleichwertigen Element wie in der folgenden Abbildung dargestellt optional kann ein Schutzgitter verwendet werden Abbildung 7 Verwenden Si...

Page 54: ...hergestellt werden Wenn ein starres Rohr verwendet wird m ssen Vibrationen die von der mechanischen Pumpe erzeugt werden mit einem Faltenbalg ged mpft werden HINWEIS TwisTorr 305 FSQ 305 SF zeichnet s...

Page 55: ...n Kapitel Technische Informationen On Board Kapitel Technische Informationen 2 die Position der START STOP und INTERLOCK Eingangsstifte sowie die zugeh rigen elektrischen Kenndaten zu ermitteln Fern K...

Page 56: ...finden Sie in den entsprechenden Bedienungsanleitungen der Steuerung Fern Kapitel Technische Informationen Bedeutungen von Steuerungsanschluss und Fenstern On Board Kapitel Technische Informationen Be...

Page 57: ...ende 305 FS in dem Karton zur ck in dem das Ersatzteil der 305 FSQ SF war HINWEIS Bevor Sie eine Pumpe zur Reparatur oder zum vorzeitigen Austausch an den Hersteller zur cksenden m ssen Sie unbedingt...

Page 58: ...rt Modus dauert im Vergleich zum Standardstart l nger Der Benutzer muss warten bis die Pumpe vollst ndig die Geschwindigkeit erreicht hat bevor er die Pumpe anh lt Nach dem ersten Start wird die Pumpe...

Page 59: ...ig zeigt an dass das betreffende Produkt NICHT zusammen mit Haushalts oder Industriem ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher d...

Page 60: ...der Reparaturservice ben tigen wenden Sie sich bitte an den rtlichen H ndler oder direkt and die Email Adresse vpt customercare agilent com vpl customercare agilent com Das Ausf llen des Request for R...

Page 61: ...signes de s curit pour les pompes turbomol culaires 69 Transport et entreposage 70 Description du produit 71 Installation 72 Pr paration pour l installation 72 Configuration 74 Montage de la TwisTorr...

Page 62: ...maintenance plus lev personnel sp cialement form aux op rations de maintenance ne doivent pas tre effectu es par l utilisateur Pour une installation et une mise en marche arr t correctes consultez le...

Page 63: ...NT Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une pratique particuli re qui si elle n est pas effectu e correctement peut entra ner de graves blessures ATTEN...

Page 64: ...qu ils d crivent est galement illustr Le symbole triangulaire indique un avertissement Les significations des symboles qui peuvent appara tre c t des avertissements dans la documentation ou sur l app...

Page 65: ...ou d entretien correspondant pour conna tre la proc dure correcte vis e par cette tiquette d avertissement Les symboles suivants apparaissent sur l appareil pour votre information Borne de mise la ter...

Page 66: ...s curit Le produit d crit dans le pr sent manuel est destin exclusivement au domaine d application sp cifi dans les instructions Le manuel fournit galement des indications concernant les exigences ess...

Page 67: ...pompage des vapeurs de condensation pompage des liquides pompage de la poussi re fonctionnement avec d bit de gaz lev fonctionnement avec des pressions de vide lev es fonctionnement avec la modalit d...

Page 68: ...la pr sence de substances dangereuses pendant la maintenance ou l installation En fonction des caract ristiques du processus les pompes vide les composants ou les fluides de fonctionnement peuvent tre...

Page 69: ...es de s curit pour les pompes turbomol culaires Les pompes turbomol culaires d crites dans le manuel d utilisation suivant contiennent une grande quantit d nergie cin tique en raison de la vitesse de...

Page 70: ...C plage d humidit relative 0 90 sans condensation la dur e de conservation d une pompe turbomol culaire est de 12 mois compter de la date d exp dition les pompes turbomol culaires doivent toujours tr...

Page 71: ...es applications vide lev et ultra lev capable de pomper tout type de compos gazeux ou gazeux non corrosif et oxydant L action de pompage est obtenue par une turbine grande vitesse max 60 600 tr m entr...

Page 72: ...tockage de longue dur e ou d exp dition Ne pas jeter les mat riaux d emballage sans autorisation Le mat riel est recyclable 100 et est conforme la directive 94 62 de la CEE et aux modifications ult ri...

Page 73: ...Mode d emploi Agilent TwisTorr 305 FSQ 305 SF User Manual 73 Figure 9 Emballage de la TwisTorr 305 FSQ 305 SF...

Page 74: ...as utiliser la pompe dans un environnement expos des agents atmosph riques pluie glace neige de la poussi re des gaz agressifs ou dans des environnements explosifs ou pr sentant un risque lev d incend...

Page 75: ...dans n importe quelle position Fixer la TwisTorr 305 FSQ 305 SF dans une position stable en montant la bride d entr e de la turbopompe sur la contre bride du syst me avec un raccord capable de r siste...

Page 76: ...DE D EMPLOI Porter une attention particuli re la conception des colliers au mat riau des colliers et des boulons et au couple de fixation des boulons Utiliser uniquement des colliers ou boulons de cla...

Page 77: ...rides ISO K fixer les deux brides avec les attaches mod le IC63250DCMZ ou quivalent comme indiqu dans la figure suivante un cran de protection peut tre utilis en option Figure 11 Utiliser le nombre re...

Page 78: ...nduit de vide Si un tuyau rigide est utilis toute vibration g n r e par la pompe m canique doit tre amortie par l utilisation de soufflets NOTE La TwisTorr 305 FSQ 305 SF se caract rise galement par s...

Page 79: ...hapitre Informations Techniques 2 Trouver l emplacement des broches d entr e START STOP Marche Arr t et INTERLOCK Verrouiller ainsi que les valeurs lectriques correspondantes Remote Chapitre Informati...

Page 80: ...ploi en question du contr leur pour trouver l ensemble des instructions appropri Remote Chapitre Informations techniques Connexion du contr leur et significations des fen tres On board Chapitre Inform...

Page 81: ...305 FS d faillante dans la bo te qui contenait la pi ce de rechange de la 305 FSQ SF NOTE Avant de retourner une pompe pour un service d change ou de r paration avanc au fabricant il est essentiel de...

Page 82: ...e progressif prend plus de temps que le mode D marrage standard l utilisateur doit attendre que la pompe atteigne compl tement sa vitesse avant de l arr ter Apr s le premier d marrage la pompe ne sera...

Page 83: ...duit sur lequel il est appos NE DOIT PAS tre limin avec des d chets m nagers o industriels communs mais qu il doit tre confi un centre de collecte s lective L utilisateur est donc invit contacter le f...

Page 84: ...ervice d change ou de r paration avanc veuillez contacter le distributeur local ou directement par courrier vpt customercare agilent com vpl customercare agilent com Vous devez remplir le formulaire d...

Page 85: ...s turbomoleculares 93 Transporte y almacenamiento 94 Descripci n del producto 95 Instalaci n 96 Preparaci n para instalaci n 96 Puesta en marcha 98 Montaje de la TwisTorr 305 FSQ 305 SF 99 Conexi n de...

Page 86: ...lares con disposiciones espec ficas relacionadas con el nivel m s elevado de mantenimiento personal espec ficamente capacitado para las operaciones de mantenimiento no deben ser realizadas por el usua...

Page 87: ...s mensajes de advertencia llaman la atenci n del operador sobre un procedimiento o pr ctica espec fica que si no se realiza correctamente puede causar lesiones personales graves PRECAUCI N Los mensaje...

Page 88: ...bomba TwisTorr 305 FSQ 305 SF Tambi n se muestra el peligro que describen Un s mbolo triangular indica una advertencia Los significados de los s mbolos que pueden aparecer junto a las advertencias en...

Page 89: ...operaci n relevante o el manual de servicio para el procedimiento referido por dicha etiqueta de advertencia Los siguientes s mbolos aparecen en el instrumento para su informaci n Terminal protectora...

Page 90: ...d funcione de manera segura El producto descrito en el presente manual est destinado exclusivamente al rea de aplicaci n especificado en las instrucciones El manual tambi n proporciona indicaciones ac...

Page 91: ...os bombear vapores condensantes bombear l quidos bombear polvo funcionamiento con capacidad de gas alta incorrecta funcionamiento con presiones de pre vaciado altas incorrectas Funcionamiento con moda...

Page 92: ...ante el mantenimiento o la instalaci n Dependiendo de la peculiaridad del proceso las bombas de vac o los componentes o los fluidos de funcionamiento pueden estar contaminados con sustancias t xicas r...

Page 93: ...con la norma EN 420 Pautas de seguridad para bombas turbomoleculares Las bombas turbomoleculares como se describen en el siguiente manual de funcionamiento contienen una gran cantidad de energ a kin t...

Page 94: ...0 C rango de humedad relativo 0 a 90 no condensante la vida til de una bomba turbomolecular es de 12 meses desde la fecha de env o las bombas turbomoleculares deben iniciadas con arranque suave cuando...

Page 95: ...plicaciones de vac o ultra alto que puede bombear cualquier tipo de gas o compuesto de gas no corrosivo y oxidante La acci n de bombeado se obtiene a trav s de una turbina de alta velocidad max 60600...

Page 96: ...de almacenamiento durante largos per odos de tiempo o en caso de env o No tire los materiales de embalaje de manera no autorizada El material es 100 reciclable y cumple con la Directive EEC 94 62 y mo...

Page 97: ...Instrucciones de uso Agilent TwisTorr 305 FSQ 305 SF User Manual 97 Figura 13 Embalaje de la TwisTorr 305 FSQ 305 SF...

Page 98: ...ositivo solo en interiores y no utilice la bomba en un ambiente expuesto a agentes atmosf ricos lluvia hielo nieve polvo gases agresivos o en ambientes explosivos o con un alto riego de incendio Duran...

Page 99: ...da en cualquier posici n Fije la TwisTorr 305 FSQ 305 SF en una posici n estable montando la brida de entrada de la turbobomba en el sistema de la contrabrida con una conexi n capaz de soportar una to...

Page 100: ...i n especificada en la secci n INSTRUCCIONES DE USO Preste especial atenci n al dise o de la pinza los materiales de las pinzas y tornillos y la torsi n de fijaci n del tornillo Utilice solo pinzas o...

Page 101: ...brida ISO K sujete las dos bridas con el modelo de pinzas IC63250DCMZ o equivalente como se muestra en la figura siguiente se puede utilizar una pantalla de protecci n opcionalmente Figura 15 Utilice...

Page 102: ...o tubo apropiada para vac o Si se utiliza un tubo r gido cualquier vibraci n generada por la bomba mec nica debe ser amortiguada a trav s del uso de fuelles NOTA La TwisTorr 305 FSQ 305 SF est caracte...

Page 103: ...nical Information On Board Chapter Technical Information 5 Encuentre la ubicaci n de las clavijas de entrada de START STOP e INTERLOCK as como las clasificaciones el ctricas relacionadas Remote Cap tu...

Page 104: ...sulte los manuales de instrucci n correspondientes del controlador para encontrar las instrucciones adecuadas Mando a distancia Chapter Technical Information Controller Connection Window Meanings On B...

Page 105: ...r lo tanto ser necesario devolver el 305 FS que no funciona en la correspondiente caja de la pieza de repuesto del 305 FSQ SF NOTA Antes de devolver la bomba para ser reparada o para el servicio de in...

Page 106: ...el arranque normal el usuario debe esperar a que la bomba haya alcanzado la velocidad completamente antes de detener la bomba Despu s del primer arranque la unidad de control no iniciar la bomba en e...

Page 107: ...nidad Europea indica que el producto en el que se aplica NO debe desecharse con la basura dom stica o industrial com n sino que debe enviarse a un sistema de recolecci n diferenciada Se invita al usua...

Page 108: ...servicio de intercambio avanzado o reparaci n contacte con un distribuidor local o contacte por correo a vpt customercare agilent com vpl customercare agilent com Es obligatorio completar la Request f...

Page 109: ...5 FSQ 305 SF User Manual 109 5 110 110 111 111 112 114 114 115 116 117 118 119 120 120 122 TwisTorr 305 FSQ 305 SF 123 124 ISO K 125 126 TwisTorr 305 FSQ 305 SF 127 TwisTorr 305 FSQ 305 SF 128 128 129...

Page 110: ...110 Agilent TwisTorr 305 FSQ 305 SF User Manual TwisTorr 305 FSQ 305 SF Technical Information 1 TwisTorr 305 FSQ 305 SF 2...

Page 111: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 111...

Page 112: ...112 Agilent TwisTorr 305 FSQ 305 SF User Manual TwisTorr 305 FSQ 305 SF...

Page 113: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 113 J1 CE CSA RoHS...

Page 114: ...114 Agilent TwisTorr 305 FSQ 305 SF User Manual 2006 42 EC Agilent Technologies Agilent Technologies Agilent Technologies Agilent...

Page 115: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 115 TwisTorr 305 FSQ 305 SF Agilent Technologies...

Page 116: ...116 Agilent TwisTorr 305 FSQ 305 SF User Manual TwisTorr 305 FSQ 305 SF 20 kg EN 347...

Page 117: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 117 EN 420...

Page 118: ...118 Agilent TwisTorr 305 FSQ 305 SF User Manual 40 C 70 C 0 90 12 60...

Page 119: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 119 TwisTorr 305 FSQ 305 SF 60600 rpm...

Page 120: ...120 Agilent TwisTorr 305 FSQ 305 SF User Manual TwisTorr 305 FSQ 305 SF 305 FSQ SF 305 FSQ SF 100 EEC 94 62 TwisTorr 305 FS...

Page 121: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 121 17 TwisTorr 305 FSQ 305 SF...

Page 122: ...122 Agilent TwisTorr 305 FSQ 305 SF User Manual 18 2 bar 5 C 35 C 0 90...

Page 123: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 123 TwisTorr 305 FSQ 305 SF TwisTorr 305 FSQ 305 SF TwisTorr 305 FSQ 305 SF 1000 Nm ConFlat ISO K ConFlat ISO K TwisTorr 305 FSQ SF...

Page 124: ...124 Agilent TwisTorr 305 FSQ 305 SF User Manual 8 8 TwisTorr 305 FSQ 305 SF...

Page 125: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 125 ISO K ISO K IC63250DCMZ 19 4 ISO 100 4 ISO 160 22 Nm...

Page 126: ...126 Agilent TwisTorr 305 FSQ 305 SF User Manual TwisTorr 305 FSQ 305 SF KF 16 NW...

Page 127: ...Q 305 SF START INTERLOCK 1 2 START STOP INTERLOCK 3 START STOP INTERLOCK MPNs X3507 64130 X3507 64131 X3506 64130 X3506 64131 Twistorr 305 FS 24V Twistorr 305 FS 110 230V Twistorr 305 FS AG RS232 485...

Page 128: ...128 Agilent TwisTorr 305 FSQ 305 SF User Manual TwisTorr 305 FSQ 305 SF I O...

Page 129: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 129 TwisTorr 305 FSQ 305 SF 50 C 305 FSQ SF 305 FSQ SF 305 FS TwisTorr 305 FSQ 305 SF 405000 17...

Page 130: ...130 Agilent TwisTorr 305 FSQ 305 SF User Manual 60 TwisTorr 305 FSQ 305 SF...

Page 131: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 131 WEEE EC WEEE 20 WEEE http www agilent com environment product index shtml...

Page 132: ...132 Agilent TwisTorr 305 FSQ 305 SF User Manual vpt customercare agilent com vpl customercare agilent com Request for Return Agilent...

Page 133: ...5 FSQ 305 SF User Manual 133 6 134 134 135 135 136 138 138 139 140 141 142 143 144 144 146 TwisTorr 305 FSQ 305 SF 147 148 ISO K 149 150 TwisTorr 305 FSQ 305 SF 151 TwisTorr 305 FSQ 305 SF 152 152 153...

Page 134: ...134 Agilent TwisTorr 305 FSQ 305 SF User Manual TwisTorr 305 FSQ 305 SF Technical Information 1 TwisTorr 305 FSQ 305 SF 2...

Page 135: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 135...

Page 136: ...136 Agilent TwisTorr 305 FSQ 305 SF User Manual TwisTorr 305 FSQ 305 SF CE...

Page 137: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 137 J1 CE CSA EU RoHS RoHS EU WEEE...

Page 138: ...138 Agilent TwisTorr 305 FSQ 305 SF User Manual Machinery Directive 2006 42 EC...

Page 139: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 139 TwisTorr 305 FSQ 305 SF...

Page 140: ...140 Agilent TwisTorr 305 FSQ 305 SF User Manual TwisTorr 305 FSQ 305 SF 20 kg EN 347...

Page 141: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 141 EN 420 t...

Page 142: ...142 Agilent TwisTorr 305 FSQ 305 SF User Manual 40 C 70 C 0 90 12 60...

Page 143: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 143 TwisTorr 305 FSQ 305 SF 60600 rpm...

Page 144: ...144 Agilent TwisTorr 305 FSQ 305 SF User Manual TwisTorr 305 FSQ 305 SF TwisTorr 305 FSQ 305 SF 100 EEC 94 62 TwisTorr 305 FSQ 305 SF...

Page 145: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 145 21 TwisTorr 305 FSQ 305 SF...

Page 146: ...146 Agilent TwisTorr 305 FSQ 305 SF User Manual 22 2 5 C 35 C 0 90...

Page 147: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 147 TwisTorr 305 FSQ 305 SF TwisTorr 305 FSQ 305 SF TwisTorr 305 FSQ 305 SF 1000 Nm ConFlat ISO K ConFlat ISO K TwisTorr 305 FSQ 305 SF...

Page 148: ...148 Agilent TwisTorr 305 FSQ 305 SF User Manual 8 8 TwisTorr 305 FSQ 305 SF...

Page 149: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 149 ISO K ISO K IC63250DCMZ 2 23 ISO 100 4 ISO 160 4 22 Nm...

Page 150: ...150 Agilent TwisTorr 305 FSQ 305 SF User Manual TwisTorr 305 FSQ 305 SF KF 16 NW TwisTorr 305 FSQ 305 SF...

Page 151: ...05 FSQ 305 SF TwisTorr 305 FSQ 305 SF 1 2 3 MPNs X3507 64130 X3507 64131 X3506 64130 X3506 64131 Twistorr 305 FS 24V Twistorr 305 FS 110 230V Twistorr 305 FS AG RS232 485 Twistorr 305 FS AG Profibus 8...

Page 152: ...152 Agilent TwisTorr 305 FSQ 305 SF User Manual TwisTorr 305 FSQ 305 SF I O...

Page 153: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 153 TwisTorr 305 FSQ 305 SF 50 C 305FSQ SF 305 FSQ SF 305 FSQ SF TwisTorr 305 FSQ 305 SF 405000 17...

Page 154: ...154 Agilent TwisTorr 305 FSQ 305 SF User Manual 60 TwisTorr 305 FSQ 305 SF...

Page 155: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 155 WEEE EC WEEE EC 24 WEEE http www agilent com environment product index shtml...

Page 156: ...156 Agilent TwisTorr 305 FSQ 305 SF User Manual vpt customercare agilent com vpl customercare agilent com Request for Return Agilent...

Page 157: ...guideline for Turbomolecular Pumps 165 Transport Storage 166 Product description 167 Installation 168 Preparation for installation 168 Set up 170 TwisTorr 305 FSQ 305 SF Mounting 171 Connection of the...

Page 158: ...he specific sections with specific provisions relating to the higher level of maintenance personnel specifically trained for maintenance operations must not be carried out by the user For a correct in...

Page 159: ...trasting color WARNING Warning messages draw the operator s attention to a specific procedure or practice which if not performed correctly could result in serious personal injury CAUTION Caution messa...

Page 160: ...ngs on the TwisTorr 305 FSQ 305 SF The hazard they describe is also shown A triangular symbol indicates a warning The meanings of the symbols that may appear alongside warnings in the documentation ar...

Page 161: ...the relevant operation or service manual for the correct procedure referred to by that warning label The following symbols appear on the instrument for your information Protective Ground Terminal Do...

Page 162: ...rved in order for the unit to work safely The product described in this manual is intended exclusively for the area of application specified in the instructions The manual also provides indications re...

Page 163: ...dizing gases pumping of explosive gases pumping of condensing vapors pumping of liquids pumping dust operation with improper high gas throughput operation with improper high fore vacuum pressures oper...

Page 164: ...and during installation WARNING Danger to health by hazardous substances during maintenance or installation Depending on the process peculiarity vacuum pumps components or operating fluids can be con...

Page 165: ...rding to EN 420 Safety guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high Rotation Speed in...

Page 166: ...mperature range 40 C to 70 C relative humidity range 0 to 90 non condensing the shelf life of a turbomolecular pump is 12 months from the shipping date the turbomolecular pumps must be always soft sta...

Page 167: ...mp for high and ultrahigh vacuum applications which is able to pump any type of non corrosive and oxidizing gas or gas compound The pumping action is obtained through a high speed turbine max 60600 rp...

Page 168: ...case of storage for a long period of time or in case of shipping Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 94 62...

Page 169: ...Instructions for Use Agilent TwisTorr 305 FSQ 305 SF User Manual 169 Figure 25 TwisTorr 305 FSQ 305 SF packaging...

Page 170: ...e indoors only and do not use the pump in an environment exposed to atmospheric agents rain ice snow dust aggressive gases or in explosive environments or those with a high fire risk During operation...

Page 171: ...nstalled in any position Fix the TwisTorr 305 FSQ 305 SF in a stable position mounting the inlet flange of the turbopump to the system counter flange with a connection capable of withstanding a torque...

Page 172: ...torque specified in the INSTRUCTION FOR USE section Specifically pay attention to clamp design material of clamps and bolts and bolt fixing torque Use only high resistance class clamps or bolts 8 8 W...

Page 173: ...ISO K flange connections fix the two flanges with the clamps model IC63250DCMZ or equivalent as shown in the following figure a protective screen can optionally be used Figure 27 Use the required num...

Page 174: ...e made by a vacuum rated hose or pipe If a rigid pipe is used any vibration generated by the mechanical pump must be damped through the use of bellows NOTE The TwisTorr 305 FSQ 305 SF is characterized...

Page 175: ...e Chapter Technical Information On Board Chapter Technical Information 2 Find the location of the START STOP and INTERLOCK input pins as well as the related electrical ratings Remote Chapter Technical...

Page 176: ...ignals Please refer to the controller s relevant instruction manuals in order to find the appropriate set of instructions Remote Chapter Technical Information Controller Connection Window Meanings On...

Page 177: ...laced You then return the failed 305 FSQ SF in the box that the exchange 305 FSQ SF comes in NOTE Before returning a pump for repair or advanced exchange service to the manufacturer it is essential to...

Page 178: ...time compared to the standard start up the user must wait that the pump is completely up to speed before stopping the pump After the first start the pump won t be started in soft start mode again by t...

Page 179: ...icates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefore...

Page 180: ...mer need an advanced exchange or repair service please contact local distributor or directly mail to vpt customercare agilent com vpl customercare agilent com Completion of the Request for Return form...

Page 181: ...95 Earth Ground Connection 196 Pump Operations 197 Inlet screen installation 197 Air Cooling Kit Installation 200 Water Cooling Kit Connection only for water cooling pumps 202 Vent Accessories 205 Pum...

Page 182: ...are made of stainless steel These are supported and accurately positioned by spacer rings The MacroTorr stators are in the form of selfpositioning machined disks with pumping channels and an opening...

Page 183: ...ee controller paragraph The pump can operate in any position but is required to be supported by the high vacuum flange The connection of the fore vacuum on the side of the pump is a KF 16 NW flange KF...

Page 184: ...t TwisTorr 305 FSQ 305 SF User Manual The following figures shows the 2 models The optional air cooling fan is shown in the drawings Figure 29 Model X3513 64067 with air cooling fan Figure 30 Model X3...

Page 185: ...Technical Information Agilent TwisTorr 305 FSQ 305 SF User Manual 185 Figure 31 Model X3513 64068...

Page 186: ...16 mbar Note foreline Tolerance defined as the pressure at which the turbopump still produces a compression of 100 For continuous operation water cooling is recommended water temperature between 15 C...

Page 187: ...PM Temperature 15 C to 30 C Max pressure 5 bar 75 psi Noise Pressure level 41 dB A at 1 meter Note mean values based on a significative sample Ar and N2 compression ratio estimated standard deviation...

Page 188: ...Torr 305 FSQ on Table 2 TwisTorr 305 SF X3513 64067 Technical Specification Technical data TwisTorr 305 SF X3513 64067 Pumping speed N2 He H2 Main Flange ISO 100 250 l s 255 l s 220 l s Side Port KF40...

Page 189: ...Technical Information Agilent TwisTorr 305 FSQ 305 SF User Manual 189 Figure 32 Maximum allowed relative humidity as a function of the air temperature for each cooling water temperature...

Page 190: ...ation 190 Agilent TwisTorr 305 FSQ 305 SF User Manual TwisTorr 305 FSQ 305 SF Outline The following figures show the 305 FSQ SF dimensions are in mm inches Figure 33 TwisTorr 305 FSQ ISO100 Standalone...

Page 191: ...Technical Information Agilent TwisTorr 305 FSQ 305 SF User Manual 191 Figure 34 TwisTorr 305 SF ISO100 Standalone Air X3513 64067 with air cooling...

Page 192: ...Technical Information 192 Agilent TwisTorr 305 FSQ 305 SF User Manual Figure 35 TwisTorr 305 FSQ ISO100 Standalone Water X3513 64068...

Page 193: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 193 Figure 36 Graph of Pumping Speed vs Inlet Pressure for TwisTorr 305 FSQ 305 SF pump Figure 37 Graph of Compression ratio vs Foreline Pressure for TwisTo...

Page 194: ...r Manual Figure 38 Graph of Pumping Speed vs Side port for TwisTorr 305 FSQ 305 SF pump Figure 39 Graph of Iso Flow Iso Power for TwisTorr 305 FSQ 305 SF with Nitrogen gas water cooling version with w...

Page 195: ...Agilent TwisTorr 305 FSQ 305 SF User Manual 195 Interconnections The following figure shows the TwisTorr 305 FSQ 305 SF interconnections Figure 40 EARTH GROUND CONTROLLER CONNECTOR FORELINE CONTROLLE...

Page 196: ...und conductor to the TwisTorr 305 FSQ 305 SF Use a separate insulated green yellow conductor and use a M5 x 10 screw and shake proof washer fitted to the earth hole on the pump to secure the earth con...

Page 197: ...Figure 41 Model 9699302 and 9699304 Figure 42 Model X3500 68000 and X3500 68001 Inlet screens help prevent damage to the blades by preventing foreign objects from entering the pump The following part...

Page 198: ...he pumping speed by the following amount Table 3 Reduction in pumping speed Ar N2 He H2 X3500 68000 X3500 68001 20 18 7 5 The inlet screen is fitted in the upper part of the pump as shown in the figur...

Page 199: ...ormation Agilent TwisTorr 305 FSQ 305 SF User Manual 199 Figure 44 The overall flange dimensions with the protection screen fitted on pump do not change as the inlet screen remains integrated into the...

Page 200: ...of the TwisTorr pump The cooling kit have to be selected in accordance to the controller that has been selected to operate the pump refer to Accessories and Spare Parts chapter Fan specifications air...

Page 201: ...e following procedure see the following figure 1 Fix the fan kit to the suitable bracket by means of the furnished screws 2 Fix the bracket to the pump body 3 Connect the cooling fan connector to the...

Page 202: ...ly for water cooling pumps Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient The two model part numbers...

Page 203: ...he items of the plastic model kit must be assembled as shown in the following figure Figure 49 The assembled kit must be screwed into the suitable holes of the pump body with a recommended torque of 5...

Page 204: ...se or disconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling system The water temperature must b...

Page 205: ...Vent Accessories The vent valve and vent device enable an automatic vent operation TwisTorr 305 FSQ 305 SF compatible Vent Valve mod 9699834 9699834M006 9699844 9699845 9699846 9699847 Figure 51 Vent...

Page 206: ...ftware optional To install the vent valve unscrew the threaded plug see figure below Figure 53 Then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torque of 2...

Page 207: ...pressure in the 10 8 mbar range can be achieved The recommended gas flow maintains a pressure into the pump body higher than the fore vacuum pressure The recommended procedure to vent the system and t...

Page 208: ...nical Information 208 Agilent TwisTorr 305 FSQ 305 SF User Manual Figure 55 Purge layout 1 Purge gas line 2 Pressure regulator 3 Gas purge valve 4 Gas purge port 5 Forevacuum pump 6 Turbopump 7 Vent v...

Page 209: ...the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve it is necessary to switch off the pump and unscrew the purge port cover as shown...

Page 210: ...olators for ISO and CFF inlet flange version pumps are available as accessories The four model part numbers are the following model 9699344 for ISO 100 flange model 9699345 for ISO 160 flange model 96...

Page 211: ...ock M12 9699240 Purge valve 20 SCCM NW16KF M12 9699241 Purge valve 20 SCCM Swagelock M12 9699242 Purge valve 10 SCCM Swagelock Swagelock 9699232 Purge valve 20 SCCM Swagelock Swagelock 9699236 RS232 S...

Page 212: ...ntroller only 9699847 Vent Valve N C 1 2 mm Orifice for remote controller only 9699846 5 m Turbopump extension cable for remote controller only 9699949 Mains Cable CHINA plug 3 m long 8121 0723 NOTE T...

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Page 218: ...bes the following Istruzioni per l uso Bedienungshandbuch Notice de mode d emploi Manual de istrucciones Instruction for Use Technical information www agilent com Agilent Technologies Inc 2020 Edition...

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