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Bruksanvisning

Underhåll

TV 551/701 Navigator User Manual / 87-900-934-01 (P)

137/328

Underhåll

TV 551/701 Navigator är underhållsfritt. Allt servicearbete måste
utföras av auktoriserad personal.

VARNING!

Innan något arbete utförs på systemet måste pumpens strömförsörjning

avbrytas och pumpen luftas genom att den aktuella ventilen öppnas. Vänta

sedan tills rotorn stannat samt tills pumpens yttemperatur är lägre än 50 ºC

Om pumpen havererar, kontakta Agilent reparationsverkstad som
kan ersätta pumpen med en renoverad pump.

OBSERVERA

Innan systemet lämnas in till tillverkaren för reparation eller advanced exchange

service, måste "Request for Return" som medföljer bruksanvisningen fyllas i och

skickas in till den lokala återförsäljaren. Bifoga dessutom en kopia av bladet med

pumpen.

Skrotning av pumpen skall ske enligt gällande lagstiftning.

Summary of Contents for TV 551 Navigator

Page 1: ...ntroller models 9698976 9698977 Manuale di istruzioni Instruksjon manual Bedienungshandbuch Ohjek sikirja Notice de mode d emploi Felhaszn l i k zik nyv Manual de istrucciones Podrecznik instrukcji Ma...

Page 2: ...t are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime...

Page 3: ...TV 551 Navigator TV 551 701 Navigator User Manual 87 900 934 01 P 3 328 TV 551 Navigator...

Page 4: ...TV 701 Navigator 4 328 TV 551 701 Navigator User Manual 87 900 934 01 P TV 701 Navigator...

Page 5: ...rmazioni Generali 17 Immagazzinamento 19 Preparazione per l installazione 19 Installazione 21 Fissaggio della pompa 23 Uso 25 Manutenzione 28 Smaltimento 29 2 Gebrauchsanleitung 31 Sicherheitshinweise...

Page 6: ...Stockage 51 Preparation pour l installation 52 Installation 53 Fixation de la pompe55 Utilisation 57 Entretien 60 Mise au rebut 61 4 Manual de istrucciones 63 Indicaciones de Seguridad para Bombas Tu...

Page 7: ...instala o84 Instala o 85 Fixa o da bomba 87 Utiliza o 89 Manuten o 92 Elimina o 93 6 Bedrijfshandleiding 95 Veiligheidsinstructies voor Turbomoleculaire pompen 96 Algemene informatie 97 Opslag 99 Voo...

Page 8: ...120 Vedligeholdelse 123 Bortskaffelse 124 8 Bruksanvisning 125 S kerhetsanvisningar f r Molekyl ra turbopumpar126 Allm n information 127 F rvaring 128 F rberedelser f r installation 129 Installation...

Page 9: ...ring 152 10 Ohjek sikirja 153 Turbomolekyylipumppujen Turvaohjeet 154 Yleisi tietoja 155 Varastointi 156 Valmistelut asennusta varten157 Asennus 158 Pumpun kinnitys160 K ytt 162 Huolto 165 H vitt mine...

Page 10: ...e bezpiecze stwa dla Pomp Turbomolekularnych 184 Informacje ogolne 185 Magazynowanie 186 Przygotowanie do instalacji 188 Instalacja 190 Mocowanie pompy 192 U ytkowanie 194 Konserwacja 197 Przetworstwo...

Page 11: ...obecn inform cie 217 Uchov vanie 218 Pr prava na in tal ciu 220 In tal cia 221 Upevnenie v vevy 223 Pou itie 225 dr ba 228 Likvid cia 229 15 Priro nik za Navodila 231 Varnostna navodila za Turbomoleku...

Page 12: ...Use 255 Maintenance 257 Disposal 258 17 Technical Information 259 Description of the TV 551 701 Navigator 261 Technical Specification 268 TV 551 701 Navigator outline 271 Interconnections 275 How to...

Page 13: ...nual 87 900 934 01 P 13 328 Purge Valve Installation 310 Serial Cable Installation 311 TV 551 701 Controller Installation 311 Pump Used with Corrosive Gases318 Pump Used in Presence of Magnetic Fields...

Page 14: ...Contents 14 328 TV 551 701 Navigator User Manual 87 900 934 01 P...

Page 15: ...ri 16 Informazioni Generali 16 Immagazzinamento 19 Preparazione per l installazione 19 Installazione 21 Fissaggio della pompa 23 Uso25 Accensione ed Uso del TV 903 Pumping System 26 Arresto del TV 551...

Page 16: ...elevata quantit di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e stat...

Page 17: ...di alto e ultra alto vuoto e dal relativo controller Il sistema capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liquidi o di particelle solide L effett...

Page 18: ...tenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura AVVERTENZA I messaggi di avvertenza attirano l attenzione dell operatore su una procedur...

Page 19: ...mmagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione ATTENZIONE Se per qualsiasi ragione il tempo di immagazzinamento superiore occorre reinviare la pompa in fabbrica Per o...

Page 20: ...le mani nude i componenti destinati ad essere esposti al vuoto Utilizzare sempre i guanti o altra protezione adeguata Figura 1 NOTA Il TV 551 701 Navigator non pu essere danneggiato rimanendo semplic...

Page 21: ...rso i fori AVVERTENZA Se questo strumento non utilizzato come indicato la protezione fornita dallo strumento potrebbe essere compromessa Questo strumento deve essere utilizzato soltanto in una condizi...

Page 22: ...934 01 P Figura 2 In presenza di campi elettromagnetici la pompa deve essere protetta tramite opportuni schermi Vedere l appendice Technical Information per ulteriori dettagli Il TV 551 701 Navigator...

Page 23: ...ati adiacenti Fissare il TV 551 701 Navigator in posizione stabile montando la flangia di ingresso della turbopompa alla controflangia di sistema con una connessione capace di resistere ad una coppia...

Page 24: ...Navigator appartiene alla seconda categoria di installazione o sovratensione prevista dalla normativa EN 61010 1 Connettere quindi il dispositivo ad una linea di alimentazione che soddisfi tale categ...

Page 25: ...ra pu causare lesioni alle persone ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa quando in funzione I cuscinetti potrebbero danneggiarsi Per la mandata all aria della pom...

Page 26: ...do suddetto tramite software vedere il paragrafo RS232 485 COMMUNICATION DESCRIPTION nell appendice Technical Information Il LED verde posto sul pannello della base del TV 903 Pumping System indica co...

Page 27: ...ale Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettriche e soddisfare i requisiti delle norme CE Le alte tensioni che si sviluppano nel cont...

Page 28: ...atura superficiale della pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent che permette di ottenere una pompa rigenerata in sostituzione di quella gu...

Page 29: ...ica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l u...

Page 30: ...1 Istruzioni per l uso Smaltimento 30 328 TV 551 701 Navigator User Manual 87 900 934 01 P...

Page 31: ...ekularpumpen 32 Allgemeine 32 Lagerung 35 Vor der Installation 36 Installation 37 Befestigung der Pumpe 39 Gebrauch 41 Einschaltung und Gebrauch von Modell TV 551 701 Navigator 42 Stoppen von Modell T...

Page 32: ...r hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor u...

Page 33: ...t Das System eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festpartikeln Die Pumpwirkung wird durch eine hochtou...

Page 34: ...Vorsichtshinweise werden vor Vorg ngen angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten WARNUNG Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf einen Vorgang od...

Page 35: ...erte nicht berschritten werden Temperatur von 20 C bis 70 C Relative Feuchtigkeit von 0 bis 95 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets...

Page 36: ...ionen zu sch tzen ist Das Verpackungsmaterial ist vorschriftsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG f r Umweltschutz VORSICHT Um Entgasungen zu vermeid...

Page 37: ...erden dass die Luft frei durch die ffnungen str men kann WARNUNG Wenn das Ger t nicht anweisungsgem betrieben wird kann die Schutzfunktion beeintr chtigt werden Das Ger t darf nur unter Normalbedingun...

Page 38: ...34 01 P Abbildung 2 Bei Vorhandensein von elektromagnetischen Feldern ist die Pumpe entsprechend abzuschirmen F r ausf hrliche Informationen siehe im Anhang Technical Information Modell TV 551 701 Nav...

Page 39: ...TV 551 701 Navigator in einer stabilen Position befestigen Den Eintrittsflansch der Turbopumpe am Gegenflansch des Systems montieren Diese Verbindung soll einem Drehmoment von 8 600 Nm um die eigene A...

Page 40: ...els befestigt werden VORSICHT Der TV 551 701 Navigator geh rt zur zweiten Installationsklasse berdruck die von den Normen EN 61010 1 vorgesehen ist Die Vorrichtung mu daher an eine Speisungsleitung an...

Page 41: ...besteht Verbrennungsgefahr VORSICHT W hrend des Betriebs sind Sto und Vibrationseinwirkungen sowie Ruckbewegungen an der Turbopumpe zu vermeiden da die Lager besch digt werden k nnten F r die Bel ftu...

Page 42: ...en ist dieser Modus mittels der Software freizugeben siehe Abschnitt RS 232 485 COMMUNICATION DESCRIPTION im Anhang Technical Information Die gr ne LED LD1 an der Bodenplatte von Modell TV 551 701 gib...

Page 43: ...tecker ausgestattet ist Verwenden Sie dieses Kabel und den Stecker zusammen mit einer entsprechend geerdeten Steckdose um Stromschl ge zu vermeiden und den Anforderungen der EG Richtlinien zu entsprec...

Page 44: ...e Temperatur am Pumpengeh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service in Anspruch genommen werden der eine general berholte Pumpe als Ersatz f r die defekte Pumpe zur Verf gung...

Page 45: ...Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabneh...

Page 46: ...2 Gebrauchsanleitung Entsorgung 46 328 TV 551 701 Navigator User Manual 87 900 934 01 P...

Page 47: ...Indications g n rales 48 Stockage 51 Preparation pour l installation 52 Installation 53 Fixation de la pompe 55 Utilisation 57 Mise en marche et utilisation du TV 551 701 Navigator 58 Arr t du TV 551...

Page 48: ...t ont une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une...

Page 49: ...uss et ultrapouss et dot d un contr leur Le syst me est m me de pomper tous les types de gaz et de compos s gazeux mais il n est pas adapt au pompage de liquides ou de particules solides L effet de po...

Page 50: ...araissent avant certaines proc dures qui si elles ne sont pas observ es pourraient endommager s rieusement l appareillage AVERTISSEMENT Les messages d avertissement attirent l attention de l op rateur...

Page 51: ...nt avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante A la premi re utilisation les pompes turbomol culaires doivent toujours tre mise...

Page 52: ...Navigator et ne lui faire subir aucun choc et aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 85 399 en mati re de pr...

Page 53: ...passer librement travers les trous AVERTISSEMENT Si cet appareil n est pas utilis conform ment aux indications sa s curit risque d tre compromise L appareil ne doit tre utilis que dans des conditions...

Page 54: ...934 01 P Figure 2 En pr sence de champs magn tiques la pompe doit tre prot g e l aide d crans appropri s Pour tout autre renseignement se reporter l opuscule Technical Information Le TV 551 701 Naviga...

Page 55: ...551 701 Navigator de fa on stable en assurant la collerette d entr e de la turbopompe la contre collerette du syst me au moyen d une connexion en mesure de r sister un couple de 8600 Nm autour de son...

Page 56: ...artient la deuxi me cat gorie d installations ou surtension pr vue par la norme EN 61010 1 De ce fait brancher le dispositif une ligne d alimentation compatible avec cette cat gorie Le TV 551 701 Navi...

Page 57: ...e peut tre l origine de l sions graves ATTENTION Lorsque la turbopompe fonctionne viter tout choc oscillation ou d placement brusque car les paliers pourraient se d t riorer Pour le refoulement de l...

Page 58: ...est n cessaire d activer ce mode op ratoire l aide du logiciel Cf paragraphe RS232 485 COMMUNICATION DESCRIPTION dans l appendice Technical Information La LED verte LD1 plac e sur le panneau de la bas...

Page 59: ...liser ce c ble et cette fiche avec une prise connect e d une mani re ad quate terre pour viter des d charges lectriques et satisfaire les requis des normes CE Les tensions lev es qui se d veloppent da...

Page 60: ...de la pompe soit inf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent qui permet d obtenir une pompe r g n r e en remplacement de la pompe endommag e NOTE Avan...

Page 61: ...ue le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un syst me de collecte s lective Apr s avoir v rif...

Page 62: ...3 Mode d emploi Mise au rebut 62 328 TV 551 701 Navigator User Manual 87 900 934 01 P...

Page 63: ...leculares 64 Informaci n general 64 Almacenamiento 67 Preparaci n para la instalaci n 68 Instalaci n 69 Fijaci n de la bomba 71 Uso73 Encendido y Uso del TV 551 701 Navigator 74 Parada del TV 551 701...

Page 64: ...nen una elevada cantidad de energ a cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto ent...

Page 65: ...c o integrada por el controler correspondiente El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear l quidos o part culas s lidas El efecto de bombe...

Page 66: ...atenci n se visualizan antes de los procedimientos que al no respetarse podr an provocar da os al equipo ADVERTENCIA Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento...

Page 67: ...les temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funciona...

Page 68: ...gator y de no someterlo a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva CEE 85 399 para la preservaci n del medio...

Page 69: ...trav s de los orificios ADVERTENCIA Si este instrumento no se utiliza como se indica la protecci n suministrada por el mismo podr a verse afectada Este instrumento se debe utilizar solo en condiciones...

Page 70: ...87 900 934 01 P Figura 2 Cuando existan campos electromagn ticos la bomba ha de protegerse mediante pantallas oportunas V ase el anexo Technical Information para m s detalles El TV 551 701 Navigator h...

Page 71: ...Fijar el TV 551 701 Navigator en posici n estable montando la brida de entrada de la turbo bomba en la contrabrida del sistema con conexi n capaz de resistir a un par de 8600 Nm en torno a su propio...

Page 72: ...a categor a de instalaci n o sobretensi n prevista por la normativa EN 61010 1 Por lo tanto este dispositivo debe ser conectado a una l nea de alimentaci n adecuada para dicha categor a El TV 551 701...

Page 73: ...puede provocar lesiones a las personas ATENCI N Ev tense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podr an da arse Para el env o de aire de...

Page 74: ...ario habilitar la forma anteriormente indicada mediante software v ase el apartado RS 232 485 COMMUNICATION DESCRIPTION en el anexo Technical Information El LED verde LD1 situado en el panel de la bas...

Page 75: ...tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumplir con los requerimientos de las normas CE Las altas tensiones que se desarrollan en el controlador pueden provo...

Page 76: ...rar a que la temperatura superficial de la bomba sea inferior a 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent que permite obtener una bomba regenerada para sustituir la ave...

Page 77: ...do aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenciada Por lo tanto...

Page 78: ...4 Manual de istrucciones Eliminaci n 78 328 TV 551 701 Navigator User Manual 87 900 934 01 P...

Page 79: ...rbomoleculares 80 Informa es gerais 80 Armazenagem 83 Prepara o para a instala o 84 Instala o 85 Fixa o da bomba 87 Utiliza o 89 Acendimento e Utiliza o do TV 551 701 Navigator 90 Paragem do TV 551 70...

Page 80: ...de Instru es t m uma alta quantidade de energia cin tica devida alta velocidade de rota o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre...

Page 81: ...ler O sistema capaz de bombear qualquer tipo de g s ou de composto gasoso mas n o adequado para bombear l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de alta...

Page 82: ...gens de cuidado s o visualizadas antes de proceder que se n o observadas poderiam causar danos aparelhagem ATEN AO As mensagens de aten o atraem a aten o do operador num procedimento ou uma pr tica es...

Page 83: ...es ambientais devem ser as seguintes temperatura de 20 C a 70 C humidade relativa de 0 a 95 n o condensante ao accionar as bombas turbomoleculares pela primeira vez o cliente deve activ las sempre em...

Page 84: ...ir o controller e para n o submet lo a choques ou vibra es N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 399 para a protec o do me...

Page 85: ...if cios AVVERTENZA Se este instrumento n o for utilizado como indicado a protec o fornecida pelo instrumento pode ser comprometida Este instrumento deve ser utilizado somente em uma condi o normal na...

Page 86: ...1 P Figura 2 Na presen a de campos electromagn ticos a bomba deve ser protegida atrav s de blindagens adequadas Para ulteriores detalhes consultar o ap ndice Technical Information O TV 551 701 Navigat...

Page 87: ...r o TV 551 701 Navigator em posi o est vel fixando o flange de entrada da turbobomba ao contra flange do sistema com uma liga o que resista a um torque de 8600 Nm volta do seu eixo Por exemplo o flang...

Page 88: ...1 701 Navigator pertence segunda categoria de instala o ou sobretens o prevista pela norma NE 61010 1 Portanto ligue o dispositivo a uma linha de alimenta o apropriada para esta categoria O TV 551 701...

Page 89: ...a temperatura pode causar les es s pessoas CUIDADO Evitar colis es oscila es ou deslocamentos bruscos da turbobomba quando est a funcionar Os rolamentos poderiam sofrer danos Para a sa da de ar da bom...

Page 90: ...teriormente utilizando o software consultar o par grafo RS232 485 COMMUNICATION DESCRIPTION no ap ndice Technical Information A luz piloto verde LD1 posicionada no painel da base do TV 551 701 indica...

Page 91: ...vel internacional Utilize este cabo e tomada juntos com uma tomada adequadamente conectada a terra para evitar choques el ctricos e satisfazer os requisitos das normas CE As altas tens es que se desen...

Page 92: ...ura superficial da bomba seja inferior a 50 C Em caso de defeito poss vel usufruir do servi o de assist ncia Agilent que permite obter uma bomba regenerada que substitua a que apresenta defeito NOTA A...

Page 93: ...e o produto no qual est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de recolha diferenciada Portanto convidamos o uti...

Page 94: ...5 Manual de Istru es Elimina o 94 328 TV 551 701 Navigator User Manual 87 900 934 01 P...

Page 95: ...n 96 Algemene informatie 96 Opslag 99 Voorbereiding voor installatie 100 Installatie 101 Bevestiging van de pomp 103 Gebruik 105 Inschakeling en gebruik van de TV 551 701 Navigator 106 Afzetten van de...

Page 96: ...en hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tuss...

Page 97: ...ehorende controller bestaat Het systeem is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect wordt verkregen d...

Page 98: ...ol staat tekst met procedures die indien niet opgevolgsd schade aan apparatuur kunnen veroorzaken WAARSCHUWING Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale proce...

Page 99: ...n voldaan temperatuur van 20 C tot 70 C relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en...

Page 100: ...illingen te verduren krijgt Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 VOORZICHTIG Om ontgassingsproblem...

Page 101: ...en door de openingen WAARSCHUWING Als dit instrument niet gebruikt wordt zoals aangegeven kan de beschermende functie in het gedrang komen Dit instrument moet alleen in normale condities gebruikt word...

Page 102: ...87 900 934 01 P Figura 1 In aanwezigheid van magnetische velden moet de pomp op passende wijze afgeschermd worden Zie de bijlage Technical Information voor meer informatie De TV 551 701 Navigator moet...

Page 103: ...1 Navigator in een stabiele positie door de inlaatflens van de turbopomp op de contraflens van het systeem te monteren met een verbinding die in staat is om een koppel van 8600 Nm rondom de eigen as t...

Page 104: ...TIG De TV 551 701 Navigator behoort tot de tweede installatiecategorie of overspanningscategorie die door de norm EN 61010 1 is voorzien Sluit deze inrichting dus aan op een voedingslijn die aan deze...

Page 105: ...el veroorzaken VOORZICHTIG Vermijd schokken trillingen of bruuske verplaatsingen van de turbopomp wanneer deze in werking is De lagers kunnen anders beschadigd raken Gebruik voor de luchttoevoer naar...

Page 106: ...moet bovengenoemde modus via de software worden vrijgegeven zie paragraaf RS 2327485 COMMUNICATION DESCRIPTION in de bijlage Technical Information De groene LED LD1 op het paneel van de basis van de...

Page 107: ...et internationale goedkeuring Gebruik de kabel en de stekker samen met een goedgeaard stopcontact om elektrische schokken te voorkomen en om te voldoen aan de vereisten van de EG normen De in de contr...

Page 108: ...temperatuur van de pomp onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent in te schakelen zo krijgt men een geregenereerde pomp ter vervan...

Page 109: ...oduct waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht contact op te nemen...

Page 110: ...6 Bedrijfshandleiding Afvalverwerking 110 328 TV 551 701 Navigator User Manual 87 900 934 01 P...

Page 111: ...112 Generel information 112 Opbevaring 114 Forberedelser f r installation 115 Installation 116 Fastgorelse af pumpe 118 Anvendelse 120 Start og anvendelse af TV 551 701 Navigator 121 Stop af TV 551 7...

Page 112: ...har en stor kinetisk energi der skyldes den h je omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og s...

Page 113: ...yreenhed Systemet er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpningen sker ve...

Page 114: ...at overholde f lgende forskrifter for at sikre optimal funktion og driftssikkerhed i de turbomolekyl re pumper fra Agilent S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med tra...

Page 115: ...r ikke tabes eller uds ttes for st d ved udpakningen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om milj beskyttelse FORSIGTIG Komponenter der skal uds ttes for...

Page 116: ...p en s dan m de at luften er i stand til frit at str mme ud fra bningerne ADVARSEL Hvis instrumentet ikke bruges som angivet risikerer man forringelse af instrumentets beskyttelsesgrad Instrumentet m...

Page 117: ...al 87 900 934 01 P 117 328 Figur 2 Hvis pumpen er anbragt i n rheden af elektromagnetiske felter skal den afsk rmes Se bilaget Technical Information for yderligere oplysninger TV 551 701 Navigator ska...

Page 118: ...t r TV 551 701 Navigator i en stabil position ved at montere turbopumpens indgangsflange p systemets kontraflange Forbindelsen skal kunne t le et drejemoment p 8 600 Nm omkring dens egen akse ISO K fl...

Page 119: ...anden installationsklasse eller oversp ndingsklasse jf normen EN 61010 1 Slut derfor anordningen til en forsyningslinie som opfylder kravene i denne klasse TV 551 701 Navigator er forsynet med konnekt...

Page 120: ...Den h je temperatur kan resultere i skade p personer FORSIGTIG Undg sammenst d vibrationer eller bratte bev gelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af lejerne Pumpe...

Page 121: ...l ovenn vnte m de programmeres ved hj lp af software se afsnit RS 2327485 COMMUNICATION DESCRIPTION i bilaget Technical Information Den gr nne LED LD1 der er anbragt p panelet p TV 551 701 s fundament...

Page 122: ...godkendt p international plan Benyt dette kabel og stik sammen med en stikkontakt som p passende m de er forbundet til jorden for at undg elektriske st d og opfylde kravene if lge CE EF normerne De h...

Page 123: ...af indgrebet til rotoren er standset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsv rksted der udskifter pumpen med en reparer...

Page 124: ...et sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi opfordrer derfor slutbrugeren til at kontakte lev...

Page 125: ...126 Allm n information 126 F rvaring 128 F rberedelser f r installation 129 Installation 130 Fasts ttning av pump 132 Anv ndning 134 Start och anv ndning av TV 551 701 Navigator 135 Att st nga av TV...

Page 126: ...en h g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn sk...

Page 127: ...och en styrenhet Systemet kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock l mpar sig inte systemet f r pumpning av v tskor eller fasta partiklar Pumpningen stadkoms med hj lp...

Page 128: ...viktig information i texten F rvaring Respektera f ljande anvisningar f r att garantera optimal prestanda och drifts kerhet f r Agilent turbomolekyl ra pumpar Vid transport flytt och lagring av pumpar...

Page 129: ...ppas eller uts tts f r st tar vid uppackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller EU direktiv 85 399 om milj skydd OBSERVER Komponenter som skall u...

Page 130: ...uften kan str mma fritt genom h len VARNING Om det h r instrumentet inte anv nds p det s tt som anges kan skyddet som ges av instrumentet st llas p spel Det h r instrumentet ska endast anv ndas under...

Page 131: ...Manual 87 900 934 01 P 131 328 Figur 2 I n rvaro av magnetf lt ska pumpen skyddas med en s rskild sk rm Se bilagan Technical information f r ytterligare upplysningar TV 551 701 Navigator m ste anslut...

Page 132: ...fl ns som m ste t la ett vridmoment p 8600 Nm kring sin axel Exempelvis kan ISO K fl nsen f stas med st lklamrar med h g h llfasthet t ex modellen Agilent IC 63250 DCMZ Tabellen som f ljer anger hur m...

Page 133: ...d rf r anordningen till en elledning som uppfyller kraven f r denna klass TV 551 701 Navigator r utrustad med kontaktdon f r ing ngarna utg ngarna och f r den seriella kommunikationen som ska ansluta...

Page 134: ...f r att undvika br nnskador OBSERVER Undvik sammanst tningar sv ngningar eller pl tsliga f rflyttningar av turbopumpen n r den r ig ng Lagren kan bli skadade Pumpen ska f rses med luft eller med delg...

Page 135: ...ktivera ovann mnda l ge genom mjukvaran se stycket RS 232 485 COMMUNICATlON DESCRIPTION i bilagan Technical information Den gr na lysdioden LD1 p underdelen av TV 551 701 anger genom frekvensen av des...

Page 136: ...d kontakt godk nd p internationell niv Anv nd sladden och kontakten tillsammans med en jordad anslutning f r att undvika st tar och enligt kr vande EU normer Den h ga sp nningen som framkallas av styr...

Page 137: ...a ventilen ppnas V nta sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad som kan ers tta pumpen med en renoverad pump O...

Page 138: ...symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m ste uppr ttas Vi rekommenderar d rf r att s...

Page 139: ...re pumper 140 Generell informasjon 140 Lagring142 Klargj re til installasjon 143 Installasjon 144 Festing av pumpen 146 Bruk 148 Starte og bruke TV 551 701 Navigator 149 Stoppe TV 551 701 Navigator 1...

Page 140: ...lgende Bruksanvisningen har et h yt kinetisk energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p gru...

Page 141: ...st r av en turbomolekul r pumpe for bruk i h y eller ultrah ye vakuumanlegg og en styreenhet Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke beregnet for pumpe v sker eller fa...

Page 142: ...ormasjon som er hentet fra teksten Lagring For garantere optimal drift og p litelighet for Agilent turbomolekyl re pumper m f lgende anvisninger f lges Under transport flytting og lagring av pumpene m...

Page 143: ...lippes ned eller utsettes for noen form for st t Emballasjen m ikke kastes p en ulovlig m te Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 399 om milj beskyttelse FORSIKTIG...

Page 144: ...plasseres slik at luften kan str mme fritt gjennom hullene ADVARSEL Hvis dette instrumentet ikke brukes som anvist kan beskyttelsen det gir bli svekket Dette instrumentet skal kun brukes under normale...

Page 145: ...1 701 Navigator User Manual 87 900 934 01 P 145 328 Figur 2 Ved magnetfelt m pumpen beskyttes av dertil egnede skjermer Se Technical Information for detaljer TV 551 701 Navigator m koples til en hoved...

Page 146: ...med en tilkopling som er i stand til t le et dreiemoment p 8600 Nm rundt sin egen akse ISO K flensen kan f eks festes ved hjelp av st lklemmer med h y styrke f eks modellen Agilent IC 63250 DCMZ Den...

Page 147: ...rdningen til en hovedledning som tilfredsstiller kravene for denne klassen TV 551 701 Navigator er utstyrt med koplingsstykker for inn utgangene og seriekommunikasjonen som m koples til de ytre str mk...

Page 148: ...mperaturene kan f re til brannskader FORSIKTIG Unng st t svingninger eller plutselige bevegelser av turbinpumpen n r den er i funksjon Lagrene kan skades Bruk st v og partikkelfri luft eller inaktiv g...

Page 149: ...en Soft Start er det n dvendig stille inn modusen via programvare se avsnittet RS232 485 COMMUNICATION DESCRIPTION i tillegget Technical Information Den gr nne lysdioden LD1 p TV 551 701 basepanel ang...

Page 150: ...ent for brukerens sikkerhet Bruk denne kabelen og st pselet sammen med en egnet jordet kontakt for unng elektrisk st t og for overholde EU forskriftene H yspenningene som utvikler seg inne i styreenhe...

Page 151: ...pumpens overflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Agilents reparasjonservice eller med Agilents avanserte bytteservice som kan tilby overhalte system til ersta...

Page 152: ...d i Det europeiske fellesselskap viser at produktet som det sitter p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering Derfor oppfordrer man den sluttelige brukeren av anord...

Page 153: ...vaohjeet 154 Yleisi tietoja 155 Varastointi 156 Valmistelut asennusta varten 157 Asennus 158 Pumpun kinnitys 160 K ytt 162 TV 551 701 Navigatorin k ynnistys ja k ytt 163 TV 551 701 Navigatorin pys ytt...

Page 154: ...rkea m r kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai...

Page 155: ...yhji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeu...

Page 156: ...ist otettua tietoa Varastointi Noudata seuraavia ohjeita jotta Agilent turbomolekyylinen pumppu toimisi eritt in tehokkaasti ja luotettavasti Kun pumppua kuljetetaan siirret n ja varastoidaan seuraavi...

Page 157: ...torin putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivi 85 399 ymp rist n suojelus...

Page 158: ...e asentaa siten ett ilma p see virtaamaan vapaasti aukkojen l pi VAROITUS Jos t t v linett ei k ytet osoitetulla tavalla sen aikaansaama suojaus voi vaarantua T t v linett tulee k ytt vain normaaleiss...

Page 159: ...87 900 934 01 P 159 328 Kuva 2 Mik li l sn on magneettikentti tulee pumppu suojata t h n tarkoitukseen olevilla suojilla Lis tietoja l ytyy Technical Information liitteest TV 551 701 Navigator tulee k...

Page 160: ...toksella joka kest 8600 Nm n momentin akselinsa ymp ri Esim ISO K laippa voidaan kiinnitt eritt in kest vill ter skiinnikkeill esim malli Agilent IC 63250 DCMZ Seuraavassa taulukossa ilmoitetaan jokai...

Page 161: ...si s hk verkkoon joka t ytt t m n luokan vaatimukset TV 551 701 Navigator laitteissa on liittimet sis ntuloille ulostuloille sek sarjakytkenn lle jotka on kytkett v ulkoisiin j rjestelmiin siten ettei...

Page 162: ...aiheuttaa henkil iden loukkaantumisia HUOMIO V lt kolhuja heiluntaa tai kkiliikkeit turbopumpun toiminnan aikana sill laakerit voivat vahingoittua K yt pumpun ilmansy tt n ilmaa tai jalokaasua joissa...

Page 163: ...art menetelm ll tulee yll mainittu on aktivoitava uudelleen ohjelmiston kautta ks kappale RS 232 485 COMMUNICATION DESCRIPTION Technical Information liitteess Vihre LED LD1 joka sijaitsee TV 551 701 n...

Page 164: ...m ll katso tilattavien osien taulukkoa K yt t t kaapelia ja pistoketta yhdess oikein maadoitetun pistorasian kanssa jotta s hk iskuilta v ltyt n ja CE normien vaatimukset t yttyv t Valvojassa kehitty...

Page 165: ...ist Antakaa t m n j lkeen pumpun pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilent in korjauspalvelua jonka kautta saatte uudistetun pumpun vahingoittuneen tilalle...

Page 166: ...nionin j senmaita tarkoittaa ett tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspisteeseen Loppuk ytt j kehotetaan sen vuoksi ottama...

Page 167: ...vatty khoz 168 ltal nos inform ci 169 T rol s170 El k sz t s telep t sre 172 Telep t s 173 A szivatty r gz t se 175 Haszn lat 177 A TV 551 701 Navigator bekapcsol sa s haszn lata 178 A TV 551 701 Navi...

Page 168: ...vetkez g pk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor s az ll r sz rintkez se vagy a...

Page 169: ...l ris szivatty val nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer b rmely t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecsk...

Page 170: ...os szem lyi s r l sekhez vezethet MEGJEGYZ S A megjegyz sek fontos a sz vegb l kivonatolt inform ci kat tartalmaznak T rol s A Agilent turbomolekul ris szivatty k maxim lis teljes tm nyszintj nek gara...

Page 171: ...01 Navigator User Manual 87 900 934 01 P 171 328 FIGYELEM Ha valamilyen okb l a rakt rozhat si id t t ll pik a szivatty t vissza kell vinni a gy rba K rem inform ci rt forduljon a helyi Agilent v kuum...

Page 172: ...annak b rmilyen hirtelen t s t vagy r zk d s t Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag teljesen jrafeldolgozhat s megfelel az EEC 85 399 es direkt v nak FIGYELEM G zkivo...

Page 173: ...ereszt l VESZ LY Ha ezt az eszk zt nem az utas t s szerint haszn lj k az eszk z ltal biztos tott biztons gi berendez s s r lhet Ezt az eszk zt csak rendes k r lm nyek k z tt amikor az sszes biztons gi...

Page 174: ...User Manual 87 900 934 01 P bra 2 M gneses mez k jelenl t ben a szivatty t v deni kell ferrom gneses pajzs seg ts g vel R szletes inform ci rt l sd Technical Information A TV 551 701 Navigatort els dl...

Page 175: ...okozhatja R gz tse a TV 551 701 Navigatort stabil helyen a turb szivatty bemeneti karim j t a rendszer ellenkarim j ra szerelve 8600 Nm tengely k r li nyomat knak ellen llni k pes csatlakoz ssal P ld...

Page 176: ...gz thet az alapj n kereszt l FIGYELEM A TV 551 701 Navigator a m sodik telep t si vagy t lfesz lts g kateg ri hoz tartozik az EN 61010 1 direkt va szerint Csatlakoztassa az eszk zt a fenti kateg ri n...

Page 177: ...ben A magas h m rs klet g si s r l seket okozhat FIGYELEM Ker lje a szivatty t s t r z s t vagy durva mozgat s t zem k zben A csap gyak megs r lhetnek Haszn ljon port l s szil rd r szekt l mentes leve...

Page 178: ...ind t s hoz azt aktiv lni kell a megfelel szoftver paranccsal l sd RS 232 485 COMMUNICATION DESCRIPTION a Technical Information f ggel kben A TV 551 701 Navigatoron elhelyezett z ld LED a villog s nak...

Page 179: ...t s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az ram t s vesz ly t s eleget tegyen az EK normat v iban lefektetett biztons gi k vetelm nyeknek A magasfesz lts g...

Page 180: ...org sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n l pjen kapcsolatba a helyi Agilent szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s hely...

Page 181: ...elyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe kell tov bb tani A v gfelhaszn l nak a gy jt si s me...

Page 182: ...11 Felhaszn l i K zik nyv Megsemmis t s 182 328 TV 551 701 Navigator User Manual 87 900 934 01 P...

Page 183: ...184 Informacje ogolne 185 Magazynowanie 186 Przygotowanie do instalacji 188 Instalacja 190 Mocowanie pompy 192 U ytkowanie 194 W czenie i U ytkowanie systemu TV 551 701 Navigator 195 Zatrzymanie syste...

Page 184: ...Obs ugi posiadaj wysok ilo energii kinetycznej spowodowanej bardzo wysok pr dko ci obrotow razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a...

Page 185: ...rowania tzw kontroler System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzyskane popr...

Page 186: ...oby spowodowa powa ne uszkodzenia cia a PRZYPIS S to wa ne informacje wyci gni te z tekstu Magazynowanie W celu zagwarantowania najwy szego poziomu funkcjonalno ci i niezawodno ci pomp Turbomolekular...

Page 187: ...01 Navigator User Manual 87 900 934 01 P 187 328 UWAGA Je eli z jakiegokolwiek powodu czas magazynowania jest d u szy nale y odes a pomp do fabryki W celu jakiejkolwiek informacji prosimy skontaktowa...

Page 188: ...biurem sprzeda y Podczas operacji rozpakowywania nale y zwr ci szczeg ln uwag aby nie spowodowa upadku systemu TV 551 701 Navigator ani nie poddawa go uderzeniom lub wibracjom Nie porzuca opakowania...

Page 189: ...User Manual 87 900 934 01 P 189 328 PRZYPIS System TV 551 701 Navigator nie mo e by uszkodzony poprzez wystawienie go na dzia anie atmosfery Mimo to zaleca si aby pompa do momentu jej instalacji na s...

Page 190: ...ki spos b aby mo liwy by swobodny przep yw przez otwory ZAGROZENIE Je Je eli ten przyrz d nie jest stosowany w okre lony spos b zabezpieczenie mo e nie dzia a prawid owo Ten przyrz d mo e by stosowany...

Page 191: ...28 W obecno ci p l elektromagnetycznych pompa musi by odpowiednio zabezpieczona przez odpowiednie ekranowanie W celu szczeg owego zapoznania si z tematem patrz dodatek Technical Information TV 551 701...

Page 192: ...Zamocowa system TV 551 701 Navigator w pozycji stabilnej montuj c ko nierz wej cia turbopompy do ko nierza systemu dokr caj c w taki spos b aby po czenie to wytrzyma o moment 8600 Nm wok w asnej osi N...

Page 193: ...dstaw UWAGA TV 551 701 Navigator nale y do drugiej kategorii instalacji lub nadnapi cia przewidzianej przez norm EN 61010 1 Dlatego te pod czy urz dzenie do linii zasilania kt ra spe ni te wymogi TV 5...

Page 194: ...zewania Wysoka temperatura mo e spowodowa uszkodzenia cia a na osobach UWAGA Unika uderze waha lub gwa townych przesuni turbopompy podczas jej dzia ania Mog uszkodzi si o yska Dla wlotu do powietrza p...

Page 195: ...oft Start nale y w czy w w tryb poprzez oprogramowanie patrz paragraf RS 232 485 COMMUNICATION DESCRIPTION w dodatku Technical Information Zielona dioda led znajduj ca si na panelu podstawy TV 551 701...

Page 196: ...na z mi dzynarodowymi normami Kabel ten pod czy wraz z wtyczk do kontaktu uziemionego celem unikni cia pora e pr dem elektrycznym oraz spe nienia wymog w norm CE Du e si y wewn trzne wytwarzaj ce si w...

Page 197: ...peratura powierzchni pompy b dzie poni ej 50 C W przypadku usterki mo liwe jest skorzystanie z serwisu naprawczego Agilent kt ry pozwoli na uzyskanie zregenerowanego systemu w zast pstwie uszkodzonego...

Page 198: ...j oznacza ze wyrob ktory nim zostal oznaczony NIE moze byc przetworzony jako odpad razem z innymi domowymi lub przemyslowymi natomiast musi byc skladowany w miejscu przeznaczonym dla odpadow do przero...

Page 199: ...omolekul rn v v vy 200 V eobecn informace 201 Uskladn n 202 P prava k instalaci 204 Instalace 205 Mont v v vy 207 Pou it 209 Zapnut a pou v n v v vy TV 551 701 Navigator 210 Vypnut v v vy TV 551 701 N...

Page 200: ...ou popisov ny v n sleduj c m n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefunk nosti nap kontaktu rotoru ane...

Page 201: ...kul rn v v vou a p slu n m regul torem pro takov aplikace kde se po aduje vysok a velmi vysok vakuum Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic...

Page 202: ...mohly zp sobit v n raz POZN MKA Pozn mky obsahuj d le it informace p evzat z textu Uskladn n Aby byla zaji t na maxim ln provozuschopnost a spolehlivost turbomolekul rn ch v v v firmy Agilent mus te d...

Page 203: ...551 701 Navigator User Manual 87 900 934 01 P 203 328 POZOR Pokud dojde z jak hokoli d vodu k p ekro en skladovac lh ty v v vu mus te vr tit v robci Informujte se pros m u m stn ho z stupce pro prode...

Page 204: ...mi nenad l mi n razy ot esy nebo vibracemi Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l lze 100 recyklovat a spl uje po adavky sm rnice EEC 85 399 POZOR Aby se zamezilo probl m m s...

Page 205: ...oln pr chod vzduchu otvory NEBEZPE P i pou v n tohoto za zen jinak ne podle uveden ch pokyn by mohlo doj t k ohro en ochrany kterou samotn za zen poskytuje Toto za zen mus b t pou v no v hradn za b n...

Page 206: ...ser Manual 87 900 934 01 P Postava 2 V p tomnosti magnetick ch pol se v v va mus chr nit feromagnetick m st n n m Viz podrobn informace v p loze Technical Information V v va TV 551 701 Navigator se mu...

Page 207: ...turbomolekul rn v v vy p ipevn te k protip rub syst mu pomoc p pojky kter odol to iv mu momentu 8600 Nm kolem sv osy Nap p rubu ISO K lze p ipevnit p chytkami z vysoce pevn oceli jako je typ IC63250DC...

Page 208: ...v v va TV 551 701 Navigator do druh elektroinstala n nebo p ep ov t dy Za zen p ipojte do nap jec s t kter spl uje uvedenou t du V v va TV 551 701 Navigator je vybavena vstupn mi a v stupn mi konekto...

Page 209: ...nedot kejte Vysok teplota m e zp sobit pop leniny POZOR B hem chodu chra te v v vu p ed n razy vibracemi a prudk mi pohyby Mohly by se po kodit lo iska Pro odplyn n v v vy pou vejte vzduch nebo inertn...

Page 210: ...m Soft Start mus te jej aktivovat pat i n m programov m p kazem viz odstavec RS 232 485 COMMUNICATION DESCRIPTION v p loze Technical Information Zelen kontrolka um st n na eln m panelu z kladny v v vy...

Page 211: ...nat se z str kou mezin rodn schv lenou Pou vejte tento kabel se z str kou a pat i n uzemn nou z suvku abyste p ede li razu elektrick m proudem a aby byly zaru en po adavky norem ES Vysok nap t kter vz...

Page 212: ...e rotor p estane ot et a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte technick servis firmy Agilent kter m e dodat n hradn repasovanou v v vu v m nou za porouch...

Page 213: ...kvidov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov n odd len od m stsk ho odpadu U ivateli kter m n v ro...

Page 214: ...13 N vod k Pou it Likvidace 214 328 TV 551 701 Navigator User Manual 87 900 934 01 P...

Page 215: ...vevy 216 V eobecn inform cie 217 Uchov vanie 218 Pr prava na in tal ciu 220 In tal cia 221 Upevnenie v vevy 223 Pou itie 225 Zapnutie a pou itie zariadenia TV 551 701 Navigator 226 Vypnutie zariadeni...

Page 216: ...leduj cej pr ru ke sa vyzna uj vysokou kinetickou energiou a to v aka vysokej r chlosti ot ania v kombin cii so pecifickou hmotnos ou svojich rotorov V pr pade syst movej poruchy napr pri kontakte rot...

Page 217: ...urbomolekul rnou v vevou pre vysok a ultravysok v kuov aplik cie s relevantn m kontroln m modulom Syst m dok e vy erpa ubovo n typ plynu alebo zmesi plynov Nie je vhodn na vy erp vanie tekut n alebo p...

Page 218: ...sp sobi v ne zranenie POZN MKA Pozn mky upozor uj na d le it inform cie v texte Uchov vanie Ak chcete aby turbomolekul rne v vevy zna ky Agilent pod vali maxim lny a spo ahliv v kon dodr iavajte nasle...

Page 219: ...1 Navigator User Manual 87 900 934 01 P 219 328 POZOR Ak z ak hoko vek d vodu vypr as skladovate nosti zariadenia vr te v vevu do z vodu v ktorom bola vyroben Inform cie z skate u miestneho zast penia...

Page 220: ...adenie nespadlo nebolo vystaven n razu alebo prudk mu otrasu alebo vibr ci m Obalov materi l zlikvidujte predp san m sp sobom Materi l je 100 recyklovate n a sp a po iadavky smernice EEC 85 399 POZOR...

Page 221: ...NEBEZPE Pri pou van tohto zariadenia in m sp sobom ako je uveden v pokynoch by mohlo d js k ohrozeniu ochrany ktor samotn zariadenie poskytuje Toto zariadenie mus by pou van v hradne v be n ch podmien...

Page 222: ...anual 87 900 934 01 P Postava 2 V pr tomnosti magnetick ho po a mus by v veva chr nen feromagnetick m t tom Podrobn inform cie sa nach dzaj v dodatku Technical Information Zariadenie TV 551 701 Naviga...

Page 223: ...tor do stabilnej polohy tak e pripevn te vstupn pr rubu turbov vevy k pr rube syst mu Pripojenie mus by schopn vydr a to iv moment 8600 Nm okolo vlastnej osi Napr klad pr ruba typu ISO K m e by pripev...

Page 224: ...Navigator sa nem e upevni pomocou vlastnej z kladnej dosky POZOR Zariadenie TV 551 701 Navigator patr do druhej in tala nej prep ovej kateg rie pod a smernice EN 61010 1 Zariadenie je potrebn pripoji...

Page 225: ...Vysok teploty m u sp sobi pop leniny POZOR Dbajte na to aby v veva po as innosti nebola vystaven n razom kmitaniu alebo prudk m pohybom Mohli by sa po kodi lo isk V vevu preplachujte pomocou vzduchu a...

Page 226: ...mus te ho aktivova vhodn m softwarov m pr kazom pozri as RS 232 485 COMMUNICATION DESCRIPTION v dodatku Technical Information Zelen di da LED na z kladnom elnom paneli zariadenia TV 551 701 Navigator...

Page 227: ...ne schv lenou T to n ru so z str kou pou vajte spolu s vhodne uzemne nou z suvkou aby nedo lo k z sahu elektrick m pr dom a aby boli splnen po iadavky noriem ES Vysok nap tie v kontrolnom zariaden m e...

Page 228: ...sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte servisn stredisko spolo nosti Agilent kde v m pokazen v vevu vymenia za n hradn repasov...

Page 229: ...e t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ako delen odpad Vyz vame preto kone n ho u vate a aby sa...

Page 230: ...14 N vod na Obsluhu Likvid cia 230 328 TV 551 701 Navigator User Manual 87 900 934 01 P...

Page 231: ...e rpalke 232 Splo ne informacije 232 Shranjevanje 234 Priprava za monta o 235 Monta a 236 Pritrjevanje rpalke 238 Uporaba 240 Vklop in uporaba naprave TV 551 701 Navigator 241 Izklop naprave TV 551 70...

Page 232: ...naslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorj...

Page 233: ...ali trdnih delcev rpanje se izvaja preko hitre turbine maks 42000 rpm ki jo vodi visoko u inkovit 3 fazni elektri ni motor TV 551 701 Navigator ne vsebuje onesna evalnih agentov in je primeren za ist...

Page 234: ...lk ne smete prese i naslednjih specifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti 0 do 95 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko iv...

Page 235: ...ajte Embala o zavrzite v skladu s pravili Material je mo no v celoti reciklirati in je v skladu z ECC direktivo 85 399 POZOR Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami saj...

Page 236: ...ko zrak prosto kro i skozi odprtine SVARILO e te naprave ne uporabljate v skladu z navodili je za ita ki jo naprava zagotavlja lahko ogro ena To napravo uporabljajte le v normalnih razmerah ko vse var...

Page 237: ...anual 87 900 934 01 P 237 328 Slika 2 V prisotnosti magnetnih polje mora rpalka biti za itena s feromagnetnim itom Za dodatne informacije glejte prilogo Technical Information TV 551 701 Navigator mora...

Page 238: ...bo rpalke na prirobnico na sistemu tako da povezava lahko zdr i navor ve ji od 8600 Nm okoli osi ISO K prirobnico lahko na primer pritrdite s pomo jo jeklenih dr al kot pri Agilent modelu IC63250DCMZ...

Page 239: ...direktivi EN 61010 1 spada TV 551 701 Navigator v skupino za drugo name anje ali prekovolta o Napravo prilju ite na napetost ki je v vskladu z zgornjo kategorijo Naprava TV 551 701 Navigator ima vhodn...

Page 240: ...soka temperatura lahko povzro i opekline POZOR Izogibajte se udarcem oscilacijam ali nenadnim premikom rpalke tekom delovanja Nosilci se lahko po kodujejo Za prezra evanje rpalke uporabite zrak ali in...

Page 241: ...bno aktivirati ustrezen programski ukaz glej odstavek RS 232 485 COMMUNICATION DESCRIPTION v prilogi Technical Information Zelena LED dioda ki se nahaja na sprednji plo i TV 551 701 Navigator s hitros...

Page 242: ...em potrjen na mednarodnem nivoju Uporabljajte ta kabel in vtika skupaj s primerno ozemljeno vti nico tako da vas tok ne strese in da zadovoljite EU predpisom Visoka napetost ki je prisotna v krmilniku...

Page 243: ...odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Agilent servisni center ki vam lahko zamenja pokvarjeno rpalko...

Page 244: ...upnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno lo evanje Zato pozivamo uporabnike da se ali pri pr...

Page 245: ...bomolecular Pumps 246 General Information 247 Storage 248 Preparation for Installation 250 Installation 251 Pump Fixing 253 Use 255 Switching on and Use of TV 551 701 Navigator 256 TV 551 701 Navigato...

Page 246: ...ual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator cont...

Page 247: ...ular pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liquids or solid particles The pu...

Page 248: ...ad to serious injury NOTE The notes contain important information taken from the text Storage In order to guarantee the maximum level of performance and reliability of Agilent Turbomolecular pumps the...

Page 249: ...01 Navigator User Manual 87 900 934 01 P 249 328 CAUTION If for any reason the shelf life time is exceeded the pump has to be returned to the factory Please contact the local Agilent Vacuum Sales and...

Page 250: ...kind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 CAUTION In order...

Page 251: ...hrough the holes WARNING If this instrument is not used as specified the protection provided by the equipment could be impaired This instrument must be used in a normal condition in which all means fo...

Page 252: ...anual 87 900 934 01 P Figure 2 In the presence of magnetic fields the pump must be protected using a ferromagnetic shield See the appendix Technical Information for detailed information The TV 551 701...

Page 253: ...rbopump to the system counter flange with a connection capable of withstanding a torque of 8600 Nm around its axis For example the ISO K flange can be fixed using high strength steel clamps like Agile...

Page 254: ...second installation or overvoltage category as per directive EN 61010 1 Connect the device to a mains line that satisfy the above category The TV 551 701 Navigator has Input Output and serial communic...

Page 255: ...s The high temperatures may cause burns CAUTION Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become dam aged Use air or inert gas free from dust or part...

Page 256: ...s normally rotating slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting for interlock status fast flashing period of about 200 ms error condition TV 551...

Page 257: ...ped turning and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reconditioned pump to replace that b...

Page 258: ...uropean Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The...

Page 259: ...ler Description 267 Technical Specification 268 TV 551 701 Navigator outline 271 Interconnections 275 Earth Ground Connection 275 P3 Vent 276 P4 External Fan 276 J1 In Out 277 Signal Description 278 H...

Page 260: ...Vent Valve mod 9699834 307 Standard Rack Controller Compatible Vent Valve mod X3501 68002 308 Vibration Isolator Installation 309 Purge Valve Installation 310 Serial Cable Installation 311 TV 551 701...

Page 261: ...h vacuum flange The TV 701 Navigator three models are Model 9698836 with ISO 200 high vacuum flange Model 9698843 with ISO 200 F high vacuum flange Model 9698837 with ConFlat 10 external diameter high...

Page 262: ...formation Description of the TV 551 701 Navigator 262 328 TV 551 701 Navigator User Manual 87 900 934 01 P Model 9698977 for TV 701 Navigator TV 551 Navigator Kit Models Figure 3 Model 9698832 Figure...

Page 263: ...Technical Information Description of the TV 551 701 Navigator 17 TV 551 701 Navigator User Manual 87 900 934 01 P 263 328 Figure 5 Model 9698833 Figure 6 Model 9698835...

Page 264: ...17 Technical Information Description of the TV 551 701 Navigator 264 328 TV 551 701 Navigator User Manual 87 900 934 01 P TV 701 Navigator Kit Models Figure 7 Model 9698836 Figure 8 Model 9698843...

Page 265: ...e is made of high strength aluminium alloy machined from a single block Proceeding from the high vacuum to the for vacuum region the turbine stages sequence is 1st stage with a blade angle of 40 2nd s...

Page 266: ...Vac three phase at 715 Hz To re duce losses during start up to a minimum the fre quency increases according to a ramp with a higher initial voltage frequency ratio The pump can be water cooled or air...

Page 267: ...r and is composed of two PCBs which include power supply and 3 phase output analog and input output section microprocessor and digi tal section The power supply together with the 3 phase out put conve...

Page 268: ...ion of test dome bake out with a Turbopump fitted with a ConFlat flange and using the recommended pre vacuum pump with minimum recommended mechanical pump 1 x 10 10 mbar 1 x 10 10 Torr with minimum re...

Page 269: ...Vac 50 60 Hz 600 VA 30 to 35 W TV 551 325 W with water cooling 220 W with air cooling TV 701 350 W with water cooling 250 W with air cooling Protection fuse 1 x 6 3 A Compliance with EN 61326 1 2006 E...

Page 270: ...chnical Specification 270 328 TV 551 701 Navigator User Manual 87 900 934 01 P NOTE When the TV 551 701 Navigator has been stored at a temperature less than 5 C wait until the system has reached the a...

Page 271: ...Navigator outline 17 TV 551 701 Navigator User Manual 87 900 934 01 P 271 328 TV 551 701 Navigator outline The following figures show the TV 551 701 Navigator outlines dimensions are in inches mm Fig...

Page 272: ...17 Technical Information TV 551 701 Navigator outline 272 328 TV 551 701 Navigator User Manual 87 900 934 01 P Figure 12 TV 701 Navigator outline...

Page 273: ...Technical Information TV 551 701 Navigator outline 17 TV 551 701 Navigator User Manual 87 900 934 01 P 273 328 Figure 13 TV 551 701 Navigator with ISO F flange outlines...

Page 274: ...nual 87 900 934 01 P Figure 14 Graph of nitrogen pumping speed vs inlet pressure with inlet screen Figure 15 Graph of compression ratio vs foreline pressure Figure 16 Graph of nitrogen throughput vs i...

Page 275: ...ctions Earth Ground Connection We recommend that you fit a separate earth ground conductor to the TV551 Use a separate insulated green yellow conductor AWG16 and use a M5 x 10 screw and shake proof wa...

Page 276: ...51 701 Navigator User Manual 87 900 934 01 P P3 Vent Figure 18 P3 Vent This is a dedicated 24 Vdc connector to control the optional vent valve P4 External Fan Figure 19 External fan This is a dedicate...

Page 277: ...P 277 328 J1 In Out Figura 2 In Out This connector carries all the input and output sig nals to remote control the TV 551 701 Navigator It is a 15 pins D type connector the available sig nals are det...

Page 278: ...t 15 Ground Programmable analog signal Out Signal Description Start Stop input signal to start or stop the pump With the supplied cover connector the START STOP signal is connected to the 24 Vdc pin a...

Page 279: ...om 272 Hz to 714 Hz see the following diagram Figure 20 SOFT START this input is used to provide a soft start to the pump in this condition the ramp up time could be up to 150 min Programmable analog...

Page 280: ...cy current or time is higher than the set threshold The signal can be high level active that is the output is normally at 0 Vdc and becomes 24 Vdc when activated or low level active that is the output...

Page 281: ...It is possible to delay the set point checking for a programmable delay time The PROGRAMMABLE SET POINT signal has the following default settings reference quantity frequency threshold 643 Hz hystere...

Page 282: ...Collector Inputs of the Controller Here below there are the typical connections of the open collector input of the integrated controller to an external system Two cases are considered 1 the customer s...

Page 283: ...Technical Information How to Connect the Open Collector Inputs of the Controller 17 TV 551 701 Navigator User Manual 87 900 934 01 P 283 328 Figure 25 Case 1...

Page 284: ...17 Technical Information How to Connect the Open Collector Inputs of the Controller 284 328 TV 551 701 Navigator User Manual 87 900 934 01 P Figure 26 Case 2 with relay utilisation...

Page 285: ...Technical Information How to Connect the Open Collector Inputs of the Controller 17 TV 551 701 Navigator User Manual 87 900 934 01 P 285 328 Figure 27 Case 2 with transistor utilisation...

Page 286: ...al input output connector to control via an RS 232 or RS 485 connection the TV 551 701 Tab 5 Signal characteristics and use Pin N Signal name 1 SPARE 2 TX RS232 3 RX RS232 4 SPARE 5 GND 6 A RS485 7 SP...

Page 287: ...device address by means of the Navigator software Communication Format 8 data bit no parity 1 stop bit baud rate 600 1200 2400 4800 9600 programmable Communication Protocol The communication protocol...

Page 288: ...he data type as per the following table Tab 6 Data type Field length Valid characters Logic L 1 0 off 1 on Numeric N 6 0 9 right justified with 0 Alphanumeric A 10 from blank to _ ASCII ETX End of tra...

Page 289: ...command execution has been successfully completed NACK 1 byte 0x15 The command execu tion has been failed Unknown Window 1 byte 0x32 The specified window in the command is not a valid window Data Type...

Page 290: ...and START Source PC Destination Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC De...

Page 291: ...T ON Source PC Destination Controller 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source...

Page 292: ...condition YES 1 NO 0 101 R W N Set Point type 0 Frequency 1 Current 2 Time default 0 102 R W N Set Point threshold expressed in Hz mA or s default 643 103 R W N Set Point delay time between the pump...

Page 293: ...to 714 default 714 121 R W N Maximum rotational frequency in Hz active only in Stop condition 272 to 714 default 714 122 R W L Set vent valve on off on closed On 1 Off 0 default 1 123 124 Reserved to...

Page 294: ...ing figure 300 R N Cycle time in minutes zeroed by the reset command 0 to 999999 301 R N Cycle number zeroed by the reset command 0 to 9999 302 R N Pump life in hours zeroed by the reset command 0 to...

Page 295: ...oller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is opened or closed by...

Page 296: ...17 Technical Information Inlet Screen Installation 296 328 TV 551 701 Navigator User Manual 87 900 934 01 P Inlet Screen Installation Figure 30 Figure 31 Figure 32...

Page 297: ...prevents the blades of the pump from being damaged by debris greater than 0 7 mm di ameter The inlet screen however does reduce the pump ing speed by about 10 The inlet screen is fitted in the upper...

Page 298: ...een Installation 298 328 TV 551 701 Navigator User Manual 87 900 934 01 P The following figure shows the overall flange dimensions with the protection screen fitted on pump with ISO flange and pump wi...

Page 299: ...model 9699808 and 9699807 can be used to heat the pump casing when a bakeout is needed The heater band is applied to the upper part of the pump casing as shown in the figure and heats it to a temperat...

Page 300: ...will be automatically cut out by the thermistor sensor NOTE The turbopump must be baked only when operat ing with an inlet pressure less than 10 4 mbar and with water cooling CAUTION If the chamber o...

Page 301: ...ve the TV 551 701 cooling during heavy operational conditions optional Figure 39 Fan specifications air flow 200m3 h input voltage 24 Vdc dimensions 127 x 127 x 38 mm 5 x 5 x 1 5 in power 4 7 W The fa...

Page 302: ...r Cooling Kit Installation 302 328 TV 551 701 Navigator User Manual 87 900 934 01 P 4 Fix the bracket to the pump body between the pump and the controller 5 Connect the fan supply to the P4 connector...

Page 303: ...controller it is necessary to utilize the air cooling kit model X3501 68001 Figure 41 Fan specification air flow 187 m3 h input voltage 24 Vdc power input 4 6 W dimensions 127 x 127 mm 5 x 5 inches To...

Page 304: ...17 Technical Information Air Cooling Kit Installation 304 328 TV 551 701 Navigator User Manual 87 900 934 01 P Figure 42...

Page 305: ...900 934 01 P 305 328 Water Cooling Kit Installation The water cooling kit mod 9699347 or 9699337 must be installed when the pump is used under heavy load conditions or when air cooling is insufficient...

Page 306: ...r or us ing a closed circuit cooling system The water temperature must be between 10 C and 30 C with an inlet pressure between 3 and 5 bar This allows a flow of about 200 l h NOTE The water electrical...

Page 307: ...ure 46 This vent valve waits before opening a minimum time of about 5 sec This time can be increased up to about 220 min by means of a setting of the Navigator software optional To install the vent va...

Page 308: ...01 P Figure 48 CAUTION Do not overtighten the valve as this may damage the thread on the pump Then connect the cable from the valve to the suita ble connector on the controller see the preceding parag...

Page 309: ...above paragraph Vibration Isolator Installation Six vibration isolators for ISO and CFF inlet flange version pumps are available as accessories The four model part numbers are the following model 9699...

Page 310: ...valve is available to protect the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve it is necessary to unscrew the purge port cover as...

Page 311: ...r or the optional vent valve have to be controlled by means of a remote computer The cable is installed fixing the 9 pin D type connector into the P2 serial connector as shown in the following figure...

Page 312: ...through holes toward the inside and fix them with the three M6 screws to the pump bottom 3 Place the controller on the blocks with the pump cable toward the pump body 4 Fix the controller to the block...

Page 313: ...nuts The 6 holes on the bracket allows to mount the controller with the rotation angle that you like 2 Turn the pump upside down 3 Place the bracket on the pump bottom the hole on the bracket has the...

Page 314: ...551 701 Controller Installation 314 328 TV 551 701 Navigator User Manual 87 900 934 01 P Figure 54 Connection A High Vacuum Flange For ISO K flange connections fix the two flanges with the clamps as s...

Page 315: ...ith the bolt in the lower side Attach the units and tighten each one in turn Re peat the sequential tightening until the flange faces meet CAUTION Exercise care when tightening nuts and bolts to avoid...

Page 316: ...17 Technical Information TV 551 701 Controller Installation 316 328 TV 551 701 Navigator User Manual 87 900 934 01 P Connection Configurations Figure 56...

Page 317: ...o the controller through an 8 pin connector Pins B C and D are the 3 phase supply to the motor pin E is connected to the pump ground pins G and H are not connected pins A and F reserved for Agilent If...

Page 318: ...allows to achieve a high vacuum pressure in the 10 8 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent...

Page 319: ...nd hence the rotor may be overheated while static parts of the pump remain cool This effect is strongly dependant from the intensity time function and distribution of the magnetic field In general the...

Page 320: ...oling kit for Navigator Controller 9699339 Air cooling kit for standard rack controller X3501 68001 Bracket for Navigator Controller side mounting 9699349 Vibration isolator CF 6 9699334 Vibration iso...

Page 321: ...Technical Information Accessories and Spare Parts 17 TV 551 701 Navigator User Manual 87 900 934 01 P 321 328 DESCRIPTION PART NUMBER IDP 15 with inlet valve X3815 64010...

Page 322: ...17 Technical Information Accessories and Spare Parts 322 328 TV 551 701 Navigator User Manual 87 900 934 01 P...

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Page 328: ...Toll free 0800 728 1405 Singapore Agilent Technologies Singapore Pte Ltd 1 Yishun Avenue 7 Singapore 768923 Tel 65 6215 8045 Fax 65 6754 0574 Toll free 1 800 2762622 vps customerservice agilent com M...

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