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Technical Information

Purge Valve Installation

17

TV 401/301/21 NSF User Manual / 87-900-995-01 (C)

273/294

Purge Valve Installation

A gas purge valve is available to protect the pump bearings against
particulate and corrosive gases that could move into the pump(see
“Accessories and Spare Parts” table).

To install the gas purge valve it is necessary to unscrew the purge
port cover as shown in the following figure.

Figure 31

and then screw the gas purge valve (with a torque of 2.5 Nm) as
shown in the following figure.

Figure 32

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Summary of Contents for TV-401/301/21 NSF

Page 1: ...ksjon manual Bedienungshandbuch Ohjek sikirja Notice de mode d emploi Felhaszn l i k zik nyv Manual de istrucciones Podrecznik instrukcji Manual de istru es N vod k pou it Bedrijfshandleiding N vod na...

Page 2: ...are furnished under a license and may be used or copied only in accordance with the terms of such license Restricted Rights Legend If software is for use in the performance of a U S Government prime...

Page 3: ...TV 401 301 21 NSF TV 401 301 21 NSF User Manual 87 900 995 01 C 3 294 TV 401 301 21 NSF...

Page 4: ...TV 401 301 21 NSF 4 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 5: ...molecolari 14 Informazioni Generali 15 Immagazzinamento 17 Preparazione per l installazione 18 Installazione 19 Uso21 Manutenzione 24 Smaltimento 25 2 Gebrauchsanleitung27 Sicherheitshinweise f r Turb...

Page 6: ...ation 47 Utilization 49 Entretien 52 Mise au rebut 53 4 Manual de istrucciones 55 Indicaciones de Seguridad para Bombas Turbomoleculares 56 Informaci n general 57 Almacenamiento 59 Preparaci n para la...

Page 7: ...ing 83 Veiligheidsinstructies voor Turbomoleculaire pompen 84 Algemene informatie 85 Opslag 87 Uitpakken 88 Installatie 89 Gebruik 91 Onderhoud 94 Afvalverwerking 95 7 Istruktionsbog 97 Sikkerhedsanvi...

Page 8: ...15 F rberedelser f r installation 116 Installation 117 Anv ndning 119 Underh ll 122 Bortskaffning 123 9 Instruksjon Manual 125 Sikkerhetsanvisninger for Turbomolekyl re pumper 126 Generell informasjon...

Page 9: ...v 153 Biztons gi tmutat Turb molekul ris szivatty khoz 154 ltal nos inform ic 155 T rol s 157 El k sz t s telep t sre 158 Telep t s 159 Haszn lat 161 Karbantart s 164 Megsemmis t s 165 12 Podrecznik I...

Page 10: ...becn informace 183 Uskladn n 185 P prava k instalaci 186 Instalace 187 Pou it 189 dr ba 192 Likvidace 193 14 N vod na Obsluhu 195 Bezpe nostn n vod pre Turbomolekul rne v vevy 196 V eobecn inform cie...

Page 11: ...16 Instructions for Use 223 Safety Guideline for Turbomolecular Pumps 224 General Information 225 Storage 227 Preparation for Installation 228 Installation 229 Use231 Maintenance 234 Disposal 235 17 T...

Page 12: ...273 Serial Cable Installation 274 TV 401 301 21 NSF Controller Installation 275 Connection of the Fore Vacuum Pump 275 Turbo V 401 301 21 Insertion and Extraction 276 Connection of the Electrical Con...

Page 13: ...Turbomolecolari 14 Informazioni Generali 15 Immagazzinamento 17 Preparazione per l installazione 18 Installazione 19 Uso 21 Accensione ed Uso del TV 401 301 21 NSF 22 Arresto del TV 401 301 21 NSF 23...

Page 14: ...levata quantit di energia cinetica dovuta alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e stator...

Page 15: ...oni di alto e ultra alto vuoto e dal relativo controller Il sistema capace di pompare qualsiasi tipo di gas o di composto gassoso ma non adatto per il pompaggio di liquidi o di particelle solide L eff...

Page 16: ...enzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura AVVERTENZA I messaggi di avvertenza attirano l attenzione dell operatore su una procedura...

Page 17: ...sere superate le seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa da 0 a 95 non condensante il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando...

Page 18: ...401 301 21 NSF e a non sottoporlo ad urti o vibrazioni Non disperdere l imballo nell ambiente Il materiale completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente AT...

Page 19: ...erici pioggia gelo neve polveri gas aggressivi in ambienti esplosivi o con elevato rischio di incendio Durante il funzionamento necessario che siano rispettate le seguenti condizioni ambientali temper...

Page 20: ...e la pompa deve avere uno spessore adeguato ai fini della sicurezza Ad esempio per camere di Anticorodal temprato y 275 MPa uno spessore di 5 mm risulta adeguato ATTENZIONE Il TV 401 301 21 NSF appart...

Page 21: ...a pu causare lesioni alle persone ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa quando in funzione I cuscinetti potrebbero danneggiarsi Per la mandata all aria della pomp...

Page 22: ...tutti i successivi avvii della pompa avvengono senza il modo Soft Start Per riavere una partenza con Soft Start attivo occorre riabilitare il modo suddetto tramite software vedere il paragrafo RS 232...

Page 23: ...la tabella delle parti ordinabili dotato di una spina approvata a livello internazionale Utilizzare questo cavo e spina insieme ad una presa adeguatamente connessa a terra per evitare scosse elettric...

Page 24: ...pompa sia inferiore a 50 C In caso di guasto possibile usufruire del servizio di riparazione Agilent o del Agilent advanced exchange service che permette di ottenere un sistema rigenerato in sostituz...

Page 25: ...o solo per i paesi della Comunit Europea indica che il prodotto sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di r...

Page 26: ...1 Istruzioni per l uso Smaltimento 26 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 27: ...urbomolekularpumpen 29 Allgemeine Informationen 29 Lagerung 31 Vor der Installation 32 Installation 33 Gebrauch 35 Einschaltung und Gebrauch von Modell TV 401 301 21 NSF 36 Stoppen von Modell TV 401 3...

Page 28: ...hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Gewicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor un...

Page 29: ...System eignet sich f r die F rderung aller Arten von Gasen oder gashaltigen Gemischen nicht jedoch f r die F rderung von Fl ssigstoffen oder Festpartikeln Der Pumpeffekt wird ber eine Hochgeschwindig...

Page 30: ...Vorsichtshinweise werden vor Vorg ngen angegeben die bei Nichtbeachtung Sch den an der Anlage verursachen k nnten WARNUNG Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf einen Vorgang ode...

Page 31: ...rte nicht berschritten werden Temperatur von 20 C bis 70 C Relative Feuchtigkeit von 0 bis 95 nicht kondensierend Der Kunde hat die Turbomolekularpumpen nach dem Empfang bei Erstinbetriebnahme stets i...

Page 32: ...en zu sch tzen ist Das Verpackungsmaterial ist vorschriftsgem zu entsorgen Es ist vollst ndig recyclebar und entspricht der Richtlinie 85 399 EWG f r Umweltschutz VORSICHT Um Entgasungen zu vermeiden...

Page 33: ...siven Gasen sind sowie auch nicht in explosionsf higen oder erh ht brandgef hrdeten Umgebungen installiert und oder benutzt werden Beim Betrieb m ssen folgende Umgebungsbedingungen eingehalten werden...

Page 34: ...Pumpe enthalten ist soll aus Sicherheitsgr nden entsprechend dickwandig ausgef hrt sein Bei Kammern aus geh rtetem Anticorodal y 275 Mpa ist eine Wandst rke von 5 mm angemessen VORSICHT Der TV 401 30...

Page 35: ...besteht Verbrennungsgefahr VORSICHT W hrend des Betriebs sind Sto und Vibrationseinwirkungen sowie Ruckbewegungen an der Turbopumpe zu vermeiden da die Lager besch digt werden k nnten F r die Bel ftun...

Page 36: ...selbstt tig abschaltet Daher erfolgen alle nachfolgenden Pumpenanl ufe ohne den Modus Soft Start Um die Pumpe erneut im Modus Soft Start zu starten ist dieser Modus mittels der Software wieder freizug...

Page 37: ...elle der Bestellteile versorgt werden das mit einem auf internationaler Ebene genehmigten Stecker ausgestattet ist Verwenden Sie dieses Kabel und den Stecker zusammen mit einer entsprechend geerdeten...

Page 38: ...eh use unter 50 C abgesunken ist Bei Defekten kann der Agilent Service oder der Agilent advanced exchange service in Anspruch genommen werden der ein general berholtes System als Ersatz f r das defekt...

Page 39: ...lectronic Equipment angebracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsys...

Page 40: ...2 Gebrauchsanleitung Entsorgung 40 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 41: ...culaires 42 Indications g n rales 43 Stockage 45 Preparation pour l installation 46 Installation 47 Utilisation 49 Mise en marche et utilisation du TV 401 301 21 NSF 50 Arr t du TV 401 301 21 NSF 51...

Page 42: ...ont une nergie cin tique lev e due la grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une r...

Page 43: ...vide pouss et ultrapouss et dot d un contr leur Le syst me est m me de pomper tous les types de gaz et de compos s gazeux mais il n est pas adapt au pompage de liquides ou de particules solides L effe...

Page 44: ...n apparaissent avant certaines proc dures dont le non respect pourrait endommager s rieusement l appareillage AVERTISSEMENT Les messages d avertissement attirent l attention de l op rateur sur une pro...

Page 45: ...t avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante A la premi re utilisation les pompes turbomol culaires doivent toujours tre mises...

Page 46: ...21 NSF et ne lui faire subir aucun choc et aucune vibration Ne pas abandonner l emballage dans la nature Le mat riel est enti rement recyclable et conforme la directive CEE 85 399 en mati re de prote...

Page 47: ...2 Ne pas installer et ou utiliser la pompe dans des milieux expos s aux agents atmosph riques pluie gel neige la poussi re aux gaz agressifs ainsi que dans des milieux explosifs ou fort risque d incen...

Page 48: ...EMENT La chambre vide contenant la pompe doit avoir une paisseur appropri e garantir les conditions de s curit Par exemple une paisseur de 5 mm est adapt e une chambre r alis e en Anticorodal tremp y...

Page 49: ...peut tre l origine de l sions graves ATTENTION Lorsque la turbopompe fonctionne viter tout choc oscillation ou d placement brusque car les paliers pourraient se d t riorer Pour le refoulement de l ai...

Page 50: ...utomatiquement et les mises en marche suivantes se font sans le passage Soft Start Pour obtenir nouveau une mise en marche Soft Start il faut r activer ce mode op ratoire l aide du logiciel Cf paragra...

Page 51: ...ies qui peuvent tre ordonn es dot d une fiche approuv e niveau international Utiliser ce c ble et cette fiche avec une prise connect e d une mani re ad quate terre pour viter des d charges lectriques...

Page 52: ...nf rieure 50 C En cas de panne il est possible de b n ficier du service r parations Agilent ou du Agilent advanced exchange service qui permet d obtenir un syst me r g n r en remplacement du syst me e...

Page 53: ...ur les pays de la Communaut europ enne indique que le produit sur lequel il est appliqu NE doit PAS tre mis au rebut avec les ordures m nag res ou les d chets industriels ordinaires mais passer par un...

Page 54: ...3 Mode d emploi Mise au rebut 54 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 55: ...bas Turbomoleculares 56 Indications g n rales 57 Almacenamiento 59 Preparaci n para la instalaci n 60 Instalaci n 61 Uso 63 Encendido y Uso del TV 401 301 21 NSF 64 Parada del TV 401 301 21 NSF 65 Par...

Page 56: ...n una elevada cantidad de energ a cin tica debido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre...

Page 57: ...vac o integrada por el controler correspondiente El sistema puede bombear cualquier tipo de gas o de composici n gaseosa pero no es adecuado para bombear l quidos o part culas s lidas El efecto de bom...

Page 58: ...atenci n se visualizan antes de los procedimientos que al no respetarse podr an provocar da os al equipo ADVERTENCIA Los mensajes de advertencia atraen la atenci n del operador sobre un procedimiento...

Page 59: ...s temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionami...

Page 60: ...SF y de no someterlo a golpes o vibraciones No abandonar el embalaje en el medio ambiente El material es completamente reciclable y cumple con la directiva CEE 85 399 para la preservaci n del medio am...

Page 61: ...entes atmosf ricos lluvia hielo y nieve polvo y gases agresivos en lugares explosivos o con alto riesgo de incendio Durante el funcionamiento es necesario que se respeten las condiciones ambientales s...

Page 62: ...izar seguridad Por ejemplo en el caso de las c maras de anticorodal templado y 275 MPa el espesor adecuado es de 5 mm ATENCI N El TV 401 301 21 NSF pertenece a la segunda categor a de instalaci n o so...

Page 63: ...uede provocar lesiones a las personas ATENCI N Ev tense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podr an da arse Para el env o de aire de...

Page 64: ...tanto cuando la bomba se ponga en marcha posteriormente se har sin Soft Start Para volver a utilizar una puesta en marcha Soft Start activa es necesario rehabilitar la forma anteriormente indicada me...

Page 65: ...bles para pedido provisto de un enchufe aprobado internacionalmente Utilizar el cable y el enchufe junto con un tomacorriente adecuadamente conectado a tierra para evitar descargas el ctricas y cumpli...

Page 66: ...superficial de la bomba sea inferior a 50 C En caso de aver a se podr utilizar el servicio de reparaci n Agilent o el Agilent advanced exchange service que permite obtener un sistema regenerado para...

Page 67: ...indica que el producto sobre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimie...

Page 68: ...4 Manual de istrucciones Eliminaci n 68 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 69: ...Bombas Turbomoleculares 70 Informa es gerais 71 Armazenagem 73 Preparaci n para la instalaci n 74 Instala o 75 Utiliza o 77 Acendimento e Utiliza o do TV 401 301 21 NSF 78 Paragem do TV 401 301 21 NSF...

Page 70: ...de Instru es t m uma alta quantidade de energia cin tica devida alta velocidade de rota o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre...

Page 71: ...troller O sistema capaz de bombear qualquer tipo de g s ou de composto gasoso mas n o adequado para bombear l quidos ou part culas s lidas O efeito da bomba obtido atrav s de uma turbina rotativa de a...

Page 72: ...ns de cuidado s o visualizadas antes de proceder que se n o observadas poderiam causar danos aparelhagem ATEN AO As mensagens de aten o atraem a aten o do operador num procedimento ou uma pr tica espe...

Page 73: ...s ambientais devem ser as seguintes temperatura de 20 C a 70 C humidade relativa de 0 a 95 n o condensante ao accionar as bombas turbomoleculares pela primeira vez o cliente deve activ las sempre em m...

Page 74: ...r o controller e para n o submet lo a choques ou vibra es N o depositar a embalagem no meio ambiente O material completamente recicl vel e em conformidade com a norma CEE 85 399 para a protec o do mei...

Page 75: ...ses agressivos em ambientes com possibilidade de explos o ou com elevado risco de inc ndio Durante o funcionamento necess rio que sejam respeitadas as seguintes condi es ambientais temperatura de 5 C...

Page 76: ...ada aos padr es de seguran a Por exemplo com c maras de Anticorodal temperado y 275 MPa adequada uma espessura de 5 mm CUIDADO O TV 401 301 21 NSF pertence segunda categoria de instala o ou sobretens...

Page 77: ...temperatura pode causar les es s pessoas CUIDADO Evitar colis es oscila es ou deslocamentos bruscos da turbobomba quando est a funcionar Os rolamentos poderiam sofrer danos Para a sa da de ar da bomb...

Page 78: ...ucessivos arranques da bomba n o ser o em Soft Start Para poder arrancar a bomba em Soft Start ser preciso reactivar o modo acima referido utilizando o software consultar o par grafo RS 232 COMMUNICAT...

Page 79: ...la das partes que podem ser encomendadas equipado de uma tomada aprovada a n vel internacional Utilize este cabo e tomada juntos com uma tomada adequadamente conectada a terra para evitar choques el c...

Page 80: ...bomba seja inferior a 50 C Em caso de defeito poss vel usufruir do servi o de assist ncia Agilent ou do Agilent advanced exchange service que permite obter um sistema regenerado que substitua a bomba...

Page 81: ...os pa ses da Comunidade Europeia indica que o produto no qual est aplicado N O deve ser eliminado juntamente com os res duos dom sticos ou industriais comuns mas deve ser dirigido a um sistema de reco...

Page 82: ...5 Manual de Istru es Manuten o 82 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 83: ...es voor Turbomoleculaire pompen 84 Algemene informatie 85 Opslag 87 Uitpakken 88 Installatie 89 Gebruik 91 Inschakeling en gebruik van de TV 401 301 21 NSF 92 Afzetten van de TV 401 301 21 NSF 93 Nood...

Page 84: ...n hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tusse...

Page 85: ...gen plus bijbehorende controller bestaat Het systeem is in staat om elk type gas of gasverbinding te pompen maar is niet geschikt voor het pompen van vloeistoffen of vaste deeltjes Het pompeffect word...

Page 86: ...l staat tekst met procedures die indien niet opgevolgsd schade aan apparatuur kunnen veroorzaken WAARSCHUWING Bij dit symbool staat tekst die de aandacht van de operator vestigt op een speciale proced...

Page 87: ...voldaan temperatuur van 20 C tot 70 C relatieve vochtigheid van 0 tot 95 niet condenserend de klant moet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en v...

Page 88: ...jgt Laat de verpakking niet ergens buiten achter Het verpakkingsmateriaal is volledig recyclebaar en voldoet aan de EEG milieurichtlijn 85 399 VOORZICHTIG Om ontgassingsproblemen te voorkomen mogen de...

Page 89: ...d en of gebruikt worden in ruimten die blootgesteld zijn aan de weersomstandigheden regen vorst sneeuw stof agressieve gassen of in ruimten met explosiegevaar of zeer groot brandgevaar Tijdens de werk...

Page 90: ...HUWING De vacu mkamer die de pomp bevat moet een geschikte dikte hebben in verband met de veiligheid Bijvoorbeeld voor kamers van gehard Anticorodal y 275 MPa is een dikte van 5 mm geschikt VOORZICHTI...

Page 91: ...oorzaken VOORZICHTIG Vermijd schokken trillingen of bruuske verplaatsingen van de turbopomp wanneer deze in werking is De lagers kunnen anders beschadigd raken Gebruik voor de luchttoevoer naar de pom...

Page 92: ...achtigd wordt Vandaar dat alle volgende starts niet op de wijze Soft Start geschieden Om opnieuw met Soft Start te starten moet bovengenoemde wijze met behulp van de software gemachtigd worden zie par...

Page 93: ...de tabel met de bestanddelen die u kunt bestellen voorzien van een stekker met internationale goedkeuring Gebruik de kabel en de stekker samen met een goedgeaard stopcontact om elektrische schokken te...

Page 94: ...p onder een temperatuur van 50 C is gezakt In geval van storing is het mogelijk om de reparatiedienst van Agilent of de Agilent advanced exchange service in te schakelen zo krijgt men een ruilpomp ter...

Page 95: ...ropese Gemeenschap geeft aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker...

Page 96: ...6 Bedrijfshandleiding Afvalverwerking 96 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 97: ...re turbopumper 98 Generel information 99 Opbevaring 101 Forberedelser f r installation 102 Installation 103 Anvendelse 105 Start og anvendelse af TV 401 301 21 NSF 106 Stop af TV 401 301 21 NSF 107 N...

Page 98: ...ar en stor kinetisk energi der skyldes den h je omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og sta...

Page 99: ...hed Systemet er i stand til at pumpe en hvilken som helst form for gas eller gaslignende luftarter men systemet kan ikke anvendes til pumpning af v ske eller af faste partikler Pumpeeffekten opn s ved...

Page 100: ...enne advarselsmeddelelse vises f r procedurer der skal f lges n je for ikke at risikere maskinskader ADVARSEL Advarselsmeddelelserne informerer operat ren om at en speciel procedure eller en vis type...

Page 101: ...g og opbevaring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra 0 til 95 ikke kondenserende Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved mod...

Page 102: ...kke tabes eller uds ttes for st d ved udpakningen Smid ikke emballagen ud Materialet kan genbruges 100 og opfylder EU direktiv 85 399 om milj beskyttelse FORSIGTIG Komponenter der skal uds ttes for va...

Page 103: ...ttes for p virkninger fra atmosf ren regn sne is damp aggressive gasser og ligeledes ikke i eksplosivt eller brandfarligt milj F lgende krav til omgivelsesforholdene g lder ved drift temperatur fra 5...

Page 104: ...vis er en tykkelse p 5 mm egnet med hensyn til vakuumkamre af h rdet anticorodal st l y 275 MPa FORSIGTIG TV 401 301 21 NSF h rer til den anden installationsklasse eller oversp ndingsklasse jf normen...

Page 105: ...n h je temperatur kan resultere i skade p personer FORSIGTIG Undg sammenst d vibrationer eller bratte bev gelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af lejerne Pumpen...

Page 106: ...enne funktion automatisk med hensyn til alle efterf lgende aktiveringer af pumpen der vil ske uden SOFT START metoden For at aktivere SOFT START metoden p ny skal ovenn vnte m de programmeres ved hj l...

Page 107: ...de bestilbare stykker f dekablet skal v re udstyret med et stik som skal v re godkendt p international plan Benyt dette kabel og stik sammen med en stikkontakt som p passende m de er forbundet til jo...

Page 108: ...dset og til temperaturen p pumpens overflade er under 50 C I tilf lde af skader p systemet kontaktes et Agilent reparationsv rksted eller Agilent advanced exchange service der udskifter systemet med e...

Page 109: ...g ldende for EU landene viser at produktet som det sidder p IKKE m bortskaffes sammen med affald fra private husholdninger eller industriel affald men skal indleveres p en godkendt affaldsstation Vi...

Page 110: ...7 Istruktionsbog Bortskaffelse 110 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 111: ...urbopumpar112 Allm n information 113 F rvaring 115 F rberedelser f r installation 116 Installation 117 Anv ndning 119 Mise en marche et utilisation du TV 401 301 21 NSF 120 Att st nga av TV 401 301 21...

Page 112: ...n h g kinetisk energi beroende p den h ga rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn sku...

Page 113: ...r och en styrenhet Systemet kan anv ndas f r pumpning av alla typer av gas eller gasf reningar Dock l mpar sig inte systemet f r pumpning av v tskor eller fasta partiklar Pumpningen stadkoms med hj lp...

Page 114: ...arningsmeddelande visas framf r procedurer som m ste f ljas exakt f r att inte risk f r maskinskada skall uppst VARNING Varningsmeddelandena informerar operat ren om att en speciell procedur eller en...

Page 115: ...omgivningsf rh llanden respekteras Temperaturomr de 20 C till 70 C Relativ fuktighet 0 till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna n r de mottas och s tts i drift f r...

Page 116: ...s eller uts tts f r st tar vid uppackningen Kasta inte packmaterialet i soporna Materialet r tervinningsbart till 100 och uppfyller EU direktiv 85 399 om milj skydd OBSERVER Komponenter som skall uts...

Page 117: ...ilj er som uts tts f r p verkan fr n atmosf ren regn sn is damm aggressiva gaser och inte heller i explosiv eller brandfarlig milj F ljande krav p omgivningsf rh llanden g ller vid drift temperatur fr...

Page 118: ...igt passande tjocklek Exempelvis r en tjocklek p 5 mm passande f r vakuumkammare av h rdat anticorodal st l y 275 MPa OBSERVER TV 401 301 21 NSF tillh r den andra installationsklassen eller versp nnin...

Page 119: ...r att undvika br nnskador OBSERVER Undvik sammanst tningar sv ngningar eller pl tsliga f rflyttningar av turbopumpen n r den r ig ng Lagren kan bli skadade Pumpen ska f rses med luft eller med delgas...

Page 120: ...gscykeln sl s av automatiskt D refter sker pumpens inledningar utan funktionen Mjukstart F r att teraktivera Mjukstart m ste man terst lla ovann mnda l ge genom mjukvaran se stycket RS 232 COMMUNICATl...

Page 121: ...et med en str mkabel med 3 stycken ledare se tabellen ver ordinerbara delar tillsammans med kontakt godk nd p internationell niv Anv nd sladden och kontakten tillsammans med en jordad anslutning f r a...

Page 122: ...sedan tills rotorn stannat samt tills pumpens yttemperatur r l gre n 50 C Om pumpen havererar kontakta Agilent reparationsverkstad eller Agilent utbytesservice som kan ers tta systemet med ett renover...

Page 123: ...Unionen indikerar att produkten p vilken symbolen har applicerats INTE f r skaffas bort tillsammans med vanliga hush lls eller industriavfall men att d remot ett differentierat uppsamlingssystem m st...

Page 124: ...8 Bruksanvisning Bortskaffning 124 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 125: ...ekyl re pumper 126 Generell informasjon 127 Lagring 129 Klargj re til installasjon 130 Installasjon 131 Bruk 133 Mise en marche et utilisation du TV 401 301 21 NSF 134 Stoppe TV 401 301 21 NSF 135 N d...

Page 126: ...ende Bruksanvisningen har et h yt kinetisk energiniv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn...

Page 127: ...av en turbo molekul r pumpe for bruk i h y eller ultrah ye vakuumanlegg og en styreenhet Systemet kan pumpe nesten alle typer gass eller gassforening Det er ikke beregnet for pumpe v sker eller faste...

Page 128: ...SIKTIG Denne advarselen vises foran fremgangsm ter som dersom de ikke f lges kan f re til at utstyret skades ADVARSEL Disse meldingene skal tiltrekke seg brukerens oppmerksomhet til en spesiell fremga...

Page 129: ...kke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra 0 til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp f...

Page 130: ...pes ned eller utsettes for noen form for st t Emballasjen m ikke kastes p en ulovlig m te Alle materialer er 100 resirkulerbare og er i samsvar med EU direktiv 85 399 om milj beskyttelse FORSIKTIG For...

Page 131: ...lj er eller milj er med stor brannfare Under bruk m f lgende forhold respekteres temperatur fra 5 C til 35 C se diagram i tillegget Technical Information relativ fuktighet 0 95 uten kondens Ved magnet...

Page 132: ...st l FORSIKTIG TV 401 301 21 NSF h rer til installasjonsklasse eller overspenningsklasse nummer 2 i f lge EN 61010 1 standarden Kople derfor anordningen til en hovedledning som tilfredsstiller kravene...

Page 133: ...eraturene kan f re til brannskader FORSIKTIG Unng st t svingninger eller plutselige bevegelser av turbinpumpen n r den er i funksjon Lagrene kan skades Bruk st v og partikkelfri luft eller inaktiv gas...

Page 134: ...angsettingssyklusen desaktiveres slik at etterf lgende igangsettinger skjer uten MYK START For oppn en MYK START igjen er det n dvendig tilbakestille modusen via software se avsnittet RS 232 COMMUNICA...

Page 135: ...om kan bestilles og utstyrt med et st psel som er internasjonalt godkjent for brukerens sikkerhet Bruk denne kabelen og st pselet sammen med en egnet jordet kontakt for unng elektrisk st t og for over...

Page 136: ...pens overflatetemperatur er lavere enn 50 C Dersom systemet stanser m du ta kontakt med Agilents reparasjonservice eller med Agilents avanserte bytteservice som kan tilby overhalte system til erstatni...

Page 137: ...e symbolet som bare gjelder for land i Det europeiske fellesselskap viser at produktet som det sitter p IKKE m behandles som vanlig hus industriavfall men m legges i kildesortering Derfor oppfordrer m...

Page 138: ...9 Instruksjon Manual Eliminering 138 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 139: ...umppujen Turvaohjeet 140 Yleisi tietoja 141 Varastointi 143 Valmistelut asennusta varten 144 Asennus 145 K ytt 147 TV 401 301 21 NSFin k ynnistys ja k ytt 148 TV 401 301 21 NSFin pys ytt minen149 H t...

Page 140: ...ea m r kineettist energiaa joka aiheutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai ro...

Page 141: ...hji n k ytt varten J rjestelm kykenee pumppaamaan kaiken tyyppisi kaasuja tai kaasukoostumuksia Se ei sovellu nesteiden tai kiinteiden hiukkasten pumppaamiseen Pumppaus saadaan aikaan korkealla nopeud...

Page 142: ...j HUOMIO Huomio merkinn t varoittavat toimenpiteist joiden laiminly nti voi johtaa laitteen vaurioitumiseen VAROITUS Varoitus merkint jen teht v n on kiinnitt k ytt j n huomio erityisiin toimintatapoi...

Page 143: ...an seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan...

Page 144: ...in putoamista tai siihen kohdistuvia iskuja tai t rin it Pakkausta ei tule j tt ymp rist n Pakkausmateriaali voidaan kierr tt kokonaisuudessaan ja se vastaa EY direktiivi 85 399 ymp rist n suojelusta...

Page 145: ...ketuksiin s tekij iden sateen j n tai lumen p lyjen tai aggressiivisten kaasujen kanssa tai joissa on olemassa r j hdys tai tulipalovaara K yt n aikana on noudatettava seuraavia ymp rist koskevia ehto...

Page 146: ...ulee olla riitt v turvallisuussyist Esim karkaistun Anticorodal kammion y 275 MPa paksuudeksi riitt 5 mm HUOMIO TV 401 301 21 NSF kuuluu toiseen EN 61010 1 s nn sten mukaiseen asennusluokkaan tai ylij...

Page 147: ...heuttaa henkil iden loukkaantumisia HUOMIO V lt kolhuja heiluntaa tai kkiliikkeit turbopumpun toiminnan aikana sill laakerit voivat vahingoittua K yt pumpun ilmansy tt n ilmaa tai jalokaasua joissa ei...

Page 148: ...Siten pumpun seuraavat k ynnistykset tapahtuvat ilman Soft Start toimintoa Jotta k ynnistys voitaisiin suorittaa uudelleen Soft Start menetelm ll tulee yll mainittu tapa aktivoida uudelleen ohjelmisto...

Page 149: ...ainv lisesti hyv ksytty tyyppi ja 3 lla johtimella varustettua s hk kaapelia k ytt m ll katso tilattavien osien taulukkoa K yt t t kaapelia ja pistoketta yhdess oikein maadoitetun pistorasian kanssa j...

Page 150: ...n pintal mm n laskea alle 50 C en Laitteen vahingoittuessa on mahdollista k ytt Agilentin korjauspalvelua tai Agilent advanced exchange service vaihtopalvelua jonka kautta saatte uudistetun pumpun vah...

Page 151: ...mukaisesti Merkki koskee ainoastaan Euroopan Unionin j senmaita tarkoittaa ett tuotetta EI saa h vitt tavallisen kotitalous tai teollisuusj tteen mukana vaan se on toimitettava erilliseen ker yspistee...

Page 152: ...10 Ohjek sikirja H vitt minen 152 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 153: ...olekul ris szivatty khoz 154 ltal nos inform ic 155 T rol s 157 El k sz t s telep t sre 158 Telep t s 159 Haszn lat 161 A TV 401 301 21 NSF bekapcsol sa s haszn lata162 A TV 401 301 21 NSF bekapcsol s...

Page 154: ...etkez g pk nyvben le van rva nagy mozg si energi val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor s az ll r sz rintkez se vagy a f...

Page 155: ...kul ris szivatty val nagy s rendk v l nagy v kuumalkalmaz sokhoz a megfelel vez rl j vel A rendszer b rmely t pus g zt vagy g zkever ket k pes szivatty zni Nem alkalmas folyad kok vagy szil rd r szecs...

Page 156: ...igyelem zenetek olyan elj r sok el tt jelennek meg amelyeket ha nem tartanak be az a berendez s k rosod s t okozhatja VESZ LY A vesz lyt jelz zenetek felh vj k a kezel figyelm t egy konkr t elj r sra...

Page 157: ...vetkez k rnyezeti param tereket nem szabad t ll pni h m rs klettartom ny 20 C 70 C relat v p ratartalom 0 95 nem kondenz l A turbomolekul ris szivatty kat mindig l gyan kell ind tani amikor a felhasz...

Page 158: ...nak b rmilyen hirtelen t s t vagy r zk d s t Ne rtalmatlan tsa a csomagol anyagokat nem megengedett m don Az anyag teljesen jrafeldolgozhat s megfelel az EEC 85 399 es direkt v nak FIGYELEM G zkivon s...

Page 159: ...ikus k zegeknek kitett k rnyezetben es h j g porban agressz v g zokban illetve robban vagy t zvesz lyes k rnyezetben zemeltet s k zben a k vetkez k rnyezeti felt teleket kell biztos tani h m rs klet 5...

Page 160: ...v kuumkamr nak amely tartalmazza a turb szivatty t biztons gi okb l megfelel vastags g nak kell lennie P ld ul 5 mm vastags g megfelel egy edzett korr zi ellenes kamr nak y 275 MPa FIGYELEM A TV 401...

Page 161: ...en A magas h m rs klet g si s r l seket okozhat FIGYELEM Ker lje a szivatty t s t r z s t vagy durva mozgat s t zem k zben A csap gyak megs r lhetnek Haszn ljon port l s szil rd r szekt l mentes leveg...

Page 162: ...iklus befejez dik a l gy ind t s m d automatikusan tiltva van s a k vetkez ind t sok l gy ind t s m d n lk l t rt nnek A l gy ind t s m d jb li enged lyez s hez azt aktiv lni kell a megfelel szoftver...

Page 163: ...v g n nemzetk zi szabv ny szerinti csatlakoz dug val van ell tva Ezt a k belt s csatlakoz dug t megfelel en f ldelt csatlakoz aljazattal haszn lja hogy elker lje az ram t s vesz ly t s eleget tegyen...

Page 164: ...or forg sa le ll s am g a szivatty fel let nek h m rs klete 50 C al esik Meghib sod s eset n l pjen kapcsolatba a helyi Agilent szervizk zponttal ahol tudnak adni egy helyre ll tott rendszert a hib s...

Page 165: ...z ss g orsz gaiban rv nyes azt jelzi hogy a term k melyen megtal lhat NEM ker lhet k z ns ges h ztart si vagy ipari hullad kkal egy tt megsemmis t sre hanem azt egy szelekt v hullad kgy jt rendszerbe...

Page 166: ...11 Felhaszn l i K zik nyv Megsemmis t s 166 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 167: ...rbomolekularnych 168 Ogolne informacje 169 Magazynowanie 171 Przygotowanie do instalacji172 Instalacja 173 U ytkowanie 175 W czenie i U ytkowanie TV 401 301 21 NSF 176 Zatrzymanie systemu TV 401 301 2...

Page 168: ...bs ugi posiadaj wysok ilo energii kinetycznej spowodowanej bardzo wysok pr dko ci obrotow razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a...

Page 169: ...terowania tzw kontroler System jest w stanie pompowa jakikolwiek typ gazu lub mieszanki gazowej ale nie jest przystosowany do pompowania p yn w lub sta ych cz stek Zjawisko pompowania jest uzyskane po...

Page 170: ...munikaty zwi kszonej uwagi s wy wietlane przed procedurami i w przypadku ich braku przestrzegania mo e doj do uszkodzenia aparatury ZAGROZENIE Komunikaty zagrozeniu przyci gaj uwag operatora co do dan...

Page 171: ...g by przekroczone nast puj ce warunki rodowiskowe temperatura od 20 C do 70 C wzgl dna wilgo od 0 do 95 bez opar klient po otrzymaniu i przygotowaniu po raz pierwszy pomp turbomolekularnych musi je za...

Page 172: ...01 301 21 NSF ani nie poddawa go uderzeniom lub wibracjom Nie porzuca opakowania w rodowisku Materia ten nadaje si ca kowicie do recyklingu zgodny jest z dyrektyw UE 855 399 dotycz cej ochrony rodowis...

Page 173: ...ch wystawionych na czynniki atmosferyczne deszcz mr z nieg py y gazy chemiczne w rodowiskach wybuchowych lub z wysokim zagro eniem po aru Podczas dzia ania obowi zkowo nale y przestrzega nast puj ce w...

Page 174: ...a kt ra zawiera pomp w celu bezpiecze stwa musi posiada odpowiedni grubo cian Na przyk ad dla kom r z hartowanego materia u Articorodal y 275 MPa grubo 5 mm jest odpowiedni warto ci UWAGA TV 401 301 2...

Page 175: ...ewania Wysoka temperatura mo e spowodowa uszkodzenia cia a na osobach UWAGA Unika uderze waha lub gwa townych przesuni turbopompy podczas jej dzia ania Mog uszkodzi si o yska Dla wlotu do powietrza po...

Page 176: ...si automatycznie i dlatego te wszystkie nast pne uruchomienia odbywaj si bez sposobu Soft Start Aby m c ponownie uruchomi z Soft Start nale y w czy w w tryb poprzez oprogramowanie patrz paragraf RS 2...

Page 177: ...rzewodach zobacz tabel cz ci daj cych si zam wi i zamontowan wtyczk zgodna z mi dzynarodowymi normami Kabel ten pod czy wraz z wtyczk do kontaktu uziemionego celem unikni cia pora e pr dem elektryczny...

Page 178: ...si a poni ej 50 C W przypadku usterki mo liwe jest skorzystanie z serwisu naprawczego Agilent lub Agilent advanced exchange service kt ry pozwoli na uzyskanie zregenerowanego systemu w zast pstwie usz...

Page 179: ...awomocny tylko w krajach Unii Europejskiej oznacza ze wyrob ktory nim zostal oznaczony NIE moze byc przetworzony jako odpad razem z innymi domowymi lub przemyslowymi natomiast musi byc skladowany w mi...

Page 180: ...12 Podrecznik Instrukcji Przetworstwo odpadow 180 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 181: ...od pro Turbomolekul rn v v vy 182 V eobecn informace 183 Uskladn n 185 P prava k instalaci 186 Instalace 187 Pou it 189 Zapnut a pou it v v vy TV 401 301 21 NSF 190 Vypnut v v vy TV 401 301 21 NSF 191...

Page 182: ...u popisov ny v n sleduj c m n vodu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefunk nosti nap kontaktu rotoru aneb...

Page 183: ...l rn v v vou a p slu n m regul torem pro takov aplikace kde se po aduje vysok a velmi vysok vakuum Za zen m e od erp vat libovoln plyn nebo plynnou sm s Nen vhodn na erp n tekutin nebo pevn ch stic er...

Page 184: ...eduj c standardn protokol POZOR V stra n hl en jsou uvedena p ed postupy kter by v p pad nedodr en mohly po kodit za zen NEBEZPE Varovn hl en jsou ur ena pro upozorn n obsluhy na ur it postup nebo inn...

Page 185: ...ov n v v v byste nem li p ekra ovat n sleduj c technick podm nky prost ed Teplotn rozp t 20 C a 70 C Rozp t vlhkosti 0 a 95 bez sr en turbomolekul rn v v vy mus u ivatel po dod vce a poprv v dycky spo...

Page 186: ...i nenad l mi n razy ot esy nebo vibracemi Balic materi l nelikvidujte nedovolen m zp sobem Tento materi l lze 100 recyklovat a spl uje po adavky sm rnice EEC 85 399 POZOR Aby se zamezilo probl m m s o...

Page 187: ...tmosf rick m vliv m d sn h led prachu agresivn m plyn m ve v bu n m prost ed nebo v prost ed s vysok m nebezpe m po ru Za provozu je t eba dodr ovat n sleduj c podm nky dan prost ed m teplota od 5 C d...

Page 188: ...ter obsahuje turbov v vu mus m t pro spln n bezpe nostn ch po adavk p im enou tlou ku Nap tlou ka 5 mm je p im en pro komoru z nerezov kalen oceli y 275 MPa POZOR Podle sm rnice EN 61010 1 pat v v va...

Page 189: ...m e zp sobit pop leniny POZOR B hem chodu chra te v v vu p ed n razy vibracemi a prudk mi pohyby Mohly by se po kodit lo iska Pro odplyn n v v vy pou vejte vzduch nebo inertn plyn kter je zbaven prac...

Page 190: ...on en re im pozvoln ho rozb hu se automaticky vypne a dal starty ji budou prob hat bez pozvoln ho rozb hu Chcete li op t zapnout re im pozvoln ho rozb hu mus te jej aktivovat pat i n m programov m p k...

Page 191: ...oj ilov m p vodn m kabelem viz tabulka d l kter lze doobjednat se z str kou mezin rodn schv lenou Pou vejte tento kabel se z str kou a pat i n uzemn nou z suvku abyste p ede li razu elektrick m proude...

Page 192: ...a po kejte dokud povrchov teplota v v vy neklesne pod 50 C V p pad poruchy kontaktujte m stn servisn st edisko firmy Agilent kter m e dodat n hradn repasovan za zen v m nou za porouchan POZN MKA P ed...

Page 193: ...ie ur uje e v robek kter je takto ozna en NESM b t likvidov n spole n s ostatn mi dom c mi nebo pr myslov mi odpady ale je nutno ho p edat do pat i n ch provozn ch sb ren kde mus b t t d n a likvidov...

Page 194: ...13 N vod k Pou it Likvidace 194 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 195: ...molekul rne v vevy 196 V eobecn inform cie 197 Uchov vanie 199 Pr prava na in tal ciu 200 In tal cia 201 Pou itie 203 Zapnutie a pou itie zariadenia TV 401 301 21 NSF 204 Vypnutie zariadenia TV 401 30...

Page 196: ...duj cej pr ru ke sa vyzna uj vysokou kinetickou energiou a to v aka vysokej r chlosti ot ania v kombin cii so pecifickou hmotnos ou svojich rotorov V pr pade syst movej poruchy napr pri kontakte rotor...

Page 197: ...rbomolekul rnou v vevou pre vysok a ultravysok v kuov aplik cie s relevantn m kontroln m modulom Syst m dok e vy erpa ubovo n typ plynu alebo zmesi plynov Nie je vhodn na vy erp vanie tekut n alebo pe...

Page 198: ...e obsahuje tieto tandardn ozna enia POZOR Pozor ozna uj postupy nedodr anie ktor ch m e sp sobi po kodenie zariadenia NEBEZPE Nebezpe ie maj s stredi pozornos pracovn ka na ur it postup alebo innos ne...

Page 199: ...tredia po as prevozu pren ania a uchov vania v vev rozsah tepl t 20 C a 70 C rozsah relat vnej vlhkosti 0 a 95 bez kondenz cie z kazn k mus pri prvom spusten turbo v vevy v dy pou i re im soft tartu s...

Page 200: ...enie nespadlo nebolo vystaven n razu alebo prudk mu otrasu alebo vibr ci m Obalov materi l zlikvidujte predp san m sp sobom Materi l je 100 recyklovate n a sp a po iadavky smernice EEC 85 399 POZOR Ak...

Page 201: ...ach koroz vne plyny ani vo v bu n ch prostrediach alebo tam kde existuje vysok riziko po iaru Po as innosti zariadenia je potrebn zabezpe i tieto vlastnosti prostredia teplota od 5 C do 35 C pozri z v...

Page 202: ...EZPE E Po iadavky na bezpe nos vy aduj aby v kuov komora s turbov vevou mala primeran hr bku stien Napr klad pre komoru z tvrden ho antikora y 275 MPa je primeran hr bka steny 5 mm POZOR Zariadenie TV...

Page 203: ...ysok teploty m u sp sobi pop leniny POZOR Dbajte na to aby v veva po as innosti nebola vystaven n razom kmitaniu alebo prudk m pohybom Mohli by sa po kodi lo isk V vevu preplachujte pomocou vzduchu al...

Page 204: ...oft Start automaticky zablokuje a v etky nasleduj ce spustenia zariadenia prebehn bez re imu Soft Start Ak chcete re im Soft Start odblokova mus te ho aktivova vhodn m softwarov m pr kazom pozri as RS...

Page 205: ...n pomocou 3 ilovej n ry vi tabu ku dielov ktor mo no objedna so z str kou medzin rodne schv lenou T to n ru so z str kou pou vajte spolu s vhodne uzemne nou z suvkou aby nedo lo k z sahu elektrick m p...

Page 206: ...te k m sa rotor neprestane ot a a k m teplota povrchu v vevy neklesne pod 50 C V pr pade poruchy zariadenia vyh adajte kontaktn stredisko spolo nosti Agilent kde v m pokazen syst m vymenia POZN MKA Sk...

Page 207: ...uje smernicu E s n zvom WEEE Tento symbol platn iba pre t ty Eur pskej nie znamen e v robok s t mto t tkom NESMIE by odstr nen spolu s be n m dom cim alebo priemyseln m odpadom ale sa mus odstr ni ak...

Page 208: ...14 N vod na Obsluhu Likvid cia 208 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 209: ...rbomolekularne rpalke 210 Splo ne informacije 211 Shranjevanje 213 Priprava za monta o 214 Monta a 215 Uporaba 217 Vklop in uporaba naprave TV 401 301 21 NSF 218 Izklop naprave TV 401 301 21 NSF 219 Z...

Page 210: ...aslednjih navodilih vsebujejo veliko koli ino kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja...

Page 211: ...turbomolekularno rpalko za visoko in ultra visoko vakuumsko uporabo s primernim krmilnikom Sistem lahko rpa vse tipe plinova ali plinskih zmesi Ni primeren za rpanje teko ine ali trdnih delcev rpanje...

Page 212: ...slednjem standardnem protokolu POZOR Sporo ila so prikazana pred postopki pri katerih lahko pride do po kodbe opreme SVARILO Svarilo so za to da pritegnejo pozornost uporabnika na dolo ene postopke pr...

Page 213: ...k ne smete prese i naslednjih specifikacij temperaturno obmo je 20 C do 70 C obmo je relativne vla nosti 0 do 95 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivl...

Page 214: ...resajte Embala o zavrzite v skladu s pravili Material je mo no v celoti reciklirati in je v skladu z ECC direktivo 85 399 POZOR Komponent ki bodo izpostavljene vakuumu se ne dotikajte z golimi rokami...

Page 215: ...ajte v okolju ki je izpostavljeno na atmosferske agente de sneg led prah agresivni plini ali v okoljih kjer obstaja nevarnost po ara Tekom delovanja je treba spo otvati naslednje pogoje temperatura od...

Page 216: ...RILO Vakuumska posoda ki vsebuje turbo rpalko mora imeti iz varnostnih zahtev primerno debelino Na primer debeilna 5 mm je primerna za otrjeno antikorodalno posodo y 275 MPa POZOR Po direktivi EN 6101...

Page 217: ...ka temperatura lahko povzro i opekline POZOR Izogibajte se udarcem oscilacijam ali nenadnim premikom rpalke tekom delovanja Nosilci se lahko po kodujejo Za prezra evanje rpalke uporabite zrak ali iner...

Page 218: ...i se na in Soft Start samodejno onemogo i in na voljo so naslednji zagoni brez na ina Soft Start Za ponovno aktiviranje Soft Start na ina je potreben ustrezen programski ukaz glej odstavek Opis komuni...

Page 219: ...znega napajalnega kabla glej tabelo delov ki se lahko naro ijo z vtika em potrjen na mednarodnem nivoju Uporabljajte ta kabel in vtika skupaj s primerno ozemljeno vti nico tako da vas tok ne strese in...

Page 220: ...odprtino po akajte da se rotor ustavi an po akajte da povr inska temperatura rpalke pade pod 50 C V primeru okvare kontaktirajte lokalni Agilent servisni center ki vam lahko zamenja pokvarjen sistem...

Page 221: ...WEEE Ta simbol ki velja samo v dr avah Evropske Skupnosti pomeni da izdelek NE SMETE ODSTRANITI skupaj z ostalimi komunalnimi ali pa industrijskimi odpadki temve morate poskrbeti za njihovo primerno...

Page 222: ...15 Priro nik za Navodila Odlaganje opadkov 222 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 223: ...eline for Turbomolecular Pumps 224 General Information 225 Storage 227 Preparation for installation 228 Installation 229 Use 231 Switching on and Use of TV 401 301 21 NSF 232 TV 401 301 Switching off...

Page 224: ...l contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contac...

Page 225: ...ular pump for high and ultra high vacuum applications with its relevant controller The system can pumps any type of gas or gas compound It is not suitable for pumping liquids or solid particles The pu...

Page 226: ...The caution messages are displayed before procedures which if not followed could cause damage to the equipment WARNING The warning messages are for attracting the attention of the operator to a parti...

Page 227: ...tal specifications should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing the turbomolecular pumps must be always soft started when received and operated...

Page 228: ...ind of sudden impact or shock vibration to it Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 CAUTION In order t...

Page 229: ...ents rain snow ice dust aggressive gases or in explosive environments or those with a high fire risk During operation the following environmental conditions must be respected temperature from 5 C to 3...

Page 230: ...r that contains the Turbopump must have an adequate thickness for safety requirements For example a thickness of 5 mm is adequate for an hardened Anticorodal chamber y 275 MPa CAUTION The TV 401 301 2...

Page 231: ...The high temperatures may cause burns CAUTION Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become damaged Use air or inert gas free from dust or partic...

Page 232: ...atically is disabled and the following start ups are without the Soft Start mode To re enable the Soft Start mode it must be activated by the suitable software command see the paragraph RS 232 485 COM...

Page 233: ...r cord see orderable parts table and plug internationally approved for user s safety Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to...

Page 234: ...and wait until the surface temperature of the pump falls below 50 C In the case of breakdown contact your local Agilent service center who can supply a reconditioned system to replace that broken down...

Page 235: ...symbol valid only in countries of the European Community indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a dif...

Page 236: ...16 Instructions for Use Disposal 236 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

Page 237: ...iption 251 How to Connect the Open Collector Inputs of the cController 255 How to Connect the Outputs of the Controller 258 J6 Serial 259 RS 232 RS 485 Communication Description 260 Communication Form...

Page 238: ...User Manual 87 900 995 01 C Material Needed 276 Insertion Procedure 278 Extraction Procedure 281 Connection of the Electrical Connector 284 Pump Used with Corrosive Gases 285 Pump Used in Presence of...

Page 239: ...l 87 900 995 01 C 239 294 Description of the TV 401 301 21 NSF The TV 401 301 21 NSF pumping system consists of a pump with a dedicated controller The TV 401 301 21 NSF pump model is 869 8928 see the...

Page 240: ...um side of the pump The static blades of the stator are made of stainless steel These are supported and accurately positioned by spacer rings The Macrotorr stators are in the form of self positioning...

Page 241: ...ro computer and is composed of two PCBs which include power supply and 3 phase output analog and input output section microprocessor and digital section The power supply together with the 3 phase out...

Page 242: ...ragm 2 x 10 8 mbar 1 5 x 10 8 Torr Inlet flange DN 100 Nominal rotational speed 60000 RPM Start up time 3 minutes Recommended forepump mechanical Agilent DS 302 dry pump Agilent SH 100 Operating posit...

Page 243: ...ble with a 9 pin D type male connector and a 9 pin D type female connector and Navigator software optional Pump power output 54 Vac 3 phases 150 W max 1010 Hz max nominal rotational speed 60 kRPM Lubr...

Page 244: ...87 900 995 01 C TV 401 301 21 NSF Outline The following figure shows the TV 401 301 21 NSF outlines dimensions are in mm inches Figure 5 TV 401 301 21 NSF outline with standard controller mounted The...

Page 245: ...l Information TV 401 301 21 NSF Outline 17 TV 401 301 21 NSF User Manual 87 900 995 01 C 245 294 Figure 6 TV 401 301 NSF controller outline Figure 7 Graph of nitrogen pumping speed vs inlet pressure M...

Page 246: ...tion TV 401 301 21 NSF Outline 246 294 TV 401 301 21 NSF User Manual 87 900 995 01 C Figure 8 Graph of nitrogen pumping speed vs inlet pressure Side port Figure 9 Graph of compression ratio vs forelin...

Page 247: ...Information TV 401 301 21 NSF Outline 17 TV 401 301 21 NSF User Manual 87 900 995 01 C 247 294 Figure 10 Graph of compression ratio vs foreline pressure Side Port Figure 11 Graph of nitrogen gas load...

Page 248: ...ions 248 294 TV 401 301 21 NSF User Manual 87 900 995 01 C Interconnections The following figure shows the TV 401 301 21 NSF interconnections Figure 12 Input Power Connector The following figure shows...

Page 249: ...r Manual 87 900 995 01 C 249 294 P3 Spare Figure 14 This is a dedicated 24 Vdc spare connector note that it can be also controlled by means of the serial connection P5 External Fan Figure 15 This is a...

Page 250: ...re detailed in the table the following paragraphs describe the signal characteristics and use Tab 3 Pin N Signal name In Output 1 START STOP IN 2 START STOP IN 3 INTERLOCK IN 4 INTERLOCK IN 5 SPEED SE...

Page 251: ...t supply Plug Pump INTERLOCK input signal to control the pump rotation With the supplied cover connector the INTERLOCK signal is connected to the 24 Vdc pin and the INTERLOCK signal to the GROUND pin...

Page 252: ...ition is detected PROGRAMMABLE SET POINT this open collector output signal is enabled when the reference quantity chosen frequency current or time is higher than the set threshold The signal can be hi...

Page 253: ...time 0 second RELAY CONTACT this output signal is the repetition of the PROGRAMMABLE SET POINT output signal When the PROGRAMMABLE SET POINT signal is at low level the relay is excited and it closes t...

Page 254: ...17 Technical Information Interconnections 254 294 TV 401 301 21 NSF User Manual 87 900 995 01 C Figure 19...

Page 255: ...TV 401 301 21 NSF to an external system Two cases are considered 1 the customer supplies the 24 Vdc 2 the customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc 60 mA voltage...

Page 256: ...17 Technical Information Interconnections 256 294 TV 401 301 21 NSF User Manual 87 900 995 01 C Figure 21 Case 2 with relay utilisation...

Page 257: ...Technical Information Interconnections 17 TV 401 301 21 NSF User Manual 87 900 995 01 C 257 294 Figure 22 Case 2 with transistor utilization...

Page 258: ...The following figure shows a typical logic output connection relay coil but any other device may be connected e g a LED a computer etc and the related simplified circuit of the controller The figure...

Page 259: ...n D type serial input output connector to control via an RS 232 or RS 485 connection the TV 401 301 21 Tab 4 PIN N SIGNAL NAME 1 5 V OUT 2 TX RS232 3 RX RS232 4 A RS422 Optional 5 GND 6 A RS485 7 B RS...

Page 260: ...is necessary to select the type of communication as well as the device address by means of the Navigator software Communication Format 8 data bit no parity 1 stop bit baud rate 600 1200 2400 4800 9600...

Page 261: ...he window DATA an alphanumeric ASCII string with the data to be written into the window In case of a reading command this field is not present The field length is variable according to the data type a...

Page 262: ...meric window Alphanumeric 10 bytes After a read instruction of an alphanumeric window ACK 1 byte 0x6 The command execution has been successfully completed NACK 1 byte 0x15 The command execution has be...

Page 263: ...ource PC Destination Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination C...

Page 264: ...PC Destination Controller 02 80 31 30 30 31 31 03 42 32 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command SOFT START OFF Source PC Destinat...

Page 265: ...03 38 37 STX ADDR WINDOW RD ETX CRC Source Controller with address 3 in stop status Destination PC 02 83 32 30 35 30 30 30 30 30 30 03 38 37 STX ADDR WINDOW DATA STATUS ETX CRC Command READ SERIAL TYP...

Page 266: ...00 R W L Soft Start write only in Stop condition YES 1 NO 0 101 R W N Set Point type 0 Frequency 1 Current 2 Time default 0 102 R W N Set Point threshold expressed in Hz mA or s default 980 103 R W N...

Page 267: ...g output type output voltage signal proportional to frequency or power 0 frequency 1 power default 0 117 R W N Low Speed frequency Hz 750 to Maximum rotationl frequency win 121 default 750 120 R W N R...

Page 268: ...R N Pump power in W pump current x pump voltage duty cycle 203 R N Driving frequency in Hz 204 R N Pump temperature in C 0 to 70 205 R N Pump status Stop 0 Waiting intlk 1 Starting 2 Auto tuning 3 Br...

Page 269: ...Serial type select 0 RS 232 1 RS 485 default 0 NOTE 1 Automatic means that when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent v...

Page 270: ...Water Cooling Kit Installation Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient The two model part numb...

Page 271: ...1 C 271 294 CAUTION The items of the plastic model kit must be assembled as shown in the following figure Figure 29 The assembled kit must be screwed into the suitable holes of the pump body with a re...

Page 272: ...o avoid that the tube s gets loose or disconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling sys...

Page 273: ...to protect the pump bearings against particulate and corrosive gases that could move into the pump see Accessories and Spare Parts table To install the gas purge valve it is necessary to unscrew the p...

Page 274: ...Serial Cable Installation The supplied serial cable must be installed when the TV 401 301 21 NSF or the optional vent valve has to be controlled by means of a remote computer The cable is installed f...

Page 275: ...s on the controller casing see controller outline drawing Connection of the Fore Vacuum Pump A KF 16 flange is available to connect the TV 401 301 21 NSF pump to the fore vacuum pump A vacuum approved...

Page 276: ...aterial Needed Turbo V401 301 21 pump PN 869 8928 in the following the pump supplied with O rings already mounted in the factory Quantity 6 screws M6 20 8 mm black with spherical tip resistance class...

Page 277: ...21 Insertion and Extraction 17 TV 401 301 21 NSF User Manual 87 900 995 01 C 277 294 Figure 35 Turbo V 401 301 21 flange insertion extraction flange Insertion smooth holes 6 RED CIRCLES 60 extraction...

Page 278: ...ully and without tilting it Align the 6 insertion smooth holes of the pump flange with the 6 threaded holes in the chamber flange Fig 36 in order to obtain the de sired foreline orientation Figure 36...

Page 279: ...se the torque wrench set 10 Nm WARNING Do not screw in the M4 screws present on the pump flange at a smaller diameter and marked with yellow enamel 4 Screw in the 6 sphere screws clockwise into the no...

Page 280: ...rbo V 401 301 21 Insertion and Extraction 280 294 TV 401 301 21 NSF User Manual 87 900 995 01 C Figure 38 5 Get the pump flange in contact with the chamber flange and close the sphere screws 10 Nm tur...

Page 281: ...orque wrench locked at a torque value 10 Nm 2 Unscrew the 6 sphere screws starting anywhere proceeding clockwise WARNING Do not unscrew in the M4 screws present on the pump flange at a smaller diamete...

Page 282: ...sertion and Extraction 282 294 TV 401 301 21 NSF User Manual 87 900 995 01 C 4 Screw in the 3 M6 screws clockwise starting anywhere half turn lap Fig 40 Figure 40 5 When the pump is free pull it out o...

Page 283: ...Technical Information Turbo V 401 301 21 Insertion and Extraction 17 TV 401 301 21 NSF User Manual 87 900 995 01 C 283 294 Figure 41 6 Remove the 3 M6 screws form the pump flange...

Page 284: ...e controller through an 6 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 K resistance at 25 C and pin E is connected...

Page 285: ...allows to achieve a high vacuum pressure in the 10 8 mbar range The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent t...

Page 286: ...Pump Used with Corrosive Gases 286 294 TV 401 301 21 NSF User Manual 87 900 995 01 C Figure 43 Purge layout 1 Purge gas line 2 Pressure regulator 3 Gas purge valve 4 Gas purge port 5 Forevacuum pump...

Page 287: ...ution of the magnetic field In general therefore an increase in pump power can be expected If this increase is lower than 50 of the power value drawn by the motor in high vacuum operation no particula...

Page 288: ...17 Technical Information Accessories and Spare Parts 288 294 TV 401 301 21 NSF User Manual 87 900 995 01 C...

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Page 294: ...6 Mead Road Oxford Industrial Park Yarnton Oxford OX5 1QU UK Tel 44 0 1865 291570 Fax 44 0 1865 291571 Toll free 00 800 234 234 00 China Agilent Technologies China Co Ltd Vacuum Products Division No 3...

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