Agilent Technologies TPS-compact, User Manual

Page: 171 / 240

Instructions for Use
Agilent TPS-compact User Manual 171
For installation of optional accessories, see "Technical Information".
This paragraph details the fundamental operating procedures.
Make all electrical pneumatic connections before the use of the system. While
heating the vacuum chamber, the temperature of the inlet flange must not exceed
120 °C with ConFlat flanging and 80 °C with ISO flanging.
WARNING
Never use the pumping system when the turbo inlet flange is not
connected to the vacuum chamber or is not blanked.
WARNING
Do not touch the turbopump or any of its accessories during the heating
process. The high temperatures may cause burns.
WARNING
Avoid impacts or harsh movements of the pump when in operation. The
bearings may become damaged and damages to the persons or the
things could be taken place.
CAUTION!
Use inert gas free from dust, particles or humidity (like Nitrogen) for
venting the pump. The pressure at the vent port must be less than 2
bar (above atmospheric pressure).
WARNING!
Do not use the pumping system in presence of explosive, toxic,
fiammable or radioactive gases.